METHOD FOR MANUFACTURING ELECTRON EMITTING DEVICE AND MEMORY MEDIUM OR RECORDING MEDIUM THEREFOR
    6.
    发明申请
    METHOD FOR MANUFACTURING ELECTRON EMITTING DEVICE AND MEMORY MEDIUM OR RECORDING MEDIUM THEREFOR 审中-公开
    用于制造电子发射装置的方法及其记忆介质或其记录介质

    公开(公告)号:US20090325330A1

    公开(公告)日:2009-12-31

    申请号:US12369811

    申请日:2009-02-12

    IPC分类号: H01L21/20 G06F19/00

    摘要: A method and an apparatus for manufacturing a high intensity electron emitting device using a boron lanthanum compound thin film are provided. An electron emitting base member region is opened in a second substrate disposed with an electron emitting base member, and is applied with a mask screening another region, thereby sputter-accumulating the sputtered particles of a low work function substance target. The second substrate sputter-accumulated and a first substrate disposed with phosphor are sealed by a sealing agent to fabricate a vacuum chamber. During the fabrication step, the first and second substrates are consistently maintained in a vacuum atmosphere or a reduced pressure atmosphere.

    摘要翻译: 提供了使用硼镧化合物薄膜制造高强度电子发射器件的方法和装置。 电子发射基底区域在设置有电子发射基底的第二基底中打开,并且对另一个区域进行掩模屏蔽,从而溅射沉积低功函数物质靶的溅射颗粒。 溅射聚集的第二衬底和布置有荧光体的第一衬底被密封剂密封以制造真空室。 在制造步骤期间,第一和第二基底一直保持在真空气氛或减压气氛中。

    METHOD FOR MANUFACTURING ELECTRON EMITTING DEVICE AND MEMORY MEDIUM OR RECORDING MEDIUM THEREFOR
    9.
    发明申请
    METHOD FOR MANUFACTURING ELECTRON EMITTING DEVICE AND MEMORY MEDIUM OR RECORDING MEDIUM THEREFOR 审中-公开
    用于制造电子发射装置的方法及其记忆介质或其记录介质

    公开(公告)号:US20090325329A1

    公开(公告)日:2009-12-31

    申请号:US12369478

    申请日:2009-02-11

    IPC分类号: H01J9/00 H01L21/02 G06F19/00

    摘要: A method and an apparatus for manufacturing a high intensity electron emitting device using a boron lanthanum compound thin film are provided. Sputtered particles of a low work function substance target are accumulated on a second substrate disposed an electron emitting base member. By using a mask for screening the electron emitting base member region opening other regions, the deposition of a low work function substance on the second substrate is etched, and after that, the second substrate and the first substrate disposed with the phosphor are sealed by a sealing agent to fabricate a vacuum chamber. During the fabrication step thereof, the first and second substrates are consistently maintained in a vacuum atmosphere or a reduced pressure.

    摘要翻译: 提供了使用硼镧化合物薄膜制造高强度电子发射器件的方法和装置。 低功函数物质靶的溅射颗粒被堆积在设置有电子发射基底的第二基底上。 通过使用用于筛选打开其他区域的电子发射基底区域的掩模,蚀刻在第二基底上的低功函数物质的沉积,之后,将第二基板和设置有荧光体的第一基板通过 密封剂制造真空室。 在其制造步骤期间,第一和第二基底一直保持在真空气氛或减压下。