公开(公告)号：WO2012004719A3

公开(公告)日：2012-03-22

申请号：PCT/IB2011052935

申请日：2011-07-04

Applicant: KONINKL PHILIPS ELECTRONICS NV ,  KLUNDER DERK JAN WILFRED ,  NIEWENHUIS JEROEN HANS ,  PRINS MENNO WILLEM JOSE ,  EVERS TOON HENDRIK

Inventor： KLUNDER DERK JAN WILFRED ,  NIEWENHUIS JEROEN HANS ,  PRINS MENNO WILLEM JOSE ,  EVERS TOON HENDRIK

IPC: G01N35/00 ,  B01L3/00 ,  G01N35/10

CPC classification number: G01N1/10 ,  B01L3/0275 ,  B01L3/527 ,  B01L7/52 ,  B01L2200/04 ,  B01L2200/0684 ,  B01L2200/16 ,  B01L2300/027 ,  B01L2300/044 ,  B01L2300/0627 ,  B01L2300/0654 ,  B01L2300/087 ,  B01L2400/043 ,  G01N35/00029 ,  G01N35/0098 ,  G01N35/1002 ,  G01N2035/00158 ,  G01N2035/0436 ,  Y10T436/2575

Abstract: The invention relates to a method and a system (100) for selectively processing a sample (130) according to one of a plurality of different assays, for example for detecting a certain target component in the sample. The system comprises a plurality of "specific reagent reservoirs" (120) that contain different sets of reagents, wherein each set is required for one of the assays. Moreover, the system (100) comprises a "universal reagent reservoir" in which reagents for several assays are provided, preferably reagents for all assays. The universal reagent reservoir may preferably be a cartridge (110) in which the processing of a sample (130) can take place and which comprises a plurality of binding sites that are selective for different target components. Depending on the assay to be performed with a sample (130) at hand, the appropriate specific reagent reservoir (121b) is chosen and processed in the universal cartridge (110). This can particularly be done by a manipulator (140) in a high-throughput automated laboratory system.

Abstract translation: 本发明涉及用于根据多种不同测定中的一种选择性处理样品（130）的方法和系统（100），例如用于检测样品中某一目标成分。 该系统包括多个含有不同试剂组的“特异性试剂储存器”（120），其中每种试剂均需要每组。 此外，系统（100）包括“通用试剂储库”，其中提供用于几种测定的试剂，优选用于所有测定的试剂。 通用试剂储存器可以优选地是其中样品（130）的处理可以发生并且包括对不同目标组分是选择性的多个结合位点的盒（110）。 根据将要用手的样品（130）进行的测定，在通用盒（110）中选择并处理适当的特定试剂储存器（121b）。 这可以通过高通量自动化实验室系统中的机械手（140）来进行。

公开(公告)号：WO2008072962A3

公开(公告)日：2008-10-16

申请号：PCT/NL2007050645

申请日：2007-12-13

Applicant: ASML NETHERLANDS BV ,  VAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS ,  BANINE VADIM YEVGENYEVICH ,  IVANOV VLADIMIR VITALEVITCH ,  KOSHELEV KONSTANTIN NIKOLAEVITCH ,  KLUNDER DERK JAN WILFRED

Inventor： VAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS ,  BANINE VADIM YEVGENYEVICH ,  IVANOV VLADIMIR VITALEVITCH ,  KOSHELEV KONSTANTIN NIKOLAEVITCH ,  KLUNDER DERK JAN WILFRED

IPC: H05G2/00 ,  G03F7/20

CPC classification number: H05G2/003 ,  B82Y10/00 ,  G03F7/70033 ,  H05G2/005

Abstract: The invention relates to a radiation system for generating electromagnetic radiation. The radiation system includes a pair of electrodes (5) constructed and arranged to generate plasma of a first substance and a pinch (10) in the plasma. The radiation system also includes a plasma recombination surface (13) that is arranged proximate to the pinch, and is configured to neutralize a plurality of plasma particles.

Abstract translation: 本发明涉及一种用于产生电磁辐射的辐射系统。 辐射系统包括一对电极（5），其构造和布置成在等离子体中产生第一物质和夹点（10）的等离子体。 辐射系统还包括等离子体复合表面（13），该等离子体复合表面（13）被布置成靠近夹点，并且被配置为中和多个等离子体颗粒。

公开(公告)号：WO2008039068A2

公开(公告)日：2008-04-03

申请号：PCT/NL2007/050466

申请日：2007-09-25

Applicant: ASML NETHERLANDS B.V. ,  KONINKLIJKE PHILIPS ELECTRONICS N.V. ,  VAN HERPEN, Maarten Marinus Johannes Wilhelmus ,  BANINE, Vadim Yevgenyevich ,  FRANKEN, Johannes Christiaan Leonardus ,  FRIJNS, Olav Waldemar Vladimir ,  KLUNDER, Derk Jan Wilfred ,  DRIESSEN, Niels Machiel ,  SOER, Wouter Anthon

Inventor： VAN HERPEN, Maarten Marinus Johannes Wilhelmus ,  BANINE, Vadim Yevgenyevich ,  FRANKEN, Johannes Christiaan Leonardus ,  FRIJNS, Olav Waldemar Vladimir ,  KLUNDER, Derk Jan Wilfred ,  DRIESSEN, Niels Machiel ,  SOER, Wouter Anthon

IPC: G03F7/20

CPC classification number: G03F7/70916 ,  G01N21/15 ,  G03F7/70558

Abstract: An optical sensor apparatus for use in an extreme ultraviolet lithographic system is disclosed. The apparatus includes an optical sensor comprising a sensor surface and a removal mechanism configured to remove debris from the sensor surface. Accordingly, dose and/or contamination measurements may be carried out conveniently for the lithographic system.

Abstract translation: 公开了一种用于极紫外光刻系统的光学传感器装置。 该装置包括光学传感器，其包括传感器表面和被配置为从传感器表面去除碎屑的去除机构。 因此，可以方便地为光刻系统执行剂量和/或污染测量。

公开(公告)号：WO2008002134A3

公开(公告)日：2008-03-13

申请号：PCT/NL2007050308

申请日：2007-06-27

Applicant: ASML NETHERLANDS BV ,  VAN HERPEN MAARTEN MARINUS JOH ,  KLUNDER DERK JAN WILFRED

Inventor： VAN HERPEN MAARTEN MARINUS JOH ,  KLUNDER DERK JAN WILFRED

IPC: G03F7/20 ,  B08B7/00

CPC classification number: G03F7/70925 ,  B08B7/00

Abstract: A Gleaning arrangement (250) is provided for use in an EUV lithographic apparatus, for example an EUV lithographic apparatus with a Sn source. The cleaning arrangement includes a gas source (700) for a hydrogen containing gas (100) and a hydrogen radical source (103). The hydrogen radical source is a source of (UV) radiation which induces photo dissociation of the hydrogen. Radicals (96) may reduce Sn oxides (if present) and may form volatile hydrides of Sn deposition (203) and/or carbon deposition (203). In this way the cleaning arrangement can be used to clean optical elements (201) from Sn and/or C deposition. The EUV source may be used as hydrogen radical source (103). An optical filter is used to remove undesired EUV radiation and transmit desired UV radiation.

Abstract translation: 提供清洗装置（250）用于EUV光刻设备，例如具有Sn源的EUV光刻设备。 清洁装置包括用于含氢气体（100）和氢根源（103）的气体源（700）。 氢自由基源是（UV）辐射源，其诱导氢的光解离。 自由基（96）可以减少Sn氧化物（如果存在），并且可以形成Sn沉积（203）和/或碳沉积（203）的挥发性氢化物。 以这种方式，清洁装置可用于从Sn和/或C沉积物清洁光学元件（201）。 EUV源可以用作氢源（103）。 使用滤光器去除不期望的EUV辐射并传输所需的UV辐射。

公开(公告)号：WO2006103612A2

公开(公告)日：2006-10-05

申请号：PCT/IB2006/050917

申请日：2006-03-27

Applicant: KONINKLIJKE PHILIPS ELECTRONICS N. V. ,  BALISTRERI, Marcello ,  KLUNDER, Derk, Jan, Wilfred ,  VAN HERPEN, Maarten

Inventor： BALISTRERI, Marcello ,  KLUNDER, Derk, Jan, Wilfred ,  VAN HERPEN, Maarten

CPC classification number: G01N21/645 ,  G02B27/0037 ,  G02B27/4205 ,  G02B27/4277

Abstract: The invention relates to an optical system that particularly allows an improved detection of signal light propagating from a light source (1) through a flat glass substrate (11). SC-modes of this signal light that would normally be totally internally reflected at the backside (10) of the substrate (11) are coupled out by a first diffractive optical element DOE (21). To map all signal light leaving the substrate (11) onto a single target location (51), a focusing lens (31) and a second DOE (41) are disposed in the optical path behind the substrate (11). The DOEs (21, 41) may for example be a ID sinusoidal grating or a 2D blaze grating. The optical system may particularly be applied in an investigation apparatus for detecting multiple spots of a fluorescent sample material.

Abstract translation: 本发明涉及一种特别允许改进从光源（1）通过平板玻璃基板（11）传播的信号光的检测的光学系统。 通常在基板（11）的背面（10）处内部反射的该信号光的SC模式由第一衍射光学元件DOE（21）耦合出来。 为了将离开基板（11）的所有信号光映射到单个目标位置（51）上，在基板（11）后面的光路中设置聚焦透镜（31）和第二DOE（41）。 DOE（21,41）可以例如是ID正弦光栅或2D火焰光栅。 光学系统可以特别应用于用于检测荧光样品材料的多个点的检查装置中。

公开(公告)号：WO2003069388A3

公开(公告)日：2003-08-21

申请号：PCT/NL2002/000697

申请日：2002-11-03

Applicant: LIGHTWAVE DEVICES GROUP ,  KLUNDER, Derk, Jan, Wilfred ,  ROELOFFZEN, Chris, Gerardus, Hermanus ,  DRIESSEN, Alfred

Inventor： KLUNDER, Derk, Jan, Wilfred ,  ROELOFFZEN, Chris, Gerardus, Hermanus ,  DRIESSEN, Alfred

IPC: G02B6/293

Abstract: A method for the processing of light, comprising the steps of: A. separating a first light current (41) by means of a first processing means (21) in: - a second light current (42) comprising a first signal (11) falling within a first wavelength band with a first direction of polarisation, and; - a third light current (43) comprising a second signal (12) falling within the first wavelength band with a second direction of polarisation, this second direction of polarisation being perpendicular to the first direction of polarisation; B. conversion of the third light (43) current by means of a first polarisation rotating means (31) in a fourth light current (44) whereby the second signal (12) is converted in a third signal (13) falling within the first wavelength band with a direction of polarisation equal to the first direction of polarisation, and; C. separating the fourth light current (44) by means of a second processing means (22) in: - a fifth light current (45) comprising a fourth signal (14) falling within the first wavelength band with a direction of polarisation equal to the first direction of polarisation, and; - a sixth light current (46), whereby at least one of the processing means (21, 22) comprises a resonator, preferably a ring resonator. Furthermore the invention provides a device for the processing of light according to such method.

公开(公告)号：WO2012147021A1

公开(公告)日：2012-11-01

申请号：PCT/IB2012/052028

申请日：2012-04-23

Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V. ,  EVERS, Toon Hendrik ,  KLUNDER, Derk Jan Wilfred ,  NIEUWENHUIS, Jeroen Hans ,  VAN ZON, Joannes Baptist Adrianus Dionisius

Inventor： EVERS, Toon Hendrik ,  KLUNDER, Derk Jan Wilfred ,  NIEUWENHUIS, Jeroen Hans ,  VAN ZON, Joannes Baptist Adrianus Dionisius

IPC: G01N21/27 ,  G01N21/55 ,  G01N21/88 ,  G06T7/00

CPC classification number: G01N21/00 ,  G01N21/552 ,  G01N21/8851 ,  G01N21/94 ,  G01N2021/157 ,  G06T7/0012 ,  G06T2207/30072 ,  G06T2207/30168

Abstract: The invention relates to a method and a sensor device(100) for evaluating an assay with a sample. During the assay, optical measurements are made at a sensing surface(112), and at least one "homogeneity-image" of the sensing surface(112) is generated. From this image, an "homogeneity-indicator" is determined for at least one region of interest, and the optical measurements are then evaluated in dependence on said indicator. The homogeneity-indicator may for example be a binary value which indicates if an inhomogeneity was detected or not. If an inhomogeneity was detected, all optical measurements may be rejected, only measurements for the involved region of interest may be rejected, or measurements for a selected sub-area of the involved region of interest(ROI) may be rejected.

Abstract translation: 本发明涉及用于评价样品的测定方法和传感器装置（100）。 在测定期间，在感测表面（112）处进行光学测量，并且产生感测表面（112）的至少一个“均匀性图像”。 从该图像中，对于至少一个感兴趣的区域确定“均匀性指示符”，然后根据所述指示符来评估光学测量。 均匀度指示符可以例如是二进制值，其指示是否检测到不均匀性。 如果检测到不均匀性，则所有光学测量可能被拒绝，只有感兴趣区域的测量可能被拒绝，或者所涉及的感兴趣区域（ROI）的选定子区域的测量可能被拒绝。

公开(公告)号：WO2012117332A1

公开(公告)日：2012-09-07

申请号：PCT/IB2012/050892

申请日：2012-02-27

Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V. ,  VAN ZON, Joannes, Baptist, Adrianus, Dionisius ,  EVERS, Toon, Hendrik ,  VAN LIESHOUT, Ron, Martinus, Laurentius ,  HARDEMAN, Wilhelmina, Maria ,  KLUNDER, Derk, Jan, Wilfred

Inventor： VAN ZON, Joannes, Baptist, Adrianus, Dionisius ,  EVERS, Toon, Hendrik ,  VAN LIESHOUT, Ron, Martinus, Laurentius ,  HARDEMAN, Wilhelmina, Maria ,  KLUNDER, Derk, Jan, Wilfred

IPC: G01N27/14 ,  G01N33/543 ,  G01N21/65 ,  G01N21/55

CPC classification number: G01N33/54326 ,  G01N21/552 ,  G01N21/648 ,  G01N21/7703 ,  G01N27/745

Abstract: The invention relates to a substance determining apparatus (19) for determining a substance within a fluid. A location event determination unit (34) determines location events indicating that a particle, which may have attached the substance, is located in a sensing region and a property of the location events from the sensing signal generated by sensing the sensing region. A location events selection unit (70) selects a part of the location events having a property in a predefined property range, and a substance determination unit (40) determines the substance within the fluid (3) based on the selected part of the location events. This allows tuning the determination of the substance within the fluid to a desired property range, which can relate to a desired kind of bound particles, thereby reducing the influence of unwanted effects on the determination of the substance and, thus, improving the determination accuracy.

Abstract translation: 本发明涉及一种用于确定流体内物质的物质确定装置（19）。 位置事件确定单元（34）确定指示可以附着物质的粒子位于感测区域中的位置事件和来自通过感测感测区域产生的感测信号的位置事件的特性。 位置事件选择单元（70）选择具有预定属性范围的属性的位置事件的一部分，物质确定单元（40）基于所选择的位置事件部分来确定流体（3）内的物质 。 这允许将流体内的物质的测定调整到期望的特性范围，这可以涉及期望类型的结合颗粒，从而减少不期望的影响对物质的测定的影响，从而提高确定精度。

公开(公告)号：WO2011073867A1

公开(公告)日：2011-06-23

申请号：PCT/IB2010/055723

申请日：2010-12-10

Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V. ,  KAHLMAN, Josephus Arnoldus Henricus Maria ,  VAN ZON, Joannes Baptist Adrianus Dionisius ,  SCHLEIPEN, Johannes Joseph Hubertina Barbara ,  KLUNDER, Derk Jan Wilfred ,  EVERS, Toon Hendrik ,  VAN LIESHOUT, Ron Martinus Laurentius

Inventor： KAHLMAN, Josephus Arnoldus Henricus Maria ,  VAN ZON, Joannes Baptist Adrianus Dionisius ,  SCHLEIPEN, Johannes Joseph Hubertina Barbara ,  KLUNDER, Derk Jan Wilfred ,  EVERS, Toon Hendrik ,  VAN LIESHOUT, Ron Martinus Laurentius

IPC: G01N21/86

CPC classification number: B01L3/5027 ,  B01L2200/0605 ,  B01L2300/0636 ,  B01L2300/0681 ,  B01L2300/0816 ,  B01L2400/0406 ,  G01N21/552 ,  G01N21/8483 ,  G01N33/54373

Abstract: The invention relates to a substance determining apparatus for determining a substance within a fluid. Particles attach the substance and bind to a binding surface (30), wherein a sensing signal is generated depending on the bound particles. Binding events indicating a binding of a particle on the binding surface (30) are determined from the generated sensing signal, and the substance within the fluid is determined based on the determined binding events. During a procedure of determining a substance within a fluid, particles may bind to the binding surface and may leave the binding surface. Therefore, during this procedure a number of binding events can be determined being much larger than the number of bound particles. The determination of the substance within the fluid can therefore be based on a very large amount of data, thereby increasing the accuracy of determining the substance within the fluid.

Abstract translation: 本发明涉及一种用于确定流体内物质的物质确定装置。 颗粒附着物质并结合到结合表面（30），其中根据结合的颗粒产生感测信号。 根据产生的感测信号确定指示结合表面（30）上的颗粒结合的结合事件，并且基于所确定的结合事件确定流体内的物质。 在确定流体内的物质的过程中，颗粒可能结合到结合表面并且可能离开结合表面。 因此，在此过程中，可以确定许多结合事件比结合粒子的数量大得多。 因此，流体内的物质的测定可以基于非常大量的数据，从而提高确定流体内物质的准确性。

公开(公告)号：WO2008072959A3

公开(公告)日：2008-06-19

申请号：PCT/NL2007/050598

申请日：2007-11-27

Applicant: ASML NETHERLANDS B.V. ,  WASSINK, Arnoud Cornelis ,  BANINE, Vadim Yevgenyevich ,  IVANOV, Vladimir Vitalevitch ,  KOSHELEV, Konstantin Nikolaevitch ,  CADEE, Theodorus Petrus Maria ,  KRIVTSUN, Vladimir Mihailovitch ,  KLUNDER, Derk Jan Wilfred ,  VAN HERPEN, Maarten Marinus Johannes Wilhelmus ,  BROM, Paul Peter Anna Antonius ,  SOER, Wouter Anthon ,  GLUSHKOV, Denis

Inventor： WASSINK, Arnoud Cornelis ,  BANINE, Vadim Yevgenyevich ,  IVANOV, Vladimir Vitalevitch ,  KOSHELEV, Konstantin Nikolaevitch ,  CADEE, Theodorus Petrus Maria ,  KRIVTSUN, Vladimir Mihailovitch ,  KLUNDER, Derk Jan Wilfred ,  VAN HERPEN, Maarten Marinus Johannes Wilhelmus ,  BROM, Paul Peter Anna Antonius ,  SOER, Wouter Anthon ,  GLUSHKOV, Denis

IPC: G03F7/20 ,  H05G2/00 ,  G21K1/00

Abstract: A radiation system (1) for generating a beam of radiation (2) that defines an optical axis (3) is provided. The radiation system (1) includes a plasma produced discharge source (4) for generating EUV radiation. The discharge source (4) includes a pair of electrodes (5) constructed and arranged to be provided with a voltage difference, and a system for producing a plasma between the pair of electrodes (5) so as to provide a discharge (7) in the plasma between the electrodes (5). The radiation system (1) also includes a debris catching shield (11) for catching debris (8) from the electrodes (5). The debris catching shield (11) is constructed and arranged to shield the electrodes (5) from a line of sight provided in a predetermined spherical angle relative the optical axis (3), and to provide an aperture (12) to a central area (10) between the electrodes (5) in the line of sight.