公开(公告)号：WO2006062766A2

公开(公告)日：2006-06-15

申请号：PCT/US2005/043112

申请日：2005-11-29

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC. ,  CUTLER, Donald, R. ,  BAIRD, Brian, W. ,  HARRIS, Richard, S. ,  HEMENWAY, David, M. ,  LO, Ho Wai ,  NILSEN, Brady, E. ,  OSAKO, Yasu ,  SUN, Lei ,  SUN, Yunlong ,  UNRATH, Mark, A.

Inventor： CUTLER, Donald, R. ,  BAIRD, Brian, W. ,  HARRIS, Richard, S. ,  HEMENWAY, David, M. ,  LO, Ho Wai ,  NILSEN, Brady, E. ,  OSAKO, Yasu ,  SUN, Lei ,  SUN, Yunlong ,  UNRATH, Mark, A.

IPC: H01S3/10 ,  H01S3/08

CPC classification number: B23K26/0673 ,  B23K26/0622 ,  B23K26/067 ,  B23K26/082

Abstract: A laser beam switching system (50) employs a laser (52) coupled to a beam switching device (58) that causes a laser beam to switch between first and second beam positioning heads such that while the first beam positioning head (60) is directing the laser beam to process a workpiece target location, the second beam positioning head (62) is moving to another target location and vice versa. A preferred beam switching device includes first and second AOMs. When RF is applied to the first AOM (72), the laser beam is diffracted toward the first beam positioning head, and when RF is applied to the second AOM (74), the laser beam is diffracted toward the second beam positioning head. A workpiece processing system (120) employs a common modular imaged optics assembly (122) and an optional variable beam expander (94) for optically processing multiple laser beams.

Abstract translation: 激光束切换系统（50）采用耦合到光束切换装置（58）的激光器（52），该激光器使激光束在第一和第二光束定位头之间切换，使得当第一 射束定位头（60）引导激光束来处理工件目标位置，第二射束定位头（62）移动到另一个目标位置，反之亦然。 优选的射束切换装置包括第一和第二AOM。 当RF施加到第一AOM（72）时，激光束被朝向第一光束定位头衍射，并且当RF被施加到第二AOM（74）时，激光束被衍射向第二光束定位头。 工件处理系统（120）采用共同的模块化成像光学组件（122）和可选的可变光束扩展器（94），用于光学处理多个激光束。

公开(公告)号：WO2006062766A3

公开(公告)日：2006-10-12

申请号：PCT/US2005043112

申请日：2005-11-29

Applicant: ELECTRO SCIENT IND INC ,  CUTLER DONALD R ,  BAIRD BRIAN W ,  HARRIS RICHARD S ,  HEMENWAY DAVID M ,  LO HO WAI ,  NILSEN BRADY E ,  OSAKO YASU ,  SUN LEI ,  SUN YUNLONG ,  UNRATH MARK A

Inventor： CUTLER DONALD R ,  BAIRD BRIAN W ,  HARRIS RICHARD S ,  HEMENWAY DAVID M ,  LO HO WAI ,  NILSEN BRADY E ,  OSAKO YASU ,  SUN LEI ,  SUN YUNLONG ,  UNRATH MARK A

IPC: H01L21/26

CPC classification number: B23K26/0673 ,  B23K26/0622 ,  B23K26/067 ,  B23K26/082

Abstract: A laser beam switching system (50) employs a laser (52) coupled to a beam switching device (58) that causes a laser beam to switch between first and second beam positioning heads such that while the first beam positioning head (60) is directing the laser beam to process a workpiece target location, the second beam positioning head (62) is moving to another target location and vice versa. A preferred beam switching device includes first and second AOMs. When RF is applied to the first AOM (72), the laser beam is diffracted toward the first beam positioning head, and when RF is applied to the second AOM (74), the laser beam is diffracted toward the second beam positioning head. A workpiece processing system (120) employs a common modular imaged optics assembly (122) and an optional variable beam expander (94) for optically processing multiple laser beams.

Abstract translation: 激光束切换系统（50）采用耦合到光束切换装置（58）的激光器（52），其使激光束在第一和第二光束定位头之间切换，使得当第一光束定位头（60）指向 激光束处理工件目标位置，第二光束定位头（62）移动到另一个目标位置，反之亦然。 优选的光束切换装置包括第一和第二AOM。 当RF施加到第一AOM（72）时，激光束朝向第一光束定位头衍射，并且当RF施加到第二AOM（74）时，激光束被朝向第二光束定位头衍射。 工件处理系统（120）采用公共模块化成像光学组件（122）和用于光学处理多个激光束的可选可变光束扩展器（94）。

公开(公告)号：WO2008014331A3

公开(公告)日：2008-10-23

申请号：PCT/US2007074340

申请日：2007-07-25

Applicant: ELECTRO SCIENT IND INC ,  BAIRD BRIAN W ,  HEMENWAY DAVID M ,  PENG XIOAYUAN ,  REN WENSHENG

Inventor： BAIRD BRIAN W ,  HEMENWAY DAVID M ,  PENG XIOAYUAN ,  REN WENSHENG

IPC: H04B10/17 ,  H01S4/00

CPC classification number: H01S3/2316 ,  B23K26/0622 ,  H01S3/0064 ,  H01S3/0085 ,  H01S3/06758 ,  H01S3/09408 ,  H01S3/0941 ,  H01S3/09415 ,  H01S3/10038 ,  H01S3/2333

Abstract: Embodiments of laser systems advantageously use pulsed optical fiber-based laser source (12) output, the temporal pulse profile of which may be programmed to assume a range of pulse shapes. Pulsed fiber lasers are subject to peak power limits to prevent an onset of undesirable nonlinear effects; therefore, the laser output power of these devices is subsequently amplified in a diode-pumped solid state photonic power amplifier (DPSS-PA) (16). The DPSS PA provides for amplification of the desirable low peak power output of a pulsed fiber master oscillator power amplifier (14) to much higher peak power levels and thereby also effectively increases the available energy per pulse at a specified pulse repetition frequency. The combination of the pulsed fiber master oscillator power amplifier and the diode-pumped solid state power amplifier is referred to as a tandem solid state photonic amplifier (10).

Abstract translation: 激光系统的实施例有利地使用基于脉冲光纤的激光源（12）输出，其时间脉冲分布可被编程为呈现一定范围的脉冲形状。 脉冲光纤激光器受到峰值功率限制，以防止发生不期望的非线性效应; 因此，这些器件的激光输出功率随后在二极管泵浦固态光子功率放大器（DPSS-PA）（16）中放大。 DPSS PA提供将脉冲光纤主振荡器功率放大器（14）的期望的低峰值功率输出放大到更高的峰值功率电平，从而也可以在指定的脉冲重复频率下有效地增加每个脉冲的可用能量。 脉冲光纤主振荡器功率放大器和二极管泵浦固态功率放大器的组合被称为串联固态光子放大器（10）。

公开(公告)号：WO2008014331A2

公开(公告)日：2008-01-31

申请号：PCT/US2007/074340

申请日：2007-07-25

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC. ,  BAIRD, Brian W. ,  HEMENWAY, David M. ,  PENG, Xioayuan ,  REN, Wensheng

Inventor： BAIRD, Brian W. ,  HEMENWAY, David M. ,  PENG, Xioayuan ,  REN, Wensheng

IPC: G02F1/017

CPC classification number: H01S3/2316 ,  B23K26/0622 ,  H01S3/0064 ,  H01S3/0085 ,  H01S3/06758 ,  H01S3/09408 ,  H01S3/0941 ,  H01S3/09415 ,  H01S3/10038 ,  H01S3/2333

Abstract: Embodiments of laser systems advantageously use pulsed optical fiber-based laser source (12) output, the temporal pulse profile of which may be programmed to assume a range of pulse shapes. Pulsed fiber lasers are subject to peak power limits to prevent an onset of undesirable nonlinear effects; therefore, the laser output power of these devices is subsequently amplified in a diode-pumped solid state photonic power amplifier (DPSS-PA) (16). The DPSS PA provides for amplification of the desirable low peak power output of a pulsed fiber master oscillator power amplifier (14) to much higher peak power levels and thereby also effectively increases the available energy per pulse at a specified pulse repetition frequency. The combination of the pulsed fiber master oscillator power amplifier and the diode-pumped solid state power amplifier is referred to as a tandem solid state photonic amplifier (10).

Abstract translation: 激光系统的实施例有利地使用基于脉冲光纤的激光源（12）输出，其时间脉冲轮廓可以被编程以假定一定范围的脉冲形状。 脉冲光纤激光器受到峰值功率限制以防止发生不希望的非线性效应; 因此，这些器件的激光输出功率随后在二极管泵浦固态光子功率放大器（DPSS-PA）（16）中放大。 DPSS PA将脉冲光纤主振荡器功率放大器（14）的期望的低峰值功率输出放大到高得多的峰值功率水平，并由此也在指定的脉冲重复频率下有效地增加每脉冲的可用能量。 脉冲光纤主振荡器功率放大器和二极管泵浦固态功率放大器的组合被称为串联固态光子放大器（10）。

公开(公告)号：WO2007064947A3

公开(公告)日：2007-06-07

申请号：PCT/US2006/046113

申请日：2006-11-30

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC. ,  BOLT, Bryan C. ,  HEMENWAY, David M. ,  KOSMOWSKI, Mark ,  LERNER, A. Grey ,  NILSEN, Brady E. ,  POPE, Richard

Inventor： BOLT, Bryan C. ,  HEMENWAY, David M. ,  KOSMOWSKI, Mark ,  LERNER, A. Grey ,  NILSEN, Brady E. ,  POPE, Richard

IPC: H01S3/10 ,  B23K26/02

Abstract: Preferred embodiments of a purge gas port (74), laser beam attenuating input window (24), and laser shutter (20) constitute subsystems of a UV laser optical system (10) in which a laser beam is completely enclosed to reduce contamination of the optical system components (42, 60, 72). Purge gas is injected through multiple locations in a beam tube assembly (18) to ensure that the optical component surfaces (78) sensitive to contamination are in the flow path of the purge gas. The input window functions as a fixed level attenuator to limit photopolymerization of airborne molecules and particles. Periodically rotating optical elements asymmetrically in their holders (142) reduces burn damage to the optics.

公开(公告)号：WO2007064947A2

公开(公告)日：2007-06-07

申请号：PCT/US2006046113

申请日：2006-11-30

Applicant: ELECTRO SCIENT IND INC ,  BOLT BRYAN C ,  HEMENWAY DAVID M ,  KOSMOWSKI MARK ,  LERNER A GREY ,  NILSEN BRADY E ,  POPE RICHARD

Inventor： BOLT BRYAN C ,  HEMENWAY DAVID M ,  KOSMOWSKI MARK ,  LERNER A GREY ,  NILSEN BRADY E ,  POPE RICHARD

CPC classification number: B23K26/12 ,  B23K26/064 ,  B23K26/0643 ,  B23K26/128 ,  B23K26/14 ,  B23K26/142

Abstract: Preferred embodiments of a purge gas port (74), laser beam attenuating input window (24), and laser shutter (20) constitute subsystems of a UV laser optical system (10) in which a laser beam is completely enclosed to reduce contamination of the optical system components (42, 60, 72). Purge gas is injected through multiple locations in a beam tube assembly (18) to ensure that the optical component surfaces (78) sensitive to contamination are in the flow path of the purge gas. The input window functions as a fixed level attenuator to limit photopolymerization of airborne molecules and particles. Periodically rotating optical elements asymmetrically in their holders (142) reduces burn damage to the optics.

Abstract translation: 净化气体端口（74），激光束衰减输入窗口（24）和激光快门（20）的优选实施例构成UV激光光学系统（10）的子系统，其中激光束被完全封闭以减少 光学系统组件（42,60,72）。 吹扫气体通过束管组件（18）中的多个位置注入以确保对污染敏感的光学部件表面（78）位于吹扫气体的流动路径中。 输入窗口用作固定水平衰减器，以限制空气中分子和颗粒的光聚合作用。 周期性地在它们的保持器（142）中不对称地旋转光学元件减少了对光学器件的烧伤。

公开(公告)号：WO2005006422A1

公开(公告)日：2005-01-20

申请号：PCT/US2004/014013

申请日：2004-05-05

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC ,  SUN, Yunlong ,  NILSEN, Brady, E. ,  HEMENWAY, David, M. ,  SUN, Lei

Inventor： SUN, Yunlong ,  NILSEN, Brady, E. ,  HEMENWAY, David, M. ,  SUN, Lei

IPC: H01L21/268

CPC classification number: B23K26/06

Abstract: A laser (126) and an AOM (10) are pulsed at substantially regular and substantially similar constant high repetition rates to provide working laser outputs (40) with variable noimpingement intervals (50) without sacrificing laser pulse-to-pulse energy stability. When a working laser output (40) is demanded, an RF pulse (38) is applied to the AOM (10) in coincidence with the laser output pulse (24) to transmit the laser pulse to a target. When no working laser output (40) is demanded, an RF pulse (38) is applied to the AOM (10) in noncoincidence with the laser output (24), so that the laser pulse is blocked. Thus, the average thermal loading on the AOM (10) remains substantially constant regardless of how randomly the working laser outputs (40) are demanded. The AOM (10) can also be employed to control the energy of the working laser output (40) by controlling the power of the RF pulse (38) applied. When the RF power is changed, the duration (44) of the RF pulse (38) is modified to maintain the constant average RF power.

Abstract translation: 激光器（126）和AOM（10）以基本上规则和基本上类似的恒定高重复率脉冲，以提供具有可变打击间隔（50）的工作激光输出（40），而不牺牲激光脉冲对脉冲能量的稳定性。 当要求工作的激光输出（40）时，与激光输出脉冲（24）一致地向AOM（10）施加RF脉冲（38），以将激光脉冲传输到目标。 当不需要工作的激光输出（40）时，将RF脉冲（38）以与激光输出（24）不一致的方式施加到AOM（10），使得激光脉冲被阻挡。 因此，无论工作激光输出（40）如何随机地要求，AOM（10）上的平均热负载保持基本恒定。 AOM（10）也可用于通过控制施加的RF脉冲（38）的功率来控制工作激光输出（40）的能量。 当RF功率改变时，改变RF脉冲（38）的持续时间（44）以保持恒定的平均RF功率。