Lateral single-photon avalanche diode and method of producing a lateral single photon avalanche diode

    公开(公告)号:US10128385B2

    公开(公告)日:2018-11-13

    申请号:US14654470

    申请日:2013-12-19

    Applicant: ams AG

    Abstract: A semiconductor body of a first type of conductivity is formed including a base layer, a first further layer on the base layer and a second further layer on the first further layer. The base layer and the second further layer have an intrinsic doping or a doping concentration that is lower than the doping concentration of the first further layer. A doped region of an opposite second type of conductivity is arranged in the semiconductor body, penetrates the first further layer and extends into the base layer and into the second further layer. Anode and cathode terminals are electrically connected to the first further layer and the doped region, respectively. The doped region can be produced by filling a trench with doped polysilicon.

    INTEGRATED SENSOR MODULES FOR DETECTION OF CHEMICAL SUBSTANCES

    公开(公告)号:US20220357204A1

    公开(公告)日:2022-11-10

    申请号:US17621440

    申请日:2020-08-11

    Applicant: AMS AG

    Abstract: An apparatus includes an integrated sensor module for detection of chemical substances. The sensor module includes a UV radiation source operable to emit UV radiation onto a sample. The sensor module also includes a sensor including dedicated channels disposed so as receive UV radiation reflected by the sample. Each of the channels is selectively sensitive to a different respective portion of the UV spectrum; collectively, the channels cover at least part of the UV spectrum sufficient for reconstruction of a spectral curve of the sample. An electronic control unit can be used to identify a composition of the sample based on signals from the channels.

    Sensor Device And Method For Manufacturing A Sensor Device

    公开(公告)号:US20190109254A1

    公开(公告)日:2019-04-11

    申请号:US16088576

    申请日:2017-04-07

    Applicant: ams AG

    Abstract: A sensor device comprises a semiconductor substrate with a first type of electrical conductivity and with a photodiode structure for detecting incident UV radiation. The photodiode structure comprises a first well arranged within the semiconductor substrate and having a second type of electrical conductivity and a second well arranged at least partially within the first well and having the first type of electrical conductivity. A doping concentration of the first well is greater than a doping concentration of the second well within a surface region at a main surface of the semiconductor substrate. Thereby, a photon capturing layer having the second type of electrical conductivity is formed at the main surface. A p-n junction for detecting the incident UV radiation is formed by a boundary between the second well and the photon capturing layer.

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