Vapor deposition apparatus
    1.
    发明授权
    Vapor deposition apparatus 失效
    蒸镀装置

    公开(公告)号:US5205870A

    公开(公告)日:1993-04-27

    申请号:US890145

    申请日:1992-05-29

    IPC分类号: H01L21/205 C23C16/48

    CPC分类号: C23C16/483

    摘要: An argon (Ar.sup.+) laser has a resonator. A reaction chamber is integrally formed in the resonator. A voltage is applied to electrodes, which discharge electricity to excite argon atoms in the resonator to produce a laser beam. The laser beam is continuously oscillated between total reflection mirrors disposed at opposite ends of the resonator. A substrate is disposed in the reaction chamber into which a material gas is introduced. The material gas absorbs the laser beam, to decompose and deposit as a thin film over the substrate.

    摘要翻译: 氩(Ar +)激光器具有谐振器。 在谐振器中一体地形成反应室。 电压被施加到电极,其放电以激发谐振器中的氩原子以产生激光束。 激光束在设置在谐振器的相对端的全反射镜之间连续振荡。 基板被设置在反应室中,材料气体被引入到该反应室中。 材料气体吸收激光束,在衬底上分解和沉积成薄膜。

    Ammonium halide eliminator, chemical vapor deposition system and chemical vapor deposition process
    3.
    发明授权
    Ammonium halide eliminator, chemical vapor deposition system and chemical vapor deposition process 失效
    卤化铵消除器,化学气相沉积系统和化学气相沉积工艺

    公开(公告)号:US06365231B2

    公开(公告)日:2002-04-02

    申请号:US09344484

    申请日:1999-06-25

    IPC分类号: C23C1634

    CPC分类号: C23C16/345 C23C16/452

    摘要: The present invention provides a chemical vapor deposition using, as feed gases, a silicon compound and hydrazine or a derivative thereof, or a compound containing both silicon and nitrogen, and a process and a system useful for chemical vapor deposition growth, in which a chlorinated silane compound and ammonia, feed gases, are preliminarily reacted with each other, and the resulting reaction gas mixture from which the ammonium halide produced by the preliminary reaction has been eliminated is fed to form a thin film on a substrate.

    摘要翻译: 本发明提供使用作为原料气体的硅化合物和肼或其衍生物或含有硅和氮的化合物的化学气相沉积,以及用于化学气相沉积生长的方法和系统,其中氯化 硅烷化合物和氨,原料气体彼此预先反应,并且所得到的通过预反应产生的卤化铵的反应气体混合物被排出,在基板上形成薄膜。

    Vapor-phase deposition apparatus and vapor-phase deposition method
    6.
    发明授权
    Vapor-phase deposition apparatus and vapor-phase deposition method 失效
    气相沉积装置和气相沉积方法

    公开(公告)号:US5474612A

    公开(公告)日:1995-12-12

    申请号:US240807

    申请日:1994-05-11

    摘要: A vapor-phase deposition apparatus comprises a substrate-supporting unit for supporting a substrate, a heater for heating the substrate-supporting unit, and a gas-supplying unit for supplying gas for forming a thin film on the substrate supported by the substrate-supporting unit. The substrate-supporting unit includes a first member to be heated to a predetermined temperature by the heater, a second member for supporting a peripheral part of the substrate, and a support member for supporting the second member on the first member and located outside a periphery of the substrate.

    摘要翻译: 气相沉积装置包括用于支撑基板的基板支撑单元,用于加热基板支撑单元的加热器,以及用于在由基板支撑的基板支撑的基板上供给用于形成薄膜的气体的气体供给单元 单元。 基板支撑单元包括通过加热器加热到预定温度的第一构件,用于支撑基板的周边部分的第二构件和用于将第二构件支撑在第一构件上并位于外围的支撑构件 的基底。

    Liquid cartridge
    7.
    发明授权
    Liquid cartridge 有权
    液体盒

    公开(公告)号:US07681760B2

    公开(公告)日:2010-03-23

    申请号:US12169999

    申请日:2008-07-09

    CPC分类号: H01M8/04

    摘要: A liquid cartridge for supplying liquid to an external device connected therewith is provided with a casing, a partition member movably fitted in the casing, which partitions the casing into a first chamber and a second chamber, an outlet port communicating between the first chamber and the external device and a pressure unit housed in the second chamber, which presses the partition member so as to discharge the liquid out of the outlet port.

    摘要翻译: 用于将液体供应到与其连接的外部设备的液体盒设置有壳体,可移动地装配在壳体中的分隔构件,其将壳体分隔成第一室和第二室,在第一室和第二室之间连通的出口 外部装置和容纳在第二室中的压力单元,其压紧分隔构件以将液体排出出口。

    FLOW PATH STRUCTURE, PRODUCTION METHOD THEREOF AND FUEL CELL SYSTEM
    8.
    发明申请
    FLOW PATH STRUCTURE, PRODUCTION METHOD THEREOF AND FUEL CELL SYSTEM 审中-公开
    流路结构及其生产方法及燃料电池系统

    公开(公告)号:US20100025385A1

    公开(公告)日:2010-02-04

    申请号:US12577381

    申请日:2009-10-12

    IPC分类号: B23K26/20 B23K31/02 B23K20/10

    摘要: A flow path structure is provided with: a first flow path member having a plurality of through grooves, the through grooves being disposed adjacent to each other; a second flow path member having a fitting portion, in the fitting portion the first flow path member being fitted; a third flow path member covering the fitting portion so as to be sealed, the third flow path member being provided on the second flow path member; an inflow port to receive a fluid; an outflow port to exhaust an exhaust fluid; and a flow path formed in the fitting portion along the first flow path member, the flow path linking the inflow port and the outflow port and running through the through grooves.

    摘要翻译: 流路结构具有:具有多个贯通槽的第一流路构件,所述贯通槽相邻配置; 具有嵌合部的第二流路构件,在所述嵌合部中嵌合有所述第一流路构件; 第三流路构件,其覆盖所述嵌合部以被密封,所述第三流路构件设置在所述第二流路构件上; 用于接收流体的流入口; 用于排出废气的流出口; 以及形成在沿着第一流路部件的装配部分中的流动路径,连接流入端口和流出端口并流过通孔的流动路径。

    FUEL CELL
    9.
    发明申请
    FUEL CELL 审中-公开
    燃料电池

    公开(公告)号:US20090162712A1

    公开(公告)日:2009-06-25

    申请号:US12342268

    申请日:2008-12-23

    IPC分类号: H01M8/04 H01M8/10

    摘要: According to an aspect of the present invention, there is provided a fuel cell including: a membrane electrode assembly including: an electrolyte membrane; anode and cathode catalyst layers respectively disposed on the electrolyte membrane; and anode and cathode gas diffusion layers respectively disposed on the anode and cathode catalyst layers; a cathode porous body including a front face portion and a rear face portion and being disposed on the cathode gas diffusion layer at the front face portion, the front face portion having an electric conductivity higher than that of air and having a hydrophilicity higher than that of the rear face portion; an anode passage plate disposed on the anode gas diffusion layer; and an air supply apparatus that supplies air toward an end of the cathode porous body.

    摘要翻译: 根据本发明的一个方面,提供了一种燃料电池,其包括:膜电极组件,包括:电解质膜; 分别设置在电解质膜上的阳极和阴极催化剂层; 以及分别设置在阳极和阴极催化剂层上的阳极和阴极气体扩散层; 阴极多孔体,其具有正面部和背面部,并且设置在所述正面部的所述阴极气体扩散层上,所述正面部的导电率高于空气的导电性,其亲水性高于 后表面部分; 设置在阳极气体扩散层上的阳极通道板; 以及向阴极多孔体的端部供给空气的空气供给装置。