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公开(公告)号：US08222911B2
公开(公告)日：2012-07-17
申请号：US12296055
申请日：2007-04-04
IPC分类号： G01R31/305
CPC分类号： G02F1/1309 , G02F2001/136254
摘要： The present invention relates to a device for testing an optoelectronic module, comprising a first source for generating an electromagnetic beam or particle beam, a second source for illuminating the optoelectronic module; and a detector. In addition, a method for testing an optoelectronic module is provided comprising illuminating the optoelectronic module, directing an electromagnetic beam or particle beam and detecting defects in the optoelectronic module. The illumination additional to the electromagnetic beam or particle beam makes defects visible which otherwise would not be detected.
摘要翻译： 本发明涉及一种用于测试光电子模块的装置，包括用于产生电磁束或粒子束的第一源，用于照亮光电子模块的第二源; 和检测器。 此外，提供了一种用于测试光电子模块的方法，包括照亮光电子模块，引导电磁束或粒子束并检测光电子模块中的缺陷。 附加到电磁波束或粒子束的照明使缺陷可见，否则将不会被检测到。
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公开(公告)号：US08012260B2
公开(公告)日：2011-09-06
申请号：US10164337
申请日：2002-06-06
申请人： Uwe Hoffmann , Jutta Trube , Dieter Haas
发明人： Uwe Hoffmann , Jutta Trube , Dieter Haas
IPC分类号： C23C16/00
摘要： An apparatus for coating an areal substrate, for example a rectangular plate comprises a vaporizer source and a distributor system for the supply of vaporized material onto the substrate. The distributor system comprises a line source, with this line source and the substrate is movable relative to one another. The apparatus serves preferably for the production of flat screens with organic light-emitting diodes.
摘要翻译： 用于涂覆面状基底（例如矩形板）的装置包括蒸发器源和用于将气化材料供应到基底上的分配器系统。 分配器系统包括线源，该线源和衬底可相对于彼此移动。 该装置优选用于生产具有有机发光二极管的平面屏幕。
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公开(公告)号：US08009299B2
公开(公告)日：2011-08-30
申请号：US11813334
申请日：2006-01-05
申请人： Matthias Brunner , Ralf Schmid , Bernhard Mueller , Axel Wenzel
发明人： Matthias Brunner , Ralf Schmid , Bernhard Mueller , Axel Wenzel
IPC分类号： G01B11/14
CPC分类号： G09G3/006 , G01R31/305 , G01R31/308 , G01R35/005 , H01J2237/2826
摘要： The invention relates to a method of calibration of the beam position of a corpuscular beam. A calibration body with structures is used, wherein the structures have a structure period PS in the plain section and within each structure there is a position L intended for the measurement. For the calibration, at least one detection signal each at structures in the plain section of the calibration body is generated, wherein the corpuscular beam is deflected with deflectors on beam target positions L1 with the beam target period P1, which is larger than half of the structure period PS, whereby a basic calibration is used for the control of the deflectors, and wherein the beam target deflections deviate either in the beam target period P1 from the structure period PS and/or in the beam target position L1 from the position L.
摘要翻译： 本发明涉及一种校准红细胞束的束位置的方法。 使用具有结构的校准体，其中结构在平坦部分中具有结构周期PS，并且在每个结构内具有用于测量的位置L. 对于校准，生成校准体的平坦部分中的结构处的至少一个检测信号，其中，粒子束在束目标位置L1上被偏转器偏转，其中光束目标周期P1大于 结构周期PS，由此使用基准校准来控制偏转器，并且其中光束目标偏转在光束目标周期P1中与结构周期PS和/或从位置L的光束目标位置L1偏离。
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公开(公告)号：US07972486B2
公开(公告)日：2011-07-05
申请号：US11279047
申请日：2006-04-07
IPC分类号： C23C14/34
CPC分类号： C23C14/56 , H01J37/32431 , H01J37/32458
摘要： A machine for coating a transparent substrate for the production of display screens comprises a coating chamber that has a modular design. Each of the modules 1 features a chamber section 2, a first support 3 that is arranged removably in or at the chamber section 2, and a second support 4 that is arranged removably at the first support 3. Whereas the first support 3 bears the cathodes, the second support 4 is formed as a cover at which are arranged the pumps for producing a vacuum in the coating chamber. Carriers 3 and 4 can be removed laterally from the chamber section 2 to such an extent that areas 11a, 11b accessible to persons can be formed between the module components. In this way, the components of the machine are readily accessible, for example for maintenance purposes. Work can be done simultaneously on the cathodes and in the chamber interior.
摘要翻译： 用于涂覆用于生产显示屏的透明基板的机器包括具有模块化设计的涂布室。 每个模块1具有腔室部分2，可移除地布置在腔室部分2中或在腔室部分2中的第一支撑件3，以及可移除地布置在第一支撑件3处的第二支撑件4.而第一支撑件3承载阴极 ，第二支撑件4形成为盖，在该盖处布置有用于在涂覆室中产生真空的泵。 载体3和4可以从腔室部分2侧向移除到可以在模块部件之间形成人员可接近的区域11a，11b。 以这种方式，机器的组件容易接近，例如用于维护目的。 可以在阴极和室内同时进行工作。
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公开(公告)号：US07837799B2
公开(公告)日：2010-11-23
申请号：US10732179
申请日：2003-12-10
CPC分类号： B65G49/065 , B65G49/063 , B65G2249/02 , B65G2249/045 , Y10S414/139
摘要： An arrangement for transporting a flat substrate through a coating installation, wherein the coating installation comprises, e.g., several and different sputter cathodes, to which the flat substrate, for example a glass pane, is transported one after the other in vacuo. So that no abrasion is generated between glass pane and contact, the glass pane is kept spaced apart from the contact by means of gas pressure. The gas pressure is herein built up through relatively few and small holes in a gas channel. Since during flooding of the coating installation to atmospheric pressure or during evacuation, due to the small holes, no fast pressure equalization between gas channel and the remaining coating installation is possible, the gas channel is decoupled in terms of gas from the remaining coating installation and provided with a separate gas line, via which gas can be introduced into the gas channel or pumped out of it.
摘要翻译： 用于将平坦基底输送通过涂覆装置的布置，其中所述涂覆装置包括例如多个和不同的溅射阴极，平坦基底例如玻璃板在其中真空地彼此输送。 因此，玻璃板和接触件之间不会产生磨损，玻璃板通过气体压力与接触件保持间隔开。 气体压力通过气体通道中相对较少和小的孔形成。 由于涂层装置在大气压下或排空过程中，由于小孔，气体通道和剩余的涂层装置之间无法实现快速压力平衡，所以气体通道与剩余涂层装置的气体相分离， 设置有单独的气体管线，通过该气体管线可以将气体引入气体通道中或从其中泵出。
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公开(公告)号：US07518142B2
公开(公告)日：2009-04-14
申请号：US11761770
申请日：2007-06-12
IPC分类号： H01L35/24
CPC分类号： H01L51/5253 , H01L2251/558
摘要： The present invention concerns a thin-film encapsulation structure for electronic devices with organic substances, especially OLEDs or other organic optoelectronic devices as well as corresponding components and a process for the production with a primary, inorganic barrier layer (5), which is directly arranged on the device or the surface to be encapsulated; a planarization layer (6) arranged on the primary, inorganic barrier layer, the thickness of said planarization layer selected such that it is thicker than the simple value of the distance between highest peak and deepest valley of the surface of the primary barrier layer or the surface of the device under the primary barrier layer or the surface to be encapsulated, as well as a secondary barrier layer (14) arranged on the planarization layer.
摘要翻译： 本发明涉及一种具有有机物质的电子器件的薄膜封装结构，特别是OLED或其它有机光电子器件以及相应的部件，以及用于生产具有主要无机阻挡层（5）的方法，其直接布置 在要封装的设备或表面上; 布置在初级无机阻挡层上的平坦化层（6），所述平坦化层的厚度被选择为比主要阻挡层的表面的最高峰和最深谷之间的距离的简单值 主要阻挡层或待封装表面下的器件表面，以及布置在平坦化层上的次级阻挡层（14）。
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7.发明授权Measuring device for the measurement of optical properties of coated substrates 失效用于测量涂层基材的光学性能的测量装置公开(公告)号：US07450233B2
公开(公告)日：2008-11-11
申请号：US10996808
申请日：2004-11-24
申请人： Hans-Georg Lotz , Peter Sauer , Stefan Hein , Peter Skuk
发明人： Hans-Georg Lotz , Peter Sauer , Stefan Hein , Peter Skuk
CPC分类号： C23C14/562 , C23C14/54 , G01N21/55
摘要： A measuring device includes several sequentially disposed coating chambers for measuring optical properties of coated substrates. These coating chambers are separated from one another by partitioning walls, whose free ends are located closely above the substrate. The substrate is preferably a continuous film. By measuring the reflection, the transmission, etc. of the substrate between the individual coating chambers, it becomes possible to carry out measurements within only partially completed layer systems. This yields advantages for the technical operation control of the coating process.
摘要翻译： 测量装置包括几个顺序设置的涂覆室，用于测量涂覆的基底的光学性质。 这些涂覆室通过分隔壁彼此分开，分隔壁的自由端位于衬底附近。 基材优选为连续膜。 通过测量各个涂覆室之间的基板的反射，透射等，可以在仅部分完成的层系统内进行测量。 这为涂覆工艺的技术操作控制带来了好处。
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公开(公告)号：US08323734B2
公开(公告)日：2012-12-04
申请号：US12964311
申请日：2010-12-09
CPC分类号： G02B5/0875 , C23C14/0015 , C23C14/0021 , C23C14/081 , C23C14/14 , C23C14/562 , G02B5/288
摘要： A Fabry-Perot filter is applied as a thin coating on a film, for example, a packaging film, and permits interesting color effects. The coating has a layered construction in which both reflecting layers of the filter may be made of aluminum and the intermediate layer between the reflecting layers may be made of aluminum oxide.
摘要翻译： 法布里 - 珀罗过滤器作为薄膜涂覆在膜上，例如包装膜上，并且允许有趣的颜色效果。 涂层具有层叠结构，其中过滤器的两个反射层可以由铝制成，并且反射层之间的中间层可以由氧化铝制成。
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公开(公告)号：US08282089B2
公开(公告)日：2012-10-09
申请号：US11709929
申请日：2007-02-21
申请人： Oliver Heimel , Andreas Jischke , Dieter Haas
发明人： Oliver Heimel , Andreas Jischke , Dieter Haas
IPC分类号： B23P17/04
CPC分类号： B65G49/061 , B65G2249/02
摘要： The present invention concerns a device for transporting substrates through vacuum chambers, especially coating machines with a substrate carrier on or at which the substrates can be arranged, wherein the substrate carrier has at least one guide rail which extends along at least one side of the substrate carrier, and wherein the guide rail is kept spaced apart from the substrate carrier by one or just a few spaced bearings.
摘要翻译： 本发明涉及一种用于通过真空室输送基材的装置，特别是具有可以布置基板的基板载体的涂布机，其中基板载体具有沿基板的至少一侧延伸的至少一个导轨 载体，并且其中导轨通过一个或仅几个间隔的轴承与衬底载体保持间隔开。
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公开(公告)号：US08137510B2
公开(公告)日：2012-03-20
申请号：US11121563
申请日：2005-05-04
申请人： Stefan Bangert , Frank Fuchs , Ralph Lindenberg , Andreas Lopp , Uwe Schüssler , Tobias Stolley
发明人： Stefan Bangert , Frank Fuchs , Ralph Lindenberg , Andreas Lopp , Uwe Schüssler , Tobias Stolley
IPC分类号： C23C14/00
CPC分类号： H01J37/3455 , C23C14/352 , C23C14/56 , H01J37/3405 , H01J2237/3325
摘要： This invention relates to a coater for the coating, in particular, of large-area substrates by means of cathode sputtering, the coater having a coating chamber and, provided therein, a cathode assembly (2) where the material to be sputtered is located on a target (4) with a curved surface, the material to be sputtered being located, in particular, on the lateral surface of a cylinder, there being in a single coating chamber for a coherent coating zone at least three, preferably more, cathode assemblies (2) with rotatable, curved targets (4) positioned one beside the other.
摘要翻译： 本发明涉及一种用于通过阴极溅射涂覆，特别是大面积基板的涂布机，涂布机具有涂覆室，并且在其中设置阴极组件（2），其中待溅射的材料位于 具有弯曲表面的靶（4），待溅射的材料特别地位于圆柱体的侧表面上，在单个涂覆室中用于粘附涂层区域，至少三个，优选更多的阴极组件 （2）具有位于另一个旁边的可旋转的弯曲目标（4）。
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