公开(公告)号：WO2015148671A1

公开(公告)日：2015-10-01

申请号：PCT/US2015/022498

申请日：2015-03-25

Applicant: KLA-TENCOR CORPORATION

Inventor： CHIMMALGI, Anant ,  YADAV, Rahul ,  SHCHEMELININ, Anatoly ,  BEZEL, Ilya ,  DERSTINE, Matthew

IPC: H01S3/063 ,  G02B6/26

CPC classification number: H01S3/0915 ,  G02B6/2804 ,  G02B6/4296 ,  H01S3/0071 ,  H01S3/2383 ,  H05G2/008

Abstract: A system for generating high power broadband light includes multiple light-sustained plasma light sources. Each one of the light-sustained sources includes a pumping source, a gas containment structure for containing gas and configured to receive pumping illumination from the pumping source and a parabolic reflector element arranged to collect at least a portion of the broadband radiation emitted by the generated plasma and form a collimated broadband radiation output. The system also including a set of optical elements configured to combine the collimated broadband outputs from the parabolic reflector elements of the multiple light-sustained plasma light sources into an aggregated broadband beam.

Abstract translation: 用于产生高功率宽带光的系统包括多个光持续等离子体光源。 光源中的每一个包括泵送源，用于容纳气体并被配置为从泵浦源接收泵浦照明的气体容纳结构和抛物面反射器元件，抛物面反射器元件被布置成收集所产生的宽度辐射的至少一部分 等离子体并形成准直宽带辐射输出。 该系统还包括一组光学元件，其被配置为将来自多个光持久等离子体光源的抛物面反射器元件的准直宽带输出组合成聚集的宽带光束。

公开(公告)号：WO2015168407A1

公开(公告)日：2015-11-05

申请号：PCT/US2015/028517

申请日：2015-04-30

Applicant: KLA-TENCOR CORPORATION

Inventor： WILSON, Lauren ,  CHIMMALGI, Anant ,  PANZER, Matthew ,  BEZEL, Ilya

IPC: H01J61/02

CPC classification number: H01J61/302 ,  H01J61/025 ,  H01J65/04 ,  H05G2/008

Abstract: A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.

Abstract translation: 激光维持等离子体光源包括等离子体灯，其构造成容纳一定体积的气体并且从泵浦激光器接收照明以产生等离子体。 等离子体灯包括对来自泵浦激光器的照明透明的一个或多个透明部分和由等离子体发射的宽带辐射的至少一部分。 一个或多个透明部分由具有高于700ppm的高氢氧化物含量的透明材料形成。

公开(公告)号：WO2017062274A1

公开(公告)日：2017-04-13

申请号：PCT/US2016/054733

申请日：2016-09-30

Applicant: KLA-TENCOR CORPORATION

Inventor： CHIMMALGI, Anant ,  BRUNNER, Rudolf ,  SHCHEMELININ, Anatoly ,  BEZEL, Ilya ,  KIM, Erik ,  PATIL, Rajeev

IPC: H01J65/04

CPC classification number: H05G2/008 ,  G02B6/4204 ,  H01J61/025 ,  H01J61/54 ,  H01J65/04 ,  H01J65/042 ,  H05G2/003

Abstract: An illumination source for igniting and sustaining a plasma in a plasma lamp of a laser-sustained plasma (LSP) broadband source includes one or more ignition lasers configured to ignite the plasma within a gas contained within the plasma lamp. The illumination sources also includes one or more sustaining lasers configured to sustain the plasma. The illumination sources includes a delivery optical fiber one or more optical elements configured to selectively optically couple an output of the one or more ignition lasers and an output of the one or more sustaining lasers to the delivery optical fiber.

Abstract translation: 用于在激光维持等离子体（LSP）宽带源的等离子体灯中点燃和维持等离子体的照明源包括一个或多个点火式激光器，其被配置为点燃等离子体灯内所包含的气体中的等离子体。 照明源还包括配置成维持等离子体的一个或多个维持激光器。 照明源包括输送光纤，一个或多个光学元件被配置为选择性地将一个或多个点火式激光器的输出和一个或多个维持激光器的输出光耦合到输送光纤。

公开(公告)号：WO2015143150A1

公开(公告)日：2015-09-24

申请号：PCT/US2015/021460

申请日：2015-03-19

Applicant: KLA-TENCOR CORPORATION

Inventor： OH, Sebaek ,  CHIMMALGI, Anant ,  YADAV, Rahul ,  DERSTINE, Matthew ,  BEZEL, Ilya

IPC: H01J37/32

CPC classification number: H01J65/00 ,  H01J61/025 ,  H01J61/32 ,  H01J65/04

Abstract: A laser-sustained plasma light source includes a plasma cell configured to contain a volume of gas. The plasma cell is configured to receive illumination from a pump laser in order to generate plasma within the volume of gas. The plasma emits broadband radiation. The plasma cell includes one or more transparent portions being at least partially transparent to at least a portion of illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The plasma cell also includes one or more nanostructured layers disposed on one or more surfaces of the one or more transparent portions of the plasma cell. The one or more nanostructure layers form a region of refractive index control across an interface between the one or more transparent portions of the plasma cell and an atmosphere.

Abstract translation: 激光维持等离子体光源包括被配置为容纳一定体积的气体的等离子体单元。 等离子体单元被配置为从泵浦激光器接收照明，以在气体体积内产生等离子体。 等离子体发射宽带辐射。 等离子体单元包括对来自泵浦激光器的至少一部分照明和由等离子体发射的宽带辐射的至少一部分至少部分透明的一个或多个透明部分。 等离子体单元还包括设置在等离子体单元的一个或多个透明部分的一个或多个表面上的一个或多个纳米结构层。 一个或多个纳米结构层在等离子体电池的一个或多个透明部分和气氛之间的界面上形成折射率控制的区域。

公开(公告)号：WO2014130836A1

公开(公告)日：2014-08-28

申请号：PCT/US2014/017743

申请日：2014-02-21

Applicant: KLA-TENCOR CORPORATION

Inventor： BEZEL, Ilya ,  SHCHEMELININ, Anatoly ,  SALNIK, Alex ,  CHIMMALGI, Anant

IPC: H01J11/18

CPC classification number: H01J61/025 ,  H01J61/33 ,  H01J65/04

Abstract: A laser-sustained plasma illuminator system includes at least one laser light source to provide light. At least one reflector focuses the light from the laser light source at a focal point of the reflector. An enclosure substantially filled with a gas is positioned at or near the focal point of the reflector. The light from the laser light source at least partially sustains a plasma contained in the enclosure. The enclosure has at least one wall with a thickness that is varied to compensate for optical aberrations in the system.

Abstract translation: 激光持续等离子体照明器系统包括至少一个激光源以提供光。 至少一个反射器将来自激光光源的光聚焦在反射器的焦点处。 基本上充满气体的外壳位于反射器的焦点处或附近。 来自激光光源的光至少部分维持包含在外壳中的等离子体。 外壳具有至少一个具有变化的厚度的壁，以补偿系统中的光学像差。

公开(公告)号：WO2017058790A1

公开(公告)日：2017-04-06

申请号：PCT/US2016/053952

申请日：2016-09-27

Applicant: KLA-TENCOR CORPORATION

Inventor： CHIMMALGI, Anant ,  OH, Sebaek ,  WITTENBURG, Joshua ,  WILSON, Lauren ,  YADAV, Rahul ,  BEZEL, Ilya ,  NAVONE, Mike ,  SHCHEMELININ, Anatoly

IPC: H05G2/00 ,  G03F7/20

CPC classification number: H05G2/008 ,  G01N23/04 ,  G02B6/0005 ,  G02B6/0006 ,  G02B6/0008 ,  G02B6/02042 ,  G02B6/028 ,  G02B6/4215 ,  G02B27/141

Abstract: An illumination pump source is disclosed. The illumination pump source includes a set of power sources configured to generate a set of laser beams, with at least some of the set of laser beams configured to include illumination having different wavelengths. The illumination pump source also includes an optical fiber. The illumination pump source also includes one or more optical elements, the one or more optical elements configured to couple the illumination from at least some of the laser beams to one or more regions of the optical fiber.

Abstract translation: 公开了一种照明泵浦源。 照明泵浦源包括被配置为产生一组激光束的一组电源，其中该组激光束中的至少一些被配置为包括具有不同波长的照明。 照明泵浦源还包括光纤。 照明泵浦源还包括一个或多个光学元件，所述一个或多个光学元件被配置为将来自至少一些激光束的照明耦合到光纤的一个或多个区域。

公开(公告)号：WO2015149022A1

公开(公告)日：2015-10-01

申请号：PCT/US2015/023177

申请日：2015-03-27

Applicant: KLA-TENCOR CORPORATION

Inventor： WILSON, Lauren ,  CHIMMALGI, Anant ,  BEZEL, Ilya ,  SHCHEMELININ, Anatoly ,  DERSTINE, Matthew ,  DELGADO, Gildardo

IPC: H01J65/04

CPC classification number: H01J37/32339 ,  H01J37/32449 ,  H01J65/04

Abstract: An open plasma lamp includes a cavity section. A gas input and gas output of the cavity section are arranged to flow gas through the cavity section. The plasma lamp also includes a gas supply assembly fluidically coupled to the gas input of the cavity section and configured to supply gas to an internal volume of the cavity section. The plasma lamp also includes a nozzle assembly fluidically coupled to the gas output of the cavity section. The nozzle assembly and cavity section are arranged such that a volume of the gas receives pumping illumination from a pump source, where a sustained plasma emits broadband radiation. The nozzle assembly is configured to establish a convective gas flow from within the cavity section to a region external to the cavity section such that a portion of the sustained plasma is removed from the cavity section by the gas flow.

Abstract translation: 开放式等离子体灯包括空腔部分。 空腔部分的气体输入和气体输出被布置成使气体流过空腔部分。 等离子体灯还包括气体供应组件，其流体地耦合到空腔部分的气体输入并且被配置为将气体供应到空腔部分的内部容积。 等离子体灯还包括流体耦合到空腔部分的气体输出的喷嘴组件。 喷嘴组件和空腔部分布置成使得一定体积的气体从泵浦源接收泵送照明，其中持续等离子体发射宽带辐射。 喷嘴组件被配置成建立从空腔部分内到空腔部分外部的区域的对流气流，使得通过气流将一部分持续等离子体从空腔部分移除。

公开(公告)号：WO2015142926A1

公开(公告)日：2015-09-24

申请号：PCT/US2015/021070

申请日：2015-03-17

Applicant: KLA-TENCOR CORPORATION

Inventor： CHIMMALGI, Anant ,  YADAV, Rahul ,  WITTENBERG, Joshua

IPC: H05G2/00

CPC classification number: G02B6/0006 ,  G02B6/0008 ,  G02B6/3512 ,  H01J65/04

Abstract: Systems and methods for providing laser sustained plasma light sources are disclosed. Different from conventional laser sustained plasma light sources where one fiber size and one wavelength combination is used in the lamphouse to generate light for different bands and pixel sizes, switchable fiber sizes and wavelength combinations are provided for optimal power output in different wavelength bands and pixel sizes. More specifically, switchable fiber configurations are provided where larger fibers with higher pump powers are used for bigger pixel sizes and higher wavelength bands while smaller fibers are used for smaller pixel size and shorter wavelength bands. Additionally and/or alternatively, pumping schemes are provided where pump wavelengths close to the absorption peak of the gas fill are used for bigger pixel sizes while pump wavelengths away from the gas fill absorption peak are used for smaller pixel sizes.

Abstract translation: 公开了用于提供激光持续等离子体光源的系统和方法。 与传统的激光持续等离子体光源不同，其中在灯塔中使用一个光纤尺寸和一个波长组合来产生用于不同带和像素尺寸的光，可提供可切换的光纤尺寸和波长组合用于在不同波长带和像素尺寸中实现最佳功率输出 。 更具体地说，可提供可切换的光纤配置，其中具有更高的泵浦功率的较大的光纤用于较大的像素尺寸和较高的波长带，而较小的光纤用于较小的像素尺寸和较短的波长带。 附加地和/或替代地，提供泵送方案，其中靠近气体填充物的吸收峰的泵浦波长用于较大的像素尺寸，而远离气体填充吸收峰的泵波长用于较小的像素尺寸。

公开(公告)号：WO2014004679A1

公开(公告)日：2014-01-03

申请号：PCT/US2013/047901

申请日：2013-06-26

Applicant: KLA-TENCOR CORPORATION

Inventor： CHIMMALGI, Anant ,  VORA, Younus ,  BRUNNER, Rudolf

IPC: H01L21/66 ,  H01L29/861

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N2021/8845 ,  G01N2021/95676 ,  G01N2201/0612 ,  G03F7/70483

Abstract: Disclosed are methods and apparatus for performing inspection or metrology of a semiconductor device. The apparatus includes a plurality of laser diode arrays that are configurable to provide an incident beam having different wavelength ranges. The apparatus also includes optics for directing the incident beam towards the sample, a detector for generating an output signal or image based on an output beam emanating from the sample in response to the incident beam, and optics for directing the output beam towards the detector. The apparatus further includes a controller for configuring the laser diode arrays to provide the incident beam at the different wavelength ranges and detecting defects or characterizing a feature of the sample based on the output signal or image.

Abstract translation: 公开了用于执行半导体器件的检查或计量的方法和装置。 该装置包括可配置为提供具有不同波长范围的入射光束的多个激光二极管阵列。 该装置还包括用于将入射光束引向样品的光学器件，用于响应于入射光束而从样品发出的输出光束产生输出信号或图像的检测器，以及用于将输出光束引向检测器的光学器件。 该装置还包括控制器，用于配置激光二极管阵列以提供不同波长范围的入射光束，并基于输出信号或图像检测缺陷或表征样本的特征。

公开(公告)号：WO2013109701A1

公开(公告)日：2013-07-25

申请号：PCT/US2013/021857

申请日：2013-01-17

Applicant: KLA-TENCOR CORPORATION

Inventor： BEZEL, Ilya ,  SHCHEMELININ, Anatoly ,  SHIFRIN, Eugene ,  PANZER, Matthew ,  DERSTINE, Matthew ,  WANG, Jincheng ,  CHIMMALGI, Anant ,  PATIL, Rajeev ,  BRUNNER, Rudolf

IPC: H01J65/04

CPC classification number: F21V9/06 ,  H01J61/125 ,  H01J61/14 ,  H01J61/16 ,  H01J61/20 ,  H01J61/34 ,  H01J61/35 ,  H01J61/40 ,  H01J61/523 ,  H01J65/04

Abstract: A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma, the plasma bulb being substantially transparent to light emanating from a pump laser configured to sustain the plasma within the plasma bulb, wherein the plasma bulb is substantially transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma, and a filter layer disposed on an interior surface of the plasma bulb, the filter layer configured to block a selected spectral region of the illumination emitted by the plasma.

Abstract translation: 用于激光维持等离子体光源的等离子体单元包括配置成容纳适于产生等离子体的气体的等离子体灯泡，该等离子体灯泡对于配置成维持等离子体灯泡内的等离子体的泵浦激光器发出的光基本上是透明的 ，其中所述等离子体灯泡对于由所述等离子体发射的照明的可收集光谱区域的至少一部分基本上是透明的，以及设置在所述等离子体灯泡的内表面上的滤光层，所述滤光层被配置为阻挡所述等离子体灯泡的选定光谱区域 等离子体发射的照明。