摘要:
A film formation method for a semiconductor process is arranged to form an amorphous silicon film on a target substrate by CVD in a process field within a reaction container, while supplying a first process gas containing silicon into the process field, and setting the process field at a first temperature of 550° C. or more and at a first pressure. The method is arranged to subsequently poly-crystallize the amorphous silicon film by a heat process in the process field to form a poly-silicon film, while supplying a second process gas different from the first process gas into the process field, and setting the process field at a second temperature higher than the first temperature and at a second pressure.
摘要:
A film formation method for a semiconductor process is arranged to form an amorphous silicon film on a target substrate by CVD in a process field within a reaction container, while supplying a first process gas containing silicon into the process field, and setting the process field at a first temperature of 550° C. or more and at a first pressure. The method is arranged to subsequently poly-crystallize the amorphous silicon film by a heat process in the process field to form a poly-silicon film, while supplying a second process gas different from the first process gas into the process field, and setting the process field at a second temperature higher than the first temperature and at a second pressure.
摘要:
A method for using a film formation apparatus for a semiconductor process includes setting an idling state where a reaction chamber of the film formation apparatus accommodates no product target substrate therein, and then, performing a purging process of removing a contaminant present in an inner surface of the reaction chamber by causing radicals to act on the inner surface of the reaction chamber. The radicals are generated by activating a purging process gas containing oxygen and hydrogen as elements.
摘要:
A method for using a film formation apparatus for a semiconductor process includes setting an idling state where a reaction chamber of the film formation apparatus accommodates no product target substrate therein, and then, performing a purging process of removing a contaminant present in an inner surface of the reaction chamber by causing radicals to act on the inner surface of the reaction chamber. The radicals are generated by activating a purging process gas containing oxygen and hydrogen as elements.
摘要:
The present invention is a thermal processing method of conducting a thermal process to an object to be processed, a base film having been formed on a surface of the object to be processed, the base film consisting of a SiO2 film or a SiON film. The method includes: an arranging step of arranging the object to be processed in a processing container; and a laminating step of supplying a source gas and an ammonia gas alternatively and repeatedly, so as to form a silicon nitride film on the base film repeatedly, the source gas being selected from a group consisting of dichlorosilane, hexachlorodisilane and tetrachlorosilane.
摘要翻译:本发明是对待处理物体进行热处理的热处理方法,在被处理物的表面上形成的基膜,由SiO 2 2 SUB >电影或SiON电影。 该方法包括:将处理对象物置于处理容器内的布置步骤; 以及层叠步骤,交替重复地供给源气体和氨气,以在所述基膜上重复形成氮化硅膜,所述源气体选自二氯硅烷,六氯二硅烷和四氯硅烷。
摘要:
A program preparation and distribution system, in which metadata indicating variable information is generated from project to project, from medium to medium, from scene to scene or from frame to frame, to realize an asset management by controlling an archive system depending on the metadata. A database is constructed in which the archive system manages metadata in a concentrated fashion along with the essence such as video and audio data. By a distributed program editing system, the metadata inputted at the planning processing and at the casting processing is registered in the database managed in a concentrated fashion by an archival manager, at the same time as a tag specifying the registered metadata is issued. This tag is co-packed with the video and audio information obtained on acquisition by an acquisition system. In a production system, the timing to flow the staff roll is specified during the off-line processing in the production system.
摘要:
An eject mechanism for ejecting automatically the tape cassette in a tape player, in which one of two switching gears disposed on both the sides of a gear plate and engaging with a forward/backward rotating gear is selectively engaged with an intermittent gear by said forward/backward rotating gear and said intermittent gear drives the driven mechanism for the eject operation, said intermittent gear being so constructed that it is locked only in the forward rotational direction.
摘要:
A fast-forwarding and rewinding levers operating mechanism in a tape recorder comprisig an FF (fast forward) lever element having formed therein a hook-shaped guide recess, a REW (rewinding) lever element superposed on the FF lever element and which has formed therein a hook-shaped recess so positioned in a direction opposite to said guide recess in the FF lever element as to intersect the latter guide recess, an oscillating member located under said FF and REW lever elements and having an oscillating portion provided at the intersection between said two guide recesses, and a transmission means to oscillate said oscillating member for a rotary medium to engage a reel base, said oscillating portion of the oscillating member being oscillated, by pressing said FF or REW lever element, to put said transmission means into action, thus revolving said reel base for FF or REW operation.
摘要:
An auto-reverse mechanism intended for use in a magnetic recording/reproducing apparatus, comprising a means of changing driving force to reel base, means of detecting stopped rotation of said reel base, means of rotating, in response to the operation of said detection means, a power gear provided with intermittent gear section, means of actuating the driving-force changing means and a change plate under the effect of the rotation of said power gear, claw formed integrally with said change plate and having the effect of a spring, and a control hole in which the claw is fitted, the reaction force developed at said claw when the change plate is actuated being utilized as attractive force to the intermittent gear section for making the power gear engage with the other gears.
摘要:
The present invention provides a monoclonal antibody or a functional fragment thereof, capable of recognizing Aggrus epitope comprising an amino-acid sequence represented by a sequence ID 1, 3, or 4, and the monoclonal antibody or the functional fragment thereof produced from a hybridoma with deposit ID of FERM BP-11446, FERM BP-11447, FERM BP-11448 or FERM BP-11449. The present invention provides the hybridoma, and further an Aggrus-CLEC-2 binding inhibitor and a pharmaceutical composition for inhibition of platelet aggregation, prevention of cancer metastasis, or treatment of tumor or cancer, comprising the monoclonal antibody or the functional fragment thereof.
摘要翻译:本发明提供能够识别包含由序列ID 1,3或4所示的氨基酸序列的Aggrus表位的单克隆抗体或其功能片段,以及由杂交瘤产生的单克隆抗体或其功能片段, FERM BP-11446,FERM BP-11447,FERM BP-11448或FERM BP-11449的存款编号。 本发明提供了包含单克隆抗体或其功能片段的杂交瘤,以及Aggrus-CLEC-2结合抑制剂和抑制血小板聚集,预防癌症转移或治疗肿瘤或癌症的药物组合物。