Sensing and operation of devices in viscous flow using derived parameters to reduce data-handling requirements

    公开(公告)号:US11526182B2

    公开(公告)日:2022-12-13

    申请号:US16363492

    申请日:2019-03-25

    发明人: Tad Hogg

    摘要: Devices, including robotic devices, operating in viscous fluid flow can use passive sensor data collected to represent fluid parameters at an instant in time to derive information about the flow, the motion and position of the device, and parameters of the physical system constraining the flow. Using quasi-static analysis techniques, and appropriate feature selection for machine learning, very accurate determinations can be made, generally in real time, with very modest computational requirements. These determinations can then be used to map systems, navigate devices through a system, or otherwise control the actions of, e.g., robotic devices for clean-up, leak detection, or other functions.

    LINEAR GAUGE
    3.
    发明申请

    公开(公告)号:US20220122862A1

    公开(公告)日:2022-04-21

    申请号:US17449484

    申请日:2021-09-30

    申请人: DISCO CORPORATION

    IPC分类号: H01L21/67 G01B13/16

    摘要: A linear gauge includes a contact member having a lower tip to be positioned facing a workpiece; an air slider including a cylinder surrounding the contact member with a clearance left between them, and configured to eject air such that the contact member is supported movably in a vertical direction; a scale that detects a height position of the contact member; a casing accommodating therein the contact member, the air slider, and the scale; an evacuation portion formed in an upper portion of the cylinder such that the ejected air is evacuated into the casing; and a communication channel communicating an inlet, which is formed in an upper portion of the contact member, and an outlet, which is formed in the lower tip of the contact member, with each other inside the contact member.

    Systems, methods, and computer-readable media for three-dimensional fluid scanning

    公开(公告)号:US09846032B2

    公开(公告)日:2017-12-19

    申请号:US14113908

    申请日:2012-04-25

    申请人: John William Ladd

    发明人: John William Ladd

    CPC分类号: G01B13/16 B33Y50/00 G01B13/20

    摘要: Systems, methods, for three-dimensional (“3D”) and computer-readable media fluid scanning are provided. According to some embodiments, there is provided a method that may include adding a first predetermined amount of fluid into a container, measuring a first fluid height in the container after the adding the first predetermined amount of fluid, adding a second predetermined amount of fluid into the container when the first predetermined amount of fluid is in the container, measuring a second fluid height in the container after the adding the second predetermined amount of fluid, emptying the fluid from the container.

    Force controlled go/no-go measurement system
    6.
    发明授权
    Force controlled go/no-go measurement system 有权
    强制控制去/测量系统

    公开(公告)号:US08984760B1

    公开(公告)日:2015-03-24

    申请号:US13758801

    申请日:2013-02-04

    CPC分类号: G01B3/50

    摘要: A go/no-go gauge for hole tolerance measurement incorporates a handle, a first pin having a first diameter extending from a first end of the handle and a second pin having a second diameter extending from a second end of the handle. A force measurement element is disposed between the ends of the handle and configured to provide an indication upon exceeding a predetermined force level when attempting to insert one of the pins into a hole.

    摘要翻译: 用于孔公差测量的去/禁止量规包括手柄,具有从手柄的第一端延伸的第一直径的第一销和具有从手柄的第二端延伸的第二直径的第二销。 力测量元件设置在手柄的端部之间并且被配置为当试图将一个销插入孔中时超过预定的力水平时提供指示。

    Optical metrology optimization for repetitive structures
    8.
    发明授权
    Optical metrology optimization for repetitive structures 有权
    重复结构光学计量优化

    公开(公告)号:US07388677B2

    公开(公告)日:2008-06-17

    申请号:US11061303

    申请日:2005-02-18

    摘要: The top-view profiles of repeating structures in a wafer are characterized and parameters to represent variations in the top-view profile of the repeating structures are selected. An optical metrology model is developed that includes the selected top-view profile parameters of the repeating structures. The optimized optical metrology model is used to generate simulated diffraction signals that are compared to measured diffraction signals.

    摘要翻译: 表征晶片中重复结构的顶视图,并且选择表示重复结构的顶视图分布变化的参数。 开发了一种光学测量模型,其包括所选择的重复结构的顶视图轮廓参数。 优化的光学测量模型用于生成与测量的衍射信号进行比较的模拟衍射信号。

    Panel-testing apparatus
    9.
    发明授权
    Panel-testing apparatus 失效
    面板测试仪

    公开(公告)号:US5426862A

    公开(公告)日:1995-06-27

    申请号:US235687

    申请日:1994-04-29

    CPC分类号: G01B7/287 G01B13/16 G01B21/20

    摘要: A panel testing apparatus for measuring the curvature of an inner surface, the thickness of an edge portion, and the thickness of a center portion of the panel comprises a lifting device for accepting and transporting the panel to a testing position, and a panel supporting device for maintaining the panel in a predetermined position during testing. The apparatus comprises a panel inner curvature measuring device, edge thickness measuring device, and a center thickness measuring device, each of which using one or more linear variable differential transformers for the purpose of providing panel measurement data. The apparatus further comprises a studpin leveling device for measuring the burial depth of studpins within the panel and simultaneously leveling the studpins to the same height, and a studpin position measuring device for measuring the horizontal and/or vertical placement of the studpins within the panel, each of which using one or more linear variable differential transformers for the purpose of providing studpin measurement data.

    摘要翻译: 用于测量内表面的曲率,边缘部分的厚度和面板的中心部分的厚度的面板测试装置包括用于接收并将面板运送到测试位置的提升装置,以及面板支撑装置 用于在测试期间将面板保持在预定位置。 该装置包括面板内曲率测量装置,边缘厚度测量装置和中心厚度测量装置,每个测量装置使用一个或多个线性可变差动变压器来提供面板测量数据。 该装置还包括一个支柱平整装置,用于测量面板内的螺柱的埋藏深度并同时将螺柱平整到相同的高度;以及支柱位置测量装置,用于测量工具头在面板内的水平和/或垂直放置, 每个都使用一个或多个线性可变差动变压器,以提供支柱测量数据。

    Precision hole verification system
    10.
    发明授权
    Precision hole verification system 失效
    精密孔验证系统

    公开(公告)号:US3782171A

    公开(公告)日:1974-01-01

    申请号:US3782171D

    申请日:1971-08-19

    申请人: WATT G

    发明人: WATT G

    IPC分类号: G01B13/16 G01B13/10

    CPC分类号: G01B13/16 Y10S33/02

    摘要: A Flexible Membrane Bearing is used as a gage to sense variations in the surface shape of a hole which acts as the bearing bore, the deformation characteristics of the thin cylindrical tube which constitutes the bearing surface being used to amplify the effects of clearance and out of roundness as sensed by the outlet restrictor edge of the bearing. Secondary sensing means are employed to measure membrane deflections with respect to the bearing shaft at selected points behind the bearing surface using bridge type detection means to correlate said deflections with the different modes of deformation which are characteristic of a thin tube supported at the ends. Secondary measurements are in turn correlated with angular position of the bearing and its axial position in the hole. The system comprises the bearing, power and control, sensors, and means for data handling including display, recording, and processing.

    摘要翻译: 柔性膜轴承用作测量作为轴承孔的孔的表面形状的变化,构成轴承表面的薄的圆柱形管的变形特性用于放大间隙的影响并且从 由轴承的出口限制器边缘感测到的圆度。 使用二次感测装置来使用桥式检测装置在轴承表面后面的选定点处测量相对于轴承轴的膜偏转,以使所述偏转与在端部处支撑的细管的特征的不同变形模式相关联。 次级测量又与轴承的角位置及其在孔中的轴向位置相关。 该系统包括轴承,电源和控制,传感器和用于数据处理的装置,包括显示,记录和处理。