公开(公告)号：US07536655B2

公开(公告)日：2009-05-19

申请号：US10885357

申请日：2004-07-06

申请人： Yuichi Abe ,  Hiroyuki Segawa ,  Akio Yoshioka

发明人： Yuichi Abe ,  Hiroyuki Segawa ,  Akio Yoshioka

IPC分类号： G06F3/048

CPC分类号： G06F3/0325 ,  A63F13/211 ,  G06F3/0346 ,  G06F3/038 ,  G06F3/04815 ,  G06T19/20 ,  G06T2200/24 ,  G06T2219/2016 ,  G06T2219/2021

摘要： Three-dimensional-model processing apparatus, three-dimensional-model processing methods, and computer programs are provided. In a three-dimensional-model processing apparatus, method, and computer programs, it is determined whether relative positions or relative attitudes of a plurality of three-dimensional objects shown on an image display unit satisfy a predetermined processing execution condition. When it is determined that the processing execution condition is satisfied, distinction information indicating that processing such as pickup or joining of objects is possible is presented. For example, display mode is changed or sound is output for the objects. A user is allowed to immediately find without stress whether an object is at a position where pickup or joining is possible. This improves the efficiency of operation.

摘要翻译： 提供三维模型处理装置，三维模型处理方法和计算机程序。 在三维模型处理装置，方法和计算机程序中，确定在图像显示单元上显示的多个三维对象的相对位置或相对姿态是否满足预定的处理执行条件。 当确定满足处理执行条件时，呈现指示诸如拾取或接合对象之类的处理是可能的区别信息。 例如，显示模式被更改或声音输出对象。 允许用户立即找到没有压力的物体是否位于拾取或接合可能的位置。 这提高了操作的效率。

公开(公告)号：US20050024360A1

公开(公告)日：2005-02-03

申请号：US10885357

申请日：2004-07-06

申请人： Yuichi Abe ,  Hiroyuki Segawa ,  Akio Yoshioka

发明人： Yuichi Abe ,  Hiroyuki Segawa ,  Akio Yoshioka

IPC分类号： A63F13/00 ,  G06F3/03 ,  G06F3/033 ,  G06F3/038 ,  G06F3/048 ,  G06T19/20 ,  G06T15/00

CPC分类号： G06F3/0325 ,  A63F13/211 ,  G06F3/0346 ,  G06F3/038 ,  G06F3/04815 ,  G06T19/20 ,  G06T2200/24 ,  G06T2219/2016 ,  G06T2219/2021

摘要： Three-dimensional-model processing apparatus, three-dimensional-model processing methods, and computer programs are provided. In a three-dimensional-model processing apparatus, method, and computer programs, it is determined whether relative positions or relative attitudes of a plurality of three-dimensional objects shown on an image display unit satisfy a predetermined processing execution condition. When it is determined that the processing execution condition is satisfied, distinction information indicating that processing such as pickup or joining of objects is possible is presented. For example, display mode is changed or sound is output for the objects. A user is allowed to immediately find without stress whether an object is at a position where pickup or joining is possible. This improves the efficiency of operation.

摘要翻译： 提供三维模型处理装置，三维模型处理方法和计算机程序。 在三维模型处理装置，方法和计算机程序中，确定在图像显示单元上显示的多个三维对象的相对位置或相对姿态是否满足预定的处理执行条件。 当确定满足处理执行条件时，呈现指示诸如拾取或接合对象之类的处理是可能的区别信息。 例如，显示模式被更改或声音输出对象。 允许用户立即找到没有压力的物体是否位于拾取或接合可能的位置。 这提高了操作的效率。

公开(公告)号：US06992666B2

公开(公告)日：2006-01-31

申请号：US09859020

申请日：2001-05-15

申请人： Norikazu Hiraki ,  Hiroyuki Segawa ,  Hiroyuki Shioya ,  Yuichi Abe

发明人： Norikazu Hiraki ,  Hiroyuki Segawa ,  Hiroyuki Shioya ,  Yuichi Abe

IPC分类号： G06T15/00

CPC分类号： G06F3/04842

摘要： Disclosed is a 3-dimensional model-processing apparatus capable of processing a 3-dimensional model appearing on a display unit including a sensor for generating information on the position and the posture, which can be controlled by the user arbitrarily, and control means for carrying out a grasp-state-setting process of taking a relation between the sensor-generated information on the position and the posture of the sensor and information on the position and the posture of the 3-dimensional model appearing on the display unit as a constraint relation on the basis of a relation between the 3-dimensional position of the 3-dimensional model appearing on the display unit and the 3-dimensional position of a tool appearing on the display unit for the sensor or on the basis of a relation between the 3-dimensional posture of the 3-dimensional model appearing on the display unit and the 3-dimensional posture of the tool appearing on the display unit for the sensor.

公开(公告)号：US07724250B2

公开(公告)日：2010-05-25

申请号：US10742701

申请日：2003-12-19

申请人： Shinya Ishii ,  Hiroyuki Segawa ,  Norikazu Hiraki ,  Yuichi Abe ,  Ryoichi Imaizumi ,  Kenichiro Nakamura

发明人： Shinya Ishii ,  Hiroyuki Segawa ,  Norikazu Hiraki ,  Yuichi Abe ,  Ryoichi Imaizumi ,  Kenichiro Nakamura

IPC分类号： G06T15/00 ,  G06T17/00 ,  G06T15/10 ,  G06T15/20 ,  G06F3/00 ,  G09B25/00

CPC分类号： G06F3/011

摘要： An information processing apparatus is provided which allows a user to easily and intuitively manipulate information in a 3-dimensional virtual space. In the information processing apparatus, a main controller sets a first coordinate system in a real space on the basis of information associated with a real object and further sets a second coordinate system in a 3-dimensional virtual space corresponding to the real space on the basis of the first coordinate system. If a user places an input device at a particular position and angle in the first coordinate system with reference to the real object, the main controller places an object in the 3-dimensional virtual space at a place and angle in the second coordinate system corresponding to the place and angle of the input device in the first coordinate system, and the main controller displays an image of the object placed in the 3-dimensional virtual space on a display.

摘要翻译： 提供一种信息处理装置，其允许用户容易且直观地操纵三维虚拟空间中的信息。 在信息处理装置中，主控制器基于与真实对象相关联的信息，将实际空间中的第一坐标系设置为基于与实空间对应的3维虚拟空间中的第二坐标系， 的第一个坐标系。 如果用户将参考实际物体的输入设备放置在第一坐标系中的特定位置和角度，则主控制器将物体放置在与所对应的第二坐标系中的位置和角度的三维虚拟空间中 第一坐标系中的输入装置的位置和角度，并且主控制器将放置在三维虚拟空间中的对象的图像显示在显示器上。

公开(公告)号：US07023436B2

公开(公告)日：2006-04-04

申请号：US10019575

申请日：2001-04-18

申请人： Hiroyuki Segawa ,  Norikazu Hiraki ,  Hiroyuki Shioya ,  Yuichi Abe

发明人： Hiroyuki Segawa ,  Norikazu Hiraki ,  Hiroyuki Shioya ,  Yuichi Abe

IPC分类号： G06T17/00

CPC分类号： G06F3/011 ,  A63F2300/8058 ,  G06F3/0346 ,  G06F3/04815 ,  G06F3/04845 ,  G06T19/20 ,  G06T2219/2012 ,  G06T2219/2021

摘要： A three-dimensional model processing apparatus is provided. The three-dimensional model processing apparatus can more really carry out a processing change of shape, color, and the like with respect to a three-dimensional object being displayed on a display by allowing an operator to operate an object tool in which a position change and an orientation change can be made and an editing tool in which relative distance with respect to the object tool can be changed to relatively move both tools such that the relative position between the object tool and the editing tool is detected to execute processing corresponding to, for example, shape change or color processing determined by the corresponding editing tool, thereby modifying attribute data of the object being displayed.

摘要翻译： 提供了三维模型处理装置。 三维模型处理装置可以通过允许操作者操作其中位置变化的对象工具来更真实地执行相对于显示在显示器上的三维对象的形状，颜色等的处理变化 并且可以进行取向改变，并且可以改变编辑工具，其中可以改变相对于对象工具的相对距离，以相对移动两个工具，使得检测到对象工具和编辑工具之间的相对位置，以执行与之对应的处理， 例如由相应的编辑工具确定的形状变化或颜色处理，从而修改被显示的对象的属性数据。

公开(公告)号：US07073709B2

公开(公告)日：2006-07-11

申请号：US10712450

申请日：2003-11-12

申请人： Ryoichi Imaizumi ,  Yuichi Abe ,  Shinya Ishii ,  Norikazu Hiraki ,  Kenichiro Nakamura ,  Hiroyuki Segawa

发明人： Ryoichi Imaizumi ,  Yuichi Abe ,  Shinya Ishii ,  Norikazu Hiraki ,  Kenichiro Nakamura ,  Hiroyuki Segawa

IPC分类号： G06F17/00

CPC分类号： G06F9/445 ,  G06F3/04842

摘要： An information processing method provided, wherein an identifier (ID) corresponding to an object is obtained based on information input from a sensor for detecting the object, and the obtained ID is continuously and repeatedly input to an information processing unit. The information processing unit compares a program that is set based on a newly-input ID with a program that is set based on an already-input ID, and ends the currently-executed program when the two programs are different from each other. In this method, by putting an object in a sensor effective area, a program corresponding to the ID of the object is started, and by removing the object from the sensor effective area, the program is ended.

摘要翻译： 一种提供的信息处理方法，其中，根据从用于检测对象的传感器输入的信息，获得与对象相对应的标识符（ID），并将所获得的ID连续重复地输入到信息处理单元。 信息处理单元将基于新输入的ID设置的程序与基于已经输入的ID设置的程序进行比较，并且当两个程序彼此不同时结束当前执行的程序。 在该方法中，通过将物体放置在传感器有效区域中，开始与物体的ID对应的程序，通过从传感器有效区域移除物体，程序结束。

公开(公告)号：US08971627B2

公开(公告)日：2015-03-03

申请号：US13696260

申请日：2011-03-17

申请人： Jun'ichi Taguchi ,  Mitsuji Ikeda ,  Yuichi Abe ,  Masahiro Kitazawa ,  Wataru Nagatomo

发明人： Jun'ichi Taguchi ,  Mitsuji Ikeda ,  Yuichi Abe ,  Masahiro Kitazawa ,  Wataru Nagatomo

IPC分类号： G06K9/00 ,  G06K9/62 ,  G01B11/00 ,  G01B15/00 ,  G06T7/00 ,  H01L21/66

CPC分类号： G06K9/6201 ,  G01B11/00 ,  G01B15/00 ,  G06K9/6202 ,  G06T7/001 ,  G06T7/74 ,  G06T2207/30148 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention is a template matching processing device capable of evaluating a similarity degree which supports even a case of intensive morphological change between a design image and a photographic image. In the template matching processing device, matching processing between the design image and the photographic image is performed, a partial design image is obtained by clipping a portion having the highest correlation (step 101), and processing for deforming the photographic image in accordance with the clipped design image (steps 102 to 105) is performed, so that correlation between the deformed image obtained and the design image is taken to be set as the similarity degree.

摘要翻译： 本发明是一种模拟匹配处理装置，其能够评价即使在设计图像和摄影图像之间形成密集的情况的情况下也能够支持的相似度。 在模板匹配处理装置中，进行设计图像与摄影图像之间的匹配处理，通过剪切具有最高相关性的部分（步骤101）获得部分设计图像，以及根据 执行剪辑设计图像（步骤102至105），使得获得的变形图像与设计图像之间的相关性被设置为相似度。

公开(公告)号：US20140219545A1

公开(公告)日：2014-08-07

申请号：US14234977

申请日：2012-07-20

申请人： Akiyuki Sugiyama ,  Yuichi Abe

发明人： Akiyuki Sugiyama ,  Yuichi Abe

IPC分类号： G06T7/00

CPC分类号： G06T7/001 ,  G01B15/08 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： When the lengths of FEM wafers are automatically measured, not only the sizes of targets, the lengths of which are to be measured, are often varied from those in registration, but also the patterns of the targets are often deformed. Therefore, it is difficult to automatically determine whether the length measurement is possible or not. Therefore, the following are executed with a semiconductor inspection system: (1) a process of identifying the position of the contour line of an inspected image using a distance image calculated from a reference image, (2) a process of calculating a defect size image based on the position of the contour line with respect to the identified distance image, and detecting a defect candidate from the defect size image, and (3-1) a process of, upon detection of the defect candidate, calculating the size of the detected defect candidate, or (3-2) a process of detecting a portion different between the first and second contour lines as the defect candidate.

摘要翻译： 当自动测量有限元晶片的长度时，不仅要测量其长度的目标的尺寸通常与注册的尺寸不同，而且目标的图案也经常变形。 因此，难以自动确定长度测量是否可行。 因此，使用半导体检查系统执行以下操作：（1）使用从参考图像计算的距离图像来识别被检查图像的轮廓线的位置的处理，（2）计算缺陷尺寸图像的处理 基于所述轮廓线相对于所识别的距离图像的位置，以及从所述缺陷尺寸图像检测缺陷候选，以及（3-1）在检测到所述缺陷候选时，计算所检测到的所述缺陷候选的大小的处理 缺陷候选者，或（3-2）检测第一和第二轮廓线之间的部分的缺陷候选的处理。

公开(公告)号：US20140023265A1

公开(公告)日：2014-01-23

申请号：US13981963

申请日：2011-12-07

申请人： Masahiro Kitazawa ,  Mitsuji Ikeda ,  Yuichi Abe ,  Junichi Taguchi ,  Wataru Nagatomo

发明人： Masahiro Kitazawa ,  Mitsuji Ikeda ,  Yuichi Abe ,  Junichi Taguchi ,  Wataru Nagatomo

IPC分类号： G06T7/00

CPC分类号： G06T7/0004 ,  G06T7/001 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01L22/12

摘要： It is an object of the present invention to provide a semiconductor inspection apparatus capable of well carrying out position alignment and correctly determining whether the position alignment has been carried out successfully or has ended in a failure without operator interventions even if an inspected image is an image having few characteristics as is the case with a repetitive pattern or the inspected image is an image having a complicated shape.The semiconductor inspection apparatus includes means for imaging a shape on a wafer or on an exposure mask; means for storing an image inspected by the imaging means; means for storing design data of the semiconductor circuit corresponding to a position on the wafer or on the exposure mask which are to be imaged by the imaging means; means for storing a design-data image obtained as a result of converting the design data into an image; means for generating a design-data ROI image by converting an interest drawing region found from a relative crude-density relation of a shape included in the design-data image into an image; and a position alignment section configured to carry out position alignment on the inspected image and the design-data image. The semiconductor inspection apparatus makes use of the design-data ROI image in order to identify a position at which the inspected image and the design-data image match each other or compute the degree of coincidence.

摘要翻译： 本发明的目的是提供一种半导体检查装置，即使被检查的图像是图像，也能够良好地执行位置对准并且正确地确定位置对准是否已经成功地执行或者在没有操作者干预的情况下已经结束 具有与重复图案的情况相同的特性，或被检查图像是具有复杂形状的图像。 半导体检查装置包括用于对晶片或曝光掩模上的形状进行成像的装置; 用于存储由成像装置检查的图像的装置; 用于存储对应于要由成像装置成像的晶片或曝光掩模上的位置的半导体电路的设计数据的装置; 用于存储作为将设计数据转换为图像而获得的设计数据图像的装置; 用于通过将从所述设计数据图像中包含的形状的相对粗密度关系中找到的兴趣绘制区域转换为图像来生成设计数据ROI图像的装置; 以及位置对准部，被配置为在被检查图像和设计数据图像上执行位置对准。 半导体检查装置利用设计数据ROI图像来识别被检查图像和设计数据图像彼此匹配的位置或计算符合度。

公开(公告)号：US20140016824A1

公开(公告)日：2014-01-16

申请号：US14005913

申请日：2011-11-09

申请人： Jun'ichi Taguchi ,  Mitsuji Ikeda ,  Yuichi Abe ,  Masahiro Kitazawa

发明人： Jun'ichi Taguchi ,  Mitsuji Ikeda ,  Yuichi Abe ,  Masahiro Kitazawa

IPC分类号： G06T7/00

CPC分类号： G06T7/0004 ,  G06K9/3275

摘要： An evaluation value indicative of the extent of lines in each direction is calculated for a pre-processed image in which 0s are filled in and extended in the lateral direction of the inputted image and which has been reduced ⅛th in the longitudinal direction. To obtain the angle of rotation of an image from the change in the evaluation value obtained while the angle relative to the lateral direction of the pre-processed image is modified in small steps, a parallel line is drawn for each direction, a projection is taken, and the sum of squares serves as the evaluation value of the direction. The direction having the highest evaluation value serves as the obtained direction of rotation from the normal position. The projection of each direction references the point of intersection between the parallel line drawn for each direction and the coordinate line of the horizontal axis.

摘要翻译： 对于其中0被填充并在输入图像的横向方向上延伸并且在纵向方向上减少1/8的预处理图像来计算指示每个方向的行程度的评估值。 为了在以小步骤修改相对于预处理图像的横向方向的角度获得的评估值的变化中获得图像的旋转角度，对于每个方向绘制平行线，进行投影 ，并且平方和作为方向的评价值。 具有最高评估值的方向用作从正常位置获得的旋转方向。 每个方向的投影参考在每个方向绘制的平行线与水平轴的坐标线之间的交点。