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公开(公告)号：US20230417660A1
公开(公告)日：2023-12-28
申请号：US18039316
申请日：2021-11-22
IPC分类号： G01N21/3504 , G01N21/03 , G01N21/39
CPC分类号： G01N21/3504 , G01N21/0332 , G01N21/39 , G01N2201/127
摘要： The present invention is a gas analysis device that measures a concentration or partial pressure of a halide contained in a material gas used in semiconductor manufacturing process or a by-product gas generated in semiconductor manufacturing process with good accuracy, the device being for analyzing a concentration or partial pressure of a halide contained in a material gas used in a semiconductor manufacturing process or a by-product gas generated in a semiconductor manufacturing process, the device including a gas cell into which the material gas or the by-product gas is introduced, a laser light source that irradiates the gas cell with laser light whose wavelength is modulated, a light detector that detects the laser light transmitted through the gas cell, and a signal processing unit that calculates the concentration or partial pressure of the halide by using a light absorption signal obtained from an output signal of the light detector.
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2.发明公开公开(公告)号：US20230168697A1
公开(公告)日：2023-06-01
申请号：US18051637
申请日：2022-11-01
发明人： Kazuya TOKUNAGA
IPC分类号： G05D7/06
CPC分类号： G05D7/0647
摘要： Provided is a flow rate controller. The flow rate controller calculates a resistor flow rate that is a flow rate of a fluid flowing through a fluid resistor, on the basis of a first measured pressure measured by a first pressure sensor and a second measured pressure measured by a second pressure sensor; controls a second valve on the basis of a deviation of the resistor flow rate from the set flow rate; outputs a first set pressure that is a target of a pressure upstream of the fluid resistor, on the basis of the set flow rate and a second set pressure which is a target of a pressure downstream of the fluid resistor and to which a constant value is set; and controls the first valve on the basis of a deviation of the first measured pressure from the first set pressure.
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公开(公告)号：US11644852B2
公开(公告)日：2023-05-09
申请号：US17316940
申请日：2021-05-11
发明人： Yusuke Kanamaru , Kotaro Takijiri , Kazuya Shakudo
CPC分类号： G05D11/132 , F16K37/005 , G01F15/06 , G05D7/0652 , G05D7/0664 , H01L21/67253 , C23C16/45561 , C23C16/52 , G05D7/0635
摘要： A system that controls the flow rates of a plurality of split channels provided parallel to each other to a certain flow split ratio includes: a flow split ratio calculation unit that, in order to be able to diagnose whether a system abnormality that affects the flow split ratio is occurring, calculates a ratio of output values of flow rate sensors obtained by allowing, while fluid control valves of different split channels are closed, fluids to flow in these split channels as an actual flow split ratio; a reference flow split ratio storage unit that stores a reference flow split ratio serving as a reference for the actual flow split ratio; and an abnormality diagnosis unit that compares the actual flow split ratio and the reference flow split ratio, and diagnoses a system abnormality.
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公开(公告)号：US20220413521A1
公开(公告)日：2022-12-29
申请号：US17847822
申请日：2022-06-23
摘要： In order to prevent unnatural behavior of a calculated flow rate, provided is a fluid control device in which a fluid control valve and upstream and downstream pressure sensors are provided on a flow path. The device includes a calculation unit configured to calculate a flow rate based on measured pressures; and an output unit configured to output the calculated flow rate, and exhibit a zero output function of outputting a zero value regardless of the calculated flow rate when the valve is in a closed state. The device is further configured to switch between execution and stop of the zero output function, and when the valve is in an open state and a difference between the measured pressures of the pressure sensors is larger than a threshold, stop the zero output function and cause the flow rate output unit to output the calculated flow rate.
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公开(公告)号：US20220276664A1
公开(公告)日：2022-09-01
申请号：US17637900
申请日：2020-07-03
发明人： Andrew PRICE
IPC分类号： G05D7/06
摘要： To provide a flow rate control valve that can improve responsiveness of flow rate control of a pressure differential type of a flow rate control device. The flow rate control valve is so configured to comprise a pair of valve members each of which has a seat surface being in contact with each other, to provide an internal flow channel that opens toward the seat surfaces and that passes through the inside of at least one of the valve members, and to control a flow rate of a fluid flowing out through the internal flow channel to the outside by adjusting a separation distance between the seat surfaces. And a restricted flow channel is formed in the internal flow channel so that a differential pressure is generated between an upstream side and a downstream side of the restricted flow channel.
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公开(公告)号：US20220228896A1
公开(公告)日：2022-07-21
申请号：US17571758
申请日：2022-01-10
发明人： Kazuya TOKUNAGA
摘要： The present invention controls convergent pressure of a closed space provided with a fluid resistance at high speed while an upstream valve provided on the upstream of the fluid resistance prevents overshooting. A pressure control system is provided with a fluid resistance in a channel forming a closed space and is configured to control pressure of the closed space by controlling an upstream valve provided on the upstream of the fluid resistance. The pressure control system includes a convergent pressure arithmetic unit and a valve controller. The convergent pressure arithmetic unit calculates convergent pressure of the closed space when the upstream valve is fully closed using at least one of upstream pressure and downstream pressure on the fluid resistance in the channel. The valve controller compares the calculated convergent pressure with a predetermined target convergent pressure and fully close the upstream valve based on the result of the comparison.
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7.发明申请公开(公告)号：US20220228665A1
公开(公告)日：2022-07-21
申请号：US17648093
申请日：2022-01-14
发明人： Kazuya SHAKUDO
摘要： To avoid formation of surface sag formed when an internal flow path of a valve element is processed and to ensure a maximum flow rate in a fluid control valve where a seating surface of the valve element is formed of a resin layer, in a fluid control valve that includes a valve seat, and a valve element including resin layers provided in concave grooves formed on a facing surface facing the valve seat, the valve element further includes internal flow paths whose inflow ports are opened in a back surface facing away from the facing surface and whose outflow ports are opened in portions around the concave grooves on the facing surface, and counterbored portions are formed on sides of the inflow ports of the internal flow paths.
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公开(公告)号：US20220163984A1
公开(公告)日：2022-05-26
申请号：US17455486
申请日：2021-11-18
发明人： Kazuya TOKUNAGA , Kotaro TAKIJIRI
摘要： A flow rate control apparatus can obtain a flow rate of a fluid passing through a downstream-side valve in a form in which noise is significantly reduced with little time delay, and has improved responsiveness. The flow rate control apparatus includes: a downstream-side valve flow rate meter that measures a downstream-side valve flow rate that is a flow rate of a fluid passing through a downstream-side valve; and an observer including a downstream-side valve flow rate estimation model that estimates the downstream-side valve flow rate on the basis of an input parameter that changes an opening degree of the downstream-side valve. The observer is configured so as to be fed back a deviation between the measured value of the downstream-side valve flow rate and the estimated value of the downstream-side valve flow rate.
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公开(公告)号：US11340635B2
公开(公告)日：2022-05-24
申请号：US16446934
申请日：2019-06-20
发明人： Kentaro Nagai
摘要： In order to provide a flow rate control apparatus capable of reducing pressure loss due to a downstream valve while enhancing responsiveness in flow rate control, a controller is designed to control the downstream valve on the basis of a flow rate deviation when a valve opening of the downstream valve is smaller than a predetermined valve opening. The controller is designed to control an upstream valve on the basis of the flow rate deviation when the valve opening of the downstream valve is the predetermined valve opening or more.
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公开(公告)号：US11291966B2
公开(公告)日：2022-04-05
申请号：US16217423
申请日：2018-12-12
发明人： Masanori Terasaka , Hidenori Oba
摘要： A mixer is adapted to include: a flow path forming member formed with an internal flow path; and an insertion member inserted into the internal flow path, in which: the inner circumferential surface forming the internal flow path in the flow path forming member or the outer circumferential surface of the insertion member is formed with a first groove and a second groove merging with the first groove and branching from the first groove, and the inner circumferential surface and the outer circumferential surface are fitted to each other; and the first groove and the second groove are formed as a mixing flow path for, between the flow path forming member and the insertion member, branching and merging fluid flowing from one side of the internal flow path and guiding the fluid to the other side of the internal flow path.
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