公开(公告)号：US10692683B2

公开(公告)日：2020-06-23

申请号：US15702647

申请日：2017-09-12

申请人： Intevac, Inc.

发明人： Kenneth A. Costello ,  Verle W. Aebi ,  Michael Jurkovic ,  Xi Zeng

IPC分类号： H01J29/04 ,  H01J31/48 ,  H01J31/49

摘要： A novel photocathode employing a conduction band barrier is described. Incorporation of a barrier optimizes a trade-off between photoelectron transport efficiency and photoelectron escape probability. The barrier energy is designed to achieve a net increase in photocathode sensitivity over a specific operational temperature range.

公开(公告)号：US10437154B2

公开(公告)日：2019-10-08

申请号：US15789702

申请日：2017-10-20

申请人： ASML NETHERLANDS B.V.

发明人： Andrey Alexandrovich Nikipelov ,  Olav Waldemar Vladimir Frijns ,  Erik Roelof Loopstra ,  Wouter Joep Engelen ,  Johannes Antonius Gerardus Akkermans

IPC分类号： G03B27/42 ,  H01J31/48 ,  G03F7/20 ,  H01S3/09 ,  G01J1/04 ,  G02B1/06 ,  G02B5/20 ,  G21K1/10 ,  G02B26/02 ,  G01J1/26 ,  G01J1/42 ,  H05H7/04 ,  H01S3/00

摘要： A method of patterning lithographic substrates, the method comprising using a free electron laser to generate EUV radiation and delivering the EUV radiation to a lithographic apparatus which projects the EUV radiation onto lithographic substrates, wherein the method further comprises reducing fluctuations in the power of EUV radiation delivered to the lithographic substrates by using a feedback-based control loop to monitor the free electron laser and adjust operation of the free electron laser accordingly.

公开(公告)号：US09035540B2

公开(公告)日：2015-05-19

申请号：US13805094

申请日：2011-06-17

申请人： Gert Nuetzel ,  Pascal Lavoute ,  Richard B. Jackman

发明人： Gert Nuetzel ,  Pascal Lavoute ,  Richard B. Jackman

IPC分类号： H01J43/10 ,  G01T1/24 ,  H01J1/32 ,  H01J29/02 ,  H01J31/48 ,  H01J31/49 ,  H01J31/50 ,  H01J43/22 ,  H01J43/24 ,  H01J43/04 ,  B82Y15/00

CPC分类号： G01T1/247 ,  B82Y15/00 ,  H01J1/32 ,  H01J29/023 ,  H01J31/48 ,  H01J31/49 ,  H01J31/506 ,  H01J43/04 ,  H01J43/22 ,  H01J43/246 ,  H01J2231/5001 ,  H01J2231/50047

摘要： A system for detecting electromagnetic radiation or an ion flow, including an input device for receiving the electronic radiation or the ion flow and emitting primary electrons in response, a multiplier of electrons in transmission, for receiving the primary electrons and emitting secondary electrons in response, and an output device for receiving the secondary electrons and emitting an output signal in response. The electron multiplier includes at least one nanocrystalline diamond layer doped with boron in a concentration of higher than 5·1019 cm−3.

摘要翻译： 一种用于检测电磁辐射或离子流的系统，包括用于接收电子辐射或离子流并响应于发射一次电子的输入装置，传输中的电子的乘数，用于接收一次电子并发出响应的二次电子， 以及输出装置，用于接收二次电子并响应于发射输出信号。 电子倍增器包括至少一个掺杂有浓度高于5×10 19 cm -3的硼的纳米晶体金刚石层。

公开(公告)号：US07227297B2

公开(公告)日：2007-06-05

申请号：US10917309

申请日：2004-08-13

申请人： Triveni Srinivasan-Rao ,  Ilan Ben-Zvi ,  Jorg Kewisch ,  Xiangyun Chang

发明人： Triveni Srinivasan-Rao ,  Ilan Ben-Zvi ,  Jorg Kewisch ,  Xiangyun Chang

IPC分类号： H01J31/48

CPC分类号： H01J3/021 ,  H01J23/06 ,  H01J25/04 ,  H05H15/00

摘要： An electron gun for generating an electron beam is provided, which includes a secondary emitter. The secondary emitter includes a non-contaminating negative-electron-affinity (NEA) material and emitting surface. The gun includes an accelerating region which accelerates the secondaries from the emitting surface. The secondaries are emitted in response to a primary beam generated external to the accelerating region. The accelerating region may include a superconducting radio frequency (RF) cavity, and the gun may be operated in a continuous wave (CW) mode. The secondary emitter includes hydrogenated diamond. A uniform electrically conductive layer is superposed on the emitter to replenish the extracted current, preventing charging of the emitter. An encapsulated secondary emission enhanced cathode device, useful in a superconducting RF cavity, includes a housing for maintaining vacuum, a cathode, e.g., a photocathode, and the non-contaminating NEA secondary emitter with the uniform electrically conductive layer superposed thereon.

摘要翻译： 提供了一种用于产生电子束的电子枪，其包括二次发射器。 二次发射体包括无污染的负电子亲和力（NEA）材料和发射表面。 枪包括从发射表面加速次级的加速区域。 响应于在加速区域外部产生的主波束发射次级。 加速区域可以包括超导射频（RF）腔，并且枪可以以连续波（CW）模式操作。 二次发射体包括氢化金刚石。 均匀的导电层叠加在发射器上以补充提取的电流，防止发射极的充电。 可用于超导RF空腔的封装的二次发射增强型阴极器件包括用于维持真空的壳体，阴极（例如光电阴极）以及其上叠加有均匀导电层的无污染NEA次级发射器。

公开(公告)号：US20060290252A1

公开(公告)日：2006-12-28

申请号：US11455761

申请日：2006-06-20

申请人： Chi-Tsung Lo ,  Tzung-Han Yang ,  Jeng-Maw Chiou ,  Shy-Wen Lai ,  Cheng-Feng Lin ,  Chao-Hsun Lin

发明人： Chi-Tsung Lo ,  Tzung-Han Yang ,  Jeng-Maw Chiou ,  Shy-Wen Lai ,  Cheng-Feng Lin ,  Chao-Hsun Lin

IPC分类号： H01J43/00 ,  H01J31/48

CPC分类号： H01J29/023 ,  H01J29/085 ,  H01J29/467 ,  H01J29/482 ,  H01J2329/00

摘要： The present invention provides an electron amplification plate placed between a first substrate and a second substrate of a field emission display device. The electron amplification plate comprises at least two insulating layers for electrical insulation; and at least one conductive electrode layer having plural apertures, wherein the conductive electrode layer is sandwiched between the insulating layers. The surface of the inner wall of the apertures is coated with an electron-amplifying material for multiplying the quantity of electrons as the surface is impacted. The inner wall of each aperture comprises an upper concave wall and a lower concave wall, and the lower concave wall is used for collecting electrons, and the upper concave wall is used for focusing electrons. Thereby, the electron beam emitted from the emitters can be effectively amplified, and color purity of the field emission display device is high.

公开(公告)号：US20060138928A1

公开(公告)日：2006-06-29

申请号：US10523711

申请日：2004-12-24

申请人： Hoon Kim ,  Jae-Hoon Chung ,  Joon-Hoo Choi ,  Sang-Pil Lee

发明人： Hoon Kim ,  Jae-Hoon Chung ,  Joon-Hoo Choi ,  Sang-Pil Lee

IPC分类号： H01J31/48

CPC分类号： H01L51/5253 ,  H01L27/3244

摘要： A flat panel display apparatus includes a main plate, an organic light emitting element, a protecting layer and an attachable-detachable layer. The organic light emitting element includes a first electrode, a second electrode corresponding to the first electrode, and an organic light emitting layer disposed between the first and second electrodes to generate a light based on a current that flows between the first and second electrodes through the organic light emitting layer. The organic light emitting element is on the main plate. The protecting layer is on the organic light emitting element to protect the organic light emitting element. The attachable-detachable layer is on the protecting layer. Therefore, an image display quality is improved, and a manufacturing cost is decreased.

摘要翻译： 平板显示装置包括主板，有机发光元件，保护层和可安装的可拆卸层。 有机发光元件包括第一电极，对应于第一电极的第二电极和设置在第一和第二电极之间的有机发光层，以基于通过第一电极和第二电极在第一和第二电极之间流动的电流产生光 有机发光层。 有机发光元件在主板上。 保护层在有机发光元件上，以保护有机发光元件。 可拆卸的层位于保护层上。 因此，图像显示质量提高，制造成本降低。

公开(公告)号：US4131820A

公开(公告)日：1978-12-26

申请号：US775939

申请日：1977-03-09

申请人： Hiroshi Washida

发明人： Hiroshi Washida

IPC分类号： H01J29/39 ,  H01J31/36 ,  H01J31/00 ,  B32B5/16 ,  H01J31/26 ,  H01J31/48

CPC分类号： H01J9/233 ,  H01J29/39 ,  H01J31/36 ,  Y10T428/249967 ,  Y10T428/25

摘要： A secondary electron multiplication target for a secondary electron conduction type which comprises a conductive support layer and a secondary electron emitting layer deposited on the support layer. This secondary electron emitting layer is a porous layer consisting of fine particles of a humidity proof substance having higher melting point and electric resistance than MgO, for example, MgF.sub.2. This porous layer consists mainly of primary particles each having an average particle size of scores of angstroms to five hundred angstroms.

摘要翻译： 用于二次电子传导型的二次电子倍增靶，其包括沉积在支撑层上的导电支撑层和二次电子发射层。 该二次电子发射层是由具有比MgO更高的熔点和电阻的耐湿物质的细颗粒，例如MgF 2组成的多孔层。 该多孔层主要由主要颗粒组成，每个颗粒的平均颗粒尺寸分数为埃至五百埃。

公开(公告)号：US4130775A

公开(公告)日：1978-12-19

申请号：US760053

申请日：1977-01-17

申请人： Peter E. Perkins ,  Stephen F. Blazo

发明人： Peter E. Perkins ,  Stephen F. Blazo

IPC分类号： H01J31/18 ,  H01J29/56 ,  H01J29/62 ,  H01J29/80 ,  H01J31/48 ,  H01J31/58

CPC分类号： H01J29/62 ,  H01J31/48

摘要： A cathode ray tube includes first and second electrostatic quadrupole lens between the electron gun and the vertical deflection plates to properly focus the electron beam before it enters the vertical deflection plates. A third electrostatic quadrupole lens is located between the vertical deflection plates and the horizontal deflection plates to enhance the angle of deflection as well as to aid in the proper focus of the electron beam as it moves from the vertical deflection plates into the horizontal deflection plates thereby providing substantially improved vertical sensitivity and scan expansion of the electron beam while maintaining the beam velocity constant. A collimation electrode means follows the horizontal deflection plates and flood gun means and is formed of conductive coatings having specific configurations disposed on the inner surface of the tube envelope thereby controlling the flood electrons to provide a more uniform flood electron beam to minimize landing angle of the flood electrons onto or through storage target means.

摘要翻译： 阴极射线管包括电子枪和垂直偏转板之间的第一和第二静电四极透镜，以便在电子束进入垂直偏转板之前使其适当地聚焦。 第三静电四极透镜位于垂直偏转板和水平偏转板之间，以增强偏转角度，并且当电子束从垂直偏转板移动到水平偏转板中时有助于电子束的适当聚焦，从而 提供显着改善的垂直灵敏度和电子束的扫描扩展，同时保持光束速度恒定。 准直电极装置遵循水平偏转板和喷射装置，并且由具有特定构型的导电涂层形成，该导电涂层设置在管壳的内表面上，从而控制泛洪电子以提供更均匀的泛电子束以最小化 通过存储目标装置将电子电量泛洪。

公开(公告)号：US4023063A

公开(公告)日：1977-05-10

申请号：US461539

申请日：1974-04-17

申请人： Hewson Nicholas Graham King ,  Derek Washington

发明人： Hewson Nicholas Graham King ,  Derek Washington

IPC分类号： H01J1/32 ,  H01J29/18 ,  H01J31/50 ,  H01J43/22 ,  H01J31/48 ,  H01J31/20 ,  H01J39/18

CPC分类号： H01J43/22 ,  H01J31/506

摘要： Electron beam apparatus comprising a channel plate which emits electrons in the form of hollow electron beams, a focusing control electrode for controlling the diameter of the hollow beams and a target having a pattern of concentric areas aligned with each hollow beam, said pattern having at least two different areas which respond differently to electron bombardment and may be selectively bombarded under control of said electrode.

摘要翻译： 电子束装置，包括以中空电子束形式发射电子的通道板，用于控制中空光束直径的聚焦控制电极和具有与每个空心光束对准的同心区域图案的靶，所述图案至少具有 对电子轰击作出不同响应的两个不同的区域，并且可以在所述电极的控制下选择性地轰击。

公开(公告)号：US3811067A

公开(公告)日：1974-05-14

申请号：US25863572

申请日：1972-06-01

申请人： AUTOMATION IND INC

发明人： TURNER W

IPC分类号： G01H3/12 ,  H01J31/495 ,  H01J31/48

CPC分类号： G01H3/125 ,  H01J31/495

摘要： An improved ultrasonic imaging tube having a piezoelectric face plate or conversion plate, a controlling screen adjacent thereto and a collector electrode back of the screen for receiving current generated by the conversion plate. The collector current is utilized to control a video tube synchronized with the ultrasonic tube, and is shunted in feedback fashion to the screen to control terminal admittance thereof and thereby increase the signal to noise ratio of the system as well as to raise the effective signal level.

摘要翻译： 一种改进的超声波成像管，其具有压电面板或转换板，与其相邻的控制屏幕和用于接收由转换板产生的电流的屏幕的集电极背面。 集电极电流用于控制与超声波管同步的视频管，并以反馈方式分流到屏幕以控制终端导纳，从而提高系统的信噪比，并提高有效信号电平 。