公开(公告)号：US10249813B2

公开(公告)日：2019-04-02

申请号：US15341587

申请日：2016-11-02

Applicant: SII Crystal Technology Inc.

Inventor： Naoya Ichimura

IPC: H04R17/00 ,  H01L41/27 ,  H01L41/293 ,  H01L41/297 ,  H03H3/02 ,  H03H9/10 ,  H03H9/21 ,  H01L41/332

Abstract: There is provided a method of manufacturing a piezoelectric vibrator element capable of preventing the piezoelectric vibrator element from being damaged when segmentallizing the piezoelectric vibrator element. The method of manufacturing a piezoelectric vibrator element includes the steps of providing the wafer with the piezoelectric plate and a frame part adapted to support the piezoelectric plate via a connection part, providing a pair of excitation electrodes to the piezoelectric plate, and forming a pair of extending electrodes extending from the piezoelectric plate to the frame part through the connection part and electrically connected respectively to the pair of excitation electrodes, and segmentallizing the piezoelectric plate by cutting the connection part. In the step of providing the pair of excitation electrodes, the pair of extending electrodes are formed on a side surface of the connection part.

公开(公告)号：US09509277B2

公开(公告)日：2016-11-29

申请号：US14976893

申请日：2015-12-21

Applicant: SII Crystal Technology Inc.

Inventor： Takashi Kobayashi

IPC: H03H9/21 ,  H03H9/05

CPC classification number: H03H9/21 ,  H03H9/0509

Abstract: A piezoelectric vibrator has a piezoelectric vibrating reed mounted on an upper layer base substrate through a conductive adhesive, in which the piezoelectric vibrating reed includes a first vibrating arm and a second vibrating arm extending along a first direction and arranged side by side in a second direction, a base supporting the first vibrating arm and the second vibrating arm and a first support arm and a second support arm positioned in the outer side of the first vibrating arm and the second vibrating arm in the second direction and bonded to the upper layer base substrate, in which an extrusion amount of the conductive adhesive in the inner side of the first support arm and the second support arm is smaller than an extrusion amount of the conductive adhesive in the outer side of the first support arm and the second support arm.

Abstract translation: 压电振子具有通过导电粘合剂安装在上层基底基板上的压电振动片，其中压电振动片包括沿着第一方向延伸的第一振动臂和第二振动臂，并沿第二方向并排布置 ，支撑所述第一振动臂和所述第二振动臂的基座以及位于所述第一振动臂和所述第二振动臂的外侧的第二支撑臂和第二支撑臂，所述第二支撑臂和所述第二支撑臂接合到所述上层基底基板 其中第一支撑臂和第二支撑臂的内侧中的导电粘合剂的挤出量小于第一支撑臂和第二支撑臂的外侧中的导电粘合剂的挤出量。

公开(公告)号：US09052699B2

公开(公告)日：2015-06-09

申请号：US13630103

申请日：2012-09-28

Applicant: Seiko Instruments Inc.

Inventor： Daishi Arimatsu

IPC: H01L41/22 ,  H01L41/00 ,  G04R20/00 ,  G04R20/10 ,  H03H3/04 ,  H03H9/10 ,  H03H9/21

CPC classification number: G04R20/00 ,  G04R20/10 ,  H03H3/04 ,  H03H9/1021 ,  H03H9/21 ,  H03H2003/0492

Abstract: A method of manufacturing a piezoelectric vibration reed is provided. The piezoelectric vibration reed includes a pair of vibrating arm portions and a base portion. The pair of vibrating arm portions is disposed in parallel to each other. The base portion is configured to integrally support proximal end portions of the pair of vibrating arm portions in a longitudinal direction of the vibrating arm portions. The method of manufacturing the piezoelectric vibration reed forms a slit-shaped notched portion at a crotch portion located between the proximal end portions of the pair of vibrating arm portions.

Abstract translation: 提供了一种制造压电振动片的方法。 压电振动片包括一对振动臂部和基部。 一对振动臂部彼此平行设置。 所述基部构造成在所述振动臂部的长度方向上一体地支撑所述一对振动臂部的基端部。 制造压电振动片的方法在位于一对振动臂部的基端部之间的裆部形成狭缝状的切口部。

公开(公告)号：US08987978B2

公开(公告)日：2015-03-24

申请号：US14024857

申请日：2013-09-12

Applicant: SII Crystal Technology Inc.

Inventor： Takashi Kobayashi

IPC: H01L41/08 ,  H03H9/21 ,  H01L41/09 ,  G04R60/00 ,  H03H9/215 ,  H03H9/10 ,  G04R20/10 ,  G04C3/12 ,  H03H3/02

CPC classification number: H01L41/09 ,  G04C3/12 ,  G04R20/10 ,  G04R60/00 ,  H03H9/1021 ,  H03H9/215 ,  H03H2003/026

Abstract: A piezoelectric vibrating piece, a piezoelectric vibrator, an oscillator, an electronic apparatus and a radio timepiece capable of reducing the size while suppressing reduction of rigidity and having excellent vibration characteristics. The piezoelectric vibrating piece includes a pair of vibrating arm portions in parallel to each other, a base portion integrally fixing base end portions of the pair of vibrating arm portions in a length direction, groove portions on main surfaces of the pair of vibrating arm portions and extending along the length direction, where each of the groove portions includes a first groove portion near a tip portion end of the vibrating arm portions and a second groove portion near the base end portion side of the vibrating arm portions with respect to the first groove portion, and the second groove portion is offset in a −X axis direction with respect to the first groove portion.

Abstract translation: 压电振动片，压电振动器，振荡器，电子设备和无线电钟表，能够在抑制刚度降低并且具有优异的振动特性的同时减小尺寸。 压电振动片包括彼此平行的一对振动臂部，将一对振动臂部的基端部沿长度方向整体固定的基部，一对振动臂部的主表面上的槽部， 沿长度方向延伸，其中每个凹槽部分包括在振动臂部分的尖端部分附近的第一凹槽部分和相对于第一凹槽部分在振动臂部分的基端部侧附近的第二凹槽部分 并且第二槽部相对于第一槽部在-X轴方向上偏移。

公开(公告)号：US20140254329A1

公开(公告)日：2014-09-11

申请号：US14202575

申请日：2014-03-10

Applicant: SII Crystal Technology Inc.

Inventor： Masanori TAMURA

IPC: H01L41/08 ,  H03B5/32 ,  H01L41/053 ,  G04R20/14

CPC classification number: H03H9/21 ,  G04R20/10 ,  H03B5/32

Abstract: A piezoelectric vibrating piece is provided including: a pair of vibrating arm sections; a base section which is provided between the pair of vibrating arm sections; and connecting sections which connect base end sections of the pair of vibrating arm sections and a base end section of the base section, in which the vibrating arm sections have bending points and the vibrating arm sections extend in a direction away from the base section from the base end sections of the vibrating arm sections to the bending points, and the vibrating arm sections extend along the base section from the bending points to leading end sections of the vibrating arm sections.

Abstract translation: 提供一种压电振动片，包括：一对振动臂部; 基部，设置在所述一对振动臂部之间; 以及连接部，其将所述一对振动臂部的基端部和所述基部的基端部连接，所述振动臂部具有弯曲点，所述振动臂部沿远离所述基部的方向延伸， 振动臂部的基端部到弯曲部，振动臂部从弯曲点向振动臂部的前端部沿基部延伸。

公开(公告)号：US08816573B2

公开(公告)日：2014-08-26

申请号：US13197311

申请日：2011-08-03

Applicant: Takashi Kobayashi

Inventor： Takashi Kobayashi

IPC: H01L41/08 ,  H03H9/21 ,  G04R20/10

CPC classification number: H03H9/21 ,  G04R20/10

Abstract: A piezoelectric vibration piece that can ensure good drive level characteristics and a piezoelectric vibrator, oscillator, electronic device and radio-controlled timepiece in which the piezoelectric vibration piece is used are provided. The width of the base-end side of the grooves 5 is narrower than that of the tip side of the grooves 5. The base 4 includes: a mount section 4a on the outer surface of which mount electrodes 12, 13 are formed to mount the piezoelectric vibration piece 1; and an intermediate section 4b that is connected to the mount section 4a and the pair of vibrating arms 3a, 3b so as to be positioned between the mount section 4a and the pair of vibrating arms 3a, 3b, on the outer surface of which leading electrodes 14a, 14b that connect the pair of excitation electrodes 10, 11 and the mount electrodes 12, 13 are formed. The width of the mount section 4a is wider than that of the intermediate section 4b. In step parts between the mount section 4a and the intermediate section 4b, side surfaces of the mount section 4a and side surfaces of the intermediate section 4b are connected via tilted surfaces 4c that tilt with respect to a longitudinal direction.

Abstract translation: 提供能够确保良好的驱动电平特性的压电振动片以及使用压电振动片的压电振动器，振荡器，电子装置和无线电控制的钟表。 槽5的基端侧的宽度比槽5的前端侧的宽度窄。基座4包括：安装部4a，其外表面上安装电极12,13形成为安装 压电振动片1; 以及中间部分4b，其连接到安装部分4a和一对振动臂3a，3b，以便位于安装部分4a和一对振动臂3a，3b之间，其外表面上的引导电极 形成连接一对激励电极10,11和安装电极12,13的14a，14b。 安装部4a的宽度比中间部4b宽。 在安装部分4a和中间部分4b之间的阶梯部分中，安装部分4a的侧表面和中间部分4b的侧表面通过相对于纵向方向倾斜的倾斜表面4c连接。

公开(公告)号：US11831296B2

公开(公告)日：2023-11-28

申请号：US17534913

申请日：2021-11-24

Applicant: SII Crystal Technology Inc.

Inventor： Takashi Kobayashi ,  Motoki Shibuya ,  Chisato Ojima ,  Tomohiro Momose

IPC: H03B5/32 ,  H03H9/215 ,  H03H9/19 ,  H03H3/04 ,  H03H9/05 ,  H03H9/13 ,  H03H9/10

CPC classification number: H03H9/19 ,  H03B5/32 ,  H03H3/04 ,  H03H9/0595 ,  H03H9/105 ,  H03H9/132 ,  H03H9/215 ,  H03H2003/0428 ,  H03H2003/0442

Abstract: There is provided a piezoelectric vibrator element which is excellent in vibration characteristics, high in quality, and capable of suppressing a frequency fluctuation after a frequency adjustment. The piezoelectric vibrator element is provided with a piezoelectric plate having a pair of vibrating arm parts, an electrode film disposed on obverse and reverse surfaces of the piezoelectric plate, and weight metal films for a frequency adjustment disposed on the electrode film at the obverse surface side in the vibrating arm parts. The reverse surface of the vibrating arm part has a reverse side exposure part from which the piezoelectric plate is exposed. The obverse surface of the vibrating arm part has an obverse side exposure part from which the weight metal film and the electrode film are removed, and from which the piezoelectric plate is exposed. A whole of the obverse side exposure part overlaps the reverse side exposure part at a distance from the electrode film on the reverse surface viewed from a thickness direction of the piezoelectric plate.

公开(公告)号：US09748467B2

公开(公告)日：2017-08-29

申请号：US15380251

申请日：2016-12-15

Applicant: SII Crystal Technology Inc.

Inventor： Takashi Kobayashi

IPC: H03H9/21 ,  H01L41/053 ,  H01L41/047 ,  H01L41/09

CPC classification number: H01L41/0533 ,  H01L41/047 ,  H01L41/094 ,  H03H9/1021 ,  H03H9/21

Abstract: A piezoelectric vibrator element is more stably bonded to reduce the displacement with respect to an external force. The piezoelectric vibrator element is provided with a pair of vibrating arm parts extending from a base, and support arm parts extending from the base on both outer sides of the vibrating arm parts in parallel thereto. Further, the piezoelectric vibrator element is bonded on a mounting part in the package with the pair of support arm parts to thereby be fixedly held. Two or more bonding regions of each of the support arm parts are disposed in the longitudinal direction. In the longitudinal direction, the bonding region on the base side is disposed on the base side of the centroid of the piezoelectric vibrator element. Thus, the length from the bonding point to the tip of the vibrating arm part can be shortened, and the displacement at the tip of the vibrating arm part can be reduced with respect to an impact from the outside. On the other hand, in order to suppress the vibration leakage from the vibrating arm part, the bonding region located on the base side is disposed on the centroid side of a connection part between the base and the support arm part.

公开(公告)号：US09391259B2

公开(公告)日：2016-07-12

申请号：US14639705

申请日：2015-03-05

Applicant: SII Crystal Technology Inc.

Inventor： Masanori Tamura

IPC: H03H9/21 ,  H01L41/053 ,  H01L41/047 ,  H03H9/17 ,  H03H9/10

CPC classification number: H01L41/053 ,  H01L41/0475 ,  H03H9/1021 ,  H03H9/17 ,  H03H9/21

Abstract: To provide a piezoelectric vibrating piece capable of preventing short circuit at the time of mounting caused by miniaturization. In a piezoelectric vibrating piece having a support arm portion provided with mount electrodes between a pair of vibrating arm portions, a layout wiring connected to the first mount electrode on the base end side of the support arm portion is formed on a mount surface, and at least a layout wiring passing the vicinity of the first mount electrode in the layout wirings connected to the second mount electrode on the tip side of the support arm portion is formed on an opposite mount surface side, thereby preventing short circuit of a conductive adhesive for bonding the first mount electrode to an electrode on the package side with respect to the layout wiring on the second mount electrode side.

Abstract translation: 提供能够防止由于小型化引起的安装时的短路的压电振动片。 在具有在一对振动臂部之间设置有安装电极的支撑臂部的压电振动片中，在支撑臂部的基端侧与第一安装电极连接的配线布线形成在安装面上， 在与支撑臂部的前端侧连接的第二安装电极的布线配线中，通过第一安装电极附近的布线布线形成在相反的安装面侧，防止用于接合的导电性粘接剂短路 第一安装电极相对于第二安装电极侧的布线布线在封装侧的电极上。

公开(公告)号：US09148120B2

公开(公告)日：2015-09-29

申请号：US14209380

申请日：2014-03-13

Applicant: SII Crystal Technology Inc.

Inventor： Masanori Tamura

IPC: H01L41/08 ,  H03H9/21 ,  G04R20/10 ,  G04C3/12 ,  G04C3/00 ,  H03H9/02 ,  H03H9/10 ,  H03B5/36

CPC classification number: H03H9/21 ,  G04C3/008 ,  G04C3/12 ,  G04R20/10 ,  H03B5/36 ,  H03H9/02157 ,  H03H9/1014

Abstract: A piezoelectric vibrating piece including: a pair of vibrating arm sections which has a groove section, respectively; a base section which is disposed between the pair of vibrating arm sections; and a connecting section which connects each base end of the pair of vibrating arm sections and the base section. If a length from a base end to a leading end of the vibrating arm section in a longitudinal direction of the vibrating arm section is Lv, and a length from the base end of the vibrating arm section to an end of the connecting section on the opposite side to the vibrating arm section is Lc, a relationship of Lc/Lv≧0.1 is satisfied.

Abstract translation: 一种压电振动片，包括：分别具有槽部的一对振动臂部; 基部，其设置在所述一对振动臂部之间; 以及将所述一对振动臂部的各基端与所述基部连接的连接部。 如果在振动臂部的长度方向上从振动臂部的基端到前端的长度为Lv，并且从振动臂部的基端到相对的连接部的端部的长度 振动臂部的侧面为Lc，满足Lc /Lv≥0.1的关系。