MICROFLUIDIC VALVE HAVING FREE-FLOATING MEMBER AND METHOD OF FABRICATION

    公开(公告)号:WO2008022048A3

    公开(公告)日:2008-02-21

    申请号:PCT/US2007/075746

    申请日:2007-08-10

    IPC分类号: F16K15/02

    摘要: Micro check valves having a free-floating member for controlling flow of fluid in microfluidic and biomedical applications and methods of fabrication. A micro check valve includes a valve seat, a valve cap that contacts the valve seat and an untethered floating member that can move between the valve seat and the valve cap. Certain micro check valves have zero cracking pressure and no reverse leakage. Certain other valves may be configured to permit flow of fluid within a pressure range. The floating member can be solid or define an orifice, and the valve seat can have one or two levels. Valves can be configured to allow fluid to flow when the floating member is pushed by fluid against the valve cap or against the valve seat. The valve seat may be silicon or another material that is compatible with micromachining processes, and the valve cap and the floating member may be a polymer such as Parylene.

    METHOD FOR DECREASING CHEMICAL DIFFUSION IN PARYLENE AND TRAPPING AT PARYLENE-TO-PARYLENE INTERFACES
    7.
    发明申请
    METHOD FOR DECREASING CHEMICAL DIFFUSION IN PARYLENE AND TRAPPING AT PARYLENE-TO-PARYLENE INTERFACES 审中-公开
    减少化学扩散的方法,用于连接到亚胺连接物

    公开(公告)号:WO2006116326A3

    公开(公告)日:2007-11-01

    申请号:PCT/US2006015500

    申请日:2006-04-21

    IPC分类号: C23C16/00

    摘要: Systems and methods for improving the adherence of poorly-adherent parylene-to-parylene films or layers and/or altering the water and chemical permeability of the parylene layers. A device having two or more parylene layers is heated in a reduced pressure treatment chamber at a temperature above the deposition temperature of the parylene (e.g., from about room temperature to several hundreds of degrees Celsius) for an extended period of time (e.g., a few hours up to several days). The methods of the present invention have been shown to convert poorly-adherent and/or water-permeable films to optimally-adherent and/or relatively water-impermeable films.

    摘要翻译: 用于改善不良的对二甲苯对聚对二甲苯薄膜或层的粘附性和/或改变聚对二甲苯层的水和化学渗透性的系统和方法。 具有两个或更多个聚对二甲苯层的装置在减压处理室中在高于聚对二甲苯的沉积温度(例如从约室温至几百摄氏度)的温度下加热一段时间(例如, 几个小时到几天)。 已经显示出本发明的方法将不良粘附和/或水渗透膜转化成最佳粘附和/或相对不透水的膜。

    IMPLANTABLE MECHANICAL PRESSURE SENSOR AND METHOD OF MANUFACTURING THE SAME
    10.
    发明申请
    IMPLANTABLE MECHANICAL PRESSURE SENSOR AND METHOD OF MANUFACTURING THE SAME 审中-公开
    可植入机械压力传感器及其制造方法

    公开(公告)号:WO2005121735A2

    公开(公告)日:2005-12-22

    申请号:PCT/US2005/020244

    申请日:2005-06-07

    IPC分类号: G01L7/08

    摘要: A biocompatible, mechanical, micromachined pressure sensor and methods of manufacturing such a pressure sensor are provided. The pressure sensor of the current invention comprises a high-aspect-ratio curved-tube structure fabricated through a one-layer parylene process. The pressure sensor of the current invention requires zero power consumption and indicates the pressure variation by changes of the in situ in-plane motion of the sensor, which can be gauged externally by a direct and convenient optical observation. In one embodiment, the pressure sensor of the current invention has been shown to work as an IOP sensor for eye implantation where the intraocular in-plane motion of the sensor can be recorded from outside of the eye, such that the intraocular pressure in glaucoma patients can be constantly monitored.

    摘要翻译: 提供生物相容的,机械的,微加工的压力传感器以及制造这种压力传感器的方法。 本发明的压力传感器包括通过一层聚对二甲苯工艺制造的高纵横比弯曲管结构。 本发明的压力传感器需要零功率消耗,并且通过传感器的原位面内运动的变化来指示压力变化,其可以通过直接和方便的光学观察在外部测量。 在一个实施例中,本发明的压力传感器已经被证明可用作眼睛植入的IOP传感器,其中可以从眼睛外部记录传感器的眼内平面内运动,使得青光眼患者的眼内压 可以不断监控。