Vacuum chamber for an SOR apparatus
    1.
    发明授权
    Vacuum chamber for an SOR apparatus 失效
    用于SOR设备的真空室

    公开(公告)号:US4908580A

    公开(公告)日:1990-03-13

    申请号:US307162

    申请日:1989-02-06

    CPC分类号: H05H7/14 H05H13/04 H05H7/20

    摘要: A vacuum chamber for a superconducting SOR apparatus comprises a main chamber through which a beam of charged particles can pass and an SOR chamber which opens onto the inside of the main chamber. The main chamber has a connecting flange formed on each end, and the SOR chamber has a connecting flange formed on its outer end. The dimensions of the vacuum chamber are such that the entire vacuum chamber can fit into the gap between the vacuum tanks of a superconducting bending magnet for the SOR apparatus. The vacuum chamber may further comprise an SOR port in the form of a tube having a flange which connects to the flange of the SOR chamber. The cross-sectional dimensions of the SOR port increase from the inner end which is connected to the SOR chamber to the outer end.

    摘要翻译: 用于超导SOR装置的真空室包括一个主室,一个带电粒子束通过该主室和一个通向主室内部的SOR室。 主室具有形成在每个端部上的连接凸缘,并且SOR室具有形成在其外端上的连接凸缘。 真空室的尺寸使得整个真空室可以装配到用于SOR装置的超导弯曲磁体的真空容器之间的间隙中。 真空室还可以包括管子形式的SOR端口,其具有连接到SOR室的凸缘的凸缘。 SOR端口的横截面尺寸从连接到SOR室的内端增加到外端。

    Superconducting synchrotron orbital radiation apparatus
    2.
    发明授权
    Superconducting synchrotron orbital radiation apparatus 失效
    超导同步加速器轨道辐射装置

    公开(公告)号:US4783634A

    公开(公告)日:1988-11-08

    申请号:US18394

    申请日:1987-02-25

    IPC分类号: H05H13/04

    CPC分类号: H05H13/04

    摘要: A superconducting synchrotron orbital radiation (SOR) apparatus having a plurality of deflecting electromagnets each comprising first and second superconducting coils which are immersed in liquid helium contained in helium tanks. The helium tanks are surrounded by nitrogen shields which are cooled by liquid nitrogen in nitrogen contained tanks. One of the helium tanks is equipped with a liquid helium supply port and a helium gas exhaust port. All of the other helium tanks are connected with this helium tank such that liquid helium which is supplied to this one helium tank automatically flows to the other helium tanks and such that helium gas from the other helium tanks automatically flows to this helium tank and is exhausted. One of the nitrogen tanks is equipped with a liquid nitrogen supply port and a nitrogen gas exhaust port, and all of the other nitrogen tanks are connected with this nitrogen tank so that liquid nitrogen which is supplied to this nitrogen tank automatically flows to the other nitrogen tanks, and nitrogen gas from the other nitrogen tanks automatically flows to this nitrogen tank and is exhausted.

    摘要翻译: 具有多个偏转电磁体的超导同步加速器轨道辐射(SOR)装置,每个偏转电磁体包括浸入在氦气罐中的液氦中的第一和第二超导线圈。 氦气罐被氮气屏蔽物包围,氮气保护箱在氮气储存罐中被液氮冷却。 其中一个氦罐配有液氦供应口和氦气排气口。 所有其他氦气罐与该氦气罐相连,供应给该氦气罐的液氦自动流入另一氦气罐,并使来自其他氦气罐的氦气自动流入该氦气罐并被耗尽 。 其中一个氮气罐配有一个液氮供应口和一个氮气排气口,其他所有的氮气罐与这个氮气罐相连,供应给这个氮气罐的液氮自动流入另一个氮气 水箱和来自其他氮气罐的氮气自动流入该氮气罐并耗尽。

    Charged beam apparatus
    3.
    发明授权
    Charged beam apparatus 失效
    带电束装置

    公开(公告)号:US4737727A

    公开(公告)日:1988-04-12

    申请号:US13816

    申请日:1987-02-12

    摘要: A charged beam apparatus comprises vacuum vessels for accommodating superconducting coils in a heat-insulating manner, a charged beam vacuum chamber that provides a passage for a charged beam, and a vacuum chamber for synchrotron radiation that is coupled to the charged beam vacuum chamber and through which is passed the synchrotron radiation that is produced by the charged beam when it is bent by the superconducting coils, the vacuum vessels being detachable from the charged beam vacuum chamber.

    摘要翻译: 带电波束装置包括用于以绝热方式容纳超导线圈的真空容器,为带电束提供通道的带电束真空室和用于同步加速器辐射的真空室,其耦合到带电束的真空室并通过 当被超导线圈弯曲时,其通过由带电束产生的同步加速器辐射,真空容器可从带电束真空室拆卸。

    COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD AND NON-TRANSITORY TANGIBLE MEDIUM
    4.
    发明申请
    COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD AND NON-TRANSITORY TANGIBLE MEDIUM 有权
    涂料和开发设备,涂料和开发方法和非交联不稳定介质

    公开(公告)号:US20120063765A1

    公开(公告)日:2012-03-15

    申请号:US13225985

    申请日:2011-09-06

    IPC分类号: G03D5/00

    摘要: A process block including a group of liquid-process related unit blocks, a first heating-process related block arranged on a carrier block side of the group of unit blocks, and a second heating-process related block arranged on an interface block side of the group of unit blocks. The group of liquid-process unit blocks includes doubled unit blocks for preprocessing for forming an antireflection film and a resist film, doubled unit blocks for post-processing for forming an upper layer film and performing a cleaning operation before exposure, and a unit block for developing. The first heating-process related block heats a substrate coated with a resist liquid and a substrate that has been developed. The second heating-process related block heats a substrate that has been exposed but is not yet developed, a substrate on which an antireflection film has been formed and a substrate on which an upper layer film has been formed.

    摘要翻译: 一种处理块,包括一组液体处理相关单元块,布置在该组单位块的载体块侧的第一加热处理相关块,以及布置在该单元块的界面块侧的第二加热处理相关块 单位块组。 液体处理单元块组包括用于形成防反射膜和抗蚀剂膜的预处理的双重单元块,用于形成上层膜的后处理和进行曝光之前的清洁操作的双倍单位块,以及用于 发展。 第一加热工艺相关块加热涂覆有抗蚀剂液体和已经显影的基底的基底。 第二加热处理相关块加热已经暴露但尚未显影的基板,已经形成有抗反射膜的基板和已经形成有上层膜的基板。

    Alignment method and system for electromagnet in high-energy accelerator
    5.
    发明授权
    Alignment method and system for electromagnet in high-energy accelerator 有权
    高能加速器电磁铁对准方法及系统

    公开(公告)号:US07522026B2

    公开(公告)日:2009-04-21

    申请号:US11563040

    申请日:2006-11-24

    IPC分类号: H01F5/00

    CPC分类号: H05H7/04

    摘要: New and useful alignment method and system for electromagnets used in the high energy accelerator that can make the installation simple and less time consuming are disclosed. By measuring the multiple of measurement reference points for obtaining the position and posture information of the electromagnet on the high energy accelerator, the deviation of the present value from the installation target value for the electromagnet within the reference coordinates in the building. For each of the adjustment mechanisms such as the multiple of adjustment bolts or the actuators, the Jacobian matrix representing the relationship between the unit operation amount and the posture changes of the electromagnet is obtained. Then, by calculating operation amounts for each of the adjustment mechanisms through multiplication of the inverse matrix of the Jacobian matrix with the deviation, the position and posture are aligned to the target value by operating the adjustment mechanisms collectively with the calculated operation amounts.

    摘要翻译: 公开了用于高能量加速器中的电磁铁的新型和有用的对准方法和系统,其可以使安装简单和较少耗时。 通过测量用于获得高能量加速器上的电磁体的位置和姿势信息的测量参考点的多个,将当前值与建筑物的参考坐标中的电磁体的安装目标值的偏差。 对于诸如调整螺栓或致动器的倍数的每个调节机构,获得表示单元操作量与电磁体的姿势变化之间的关系的雅可比矩阵。 然后,通过将雅可比矩阵的逆矩阵与偏差相乘来计算每个调整机构的运算量,通过与计算出的运算量一起运行调整机构,将位置和姿势与目标值对齐。

    Cooling fan drive control device
    6.
    发明授权
    Cooling fan drive control device 有权
    冷却风扇驱动控制装置

    公开(公告)号:US06481388B1

    公开(公告)日:2002-11-19

    申请号:US09553548

    申请日:2000-04-20

    申请人: Yuuichi Yamamoto

    发明人: Yuuichi Yamamoto

    IPC分类号: F01P900

    摘要: A target fan rotation speed FANRPM is set corresponding to the temperature Tc sensed by a cooling water temperature sensing unit. A capacity control unit (controller, EPC valve )is then used to control the capacity of a hydraulic pump (or a hydraulic motor) so that the fan rotation speed N of the cooling fan becomes the target fan rotation speed FANRPM. In this way, when the cooling fan is driven by a hydraulic source, it can be driven with optimal energy efficiency and noise can be controlled to a minimum.

    摘要翻译: 对应于由冷却水温度检测单元检测的温度Tc设定目标风扇转速FANRPM。 然后使用容量控制单元(控制器,EPC阀)来控制液压泵(或液压马达)的容量,使得冷却风扇的风扇转速N成为目标风扇转速FANRPM。 这样,当冷却风扇由液压源驱动时,可以以最佳的能量效率驱动冷却风扇,并将噪音控制在最小限度。

    Alignment Method and System for Electromagnet in High-Energy Accelerator
    9.
    发明申请
    Alignment Method and System for Electromagnet in High-Energy Accelerator 有权
    高能加速器电磁铁对准方法与系统

    公开(公告)号:US20070273464A1

    公开(公告)日:2007-11-29

    申请号:US11563040

    申请日:2006-11-24

    IPC分类号: H01F1/00

    CPC分类号: H05H7/04

    摘要: New and useful alignment method and system for electromagnets used in the high energy accelerator that can make the installation simple and less time consuming are disclosed. By measuring the multiple of measurement reference points for obtaining the position and posture information of the electromagnet on the high energy accelerator, the deviation of the present value from the installation target value for the electromagnet within the reference coordinates in the building. For each of the adjustment mechanisms such as the multiple of adjustment bolts or the actuators, the Jacobian matrix representing the relationship between the unit operation amount and the posture changes of the electromagnet is obtained. Then, by calculating operation amounts for each of the adjustment mechanisms through multiplication of the inverse matrix of the Jacobian matrix with the deviation, the position and posture are aligned to the target value by operating the adjustment mechanisms collectively with the calculated operation amounts.

    摘要翻译: 公开了用于高能量加速器中的电磁铁的新型和有用的对准方法和系统,其可以使安装简单和较少耗时。 通过测量用于获得高能量加速器上的电磁体的位置和姿势信息的测量参考点的多个,将当前值与建筑物的参考坐标中的电磁体的安装目标值的偏差。 对于诸如调整螺栓或致动器的倍数的每个调节机构,获得表示单元操作量与电磁体的姿势变化之间的关系的雅可比矩阵。 然后,通过将雅可比矩阵的逆矩阵与偏差相乘来计算每个调整机构的运算量,通过与计算出的运算量一起运行调整机构,将位置和姿势与目标值对齐。