公开(公告)号：US20150227139A1

公开(公告)日：2015-08-13

申请号：US14695202

申请日：2015-04-24

申请人： TOKYO ELECTRON LIMITED

发明人： Takuo YAMAMOTO ,  Yuki KATAOKA

IPC分类号： G05B19/418

CPC分类号： G05B19/41875 ,  C23C16/52 ,  F02D41/1402 ,  F02D41/1441 ,  F02D2041/1412 ,  F02D2041/1416 ,  F02D2041/1426 ,  F02D2041/1433 ,  F02D2041/2058 ,  F02D2200/0402 ,  G05B13/041 ,  G05B13/042 ,  G05B2219/31103 ,  G05B2219/32018 ,  G05B2219/32187 ,  G06N5/022 ,  H01L22/20 ,  H01L2924/0002 ,  Y02P90/12 ,  Y02P90/22 ,  H01L2924/00

摘要： A device for computing correction for control parameter in a manufacturing process executed on a manufacturing apparatus includes circuitry which acquires an index representing fluctuation in a manufacturing apparatus, acquires an apparatus model and a process model, acquires an output from a sensor in the manufacturing apparatus, transforms the output into first fluctuation for a process element, transforms the index into second fluctuation for the process element based on the apparatus model, computes fluctuation for performance indicator from the first and second fluctuation based on the process model, computes correction for the performance indicator from control range for the performance indicator and the fluctuation for the performance indicator, and converts the correction for the performance indicator into correction for each process element based on the process model such that correction for control parameter in process executed on the manufacturing apparatus is computed from the correction converted for each process element.

摘要翻译： 在制造装置中执行的制造过程中用于计算控制参数校正的装置包括获取表示制造装置中的波动的指标的电路，获取装置模型和处理模型，从制造装置中的传感器获取输出， 将输出变换为处理单元的第一波动，基于设备模型将索引变换为处理单元的第二波动，基于过程模型从第一和第二波动计算性能指标的波动，计算性能指标的校正 从性能指标的控制范围和性能指标的波动，并且基于过程模型将性能指标的校正转换为每个处理元件的校正，使得在制造设备上执行的处理中的控制参数的校正是从 对每个过程元素进行校正。

公开(公告)号：US06314952B1

公开(公告)日：2001-11-13

申请号：US09535006

申请日：2000-03-23

申请人： Raymond Claude Turin ,  Sanjeev Manubhai Naik

发明人： Raymond Claude Turin ,  Sanjeev Manubhai Naik

IPC分类号： F02D4114

CPC分类号： F02D41/0085 ,  F02D41/1401 ,  F02D2041/1409 ,  F02D2041/1415 ,  F02D2041/1416 ,  F02D2041/1417 ,  F02D2041/1426 ,  F02D2041/1433

摘要： An improved individual cylinder fuel control method based on sampled readings of a single oxygen sensor responsive to the combined exhaust gas flow of several engine cylinders. A model-based observer is used to reproduce the imbalances of the different cylinders and a proportional-plus-integral controller is used for their elimination. Both the observer and the controller are formulated in terms of a periodic system. The observer input signal is preprocessed such that it reflects at each point of time the deviation from the current A/F-ratio mean value calculated over two engine cycles. Therefore, transient engine operating conditions do not harm the reconstruction of the cylinder imbalances dramatically. The control algorithm features process/controller synchronization based on table lookup and a mechanism to automatically adjust the mapping between the observer estimates and the corresponding cylinders if unstable control operation is detected.

摘要翻译： 基于对几个发动机气缸的组合排气流响应的单个氧传感器的采样读数的改进的单缸燃料控制方法。 使用基于模型的观察器来再现不同气缸的不平衡，并且使用比例加积分控制器进行消除。 观察者和控制者都是按照周期系统制定的。 观察者输入信号被预处理，使得其在每个时间点反映与在两个发动机循环中计算的当前A / F比平均值的偏差。 因此，瞬态发动机的运行条件不会严重影响汽缸失重的重建。 控制算法具有基于表查找的过程/控制器同步，以及如果检测到不稳定控制操作，则自动调整观测器估计与对应气缸之间的映射的机制。

公开(公告)号：US06266605B1

公开(公告)日：2001-07-24

申请号：US09465766

申请日：1999-12-17

申请人： Yuji Yasui ,  Shusuke Akazaki ,  Tadashi Sato ,  Masaki Ueno ,  Yoshihisa Iwaki

发明人： Yuji Yasui ,  Shusuke Akazaki ,  Tadashi Sato ,  Masaki Ueno ,  Yoshihisa Iwaki

IPC分类号： F02D4114

CPC分类号： F02D41/1458 ,  F02D41/1402 ,  F02D41/1403 ,  F02D41/1441 ,  F02D41/1456 ,  F02D2041/1409 ,  F02D2041/1415 ,  F02D2041/1416 ,  F02D2041/1418 ,  F02D2041/142 ,  F02D2041/1423 ,  F02D2041/1426 ,  F02D2041/1431 ,  F02D2041/1433 ,  G05B13/0255

摘要： A plant control system has a reference value setting unit for variably setting a reference value for an air-fuel ratio to be given to an exhaust system including a catalytic converter, depending on a component based on an adaptive control law of a manipulated variable of the air-fuel ratio generated by a controller according to an adaptive sliding mode control process in order to converge an output of an O2 sensor disposed downstream of the catalytic converter to a target value. The plant control system also has an estimator for estimating the difference between an output of the O2 sensor after the dead time of the exhaust system and a target value therefor, using the difference between the set reference value and a detected value of the air-fuel ratio, and giving the estimated difference to the controller.

摘要翻译： 工厂控制系统具有参考值设定单元，用于根据构成要素的操作变量的自适应控制定律，根据构成要素，对包含催化转换器的排气系统进行空燃比的基准值的可变设定 由控制器根据自适应滑动模式控制过程产生的空燃比，以将设置在催化转化器下游的O2传感器的输出收敛到目标值。 工厂控制系统还具有用于估计在排气系统的死区时间之后的O 2传感器的输出与其目标值之间的差异的估计器，使用设定的参考值与空燃比的检测值之间的差 比率，并给予控制器估计的差异。

公开(公告)号：US06256983B1

公开(公告)日：2001-07-10

申请号：US09548931

申请日：2000-04-13

申请人： Yuji Yasui

发明人： Yuji Yasui

IPC分类号： F01N300

CPC分类号： G05B13/042 ,  F02D41/1402 ,  F02D41/1403 ,  F02D41/1441 ,  F02D41/1456 ,  F02D41/1479 ,  F02D41/1481 ,  F02D41/1482 ,  F02D2041/1409 ,  F02D2041/1416 ,  F02D2041/1418 ,  F02D2041/142 ,  F02D2041/1423 ,  F02D2041/1426 ,  F02D2041/1431 ,  F02D2041/1433 ,  G05B13/047

摘要： A downstream exhaust system controller generates a target value for the output of an upstream O2 sensor disposed between first and second catalytic converters for converging the output of a downstream O2 sensor disposed downstream of the second catalytic converter to a target value while taking into account the dead time of a downstream exhaust system. An upstream exhaust system controller generates a target air-fuel ratio for an internal combustion engine for converging the output of the upstream O2 sensor to a target value while taking into account the dead time of an upstream exhaust system. A fuel processing controller controls the air-fuel ratio of the internal combustion engine at the target air-fuel ratio according to a feedback control process.

摘要翻译： 下游排气系统控制器产生用于输出设置在第一和第二催化转化器之间的上游O 2传感器的输出的目标值，用于将设置在第二催化转化器下游的下游O2传感器的输出会聚到目标值，同时考虑死区 下游排气系统的时间。 上游排气系统控制器在考虑了上游排气系统的死区时间的同时，生成用于将上游O 2传感器的输出会聚到目标值的内燃机的目标空燃比。 燃料处理控制器根据反馈控制过程控制内燃机的目标空燃比的空燃比。

公开(公告)号：US6082099A

公开(公告)日：2000-07-04

申请号：US153032

申请日：1998-09-15

申请人： Yuji Yasui ,  Shusuke Akazaki ,  Yoshihisa Iwaki

发明人： Yuji Yasui ,  Shusuke Akazaki ,  Yoshihisa Iwaki

IPC分类号： F02D45/00 ,  F02D41/00 ,  F02D41/14 ,  F02D41/34 ,  G05B13/00 ,  G05B13/02 ,  G05B13/04 ,  G05B21/02 ,  F01N3/00

CPC分类号： F02D41/008 ,  F02D41/1403 ,  F02D41/1441 ,  F02D41/1456 ,  G05B13/047 ,  G05B21/02 ,  F02D2041/1409 ,  F02D2041/1415 ,  F02D2041/1416 ,  F02D2041/1418 ,  F02D2041/142 ,  F02D2041/1426 ,  F02D2041/1431 ,  F02D2041/1433 ,  F02D41/1402

摘要： A plant control system for controlling a plant includes an actuator for generating an input to the plant and a first detector for detecting an output from the plant. A manipulated variable determining unit determines a manipulated variable which determines the input to the plant according to a sliding mode control process such that an output from the first detector will be equalized to a predetermined target value. The manipulated variable determining unit determines the manipulated variable to converge a plurality of state quantities, which comprise differences between a plurality of present and previous time-series data of the output of the first detector and the target value, onto a balanced point on a hyperplane for the sliding mode control process, which is defined by a linear function having variables represented respectively by the state quantities.

摘要翻译： 用于控制设备的设备控制系统包括用于产生对工厂的输入的致动器和用于检测来自所述设备的输出的第一检测器。 操作变量确定单元根据滑动模式控制处理来确定确定对工厂的输入的操作变量，使得来自第一检测器的输出将被等于预定的目标值。 操作变量确定单元确定操纵变量以将包括第一检测器的输出的多个当前时间序列数据和目标值之间的差异的多个状态量收敛到超平面上的平衡点上 对于滑动模式控制过程，其由具有分别由状态量表示的变量的线性函数定义。

公开(公告)号：US5974870A

公开(公告)日：1999-11-02

申请号：US153506

申请日：1998-09-15

申请人： Stefan Treinies ,  Gerd Rosel ,  Maximilian Engl

发明人： Stefan Treinies ,  Gerd Rosel ,  Maximilian Engl

IPC分类号： F02D21/08 ,  F02D41/14 ,  G01M15/00

CPC分类号： F02D41/0072 ,  F02D41/1401 ,  F02D41/182 ,  F02M26/48 ,  F02D2041/0017 ,  F02D2041/1426 ,  F02D2041/143 ,  F02D2041/1431 ,  F02D2041/1433 ,  F02D2200/0402 ,  F02M26/56 ,  Y02T10/47

摘要： A method for calculating an actual fresh-air mass flowing into a cylinder with the aid of an inlet pipe flow model. The description of the flow model is based on a nonlinear differential equation. The chosen model approach contains modeling of an external exhaust-gas recycling system, variable inlet systems and systems with variable control valves. The model-assisted load detection method can be used in engine control systems based on air mass flow and on inlet pipe pressure. A correction algorithm, in the form of a model control loop allows permanent improvement of accuracy when the model parameters are inexact. That is to say model balancing is provided in steady and unsteady operational states.

摘要翻译： 借助于入口管流模型计算流入气缸的实际新鲜空气质量的方法。 流动模型的描述基于非线性微分方程。 所选择的模型方法包含外部废气回收系统，可变进气系统和带可变控制阀的系统的建模。 模型辅助载荷检测方法可用于基于空气质量流量和入口管道压力的发动机控制系统。 模型控制循环形式的校正算法允许在模型参数不准确时永久提高精度。 也就是说，在稳定和不稳定的运行状态下提供模型平衡。

公开(公告)号：US5852930A

公开(公告)日：1998-12-29

申请号：US833091

申请日：1997-04-04

申请人： Yuji Yasui ,  Shusuke Akazaki ,  Kohei Hanada

发明人： Yuji Yasui ,  Shusuke Akazaki ,  Kohei Hanada

IPC分类号： F02D41/14 ,  F01N3/00

CPC分类号： F02D41/1473 ,  F02D41/1403 ,  F02D41/1441 ,  F02D2041/1409 ,  F02D2041/1415 ,  F02D2041/1416 ,  F02D2041/1418 ,  F02D2041/142 ,  F02D2041/1426 ,  F02D2041/1431 ,  F02D2041/1433 ,  F02D41/1402 ,  F02D41/1456

摘要： An air-fuel control system for use with an internal combustion engine has a catalytic converter disposed in an exhaust system of the engine, for purifying an exhaust gas emitted from the engine, a first exhaust gas sensor disposed in the exhaust system for detecting an air-fuel ratio of the exhaust gas upstream of the catalytic converter, a second exhaust gas sensor disposed in the exhaust system for detecting the concentration of a component of the exhaust gas which has passed through the catalytic converter, downstream of the catalytic converter, and a control unit for controlling an air-fuel ratio of the engine based on outputs from the first exhaust gas sensor and the second exhaust gas sensor. The control unit includes an adaptive sliding mode controller for determining a correction quantity to correct the air-fuel ratio of the engine so as to equalize the concentration of the component of the exhaust gas downstream of the catalytic converter to a predetermined appropriate value, according to an adaptive sliding mode control process based on the output from the second exhaust gas sensor, and a feedback controller for controlling a rate at which fuel is supplied to the engine so as to converge the concentration of the component of the exhaust gas downstream of the catalytic converter toward the predetermined appropriate value, based on the correction quantity and the output from the first exhaust gas sensor.

摘要翻译： 一种与内燃机一起使用的空气燃料控制系统，具有设置在发动机的排气系统中的用于净化从发动机排出的排气的催化转化器，设置在排气系统中的第一排气传感器，用于检测空气 - 催化转化器上游排气的燃料比，设置在排气系统中的第二废气传感器，用于检测通过催化转化器的排气的成分浓度，催化转化器的下游，以及 控制单元，用于基于来自第一排气传感器和第二排气传感器的输出来控制发动机的空燃比。 控制单元包括自适应滑动模式控制器，用于确定校正量以校正发动机的空燃比，以便将催化转化器下游的排气的分量的浓度相等到预定的适当值，根据 基于来自第二废气传感器的输出的自适应滑动模式控制过程和用于控制向发动机供应燃料的速率的反馈控制器，以使催化剂下游的排气的组分的浓度 转换器基于校正量和来自第一废气传感器的输出而朝向预定的适当值。

公开(公告)号：US5797384A

公开(公告)日：1998-08-25

申请号：US604650

申请日：1996-02-21

申请人： Hiroshi Kitagawa ,  Hidetaka Maki

发明人： Hiroshi Kitagawa ,  Hidetaka Maki

IPC分类号： F02D45/00 ,  F02D41/12 ,  F02D41/14 ,  F02D41/22 ,  G05B13/02

CPC分类号： F02D41/1495 ,  F02D41/1402 ,  F02D41/1441 ,  F02D41/1456 ,  F02D41/1477 ,  F02D41/2454 ,  F02D41/2474 ,  F02B2275/18 ,  F02D2041/1409 ,  F02D2041/1415 ,  F02D2041/1418 ,  F02D2041/142 ,  F02D2041/1426 ,  F02D2041/1433 ,  F02D41/123

摘要： An air-fuel ratio control system for an internal combustion includes an air-fuel ratio sensor arranged in the exhaust system, and an ECU which controls an amount of fuel to be supplied to the engine in a feedback manner based on an output from the air-fuel ratio sensor by using an adaptive controller of a recurrence formula type, such that the air-fuel ratio of an air-fuel mixture supplied to the engine becomes equal to a desired air-fuel ratio. Deterioration of a response characteristic of the air-fuel ratio sensor is detected based on at least one adaptive parameter used in the feedback control of the amount of fuel to be supplied to the engine.

公开(公告)号：US5781875A

公开(公告)日：1998-07-14

申请号：US606384

申请日：1996-02-23

申请人： Hidetaka Maki ,  Shusuke Akazaki ,  Yusuke Hasegawa ,  Isao Komoriya

发明人： Hidetaka Maki ,  Shusuke Akazaki ,  Yusuke Hasegawa ,  Isao Komoriya

IPC分类号： F02D41/00 ,  F02D41/14 ,  F02D41/34 ,  G06G7/70

CPC分类号： F02D41/008 ,  F02D41/1402 ,  F02D41/1473 ,  F02D41/1477 ,  F02D2041/1409 ,  F02D2041/1415 ,  F02D2041/1416 ,  F02D2041/1417 ,  F02D2041/1418 ,  F02D2041/142 ,  F02D2041/1422 ,  F02D2041/1426 ,  F02D2041/1433 ,  F02D41/1456

摘要： A system for controlling fuel metering for an internal combustion engine provided with a first feedback loop that calculates a first feedback correction coefficient using an adaptive control law to correct a quantity of fuel injection such that a detected air/fuel ratio is brought to a desired air/fuel ratio, a second feedback loop that calculates a second coefficient using a PID control law to similarly correct the quantity of fuel injection, and a third feedback loop that calculates a third coefficient using a PID controller to correct the quantity of fuel injection such that air/fuel ratio variance among the cylinders decreases. Either of the first or second coefficient is selected and based on the selected coefficient, the feedback gains of the third feedback loop are determined.

摘要翻译： 一种用于控制用于内燃机的燃料计量的系统，该内燃机设置有第一反馈回路，该第一反馈回路使用自适应控制定律来计算第一反馈校正系数，以校正燃料喷射量，使得检测到的空气/燃料比达到期望空气 /燃料比，第二反馈回路，其使用PID控制定律来计算第二系数以类似地校正燃料喷射量;以及第三反馈回路，其使用PID控制器计算第三系数，以校正燃料喷射量，使得 气缸之间的空气/燃料比差异减小。 选择第一或第二系数中的任一个，并且基于所选择的系数，确定第三反馈回路的反馈增益。

公开(公告)号：US5755212A

公开(公告)日：1998-05-26

申请号：US723143

申请日：1996-09-30

申请人： Takumi Ajima

发明人： Takumi Ajima

IPC分类号： F02D45/00 ,  F02D41/14 ,  G05B13/02 ,  F02D41/00

CPC分类号： F02D41/1458 ,  F02D41/1405 ,  F02D2041/1409 ,  F02D2041/1415 ,  F02D2041/1426 ,  F02D2041/1431 ,  F02D2041/1433 ,  F02D2200/0402

摘要： An air-fuel ratio control system with a high accuracy for an internal combustion engine which is capable of particularly improving the transient response characteristic irrespective of the occurrence of an air-fuel ratio sensor delay and a fuel attachment. An in-cylinder air-fuel ratio is calculated on the basis of engine data obtained in advance so that an neural network (NN) receiving a fuel injection quantity involving the past value and air quantity estimating information such as an intake pressure and outputting a calculated in-cylinder air-fuel ratio undergoes learning. In the actual control, a difference between the in-cylinder air-fuel ratio estimated in the NN and the target air-fuel ratio is taken on the basis of information such as a fuel injection quantity varying with the time and the output of the NN is partially differentiated with respect to the fuel injection quantity, so that the difference therebetween is divided by the resultant partial differential coefficient to obtain a fuel correction amount whereby the in-cylinder air-fuel ratio coincides with the target air-fuel ratio. The fuel injection quantity is corrected with this correction amount to calculate a final fuel injection quantity. That is, the in-cylinder air-fuel ratio is controlled to approach the target air-fuel ratio so that the exhaust gas air-fuel ratio equals the target air-fuel ratio.

摘要翻译： 一种用于内燃机的具有高精度的空燃比控制系统，其能够特别地改善瞬态响应特性，而与空燃比传感器延迟和燃料附着的发生无关。 基于预先获得的发动机数据来计算缸内空燃比，使得接收到过去值的燃料喷射量的神经网络（NN）和诸如进气压力的空气量估计信息，并输出计算出的 缸内空燃比经过学习。 在实际控制中，基于NN估计的缸内空燃比与目标空燃比之间的差异是基于随着时间和NN的输出而变化的燃料喷射量的信息 相对于燃料喷射量被部分地区分，从而将其之间的差除以所得到的偏微分系数，以获得燃料校正量，从而缸内空燃比与目标空燃比一致。 以该校正量校正燃料喷射量，以计算最终燃料喷射量。 也就是说，将缸内空燃比控制为接近目标空燃比，使得排气空燃比等于目标空燃比。