摘要:
In a laser module, a laser beam which is emitted from a laser element is focused by a condensing optical system and caused to enter an incidence end of an optical fiber. A laser device is provided with a plurality of these laser modules. Emission end portions of the optical fibers are bundled to form a laser emission portion. A thickness of cladding h of each optical fiber is set to a value calculated in accordance with the following equation: cladding thickness h ≤ ( emission light amount of one laser module W required intensity C × packing ratio P - core diameter t ) ÷ 2 As a result, it is possible to emit a laser-beam with a high intensity that is required for functionality as a laser light source, for the purpose of raising resolution of an exposure apparatus.
摘要:
In a laser module, a laser beam which is emitted from a laser element is focused by a condensing optical system and caused to enter an incidence end of an optical fiber. A laser device is provided with a plurality of these laser modules. Emission end portions of the optical fibers are bundled to form a laser emission portion. A thickness of cladding h of each optical fiber is set to a value calculated in accordance with the following equation: cladding thickness h ≤ ( emission light amount of one laser module W required intensity C × packing ratio P - core diameter t ) ÷ 2 As a result, it is possible to emit a laser-beam with a high intensity that is required for functionality as a laser light source, for the purpose of raising resolution of an exposure apparatus.
摘要:
A combined-laser-light source includes: a plurality of semiconductor lasers; an optical fiber; and an optical system which converges a bundle of laser beams emitted from the plurality of semiconductor lasers, and makes the converged bundle of the laser beams enter the core of the optical fiber so that the laser beams are combined in the optical fiber when the laser beams pass through the optical fiber. The optical system is aligned with the optical fiber so that the converged bundle of the laser beams is incident on an area of an end face of the core when steady temperature control is performed on the combined-laser-light source, where the area is concentric with the end face of the core, and has a diameter equal to or smaller than half of the diameter of the core.
摘要:
(Problem to be solved) To provide a laser beam synthesizing apparatus which is small in size and high in output power.(Means for solving the problem) A convergent angle transforming optical system 30 is disposed further upstream of the upstream-most position Pa in the positions where the optical axes of beam bundles La, Lb, Lc . . . which are radiated from a plurality of semiconductor lasers 11A, 11B, 112C . . . and converged in the fast axis view by a converging/dispersion lens 120 intersect each other in the fast axis view, and the whole beam bundle made up of the beam bundles La, Lb, Lc . . . passed through the converging/dispersion lens 120 is converged in the fast axis view by the convergent angle transforming optical system 30 so that the angle of convergence of the whole beam bundle is made smaller in the fast axis view, and introduced into the core 41 of an optical fiber 40.
摘要:
In a laser module comprising a hermetically sealed container having inside a semiconductor laser device whose emission wavelength is 350˜450 nm, generation of organic volatile gas is suppressed in the container and life of the module is prolonged. In a laser module comprising a hermetically sealed container having inside a semiconductor laser device whose emission wavelength is 350˜450 nm and whose life is 5500 hours or more, optical components whose organic volatile gas generation measured by GC/MS is 10 μg/g or less at 150° C. are positioned in the container. In addition, as an organic adhesive to fix the optical components such as a collimating lens is used an organic adhesive whose organic volatile gas generation measured by GC/MS is 300 μg/g or less at 15° C.
摘要:
In a disclosed laser module, a usage amount of organic adhesive is set to no more than 1.0 g/ml. Thus, an equilibrium density of outgas components from the adhesive after an air removal treatment is less than 1000 ppm. In another laser module, a heat sink at which a semiconductor laser element is adhered on a submount, an electrode terminal wire-connected with the laser element, a photodiode wire-connected with the electrode terminal, and a zeolite adsorbent are fixedly provided on a stem. These are ring-welded in a container in a dry air atmosphere (80% nitrogen, 20% oxygen). In still another laser module, sixteen multiplexed lasers are disposed in a container. The container is connected with an air circulation apparatus, which is provided with a filter for removing contaminants, a rotary pump for circulating inert gas, and a valve for controlling replenishment of the gas.
摘要:
In a laser light multiplexing apparatus: a collimating optical system collimates light beams emitted from semiconductor lasers so that the slow axes of the light beams become coplanar, and optical axes of the light beams become parallel to each other; a light beam rearrangement optical system constituted by prisms respectively arranged in correspondence with the light beams rearranges the light beams in such a manner that directions of the fast axes of the light beams are changed at different locations along a direction in which the light beams propagate, and the fast axes of the light beams become coplanar; and a convergence optical system converges a bundle of the light beams rearranged by the light beam rearrangement optical system, in directions of the fast axes and the slow axes of the light beams, and makes the converged bundle of the light beams enter an optical fiber.
摘要:
In a laser apparatus, a plurality of semiconductor laser elements respectively emit laser beams; a multimode optical fiber has a light-entrance end and a light-emission end; an optical condensing system collects the laser beams emitted from the plurality of semiconductor laser elements, and couples the collected laser beams to the light-entrance end of the multimode optical fiber; and a protection member is arranged at the light-emission end of the multimode optical fiber, protects the light-emission end from the atmosphere, and has a light-emission window located at at least a predetermined distance from the light-emission end.
摘要:
In a laser module comprising a hermetically sealed container having inside a semiconductor laser device whose emission wavelength is 350˜450 nm, generation of organic volatile gas is suppressed in the container and life of the module is prolonged. In a laser module comprising a hermetically sealed container having inside a semiconductor laser device whose emission wavelength is 350˜450 nm and whose life is 5500 hours or more, optical components whose organic volatile gas generation measured by GC/MS is 10 μg/g or less at 150° C. are positioned in the container. In addition, as an organic adhesive to fix the optical components such as a collimating lens is used an organic adhesive whose organic volatile gas generation measured by GC/MS is 300 μg/g or less at 15° C.
摘要:
The present invention is directed to a drum washing machine. In particular, the drum washing machine includes a rotating tub, wherein the rotating tub has a cylindrical drum having a front formed with a circular opening through which laundry is put into the rotating tub and having a rear that is closed. The drum washing machine further includes a DC brushless motor for generating a driving force for wash, rinse and dehydration operations and a rotor. The drum washing machine further includes a rotational shaft of the motor having a front end directly fixed to the rotating tub and a rear end fixed to a core of the rotor, so that torque developed by the motor is directly transmitted to the rotating tub. A current detector is provided in the drum washing machine for detecting electric current flowing into the motor. A torque control unit is also provided in the drum washing machine for performing a vector control for the motor on the basis of the current detected by the current detector, so that torque developed by the motor is rendered optimum for at least the wash and dehydration operations. A speed control unit for controlling a rotational speed of the motor, based on the current detected by the current detector and a laundry amount determining unit for determining an amount of laundry in the rotating tub, based on a magnitude of an accumulated value of torque current in a period when a rotational speed of the motor is accelerated are also provided in the drum washing machine of the present invention.