Method for Inspecting Critical Dimension Uniformity at High Speed Measurement
    1.
    发明申请
    Method for Inspecting Critical Dimension Uniformity at High Speed Measurement 有权
    检测高速测量中临界尺寸均匀性的方法

    公开(公告)号:US20100111427A1

    公开(公告)日:2010-05-06

    申请号:US12607238

    申请日:2009-10-28

    CPC classification number: G06T7/0006 G03F1/86 G03F7/70625 G06T2207/30148

    Abstract: A method for inspecting a uniformity of CD (CD) of a photo mask pattern increases a production yield. The method obtains a CD by precisely measuring a photo mask by using, an electron microscope. Then, a measurement image having, a plurality of patterns formed in the photo mask is obtained by photographing the photo mask at a high speed through an optical microscope. A gray level based on the CD is calculated by capturing just a pattern area in the measurement image, and an estimated value and a correlation coefficient is obtained, when an open density of the measurement image is relatively low. Accordingly, a uniformity of CD can be confirmed more clearly in a measurement of high speed for a measurement image having a relatively low open density.

    Abstract translation: 用于检查光掩模图案的CD(CD)的均匀性的方法提高了产量。 该方法通过使用电子显微镜精确测量光掩模来获得CD。 然后,通过光学显微镜高速拍摄光掩模,获得具有形成在光掩模中的多个图案的测量图像。 当测量图像的开放密度相对较低时,通过仅捕获测量图像中的图案区域来计算基于CD的灰度级,并且获得估计值和相关系数。 因此,对于具有较低开放密度的测量图像的高速测量,可以更清楚地确认CD的均匀性。

    Vertical nonvolatile memory devices having reference features
    4.
    发明授权
    Vertical nonvolatile memory devices having reference features 有权
    具有参考特征的垂直非易失性存储器件

    公开(公告)号:US08836020B2

    公开(公告)日:2014-09-16

    申请号:US13285291

    申请日:2011-10-31

    Abstract: A memory device includes a substrate having a cell array region defined therein. A dummy structure is disposed on or in the substrate near a boundary of the cell array region. The memory device also includes a vertical channel region disposed on the substrate in the cell array region. The memory device further includes a plurality of vertically stacked conductive gate lines with insulating layers interposed therebetween, the conductive gate lines and interposed insulating layers disposed laterally adjacent the vertical channel region and extending across the dummy structure, at least an uppermost one of the conductive gate lines and insulating layers having a surface variation at the crossing of the dummy structure configured to serve as a reference feature. The dummy structure may include a trench, and the surface variation may include an indentation overlying the trench.

    Abstract translation: 存储器件包括其中限定有单元阵列区域的衬底。 在单元阵列区域的边界附近设置在基板上或基板上的虚设结构。 存储器件还包括设置在单元阵列区域中的衬底上的垂直沟道区域。 所述存储装置还包括多个垂直堆叠的导电栅极线,其间插入有绝缘层,所述导电栅极线和插入的绝缘层横向设置在所述垂直沟道区域的两侧并延伸穿过所述虚拟结构,所述至少一个所述导电栅极 线和绝缘层,其在被配置为用作参考特征的虚拟结构的交叉处具有表面变化。 虚拟结构可以包括沟槽,并且表面变化可以包括覆盖沟槽的凹陷。

    ADAPTIVE ENCODING AND DECODING METHODS AND APPARATUSES
    5.
    发明申请
    ADAPTIVE ENCODING AND DECODING METHODS AND APPARATUSES 有权
    自适应编码和解码方法和装置

    公开(公告)号:US20080010062A1

    公开(公告)日:2008-01-10

    申请号:US11774664

    申请日:2007-07-09

    Abstract: An adaptive encoding method includes splitting an input signal into a low-frequency band signal and a high-frequency band signal; performing forward adaptive linear prediction on the low-frequency band signal and thus filtering the low-frequency band signal; selectively performing backward adaptive linear prediction or long-term prediction on the filtered low-frequency band signal according to the analysis result of the low-frequency band signal; transforming the low-frequency band signal, on which backward adaptive linear prediction or long-term prediction has been performed, into a signal in a frequency domain and quantizing the signal; and encoding the high-frequency band signal using the low-frequency band signal, on which backward adaptive linear prediction or long-term prediction has been performed, or the quantized signal. Therefore, compression efficiency of both speech and music signals can be enhanced, and a robust compression method can be provided for various audio contents at a low bit rate.

    Abstract translation: 一种自适应编码方法,包括将输入信号分成低频带信号和高频带信号; 对低频带信号执行前向自适应线性预测,从而对低频带信号进行滤波; 根据低频带信号的分析结果,对经滤波的低频带信号选择性地执行反向自适应线性预测或长期预测; 将已经进行了反向自适应线性预测或长期预测的低频带信号变换为频域中的信号并量化信号; 并且使用已经执行了反向自适应线性预测或长期预测的低频带信号或量化信号对高频带信号进行编码。 因此,可以提高语音和音乐信号的压缩效率,并且可以以低比特率为各种音频内容提供鲁棒的压缩方法。

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