摘要:
In a laser module, a laser beam which is emitted from a laser element is focused by a condensing optical system and caused to enter an incidence end of an optical fiber. A laser device is provided with a plurality of these laser modules. Emission end portions of the optical fibers are bundled to form a laser emission portion. A thickness of cladding h of each optical fiber is set to a value calculated in accordance with the following equation: cladding thickness h ≤ ( emission light amount of one laser module W required intensity C × packing ratio P - core diameter t ) ÷ 2 As a result, it is possible to emit a laser-beam with a high intensity that is required for functionality as a laser light source, for the purpose of raising resolution of an exposure apparatus.
摘要:
A combined-laser-light source includes: a plurality of semiconductor lasers; an optical fiber; and an optical system which converges a bundle of laser beams emitted from the plurality of semiconductor lasers, and makes the converged bundle of the laser beams enter the core of the optical fiber so that the laser beams are combined in the optical fiber when the laser beams pass through the optical fiber. The optical system is aligned with the optical fiber so that the converged bundle of the laser beams is incident on an area of an end face of the core when steady temperature control is performed on the combined-laser-light source, where the area is concentric with the end face of the core, and has a diameter equal to or smaller than half of the diameter of the core.
摘要:
In a laser module, a laser beam which is emitted from a laser element is focused by a condensing optical system and caused to enter an incidence end of an optical fiber. A laser device is provided with a plurality of these laser modules. Emission end portions of the optical fibers are bundled to form a laser emission portion. A thickness of cladding h of each optical fiber is set to a value calculated in accordance with the following equation: cladding thickness h ≤ ( emission light amount of one laser module W required intensity C × packing ratio P - core diameter t ) ÷ 2 As a result, it is possible to emit a laser-beam with a high intensity that is required for functionality as a laser light source, for the purpose of raising resolution of an exposure apparatus.
摘要:
The present invention is directed to a drum washing machine. In particular, the drum washing machine includes a rotating tub, wherein the rotating tub has a cylindrical drum having a front formed with a circular opening through which laundry is put into the rotating tub and having a rear that is closed. The drum washing machine further includes a DC brushless motor for generating a driving force for wash, rinse and dehydration operations and a rotor. The drum washing machine further includes a rotational shaft of the motor having a front end directly fixed to the rotating tub and a rear end fixed to a core of the rotor, so that torque developed by the motor is directly transmitted to the rotating tub. A current detector is provided in the drum washing machine for detecting electric current flowing into the motor. A torque control unit is also provided in the drum washing machine for performing a vector control for the motor on the basis of the current detected by the current detector, so that torque developed by the motor is rendered optimum for at least the wash and dehydration operations. A speed control unit for controlling a rotational speed of the motor, based on the current detected by the current detector and a laundry amount determining unit for determining an amount of laundry in the rotating tub, based on a magnitude of an accumulated value of torque current in a period when a rotational speed of the motor is accelerated are also provided in the drum washing machine of the present invention.
摘要:
An exposure image is accurately projected. An exposure apparatus includes a light source for emitting exposure light, a DMD, which includes a plurality of two-dimensionally-arranged pixel portions, and a telecentric optical system for collimating principal rays of the exposure light. The telecentric optical system is positioned in an optical path of the exposure light that enters the DMD. The DMD performs, based on an image signal, spatial light modulation on exposure light, which has been emitted from the light source, and that has entered the plurality of pixel portions, for each of the plurality of pixel portions.
摘要:
An exposure apparatus includes a light source for emitting exposure light, a spatial light modulation means for performing spatial light modulation, based on an image signal, on the exposure light, an imaging means for forming an image on a photosensitive material with the exposure light on which spatial light modulation has been performed, and a focus adjustment means for adjusting focus by changing the optical path length of the modulated exposure light when an image is formed on the photosensitive material with the spatially modulated exposure light. The imaging means forms an image with the spatially modulated exposure light only by a substantially rectangular region of the imaging means including the central portion of the imaging means.
摘要:
A solid-state laser crystal constituting a laser-diode-excited solid-state laser apparatus or an optical fiber constituting a fiber laser apparatus or fiber laser amplifier is doped with one of Ho3+, Sm3+, Eu3+, Dy3+, Er3+, and Tb3+ so that a laser beam is emitted from the solid-state laser crystal or the optical fiber, or incident light of the fiber laser amplifier is amplified, by one of the transitions from 5S2 to 5I7, from 5S2 to 5I8, from 4G5/2 to 6H5/2, from 4G5/2 to 6H7/2, from 4F3/2 to 6H11/2, from 5D0 to 7F2, from 4F9/2 to 6H13/2, from 4F9/2 to 6H11/2, from 4S3/2 to 4I15/2, from 2H9/2 to 4I13/2, and from 5D4 to 7F5. The above solid-state laser crystal or optical fiber is excited with a GaN-based compound laser diode.
摘要:
(Problem to be solved) To provide a laser beam synthesizing apparatus which is small in size and high in output power.(Means for solving the problem) A convergent angle transforming optical system 30 is disposed further upstream of the upstream-most position Pa in the positions where the optical axes of beam bundles La, Lb, Lc . . . which are radiated from a plurality of semiconductor lasers 11A, 11B, 112C . . . and converged in the fast axis view by a converging/dispersion lens 120 intersect each other in the fast axis view, and the whole beam bundle made up of the beam bundles La, Lb, Lc . . . passed through the converging/dispersion lens 120 is converged in the fast axis view by the convergent angle transforming optical system 30 so that the angle of convergence of the whole beam bundle is made smaller in the fast axis view, and introduced into the core 41 of an optical fiber 40.
摘要:
In a laser module comprising a hermetically sealed container having inside a semiconductor laser device whose emission wavelength is 350˜450 nm, generation of organic volatile gas is suppressed in the container and life of the module is prolonged. In a laser module comprising a hermetically sealed container having inside a semiconductor laser device whose emission wavelength is 350˜450 nm and whose life is 5500 hours or more, optical components whose organic volatile gas generation measured by GC/MS is 10 μg/g or less at 150° C. are positioned in the container. In addition, as an organic adhesive to fix the optical components such as a collimating lens is used an organic adhesive whose organic volatile gas generation measured by GC/MS is 300 μg/g or less at 15° C.
摘要:
Light modulated by a spatial light modulator is projected onto photosensitive material and the photosensitive material is exposed to light in a predetermined pattern. The action of the spatial light modulator is controlled so that the amount of the light projected onto the photosensitive material is changed in at least two stages according to the part of the photosensitive material.