摘要:
A micro-electrical-mechanical system (MEMS) guided wave device includes a plurality of electrodes arranged below a piezoelectric layer (e.g., either embedded in a slow wave propagation layer or supported by a suspended portion of the piezoelectric layer) and configured for transduction of a lateral acoustic wave in the piezoelectric layer. The piezoelectric layer permits one or more additions or modifications to be made thereto, such as trimming (thinning) of selective areas, addition of loading materials, sandwiching of piezoelectric layer regions between electrodes to yield capacitive elements or non-linear elastic convolvers, addition of sensing materials, and addition of functional layers providing mixed domain signal processing utility.
摘要:
A surface acoustic wave device includes a piezoelectric substrate, a wave guide path provided on the piezoelectric substrate and an interdigital transducer for exciting a surface acoustic wave. The interdigital transducer is provided with plural portions of mutually different pitches of the electrode finger, respectively corresponding to different frequencies. The portions are parallelly arranged along a direction perpendicular to the propagation direction of the surface acoustic wave. The surface acoustic wave generated by the interdigital transducer is entered in concentrated manner into the wave guide path.
摘要:
A surface acoustic wave device includes a piezoelectric substrate, a wave guide path provided on the piezoelectric substrate and an interdigital transducer for exciting a surface acoustic wave. The interdigital transducer is provided with plural portions of mutually different pitches of the electrode finger, respectively corresponding to different frequencies. The portions are parallelly arranged along a direction perpendicular to the propagation direction of the surface acoustic wave. The surface acoustic wave generated by the interdigital transducer is entered in concentrated manner into the wave guide path.
摘要:
A memory device including a piezoelectric delay line along the surface of which travels acoustic waves to be put into memory; an electron gun which sweeps the work surface of the line with a beam of electrons for recording or reading out the wave; and in which this work surface is covered at least in part by a layer of a highly resistive material.
摘要:
A micro-electrical-mechanical system (MEMS) guided wave device includes a plurality of electrodes arranged below a piezoelectric layer (e.g., either embedded in a slow wave propagation layer or supported by a suspended portion of the piezoelectric layer) and configured for transduction of a lateral acoustic wave in the piezoelectric layer. The piezoelectric layer permits one or more additions or modifications to be made thereto, such as trimming (thinning) of selective areas, addition of loading materials, sandwiching of piezoelectric layer regions between electrodes to yield capacitive elements or non-linear elastic convolvers, addition of sensing materials, and addition of functional layers providing mixed domain signal processing utility.
摘要:
A surface acoustical wave (SAW) waveguide device which compensates for dispersion by utilizing diffused substrates. Various embodiments have in-diffused or out-diffused core regions in which the ray is channeled that are topped by a thin metallic film overlay. Partially surrounding each core region are cladding portions which are also selectively in-diffused or out-diffused and may be covered by the metal overlay. By varying the amounts of in-diffusion or out-diffusion for the particular application, the effects of dispersion are minimized.
摘要:
An acoustic guided wave device has a wave guiding volume (20) which may include transducer elements (22-25) and other metal elements (26), sandwiched between two acoustic half spaces (10, 12) having acoustic velocity faster than the effective acoustic velocity of the material within the wave guiding volume.
摘要:
Couplers are disclosed for use with guided elastic waves and guided optical waves. The coupling is effected by means of a coupling region having a different phase velocity characteristic than that of the waveguide. The presence of the coupling region causes the waves traveling in the waveguide to become highly leaky. These leaky waves then encounter a second waveguide or transducer and are coupled into it. Utilizing the electroacoustic effect in the acoustic wave devices and the electrooptic effect in the optical wave devices, the phase velocity characteristic of the coupling region is controllable, permitting switchable couplers.
摘要:
A micro-electrical-mechanical system (MEMS) guided wave device includes a plurality of electrodes arranged below a piezoelectric layer (e.g., either embedded in a slow wave propagation layer or supported by a suspended portion of the piezoelectric layer) and configured for transduction of a lateral acoustic wave in the piezoelectric layer. The piezoelectric layer permits one or more additions or modifications to be made thereto, such as trimming (thinning) of selective areas, addition of loading materials, sandwiching of piezoelectric layer regions between electrodes to yield capacitive elements or non-linear elastic convolvers, addition of sensing materials, and addition of functional layers providing mixed domain signal processing utility.
摘要:
An acoustic wave element includes a piezoelectric substrate, an excitation electrode configured to excite and output a main acoustic wave on the piezoelectric substrate, a receiving electrode configured to receive the main acoustic wave, a propagation path configured to allow the main acoustic wave to propagate along the piezoelectric substrate between the excitation electrode and the receiving electrode, and a sensing portion configured to react to an object substance. The propagation path is configured to allow the main acoustic wave to pass plural times through the sensing portion along the propagation path. This acoustic wave element has high sensitivity to the object substance.