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公开(公告)号：US11543229B2
公开(公告)日：2023-01-03
申请号：US17225464
申请日：2021-04-08
申请人： INVENSENSE, INC.
发明人： Ilya Gurin , Leonardo Baldasarre
摘要： The present disclosure relates to measuring misalignment between layers of a semiconductor device. In one embodiment, a device includes a first conductive layer; a second conductive layer; one or more first electrodes embedded in the first conductive layer; one or more second electrodes embedded in the second conductive layer; a sensing circuit connected to the one or more first electrodes; and a plurality of time-varying signal sources connected to the one or more second electrodes, wherein the one or more first electrodes and the one or more second electrodes form at least a portion of a bridge structure that exhibits an electrical property that varies as a function of misalignment of the first conductive layer and the second conductive layer in an in-plane direction.
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公开(公告)号：US20210223024A1
公开(公告)日：2021-07-22
申请号：US17225464
申请日：2021-04-08
申请人： INVENSENSE, INC.
发明人： Ilya Gurin , Leonardo Baldasarre
摘要： The present disclosure relates to measuring misalignment between layers of a semiconductor device. In one embodiment, a device includes a first conductive layer; a second conductive layer; one or more first electrodes embedded in the first conductive layer; one or more second electrodes embedded in the second conductive layer; a sensing circuit connected to the one or more first electrodes; and a plurality of time-varying signal sources connected to the one or more second electrodes, wherein the one or more first electrodes and the one or more second electrodes form at least a portion of a bridge structure that exhibits an electrical property that varies as a function of misalignment of the first conductive layer and the second conductive layer in an in-plane direction.
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公开(公告)号：US20200158489A1
公开(公告)日：2020-05-21
申请号：US16750650
申请日：2020-01-23
申请人： INVENSENSE, INC.
发明人： Ilya Gurin , Leonardo Baldasarre
摘要： The present disclosure relates to measuring misalignment between layers of a semiconductor device. In one embodiment, a device includes a first conductive layer; a second conductive layer; one or more first electrodes embedded in the first conductive layer; one or more second electrodes embedded in the second conductive layer; a sensing circuit connected to the one or more first electrodes; and a plurality of time-varying signal sources connected to the one or more second electrodes, wherein the one or more first electrodes and the one or more second electrodes form at least a portion of a bridge structure that exhibits an electrical property that varies as a function of misalignment of the first conductive layer and the second conductive layer in an in-plane direction.
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公开(公告)号：US20180299010A1
公开(公告)日：2018-10-18
申请号：US15767467
申请日：2016-11-11
发明人： Masashi ONO , Ichiro TANAKA , Kyohei IZUMI
摘要： A rotation position detection device includes a change drum, a magnetic field generator, and a magnetic field detector. The magnetic field generator is fixed to the change drum and rotates along with the change drum to differentiate an ambient magnetic field. The magnetic field detector is formed separately from the magnetic field generator and fixed to a position at which a magnetic field changes in response to rotation of the magnetic field generator so as to detect the magnetic field and output a signal that depends on the rotational position of the change drum on the basis of the detection result.
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5.发明授权
公开(公告)号：US5303162A
公开(公告)日：1994-04-12
申请号：US790341
申请日：1991-11-12
申请人： Myung Oh Yoon
发明人： Myung Oh Yoon
摘要： A system for automatically measuring piling results of a piling operation. The system comprises a pile numbering unit, an operational date setting unit, a reference sinking amount setting unit, an average times of hammering setting unit, a stop signal generating unit, a start signal generating unit, a pile sinking displacement measuring unit, a pile perpendicularity detecting unit, a hammering sound detecting unit, a central processing unit, a data printer, a signal display, an informing speaker, a pile perpendicularity display, and a measuring arm for mounting the pile sinking displacement measuring unit and the pile perpendicularity detecting unit. The system of this invention provides an advantage in that it carries out the piling operation without an error, and needs no piling operator for controlling the piling operation, resulting in curtailment of personnel expenditures, efficiently preventing a safety accident, and another advantage in that the results of the piling operation are stored in an electronic circuit which can not be fabricated, and printed by a printer, thereby accomplishing an automatic superintendence for the piling operation. The system of this invention can visually display the perpendicularity of the pile in order to provide an easy and exact observation of the perpendicularity of the pile.
摘要翻译： 用于自动测量打桩作业打桩结果的系统。 该系统包括打桩单元，操作日期设定单元，基准沉降量设定单元，锤击设定单元的平均次数，停止信号生成单元，起始信号生成单元，堆沉位移测量单元，桩 垂直度检测单元，锤击声检测单元，中央处理单元，数据打印机，信号显示器，通知扬声器，桩垂直度显示器以及用于安装桩沉降位移测量单元和桩垂直度检测单元的测量臂 。 本发明的系统具有无错误地执行打桩作业的优点，不需要打桩操作者控制打桩作业，导致人员开支减少，有效地防止安全事故，另一优点在于： 堆积操作的结果存储在不能制造的电子电路中，并且由打印机打印，从而完成打桩操作的自动监督。 本发明的系统可以在视觉上显示桩的垂直度，以提供对桩的垂直度的容易且准确的观察。
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公开(公告)号：US09671312B2
公开(公告)日：2017-06-06
申请号：US14000629
申请日：2011-12-30
申请人： Karsten Klein
发明人： Karsten Klein
IPC分类号： F01D21/00 , F01D21/04 , B24B19/14 , B24B49/04 , G01B11/02 , G01B11/08 , G01B11/14 , G01S17/88 , F01D11/14 , G01B11/27 , G01B21/22 , G01B21/24 , G01B21/26 , G01B7/30 , G01B7/305 , G01B7/31 , G01B7/312 , G01B7/315 , G01M15/14 , F01D5/02 , G01B11/12 , F01D25/00
CPC分类号： G01M15/14 , B24B19/14 , B24B49/04 , F01D5/027 , F01D11/14 , F01D21/003 , F01D21/04 , F01D25/00 , F05D2230/64 , F05D2260/34 , G01B7/30 , G01B7/305 , G01B7/31 , G01B7/312 , G01B7/315 , G01B11/028 , G01B11/08 , G01B11/12 , G01B11/14 , G01B11/27 , G01B11/272 , G01B21/22 , G01B21/24 , G01B21/26 , G01S17/88 , Y10T29/4932
摘要： A method is provided for determining the diameter of a rotor of a turbomachine, rotor being equipped with rotor blades. The method involves setting the rotor with the rotor blade ring in rotation, arranging a clearance measuring device assigned to the rotor blade ring outside the region of the latter, measuring the distance to the rotor blades of the rotor blade ring which are rotating past the clearance measuring device, and using the measured distance for determining the diameter of the rotor. During measuring, the rotational speed is identical to, almost identical to or higher than the setpoint rotational speed of the rotor.
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公开(公告)号：US5121555A
公开(公告)日：1992-06-16
申请号：US622554
申请日：1990-12-05
申请人： Michael A. Jiorle
发明人： Michael A. Jiorle
CPC分类号： G01B7/31 , B23Q17/225 , G01B7/305
摘要： A device and method for quickly aligning a machine tool spindle to the work surface of the machine tool. The device comprises a shank designed to be attached to the machine tool spindle, transducers used to sense the work surface, and indicators used by the operator to calibrate the position. The device can be used to determine and set the proper angle of the machine tool spindle in any two dimensions.
摘要翻译： 一种用于将机床主轴快速对准机床工作面的装置和方法。 该装置包括设计成附接到机床主轴的杆，用于感测工作表面的换能器以及操作者用于校准位置的指示器。 该设备可用于确定和设置机床主轴在任何两个维度上的适当角度。
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公开(公告)号：US4851760A
公开(公告)日：1989-07-25
申请号：US222053
申请日：1988-07-21
申请人： John T. Luebke
发明人： John T. Luebke
摘要： An apparatus for use in measuring the straightness of a tube includes a flat support surface made of electrically insulative material and a plurality of strips of electrically conductive material oriented parallel to one another on the support surface. The strips are substantially uniform in shape and thickness, and a layer of dielectric material covers each of the strips of conductive material. The layers of dielectric material are of uniform thickness along the length of the strips and are adapted to support a tube to be tested for straightness so that a capacitor is formed by each of the strips and the tube. An oscillators is provided for generating pulses each having a pulse width proportional to the capacitance between at least one of the strips and the tube and representative of the size of gap between the at least one strip and the tube. These pulse widths are measured and compared with a preset value representative of a limit pulse width in order to determine the acceptability of the tube straightness. A method of measuring the straightness of a tube by measuring capacitances along the length of the tube as it rolls along a support surface is also disclosed.
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公开(公告)号：US11293547B2
公开(公告)日：2022-04-05
申请号：US15767467
申请日：2016-11-11
发明人： Masashi Ono , Ichiro Tanaka , Kyohei Izumi
摘要： A rotation position detection device includes a change drum, a magnetic field generator, and a magnetic field detector. The magnetic field generator is fixed to the change drum and rotates along with the change drum to differentiate an ambient magnetic field. The magnetic field detector is formed separately from the magnetic field generator and fixed to a position at which a magnetic field changes in response to rotation of the magnetic field generator so as to detect the magnetic field and output a signal that depends on the rotational position of the change drum on the basis of the detection result.
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公开(公告)号：US20180284198A1
公开(公告)日：2018-10-04
申请号：US15766238
申请日：2016-08-22
发明人： Tetsuya MATSUDA , Kazuo YAMAMOTO
摘要： A magnetic field measuring method includes: a first radial-magnetic-field measuring using a magnetic field measuring element placed at an offset position apart from the coil axis, to thereby measure, at the offset position, first radial magnetic fields along an offset axis parallel to the coil axis; a second radial-magnetic-field measuring using the magnetic field measuring element after being rotated by a set angle, to thereby measure, at the offset position, second radial magnetic fields along the offset axis; and a center-position determining determining the inter-coil center position, based on a first radial-magnetic-field characteristic that is a characteristic in a direction of the offset axis of the first radial magnetic fields, and a second radial-magnetic-field characteristic that is a characteristic in the direction of the offset axis of the second radial magnetic fields.
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