公开(公告)号：WO2019076742A1

公开(公告)日：2019-04-25

申请号：PCT/EP2018/077842

申请日：2018-10-12

申请人： TRONIC'S MICROSYSTEMS

发明人： RIBETTO, Luca ,  PETIT, Matthieu ,  COLLET, Joël

IPC分类号： B81C1/00 ,  G04D3/00 ,  G04B13/00

摘要： L'invention concerne un procédé de fabrication (10) d'une pièce micromécanique (11) en silicium comportant les étapes suivantes : - usinage (50) d'une plaque de silicium (12) de sorte à créer une structure micromécanique (13), ladite structure (13) comportant au moins une face de contact (14) destinée à supporter des efforts et au moins une face de positionnement (15) destinée à positionner ladite structure (13); - dépôt (51) d'une couche de nitrure de silicium (16) sur toutes les faces de ladite structure (13); - gravure (52) de ladite couche de nitrure de silicium (16) sur au moins une face de positionnement (15); et - oxydation (53) de ladite au moins une face de positionnement (15) sur les parties dépourvues de nitrure de silicium.

公开(公告)号：WO2019054873A1

公开(公告)日：2019-03-21

申请号：PCT/NL2018/050610

申请日：2018-09-17

申请人： BERKIN B.V.

发明人： ZHAO, Yiyuan ,  VELTKAMP, Henk-Willem ,  ZENG, Yaxiang ,  LOTTERS, Joost Conrad ,  WIEGERINK, Remco John

IPC分类号： B81C1/00

CPC分类号： B81C1/00071 ,  B81B2201/0214 ,  B81B2201/0242 ,  B81B2201/0292 ,  B81B2201/058 ,  B81C2201/0112 ,  B81C2201/014 ,  B81C2201/0181

摘要： The invention relates to a method of fabricating a micro machined channel, comprising the steps of providing a substrate of a first material and having a buried layer of a different material therein, and forming at least two trenches in said substrate by removing at least part of said substrate. Said trenches are provided at a distance from each other and at least partly extend substantially parallel to each other, as well as towards said buried layer. The method comprises the step of forming at least two filled trenches by providing a second material different from said first material and filling said at least two trenches with at least said second material; forming an elongated cavity in between said filled trenches by removing at least part of said substrate extending between said filled trenches; and forming an enclosed channel by providing a layer of material in said cavity and enclosing said cavity.

公开(公告)号：WO2019004933A1

公开(公告)日：2019-01-03

申请号：PCT/SG2018/050299

申请日：2018-06-19

申请人： AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH

发明人： SINGH, Navab ,  ZHANG, Xiaolin ,  CHUNG, Wing Wai

IPC分类号： H04R19/00 ,  H04R19/02 ,  H04R19/04 ,  H04R31/00 ,  B81B3/00 ,  B81C1/00

摘要： Various embodiments may provide an acoustic device. The acoustic device may include a substrate, an electrically conductive first membrane, a first spacer holding the first membrane to form a first acoustic chamber between the substrate and the first membrane. The acoustic device may additionally include an electrically conductive second membrane, a second spacer holding the second membrane to form a second acoustic chamber between the first membrane and the second membrane, and a plurality of electrical pads in electrical connection with the first membrane and the second membrane.

公开(公告)号：WO2018223389A1

公开(公告)日：2018-12-13

申请号：PCT/CN2017/087771

申请日：2017-06-09

申请人： GOERTEK. INC

发明人： ZOU, Quanbo

IPC分类号： B81B7/02 ,  B81C1/00 ,  H04R19/04 ,  H04R31/00

CPC分类号： B81B7/0029 ,  B81B2201/0257 ,  B81B2207/012 ,  H04R19/005 ,  H04R19/04 ,  H04R31/006

摘要： A MEMS microphone, a manufacturing method thereof and an electronic apparatus are disclosed. The MEMS microphone comprises: a MEMS microphone device including a MEMS microphone chip and a mesh membrane (402) monolithically integrated with the MEMS microphone chip; and a housing (411, 412) including an acoustic port (413), wherein the MEMS microphone device is mounted in the housing (411, 412), and the mesh membrane (402) is arranged between the MEMS microphone chip and the acoustic port (413) as a particle filter for the MEMS microphone chip. According to an embodiment, a relatively thin mesh filter can be provided to a MEMS microphone with relatively high reliability.

公开(公告)号：WO2018221753A1

公开(公告)日：2018-12-06

申请号：PCT/KR2017/005569

申请日：2017-05-29

申请人： 한국과학기술원

发明人： 오재섭 ,  강민호 ,  이완규 ,  임성규 ,  김영수 ,  황욱중

IPC分类号： B81B7/02 ,  B81C1/00

CPC分类号： B81B7/02 ,  B81C1/00

摘要： 비정질탄소막을 희생층으로 이용한 멤스 디바이스 및 그 제조 방법이 제공된다. 본 발명의 일 실시예에 따르면, 하부 구조체; 상기 하부 구조체의 상부로 이격되어 배치된 멤스 구조체; 상기 하부 구조체와 상기 멤스 구조체를 전기적으로 연결하는 전기적 연결 구조체; 및 상기 멤스 구조체의 상부로 이격되어 배치되는 플레이트부와 상기 플레이트부로부터 상기 멤스 구조체로 연장되는 비어 연결부를 구비하는 광흡수 구조체;를 포함하는, 멤스 디바이스를 제공한다.

公开(公告)号：WO2018208074A1

公开(公告)日：2018-11-15

申请号：PCT/KR2018/005299

申请日：2018-05-09

申请人： 성낙훈

发明人： 성낙훈

IPC分类号： C25D1/00 ,  C25D1/08 ,  C25D1/20 ,  C25D17/12 ,  B81C1/00

CPC分类号： B81C1/00 ,  C25D1/00 ,  C25D1/08 ,  C25D1/20 ,  C25D17/12

摘要： 본 발명은 도금체의 수직성장을 가능케 하는 수직성장 마스타를 사용하여 수직성장 된 전주가공물의 가공방법과 그 방법으로 만들어진 전주가공물에 대한 것이다. 본 발명의 수직성장 마스타의 상부표면에는 돌출부와 공간부가 형성되어 진다. 상기 공간부에는 비도전성 물질로 충진 또는 코팅 또는 도포를 한다. 상기 충진 또는 코팅 또는 도포된 공간부에는 도금용액이 내부에 갇히어 정체영역을 형성하게 된다. 본 발명의 특징은 공간부에 비도전성 물질을 충진 또는 코팅 또는 도포하여, 공간부에 정체영역이 발생하도록 하는 것을 특징으로 한다. 본 발명의 수직성장 마스타를 통하여 전주가공을 실행하면, 전주가공물은 수평성장은 거의 하지 않고, 수직성장이 되게 하는 것을 특징으로 한다. 전주가공물이 수직성장이 됨에 따라 정체영역도 상부로 함께 상승한다.

公开(公告)号：WO2018203872A1

公开(公告)日：2018-11-08

申请号：PCT/US2017/030374

申请日：2017-05-01

申请人： HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.

发明人： CHEN, Chien-Hua ,  CUMBIE, Michael W.

IPC分类号： B29C64/112 ,  B29C64/209 ,  B41J2/135 ,  B81B1/00 ,  B81C1/00

摘要： Examples include a process comprising forming a molded panel that includes a fluid ejection die molded in the molded panel. The molded panel is formed with a mold chase and a release liner. The mold chase has a fluid slot feature that aligns with fluid feed holes of the fluid ejection die. The mold chase and release liner is released from the molded panel such that the molded panel has a fluid slot formed therethrough corresponding to the fluid slot feature of the mold chase, and the fluid slot is fluidly connected to the fluid feed holes of the fluid ejection die.

公开(公告)号：WO2018202576A1

公开(公告)日：2018-11-08

申请号：PCT/EP2018/060879

申请日：2018-04-27

申请人： LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)

发明人： GODARD, Nicolas ,  SETTE, Daniele ,  GLINSEK, Sebastjan ,  DEFAY, Emmanuel

IPC分类号： C09D11/322 ,  C09D11/38 ,  C09D11/52 ,  B81C1/00 ,  B82Y40/00 ,  H01L41/00

摘要： The invention is directed to an only inkjet-printing-based process for depositing functional materials, preferably PZT, on a substrate, preferably platinized silicon. Substrate templating (via SAMs) and material deposition are both performed by an inkjet printing process. The invention also relates to a composition to be used as a SAM precursor ink which is a thiol in a solvent mixture. The invention further concerns a cartridge for a printing machine with such a composition. The invention also relates to the use of such a cartridge, alone, or as a kit with another cartridge containing a precursor of the functional material, in particular to perform both steps of the printing method. The invention also relates to the product, for instance a microsystem, obtained by the process of the invention.

公开(公告)号：WO2018187782A1

公开(公告)日：2018-10-11

申请号：PCT/US2018/026606

申请日：2018-04-06

申请人： THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS

发明人： ALLAIN, Jean Paul ,  CHANG, Shuquan ,  KOYN, Zachariah ,  CIVANTOS FERNANDEZ, Ana Fatima ,  ARIAS SUAREZ, Sandra, Liliana

IPC分类号： A61L27/34 ,  A61L31/10 ,  B81C1/00 ,  B82Y40/00 ,  B82Y15/00 ,  B82Y30/00 ,  C23C14/22

摘要： Provided herein are methods for the controlled, independent modification of the surface of polymer-based materials and compositions generated thereby. The methods include use of low temperature plasma for surface modification. The methods allow for the alteration of multiple surface characteristics including generation of precise nanostructures, morphology, crystallography and chemical composition for increased biocompatibility, for example, hydrophilicity, steric hindrance, anti-inflammatory properties and/or anti-bacterial properties.

公开(公告)号：WO2018175411A1

公开(公告)日：2018-09-27

申请号：PCT/US2018/023324

申请日：2018-03-20

申请人： NANOCELLECT BIOMEDICAL, INC.

发明人： CHO, Sunghwan ,  MORACHIS, Jose Manuel ,  GAGNE, Ivan ,  SEGIL, Rick ,  ALAYNICK, William Arthur ,  MEI, Zhe ,  PHILLIPS, Sean ,  YANG, Chien-Chun ,  YUN, Dongseob ,  BENCHIMOL, Michael Jerome ,  DOUD, Manna ,  SULLIVAN, Nick ,  ARDILA, Constance

IPC分类号： B01L3/00 ,  B81B5/00 ,  B81B7/00 ,  B81C1/00 ,  B81C3/00

CPC分类号： G01N15/1484 ,  B01L3/502715 ,  G01N15/1425 ,  G01N15/1459 ,  G01N2015/1006 ,  G01N2015/149

摘要： A method includes providing a cartridge and the cartridge includes a slot for receiving a microfluidic chip having a set of first channels. The cartridge also includes a set of second channels and each channel of the set of second channels is coupleable to a different channel of the set of first channels during use with the microfluidic chip. The cartridge also includes an indent configured for engagement and alignment of the cartridge during use. The method also includes inserting the cartridge into a device, such that the cartridge engages a first biasing member of the device configured for alignment of the cartridge in a first direction. The first biasing member is configured to bias movement of the cartridge into locking position with a notch of the device.