MEMS WITH SINGLE USE VALVE AND METHOD OF OPERATION
    1.
    发明申请
    MEMS WITH SINGLE USE VALVE AND METHOD OF OPERATION 审中-公开
    具有单个阀门的MEMS和操作方法

    公开(公告)号:WO2013009839A1

    公开(公告)日:2013-01-17

    申请号:PCT/US2012/046211

    申请日:2012-07-11

    CPC classification number: F16K99/003 F16K99/0044

    Abstract: In one embodiment, a method of opening a passageway to a cavity includes providing a donor portion, forming a heating element adjacent to the donor portion, forming a first sacrificial slab abutting the donor portion, wherein the donor portion and the sacrificial slab are a shrinkable pair, forming a first cavity, a portion of the first cavity bounded by the first sacrificial slab, generating heat with the heating element, forming a first reduced volume slab from the first sacrificial slab using the generated heat and the donor portion, and forming a passageway to the first cavity by forming the first reduced volume slab.

    Abstract translation: 在一个实施例中,将通道打开到空腔的方法包括提供供体部分,形成邻近供体部分的加热元件,形成邻接供体部分的第一牺牲板,其中供体部分和牺牲板是可收缩的 形成第一空腔,由第一牺牲板限定的第一空腔的一部分,用加热元件产生热量,使用产生的热量和供体部分从第一牺牲板形成第一减小体积的板坯,并形成 通过形成第一减小体积的板坯到第一空腔的通道。

    MICROFABRICATED IMPLANTABLE WIRELESS PRESSURE SENSOR FOR USE IN BIOMEDICAL APPLICATIONS AND PRESSURE MEASUREMENT AND SENSOR IMPLANTATION METHODS
    2.
    发明申请
    MICROFABRICATED IMPLANTABLE WIRELESS PRESSURE SENSOR FOR USE IN BIOMEDICAL APPLICATIONS AND PRESSURE MEASUREMENT AND SENSOR IMPLANTATION METHODS 审中-公开
    MICROFABRICATED IMPLANTABLE WIRELESS PRESSURE SENSOR用于生物医学应用和压力测量和传感器植入方法

    公开(公告)号:WO2008027996A3

    公开(公告)日:2008-10-09

    申请号:PCT/US2007077156

    申请日:2007-08-29

    CPC classification number: A61B3/16 A61B5/0031 A61B5/0215 A61B5/03 G01L9/0072

    Abstract: A variable capacitor, a microfabricated implantable pressure sensor including a variable capacitor and an inductor, and related pressure measurement and implantation methods. The inductor may have a fixed or variable inductance. A variable capacitor and pressure sensors include a flexible member that is disposed on a substrate and defines a chamber. Capacitor elements extend indirectly from the flexible member. Sufficient fluidic pressure applied to an exterior surface of the flexible member causes the flexible member to move or deform, thus causing the capacitance and/or inductance to change. Resulting changes in resonant frequency or impedance can be detected to determine pressure, e.g., intraocular pressure.

    Abstract translation: 可变电容器,包括可变电容器和电感器的微制造植入式压力传感器以及相关的压力测量和植入方法。 电感器可能具有固定或可变的电感。 可变电容器和压力传感器包括设置在基板上并限定腔室的柔性构件。 电容器元件从柔性构件间接延伸。 施加到柔性构件的外表面的足够的流体压力导致柔性构件移动或变形,从而导致电容和/或电感改变。 可以检测共振频率或阻抗的结果变化以确定压力,例如眼内压。

    PORTABLE DEVICE WITH TEMPERATURE SENSING
    4.
    发明申请
    PORTABLE DEVICE WITH TEMPERATURE SENSING 审中-公开
    便携式设备,具有温度感应功能

    公开(公告)号:WO2014159583A1

    公开(公告)日:2014-10-02

    申请号:PCT/US2014/024290

    申请日:2014-03-12

    Abstract: In one embodiment, a portable temperature sensing system includes a portable housing configured to be carried by a user, a micro electrical mechanical system (MEMS) thermal sensor assembly supported by the housing and including an array of thermal sensor elements, a memory including program instructions, and a processor operably connected to the memory and to the sensor, and configured to execute the program instructions to obtain signals from each of a selected set of thermal sensor elements of the array of thermal sensor elements, determine an average sensed temperature based upon the signals, and render data associated with the determined average sensed temperature.

    Abstract translation: 在一个实施例中,便携式温度感测系统包括被配置为由用户承载的便携式壳体,由壳体支撑并包括热传感器元件阵列的微机电系统(MEMS)热传感器组件,包括程序指令的存储器 以及处理器,其可操作地连接到所述存储器和所述传感器,并且被配置为执行所述程序指令以从所述热传感器元件阵列的选定组的热传感器元件中的每一个获得信号,基于所述热传感器元件 信号和渲染与确定的平均感测温度相关联的数据。

    MULTI-STACK FILM BOLOMETER
    5.
    发明申请
    MULTI-STACK FILM BOLOMETER 审中-公开
    多层薄膜温度计

    公开(公告)号:WO2014062807A1

    公开(公告)日:2014-04-24

    申请号:PCT/US2013/065250

    申请日:2013-10-16

    Abstract: A semiconductor device includes a substrate, suspension structures extending from the upper surface of the substrate, and an absorber stack attached to the substrate by the suspension structures. The suspension structures suspend the absorber stack over the substrate such that a gap is defined between the absorber stack and the substrate. The absorber stack includes a plurality of metallization layers interleaved with a plurality of insulating layers. At least one of the metallization layers has a thickness of approximately 10nm or less.

    Abstract translation: 半导体器件包括衬底,从衬底的上表面延伸的悬浮结构以及通过悬挂结构附接到衬底的吸收体堆叠。 悬架结构将吸收体堆叠物悬挂在衬底上,使得在吸收体堆叠和衬底之间限定间隙。 吸收体堆叠包括与多个绝缘层交错的多个金属化层。 至少一层金属化层的厚度约为10nm以下。

    MICROFLUIDIC VALVE HAVING FREE-FLOATING MEMBER AND METHOD OF FABRICATION

    公开(公告)号:WO2008022048A3

    公开(公告)日:2008-02-21

    申请号:PCT/US2007/075746

    申请日:2007-08-10

    Abstract: Micro check valves having a free-floating member for controlling flow of fluid in microfluidic and biomedical applications and methods of fabrication. A micro check valve includes a valve seat, a valve cap that contacts the valve seat and an untethered floating member that can move between the valve seat and the valve cap. Certain micro check valves have zero cracking pressure and no reverse leakage. Certain other valves may be configured to permit flow of fluid within a pressure range. The floating member can be solid or define an orifice, and the valve seat can have one or two levels. Valves can be configured to allow fluid to flow when the floating member is pushed by fluid against the valve cap or against the valve seat. The valve seat may be silicon or another material that is compatible with micromachining processes, and the valve cap and the floating member may be a polymer such as Parylene.

    IMPLANTABLE MECHANICAL PRESSURE SENSOR AND METHOD OF MANUFACTURING THE SAME
    7.
    发明申请
    IMPLANTABLE MECHANICAL PRESSURE SENSOR AND METHOD OF MANUFACTURING THE SAME 审中-公开
    可植入机械压力传感器及其制造方法

    公开(公告)号:WO2005121735A2

    公开(公告)日:2005-12-22

    申请号:PCT/US2005/020244

    申请日:2005-06-07

    CPC classification number: A61B3/16 A61B2562/02 A61B2562/028 G01L7/045

    Abstract: A biocompatible, mechanical, micromachined pressure sensor and methods of manufacturing such a pressure sensor are provided. The pressure sensor of the current invention comprises a high-aspect-ratio curved-tube structure fabricated through a one-layer parylene process. The pressure sensor of the current invention requires zero power consumption and indicates the pressure variation by changes of the in situ in-plane motion of the sensor, which can be gauged externally by a direct and convenient optical observation. In one embodiment, the pressure sensor of the current invention has been shown to work as an IOP sensor for eye implantation where the intraocular in-plane motion of the sensor can be recorded from outside of the eye, such that the intraocular pressure in glaucoma patients can be constantly monitored.

    Abstract translation: 提供生物相容的,机械的,微加工的压力传感器以及制造这种压力传感器的方法。 本发明的压力传感器包括通过一层聚对二甲苯工艺制造的高纵横比弯曲管结构。 本发明的压力传感器需要零功率消耗,并且通过传感器的原位面内运动的变化来指示压力变化,其可以通过直接和方便的光学观察在外部测量。 在一个实施例中,本发明的压力传感器已经被证明可用作眼睛植入的IOP传感器,其中可以从眼睛外部记录传感器的眼内平面内运动,使得青光眼患者的眼内压 可以不断监控。

    PIEZOELECTRIC BASED MEMS STRUCTURE
    9.
    发明申请
    PIEZOELECTRIC BASED MEMS STRUCTURE 审中-公开
    基于压电的MEMS结构

    公开(公告)号:WO2013106791A1

    公开(公告)日:2013-07-18

    申请号:PCT/US2013/021335

    申请日:2013-01-12

    Abstract: In one embodiment, a method of deforming a MEMS structure includes providing a base layer (102), providing a first piezoelectric slab (106, 108, 110, 112) operably connected to a surface of the base layer (102), determining a desired deformation of the base layer, applying a first potential to a first electrode operably connected to the first piezoelectric slab, applying a second potential to a second electrode operably connected to the first piezoelectric slab (106, 108, 110, 112), and deforming the base layer (102) with the first piezoelectric slab (106, 108, 110, 112) using the applied first potential and the applied second potential based upon the determined desired deformation.

    Abstract translation: 在一个实施例中,使MEMS结构变形的方法包括提供基层(102),提供可操作地连接到基层(102)的表面的第一压电板(106,108,110,112),确定期望的 基底层的变形,向可操作地连接到第一压电板的第一电极施加第一电位,向可操作地连接到第一压电板(106,108,110,112)的第二电极施加第二电位,并使 基础层(102)与第一压电板(106,108,110,112)一起使用所施加的第一电位和施加的第二电位,基于所确定的期望变形。

    MICROFLUIDIC VALVE HAVING FREE-FLOATING MEMBER AND METHOD OF FABRICATION
    10.
    发明申请
    MICROFLUIDIC VALVE HAVING FREE-FLOATING MEMBER AND METHOD OF FABRICATION 审中-公开
    具有自由浮动部件的微流体阀及其制造方法

    公开(公告)号:WO2008022048A2

    公开(公告)日:2008-02-21

    申请号:PCT/US2007075746

    申请日:2007-08-10

    Abstract: Micro check valves having a free-floating member for controlling flow of fluid in microfluidic and biomedical applications and methods of fabrication. A micro check valve includes a valve seat, a valve cap that contacts the valve seat and an untethered floating member that can move between the valve seat and the valve cap. Certain micro check valves have zero cracking pressure and no reverse leakage. Certain other valves may be configured to permit flow of fluid within a pressure range. The floating member can be solid or define an orifice, and the valve seat can have one or two levels. Valves can be configured to allow fluid to flow when the floating member is pushed by fluid against the valve cap or against the valve seat. The valve seat may be silicon or another material that is compatible with micromachining processes, and the valve cap and the floating member may be a polymer such as Parylene.

    Abstract translation: 微型止回阀具有自由浮动构件,用于控制微流体和生物医学应用中的流体流动和制造方法。 微型止回阀包括阀座,与阀座接触的阀帽以及可在阀座与阀帽之间移动的非系绳浮动构件。 某些微型止回阀具有零开启压力并且没有反向泄漏。 某些其他阀门可以构造成允许流体在压力范围内流动。 浮动构件可以是实心的或限定孔口,并且阀座可以具有一个或两个水平面。 当浮动构件被流体推动抵靠阀帽或抵靠阀座时,阀可被构造成允许流体流动。 阀座可以是硅或与微机械加工工艺兼容的另一种材料,并且阀帽和浮动构件可以是诸如聚对二甲苯的聚合物。

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