公开(公告)号：US4569452A

公开(公告)日：1986-02-11

申请号：US736596

申请日：1985-05-21

申请人： Karl-Albert Schulke

发明人： Karl-Albert Schulke

IPC分类号： H01L21/673 ,  C30B25/12 ,  C30B31/14 ,  C30B35/00 ,  H01L21/22 ,  H01L21/67 ,  B65D25/28

CPC分类号： C30B31/14 ,  C30B25/12 ,  Y10S206/832

摘要： A tray made of silica glass or ceramic material with a seating component made out of U-shaped lengths, for disk-shaped elements and especially for round wafers, whereby the elements are secured in the seating component by means of slots. To provide a tray that is shaped in such a way as to provide easy access, is highly stable, and is designed to accept a wide range of wafer sizes, the seating component is in the form of two U sections, each with a base and two sides that are spaced by means of transverse tubes in such a way that the bases of the sections slope toward each other, the slots in the sides being deep enough for the upright elements to rest at points or along lines on the bases.

摘要翻译： 由石英玻璃或陶瓷材料制成的托盘，其具有由U形长度制成的座部件，用于盘形元件，特别是用于圆形晶片，由此通过槽将元件固定在座位部件中。 为了提供以能够容易接近的方式成形的托盘，是高度稳定的，并且被设计成可以接受各种晶片尺寸，座位部件是两个U部分的形式，每个部分具有基部和 两侧通过横向管隔开，使得这些部分的基部朝向彼此倾斜，侧面中的狭槽足够深以使直立元件在点处或沿着基部的线处静止。

公开(公告)号：US4528163A

公开(公告)日：1985-07-09

申请号：US345515

申请日：1982-02-04

申请人： Horst Albrecht

发明人： Horst Albrecht

IPC分类号： B28B1/34 ,  B32B9/04 ,  C03B19/09 ,  C03B20/00 ,  C30B15/10 ,  C30B29/06 ,  C30B35/00 ,  H01L21/208

CPC分类号： C30B35/002 ,  C03B19/095 ,  C03B20/00 ,  C30B15/10 ,  Y10S117/90 ,  Y10T117/1032

摘要： A crucible for semiconductor technology purposes, especially for the production of silicon crystals, comprising an outer layer portion or layer of silicon dioxide, especially an outer made from granular natural quartz, and an inner lining made from synthetic crystalline quartz is described. The inner lining has on its interior surface a thin amorphous layer suitably made by heating a synthetic quartz layer disposed over a granular natural quartz layer at a sufficient temperature for a sufficient period of time to convert at least a portion of the synthetic crystalline quartz to the amorphous state.

摘要翻译： 描述了用于半导体技术目的的坩埚，特别是用于生产硅晶体，其包括二氧化硅的外层部分或二层，特别是由粒状天然石英制成的外部，以及由合成晶体石英制成的内衬。 内衬在其内表面上具有薄的非晶层，其通过在足够的温度下在足够的温度下加热设置在颗粒状天然石英层上的合成石英层足够长的时间来将至少一部分合成晶体石英转化为 非晶态。

公开(公告)号：US4488743A

公开(公告)日：1984-12-18

申请号：US401920

申请日：1982-07-26

申请人： Karl A. Schulke

发明人： Karl A. Schulke

IPC分类号： F16L23/024 ,  F16L23/026 ,  F16L23/028 ,  F16L49/04 ,  F16L17/06

CPC分类号： F16L49/04 ,  Y10S285/911

摘要： To connect together tubular elements, such as pipes and the like, made of materials which are difficult to machine and handle, and which are expensive, such as quartz glass, or quartz materials or quartz-ceramic goods used, for example, in laboratory or chemical processing apparatus, the end portions of the tubular elements are formed with a circumferential groove or recess in which a spring ring made of metal, fiber-reinforced plastic, or the like, is snapped, the spring ring (3) being clamped at its external, projecting surface by a conical surface (8) on a flange ring (4) and a similar conical surface (8) on a counter ring, the flange ring and the counter ring being clamped by connecting bolts (6); two such elements can be connected together by passing connecting bolts (10) through aligned openings (7) in the flange rings; preferably, the connecting bolts are spring-loaded (11). The engagement angles of the conical surfaces (8) on the rings are, for example, about 38.degree. each with respect to a plane passing transversely through the axis of the tubular quartz goods.

摘要翻译： 将由难以加工和处理的材料制成的管状元件（例如管道等）连接在一起，并且昂贵的诸如石英玻璃或石英材料或石英陶瓷制品，例如在实验室或 化学处理装置，管状元件的端部形成有圆周凹槽或凹槽，弹性环由金属，纤维增强塑料等制成，弹簧环（3）夹在其上 通过凸缘环（4）上的锥形表面（8）和对置环上的类似锥形表面（8）的外部突出表面，凸缘环和对置环由连接螺栓（6）夹紧; 通过将连接螺栓（10）穿过法兰环中的对准的开口（7）将两个这样的元件连接在一起; 优选地，连接螺栓是弹簧加载的（11）。 环上的锥形表面（8）的接合角度相对于穿过管状石英制品的轴线的平面相对于例如大约38度。

公开(公告)号：US4392715A

公开(公告)日：1983-07-12

申请号：US122088

申请日：1980-02-19

申请人： Hans-Ulrich Bonewitz ,  Albert Muhlich ,  Karlheinz Rau

发明人： Hans-Ulrich Bonewitz ,  Albert Muhlich ,  Karlheinz Rau

IPC分类号： C03C13/04 ,  C03C25/10 ,  G02B6/00 ,  G02B6/02 ,  G02B6/036 ,  G02B5/172

CPC分类号： G02B6/03633 ,  C03C25/105 ,  G02B6/02 ,  G02B6/02033 ,  G02B6/0285

摘要： In an optical fiber having a core whose material consists essentially of vitreous silica, said core having a jacket of plastic which is optically effective at least on a length of 10 m reckoned from the light input end of the fiber and which has a refractive index n.sub.M which is smaller than that of the core, the improvement wherein the core has an outer layer whose refractive index n.sub.ext is smaller than the refractive index n.sub.K of the remaining inner core portion which is constant and greater than the refractive index n.sub.M of the jacket, and n.sub.ext lies in the range from n.sub.K -(n.sub.K -n.sub.M). (0.25 to 0.8) and whose thickness amounts to between 0.8 .mu.m and 8 .mu.m.

摘要翻译： 在具有其材料基本上由玻璃状二氧化硅组成的芯的光纤中，所述芯具有塑料外壳，其至少在纤维的光输入端计量至少10m的长度上具有光学有效性，并且具有折射率nM 其小于芯的改善，其中芯具有其折射率接下来小于剩余内芯部分的折射率nK的外层，该外层的外层是恒定的并且大于外壳的折射率nM，以及 接下来在nK-（nK-nM）的范围内。 （0.25〜0.8），其厚度为0.8〜8μm。

公开(公告)号：US4377405A

公开(公告)日：1983-03-22

申请号：US254579

申请日：1981-04-16

申请人： Lutz Brandt ,  Karl Kreutzer ,  Karlheinz Rau ,  Horst Schmidt ,  Fritz Simmat

发明人： Lutz Brandt ,  Karl Kreutzer ,  Karlheinz Rau ,  Horst Schmidt ,  Fritz Simmat

IPC分类号： C03B5/02 ,  C03B5/033 ,  C03B19/09 ,  C03B20/00 ,  F27B5/06 ,  C03B5/225 ,  C03B5/235 ,  C03B5/42

CPC分类号： C03B19/09 ,  C03B5/0334

摘要： Flat, transparent slabs of vitreous silica of optical quality are produced by melting granular starting material in a vacuum by means of an electrical heating system. The starting material is melted while sustaining a heat flow from the top to the bottom of the crucible. The bottom of the crucible is made permeable to gases. The heat isolation power of the crucible wall increases from the bottom to the top of the crucible.

摘要翻译： 通过电加热系统在真空中熔化颗粒状原料来生产光学质量的玻璃状二氧化硅的平坦透明板。 原料熔化，同时保持坩埚顶部至底部的热流。 坩埚的底部使气体可渗透。 坩埚壁的隔热能力从坩埚的底部向顶部增加。

公开(公告)号：US4367768A

公开(公告)日：1983-01-11

申请号：US122089

申请日：1980-02-19

申请人： Karl A. Schulke

发明人： Karl A. Schulke

IPC分类号： H01L21/22 ,  C30B25/08 ,  C30B31/10 ,  C23C13/08

CPC分类号： C30B31/10 ,  C30B25/08 ,  Y10T137/7902 ,  Y10T137/7922

摘要： In a refractory protective tube for the heat treatment of semiconductor components which is constricted at one end and at such constricted end is provided with a treating or working gas inlet, said tube having opposite to said gas inlet a closed end provided with a gas outlet, the improvement for the prevention of back diffusion of ambient air wherein said closed end is closed by a cover which is fastened to a holding bracket which is movably suspended from the tube.

摘要翻译： 在用于热处理半导体部件的耐火保护管中，所述半导体部件在一端被收缩并且在这种收缩端处设置有处理或工作气体入口，所述管与所述气体入口相对，具有设置有气体出口的封闭端， 防止环境空气的背面扩散的改进，其中所述封闭端被固定到可移动地从管中悬挂的保持支架的盖封闭。

公开(公告)号：US5003284A

公开(公告)日：1991-03-26

申请号：US395481

申请日：1989-08-18

申请人： Walter Dieudonne

发明人： Walter Dieudonne

IPC分类号： H05B3/10 ,  H05B3/00 ,  H05B3/44

CPC分类号： H05B3/44 ,  H05B3/009

摘要： An infrared radiator includes a non-circular jacket tube made of quartz material, which may be quartz glass, the length of which is a multiple of the larger interior diameter and the interior of whch, in a sectional view, is separated into two areas, in each of which a heating wire extends in the direction of the tube axis. The heating wires are electrically conductive and connected to each other at one end of the jacket tube and lead to the exterior via connecting pieces at the other end. Two cross pieces which protrude from the inside wall of the jacket tube face each other and are directed toward the direction of the axis of the jacket tube so as to form the two areas.

摘要翻译： 红外辐射器包括由石英材料制成的非圆形护套管，其可以是石英玻璃，其长度是较大内径的倍数，并且在截面图中将其的内部分成两个区域， 其中每根加热丝沿着管轴线的方向延伸。 加热线是导电的，并且在护套管的一端彼此连接并且通过另一端的连接件导向外部。 从护套管的内壁突出的两个横截面彼此面对并且朝着护套管的轴线的方向指向以形成两个区域。

公开(公告)号：US4956059A

公开(公告)日：1990-09-11

申请号：US410581

申请日：1989-09-21

申请人： Wolfgang Englisch ,  Helmut Leber ,  Klaus Reimann ,  Fritz Simmat

发明人： Wolfgang Englisch ,  Helmut Leber ,  Klaus Reimann ,  Fritz Simmat

IPC分类号： B01J19/08 ,  B01J19/28 ,  C01B33/18 ,  C03C1/02

CPC分类号： B01J19/28 ,  B01J19/087 ,  C01B33/18 ,  C03C1/022 ,  B01J2208/00407 ,  B01J2219/182 ,  C01P2004/50 ,  C01P2006/80

摘要： Granular silicon dioxide is placed in a treatment chamber which is heated to a temperature ranging from 700.degree. to 1300.degree. C. The chamber is then rotated for a prescribed period of time to mix the grains while a gaseous atmosphere of chlorine and/or hydrogen chloride is passed through the treatment chamber. The mixing period is followed by a resting period which is at least ten times longer than the mixing time. During the resting period the grains are exposed to a constant electric field having a strength of 600 to 1350 V/cm applied across the chamber. The foregoing cycle is repeated several times. For working the process a device is used which includes a quartz glass rotary tube into which hollow silicon carbide electrodes extend.

摘要翻译： 将颗粒状二氧化硅放置在加热至700℃至1300℃的处理室中。然后将该室旋转规定的时间以混合谷物，同时在气体的氯气和/或氯化氢气氛 通过处理室。 混合时间之后是静止期，其比混合时间长至少十倍。 在静止期间，晶粒暴露于贯穿腔室的强度为600至1350V / cm的恒定电场。 上述循环重复几次。 对于工作过程，使用包括中空碳化硅电极延伸的石英玻璃旋转管的装置。

公开(公告)号：US4915474A

公开(公告)日：1990-04-10

申请号：US277249

申请日：1988-11-29

申请人： Karl F. Klein ,  Walter Heitmann

发明人： Karl F. Klein ,  Walter Heitmann

IPC分类号： G02B6/00 ,  C03C13/04 ,  G02B6/02 ,  G02B6/10 ,  G02B6/44

CPC分类号： G02B6/102 ,  G02B6/4439

摘要： A transmission line for optical radiation is disclosed, which has at least one optical fiber with core and cladding. The core consists of vitreous synthetic silicon dioxide, and the cladding of bitreous synthetic silicon dioxide doped with boric oxide and/or fluorine. The fiber is cooled over substantially its entire length to a temperature below 220 K. for the transmission of optical radiation in the wavelength range from 160 to 300 nm. Such transmission lines are used in spectroscopy, in machining processes, in medicine and chemical processes, and for biological purposes.

摘要翻译： 公开了一种用于光辐射的传输线，其具有至少一个具有芯和包层的光纤。 核心由玻璃质合成二氧化硅和掺杂有氧化硼和/或氟的混合合成二氧化硅的包层组成。 将纤维基本上在其整个长度上冷却到低于220K的温度，以便在160nm至300nm的波长范围内传输光学辐射。 这种传输线用于光谱学，加工过程，医学和化学过程以及生物学目的。

公开(公告)号：US4653650A

公开(公告)日：1987-03-31

申请号：US790326

申请日：1985-10-23

申请人： Karl A. Schulke

发明人： Karl A. Schulke

IPC分类号： B65D85/38 ,  F27D5/00 ,  H01L21/67 ,  H01L21/673 ,  A47G19/08

CPC分类号： F27D5/0012 ,  Y10S206/833

摘要： A rack for supporting wafers has a pair of parallel struts with kerfs therealong for supporting the wafers. A dummy wafer is attached to the struts near each end of the struts to connect the struts structurally as the rack and serve as rack-handling handles. The dummy wafers are parallel to the adjacent kerfs and thus the wafers therein and dimensioned similarly to the wafers for providing favorable gas and heat distribution when a wafer loaded rack is placed in a furnace. This adapts the rack for diffusion treatment of semiconductor wafers.

摘要翻译： 用于支撑晶片的支架具有一对具有用于支撑晶片的切口的平行支柱。 将假晶片附接到支柱每个支柱附近的支柱，以将支柱结构地连接到支架上并用作支架处理手柄。 虚拟晶片平行于相邻的切口，因此平行于其中的晶片，并且其尺寸类似于晶片，以便当晶片加载的机架放置在炉中时提供有利的气体和热分布。 这适应了机架用于半导体晶片的扩散处理。