Nematicidal trifluorobutenes
    4.
    发明授权
    Nematicidal trifluorobutenes 失效
    杀线虫三氟丁烯

    公开(公告)号:US06743814B2

    公开(公告)日:2004-06-01

    申请号:US10220775

    申请日:2002-09-05

    IPC分类号: A61K31421

    CPC分类号: A01N43/76 C07D263/46

    摘要: The present invention relates to novel trifluorobutenes of the formula (I) wherein R1 represents hydrogen; halogen; alkyl that is unsubstituted or substituted with halogen, hydroxy, alkoxy, alkylthio, alkylcarbonyloxy, haloalkylcarbonyloxy, or cyano; alkylsulfonyloxy; or phenyl that is unsubstituted or substituted with halogen, alkyl, haloalkyl, alkoxy, alkylthio, alkylsulfonyl, haloalkoxy, haloalkylthio, phenyl, phenoxy, cyano, or nitro; R2 represents hydrogen; halogen; alkyl that is unsubstituted or substituted with alkoxy or halogen; or alkoxycarbonyl; and n represents 0, 1 or 2, with the proviso that if R1 represents alkyl, then R2 does not represent halogen. The invention also relates to processes for their preparation and their use as nematicides.

    摘要翻译: 本发明涉及式(I)的新型三氟丁烯,其中R 1表示氢; 卤素; 未取代或被卤素,羟基,烷氧基,烷硫基,烷基羰基氧基,卤代烷基羰基氧基或氰基取代的烷基; 烷基磺酰氧基; 或未被取代或被卤素,烷基,卤代烷基,烷氧基,烷硫基,烷基磺酰基,卤代烷氧基,卤代烷硫基,苯基,苯氧基,氰基或硝基取代的苯基; R 2表示氢; 卤素; 未被取代或被烷氧基或卤素取代的烷基; 或烷氧基羰基; 和n表示0,1或2,条件是如果R 1表示烷基,则R 2不表示卤素。 本发明还涉及其制备方法及其作为杀线虫剂的用途。

    Metal-organic vaporizing and feeding apparatus, metal-organic chemical vapor deposition apparatus, metal-organic chemical vapor deposition method, gas flow rate regulator, semiconductor manufacturing apparatus, and semiconductor manufacturing method
    6.
    发明申请
    Metal-organic vaporizing and feeding apparatus, metal-organic chemical vapor deposition apparatus, metal-organic chemical vapor deposition method, gas flow rate regulator, semiconductor manufacturing apparatus, and semiconductor manufacturing method 审中-公开
    金属有机蒸发送料装置,金属有机化学气相沉积装置,金属有机化学气相沉积法,气体流量调节器,半导体制造装置和半导体制造方法

    公开(公告)号:US20070292612A1

    公开(公告)日:2007-12-20

    申请号:US11808960

    申请日:2007-06-14

    IPC分类号: C23C16/00

    CPC分类号: C23C16/4482 C23C16/52

    摘要: A metal-organic vaporizing and feeding apparatus includes: a retention vessel for retaining a metal-organic material; a bubbling gas feeding path connected to the retention vessel, for feeding bubbling gas to the metal-organic material; a metal-organic gas feeding path connected to the retention vessel, for feeding metal-organic gas generated in the retention vessel and dilution gas to a deposition chamber; a dilution gas feeding path connected to the metal-organic gas feeding path, for feeding the dilution gas to the metal-organic gas feeding path; a flow rate regulator provided in the bubbling gas feeding path, for regulating flow rate of the bubbling gas; a pressure regulator for regulating pressure of the dilution gas; and a sonic nozzle disposed in the metal-organic gas feeding path on a downstream side of a connecting position between the metal-organic gas feeding path and the dilution gas feeding path.

    摘要翻译: 一种金属有机气化和输送装置,包括:用于保持金属 - 有机材料的保留容器; 连接到保持容器的鼓泡气体供给路径,用于将鼓泡气体供给到金属有机材料; 连接到保持容器的金属有机气体供给路径,用于将在保留容器中产生的金属有机气体和稀释气体供给到沉积室; 连接到金属 - 有机气体供给路径的稀释气体供给路径,用于将稀释气体供给到金属 - 有机气体供给路径; 设置在鼓泡气体供给路径中的流量调节器,用于调节发泡气体的流量; 用于调节稀释气体的压力的压力调节器; 以及设置在金属 - 有机气体供给路径之间的金属 - 有机气体供给路径和稀释气体供给路径之间的连接位置的下游侧的声波喷嘴。