PLASMA PROCESSING WITH TUNABLE NITRIDATION

    公开(公告)号:US20230127138A1

    公开(公告)日:2023-04-27

    申请号:US17892968

    申请日:2022-08-22

    摘要: In an embodiment, a method for nitriding a substrate is provided. The method includes flowing a nitrogen-containing source and a carrier gas into a plasma processing source coupled to a chamber such that a flow rate of the nitrogen-containing source is from about 3% to 20% of a flow rate of the carrier gas; generating an inductively-coupled plasma (ICP) in the plasma processing source by operating an ICP source, the ICP comprising a radical species formed from the nitrogen-containing source, the carrier gas, or both; and nitriding the substrate within the chamber, wherein nitriding includes operating a heat source within the chamber at a temperature from about 150° C. to about 650° C. to heat the substrate; maintaining a pressure of the chamber from about 50 mTorr to about 2 Torr; introducing the ICP to the chamber; and adjusting a characteristic of the substrate by exposing the substrate to the radical species.

    Axial Piston-Type Hydraulic Rotary Machine

    公开(公告)号:US20210277891A1

    公开(公告)日:2021-09-09

    申请号:US16330428

    申请日:2017-11-03

    IPC分类号: F04B53/16 F04B1/2035 C23C8/24

    摘要: A nitriding layer (13) is formed on the front surface side of a base material of a cylinder block (7) including an opening side end surface (7B) and each cylinder hole (12). Then, a piston sliding surface (12A) of each cylinder hole (12) is formed as a compound layer-removed hole (17) by removing a compound layer (16) that is located on the front surface side of the nitriding layer (13) by using polishing means such as, for example, honing and so forth. Further, a compound layer-removed surface (18) is formed on a part (A) where a compound layer-removed hole (17) and a cylinder inlet side tapered surface (12B) of each cylinder hole (12) intersect by using the polishing means such as, for example, the honing and so forth. This compound layer-removed surface (18) is formed as a tapered-state inclined surface of an angle α.