Power supply module and charged particle beam device

    公开(公告)号:US12132411B2

    公开(公告)日:2024-10-29

    申请号:US17763840

    申请日:2019-10-07

    摘要: The invention provides a power supply module and a charged particle beam device that are capable of reducing ripple noise. A high-voltage generation circuit 101 includes booster circuits CPa and CPb of two systems that are configured to be symmetrical to each other, and performs a boosting operation by using a capacitive element and a diode in the booster circuits CPa and CPb of the two systems. The high-voltage generation circuit is housed in a housing and a reference power supply voltage is applied thereto. A left electrode 102a is fixedly provided in the vicinity of one of the booster circuits CPa and CPb of the two systems in the housing, and a right electrode 102b is fixedly provided in the vicinity of the other of the booster circuits CPa and CPb of the two systems in the housing. A stray capacitance adjustment circuit 100a adjusts capacitance values of stray capacitances of the booster circuits CPa and CPb of the two systems by electrically controlling an electrical connection characteristic between the left electrode 102a and the reference power supply voltage 104 and an electrical connection characteristic between the right electrode 102b and the reference power supply voltage 104.

    Cathode construction for linear beam tubes
    2.
    发明授权
    Cathode construction for linear beam tubes 失效
    线性束管阴极结构

    公开(公告)号:US4147953A

    公开(公告)日:1979-04-03

    申请号:US754001

    申请日:1976-12-27

    申请人: Maurice Esterson

    发明人: Maurice Esterson

    CPC分类号: H01J23/065 H01J19/02 H01J3/02

    摘要: A linear beam tube is provided with a gridded electron gun in which a concave cathode surface is provided with concave channels from which electrons are emitted. The channels may be arranged as concentric annuli. In a preferred embodiment the channels extend radially outwards from the center of the cathode to minimize the effects of temperature distortion. The cathode is provided with a shadow grid and a control grid is spaced from and aligned therewith.

    摘要翻译: 线性束管设置有格栅电子枪,其中凹阴极表面设置有从其发射电子的凹通道。 通道可以布置为同心环。 在优选实施例中,通道从阴极的中心径向向外延伸,以最小化温度变形的影响。 阴极设置有阴影网格,并且控制栅格与其隔开并与之对齐。