公开(公告)号：US11595026B2

公开(公告)日：2023-02-28

申请号：US17243632

申请日：2021-04-29

申请人： Seiko Epson Corporation

发明人： Seiichiro Ogura ,  Keiichi Yamaguchi ,  Masahiro Oshio ,  Takashi Yamazaki

IPC分类号： G01C19/5607 ,  G01C19/5621 ,  H03H9/21 ,  H03H3/02 ,  H03H9/05 ,  H03H3/04 ,  H03H9/10

摘要： A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

公开(公告)号：US20220244051A1

公开(公告)日：2022-08-04

申请号：US17614923

申请日：2020-05-26

申请人： KYOCERA Corporation

发明人： Munetaka SOEJIMA

IPC分类号： G01C19/5607

摘要： A sensor element of an angular velocity sensor includes a piezoelectric body, a plurality of excitation electrodes, and a plurality of detection electrodes. The piezoelectric body includes at least two driving arms and a detection arm. The plurality of excitation electrodes excites the two driving arms in phases that are opposite to each other in an x-axis direction. The plurality of detection electrodes takes out a signal that is produced by vibration of the detection arm in the x-axis direction or a z-axis direction. The piezoelectric body further includes a frame portion, a retention portion that extends outward from the frame portion and that supports the frame portion, and a supporting portion that is connected to a side of the retention portion opposite to the frame portion. The two driving arms and the detection arm extend from the frame portion.

公开(公告)号：US20220236057A1

公开(公告)日：2022-07-28

申请号：US17718418

申请日：2022-04-12

申请人： Seiko Epson Corporation

发明人： Seiichiro OGURA ,  Keiichi YAMAGUCHI ,  Ryuta NISHIZAWA

IPC分类号： G01C19/5642 ,  B60R16/023 ,  G01C19/5656 ,  G01P15/18 ,  G01C19/5607 ,  G01C19/56

摘要： A vibrator device includes a vibrator element, and a support substrate configured to support the vibrator element. The vibrator element includes a drive arm provided with a drive signal electrode and a drive constant-potential electrode, and a detection arm provided with a detection signal electrode and a detection constant-potential electrode. The support substrate includes a base, and a drive signal interconnection electrically coupled to the drive signal electrode, a drive constant-potential interconnection electrically coupled to the drive constant-potential electrode, and a detection signal interconnection electrically coupled to the detection signal electrode all provided to the base, and the drive arm includes a first surface located at the support substrate side, and a second surface located at an opposite side to the first surface. Further, the drive constant-potential electrode is disposed on the first surface, and the drive signal electrode is disposed on the second surface.

公开(公告)号：US10794778B2

公开(公告)日：2020-10-06

申请号：US15839042

申请日：2017-12-12

申请人： Seiko Epson Corporation

发明人： Ryuta Nishizawa ,  Keiji Nakagawa ,  Keiichi Yamaguchi ,  Atsushi Matsuo ,  Fumio Ichikawa

IPC分类号： H01L41/107 ,  G01L1/16 ,  G01L1/10 ,  G01C19/5607 ,  G01C19/5621 ,  G01C19/5614 ,  H01L41/09

摘要： A physical quantity detecting device includes a vibrating element and a charge amplifier. The vibrating element includes a first detection electrode, a second detection electrode, a third detection electrode, and a fourth detection electrode. The first and fourth detection electrodes have the same electrical polarity, the second and third detection electrodes have the same electrical polarity, and the first and second detection electrodes have opposite electrical polarities. The first and fourth detection electrodes are connected to the charge amplifier, and the second and third detection electrodes are connected to the charge amplifier.

公开(公告)号：US10408618B2

公开(公告)日：2019-09-10

申请号：US15416341

申请日：2017-01-26

申请人： Panasonic Intellectual Property Management Co., Ltd.

发明人： Satoshi Ohuchi ,  Hiroyuki Aizawa ,  Jiro Terada ,  Takami Ishida ,  Ichirou Satou ,  Hideo Ohkoshi ,  Yohei Ashimori

IPC分类号： G01C19/56 ,  G01C19/5642 ,  G01C19/5607 ,  G01P15/097 ,  G01P15/18 ,  G01C19/574

摘要： An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.

公开(公告)号：US10393523B2

公开(公告)日：2019-08-27

申请号：US15307859

申请日：2015-06-11

申请人： DENSO CORPORATION

发明人： Kiyomasa Sugimoto ,  Naoki Yoshida ,  Minekazu Sakai ,  Nobuaki Kuzuya

IPC分类号： G01C19/56 ,  G01C19/5607 ,  G01C19/5614 ,  G01C19/5628 ,  G01P21/00 ,  G01C25/00 ,  G01P15/125 ,  G01P15/08

摘要： A physical quantity sensor includes a detection unit outputting a detection signal corresponding to a vibration of a vibrating element in an angular velocity sensor, and a self-diagnostic unit self-diagnosing a detection environment of an acceleration sensor and the angular velocity sensor on a basis of the detection signal outputted by the detection unit.

公开(公告)号：US20190195630A1

公开(公告)日：2019-06-27

申请号：US16232112

申请日：2018-12-26

申请人： SEIKO EPSON CORPORATION

发明人： Masashi SHIMURA ,  Atsushi MATSUO ,  Shinya AOKI ,  Shiro MURAKAMI ,  Ryuta NISHIZAWA

IPC分类号： G01C19/5642 ,  H01L41/09 ,  G01C19/5607 ,  H01L41/047 ,  H03H9/15 ,  H03B5/32

CPC分类号： G01C19/5642 ,  G01C19/5607 ,  H01L41/047 ,  H01L41/09 ,  H03B5/32 ,  H03H9/15

摘要： A vibrator device includes a base, a first relay substrate mounted on the base, a second relay substrate mounted on the first relay substrate, and a vibrator element mounted on the second relay substrate, in which the second relay substrate is disposed between the first relay substrate and the vibrator, and the second relay substrate includes a terminal that is electrically coupled to the vibrator element and is positioned in a region overlapping with the first relay substrate and not overlapping the vibrator element in a plan view.

公开(公告)号：US10199556B2

公开(公告)日：2019-02-05

申请号：US15248791

申请日：2016-08-26

申请人： PIEDEK TECHNICAL LABORATORY

发明人： Hirofumi Kawashima

IPC分类号： H01L41/053 ,  G01C19/5607 ,  G04B17/00 ,  H03B1/04 ,  H03B5/36 ,  H03H9/02 ,  H03H9/05 ,  H03H9/10 ,  H03H9/215

摘要： A quartz crystal resonator unit has an overall length less than 2.1 mm and a base portion having a length less than 0.5 mm and a width less than 0.55 mm, vibrational arms, and mounting arms connected to the base portion through connecting portions. Each vibrational arm has a first vibrational portion including a first width and a first length within a range of 0.32 mm to 0.72 mm and a second vibrational portion including a second width greater than the first width and a second length less than the first length. A groove is formed in at least one main surface of the first vibrational portions of the vibrational arms, a width of the groove being less than 0.07 mm and a distance in the width direction of the groove being less than 0.015 mm. A width of the mounting arms is less than 0.45 mm and a width of the connecting portion is less than 0.41 mm.

公开(公告)号：US10119821B2

公开(公告)日：2018-11-06

申请号：US15058374

申请日：2016-03-02

申请人： Panasonic Intellectual Property Management Co., Ltd.

发明人： Tsuyoshi Fujii ,  Kensaku Yamamoto

IPC分类号： G01C19/56 ,  G01C19/574 ,  G01C19/5719 ,  G01C19/5607 ,  H01L41/113

摘要： A sensor includes a sensor element, defined in an XY plane, including a first member, a second member having a first portion extending from the first member in a positive Y axis direction, a second portion extending from the first portion in a positive X axis direction and a third portion extending from the second portion in a negative Y axis direction, and a third member having a first section and a second section having a rectangular shape in a top view respectively. The first portion, the second portion and the third portion extend along a periphery of the first section in the top view respectively. The second section is connected to the third portion and extends from the first section in a positive Y axis direction. A length of the second member is larger than a length of the third member in a positive X axis direction.

公开(公告)号：US10079590B2

公开(公告)日：2018-09-18

申请号：US14885646

申请日：2015-10-16

申请人： SEIKO EPSON CORPORATION

发明人： Keiji Nakagawa ,  Ryuta Nishizawa ,  Atsushi Matsuo

IPC分类号： H03H9/21 ,  H03H3/02 ,  G01C19/5607

CPC分类号： H03H9/21 ,  G01C19/5607 ,  H03H3/02 ,  H03H2003/026

摘要： A vibrator element includes drive vibrating arms extending from an end of a base section, the drive vibrating arms are each provided with an obverse surface, a reverse surface disposed on an opposite side to the obverse surface, and a side surface connecting the obverse surface and the reverse surface to each other, a tilted section facing toward the obverse surface is disposed at least a part of the side surface, and there are disposed a first drive electrode and a second drive electrode obtained by bisection with an electrode separation section disposed in the tilted section.