公开(公告)号：WO0233458A3

公开(公告)日：2003-08-14

申请号：PCT/US0132512

申请日：2001-10-17

Applicant: AXSUN TECH INC ,  MILLER MICHAEL F ,  LE MINH VAN ,  COOK CHRISTOPHER C ,  FLANDERS DALE C ,  NAGLE STEVEN F

Inventor： MILLER MICHAEL F ,  LE MINH VAN ,  COOK CHRISTOPHER C ,  FLANDERS DALE C ,  NAGLE STEVEN F

IPC: B81B3/00 ,  G02B26/00 ,  G02B1/10

CPC classification number: B81B3/0083 ,  B81B2201/042 ,  B81B2201/047 ,  B81C1/0038 ,  B81C2201/0159 ,  B81C2201/053 ,  B81C2201/056 ,  G02B26/001

Abstract: A process for patterning dielectric layers of the type typically found in optical coatings in the context of MEMS manufacturing is disclosed. A dielectric coating is deposited over a device layer, which has or will be released, and patterned using a mask layer. In one example, the coating is etched using the mask layer as a protection layer. In another example, a lift-off process is shown. The primary advantage of photolithographic patterning of the dielectric layers in optical MEMS devices is that higher levels of consistency can be achieved in fabrication, such as size, location, and residual material stress.

Abstract translation: 公开了一种用于在MEMS制造的上下文中通常在光学涂层中发现的类型的介电层图案的工艺。 电介质涂层沉积在器件层上，器件层已经或将被释放，并使用掩模层进行图案化。 在一个实例中，使用掩模层作为保护层来蚀刻涂层。 在另一示例中，示出了剥离过程。 光学MEMS器件中电介质层的光刻图案的主要优点是可以在诸如尺寸，位置和残余材料应力的制造中实现更高水平的稠度。

公开(公告)号：WO0167171A3

公开(公告)日：2002-03-14

申请号：PCT/US0106577

申请日：2001-03-01

Applicant: AXSUN TECH INC ,  FLANDERS DALE C ,  WHITNEY PETER S ,  MILLER MICHAEL F

Inventor： FLANDERS DALE C ,  WHITNEY PETER S ,  MILLER MICHAEL F

IPC: G01J3/26 ,  G02B7/188 ,  G02B26/00 ,  G02B26/02

CPC classification number: G02B26/02 ,  G01J3/26 ,  G02B7/188 ,  G02B26/00 ,  G02B26/001

Abstract: A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. Voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.

Abstract translation: 可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。 光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。 跨过静电腔施加到电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。 具有可移动膜的过滤器可以通过微结构的光刻和制造工艺由集成器件结构中的半导体材料形成。 膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。 图案可以是直的或径向的系绳将内膜与外体连接。 或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。

公开(公告)号：WO2009099733A1

公开(公告)日：2009-08-13

申请号：PCT/US2009/031060

申请日：2009-01-15

Applicant: BIOSCALE, INC. ,  MASTERS, Brett, P. ,  FALB, Peter, W. ,  MILLER, Michael, F.

Inventor： MASTERS, Brett, P. ,  FALB, Peter, W. ,  MILLER, Michael, F.

IPC: B01L3/00 ,  G01N29/02

CPC classification number: G01N29/222 ,  B01L3/502707 ,  B01L3/502746 ,  B01L2200/027 ,  B01L2200/0668 ,  B01L2300/0627 ,  B01L2300/0877 ,  B01L2400/0487 ,  B01L2400/084 ,  G01N29/022 ,  G01N2291/014 ,  G01N2291/0423 ,  G01N2291/0427 ,  Y10T137/2082 ,  Y10T137/2191 ,  Y10T137/2224

Abstract: The invention relates to a fluidic system (200) that includes a body structure having a chamber (264) disposed therein. The fluidic system (200) includes at least one fluid input (268) at a first end (276) of the chamber (264) and at least one fluid output (274) at a second end ( (280) of the chamber (264). The fluidic system also includes a sensor device (260) (e.g., an acoustic device) having a surface (284) defining a portion of a surface of the chamber (264). The fluidic system (200) also includes a first surface (222a) at the first end (276) of the chamber (264) oriented at an oblique or arcuate (e.g., curved) angle relative to the surface (284) of the sensor device (260) to direct fluid through the chamber (264).

Abstract translation: 本发明涉及一种流体系统（200），其包括具有设置在其中的室（264）的主体结构。 流体系统（200）包括在腔室（264）的第一端（276）处的至少一个流体输入（268）和在腔室（264）的第二端（280）处的至少一个流体输出（274） 流体系统还包括具有限定腔室（264）表面的一部分的表面（284）的传感器装置（例如，声学装置），流体系统（200）还包括第一表面 （260）的表面（284）以倾斜或弓形（例如，弯曲）的角度定向的腔室（264）的第一端（276）处的导管（222a），以引导流体通过腔室 ）。

公开(公告)号：WO2007021907A3

公开(公告)日：2009-04-16

申请号：PCT/US2006031329

申请日：2006-08-10

Applicant: BIOSCALE INC ,  MASTERS BRETT P ,  MILLER MICHAEL F

Inventor： MASTERS BRETT P ,  MILLER MICHAEL F

IPC: G01N15/06 ,  G01N11/10 ,  G01N29/00 ,  G01N29/02

CPC classification number: G01N29/036 ,  B82Y15/00 ,  B82Y30/00 ,  G01N2291/0256 ,  G01N2291/0257

Abstract: A system having reduced gas interference that includes a fluid chamber and a resonant sensor device in fluid communication with a fluid in the fluid chamber. The system includes a fluid control device adapted to change at least one of the fluid flow or pressure within the fluid chamber to achieve substantial wetting of surfaces in proximity to the resonant sensor device. Fluid surfaces of the system can include a material to increase the wettability (e.g., hydrophilicity) of the fluid surfaces.

Abstract translation: 具有减小的气体干扰的系统，其包括与流体室中的流体流体连通的流体室和谐振传感器装置。 该系统包括流体控制装置，其适于改变流体室内的流体流动或压力中的至少一个，以实现靠近谐振传感器装置的表面的显着润湿。 系统的流体表面可以包括增加流体表面的润湿性（例如亲水性）的材料。

公开(公告)号：WO2007127107A3

公开(公告)日：2007-11-08

申请号：PCT/US2007/009399

申请日：2007-04-17

Applicant: BIOSCALE, INC. ,  BAKSHI, Shivalik ,  MILLER, Michael, F.

Inventor： BAKSHI, Shivalik ,  MILLER, Michael, F.

IPC: B81B7/00

Abstract: Microfabricated devices for operation in a fluid that include a substrate that has a first and second surface and a first electrode material layer located over the first surface of the substrate. The devices have a piezoelectric material layer located over the first electrode material layer and a second electrode material layer located over the piezoelectric material layer. The devices also include a layer of isolation material located over the second electrode material layer that at least one of chemically or electrically isolates a portion of the second electrode material layer from a fluid. Some devices include a layer of conductive material located over the layer of isolation material.

公开(公告)号：WO2007062038A1

公开(公告)日：2007-05-31

申请号：PCT/US2006/045057

申请日：2006-11-21

Applicant: BIOSCALE, INC. ,  MASTERS, Brett, P. ,  MILLER, Michael, F. ,  SAUER-BUDGE, Alexis, F.

Inventor： MASTERS, Brett, P. ,  MILLER, Michael, F. ,  SAUER-BUDGE, Alexis, F.

IPC: G01N33/543 ,  B06B1/00 ,  G01N29/02

CPC classification number: G01N33/54373 ,  B82Y15/00 ,  B82Y30/00 ,  G01N29/022 ,  G01N29/036 ,  G01N29/30 ,  G01N29/4436 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/02836 ,  G01N2291/0423 ,  G01N2291/0426 ,  G01N2291/0427 ,  Y10T436/2575

Abstract: Methods and apparatuses for performing assays involving binding material elements with a plurality of bonds over a substantial area of a surface of a resonant device establishing a normalized exposure. The methods and apparatuses also involve controlling an external influence applied to the material elements over a first period of time and measuring a signal during a second period of time that is indicative of the change in the amount of material elements bound to the surface relative to the normalized exposure. In some cases, the measured signals are integrated with respect to time to determine the time averaged amount of material elements bound to the surface.

Abstract translation: 用于进行测定的方法和装置，其涉及在谐振装置的表面的实质区域上结合具有多个键的材料元件，从而建立归一化曝光。 所述方法和装置还涉及控制在第一时间段内施加到材料元件的外部影响，并且在第二时间段内测量指示与表面相关的材料元素量相对于 归一化曝光 在一些情况下，测量的信号相对于时间被积分，以确定与表面结合的材料元素的时间平均量。

公开(公告)号：WO2006107961A3

公开(公告)日：2006-10-12

申请号：PCT/US2006/012491

申请日：2006-04-05

Applicant: BIOSCALE, INC. ,  MASTERS, Brett P. ,  MILLER, Michael F.

Inventor： MASTERS, Brett P. ,  MILLER, Michael F.

IPC: H03H3/00 ,  H03H3/04 ,  H03H3/10 ,  H03H9/02

Abstract: Electrically responsive devices and methods for fabricating electrically- responsive devices involves applying an electrically responsive material (e.g. piezoelectric material) (132) over at least a portion of a surface of a substrate material (104) and applying an electrode material (140) over at least a portion of a surface of the electrically responsive material. At least one region of the electrode material (140) is selectively removed exposing the electrically responsive material (244) . At least some of the electrically responsive material is selectively removed in a region corresponding to the at least one region of the electrode material.

公开(公告)号：WO0167158A2

公开(公告)日：2001-09-13

申请号：PCT/US0106944

申请日：2001-03-02

Applicant: AXSUN TECH INC ,  FLANDERS DALE C ,  WHITNEY PETER S ,  MILLER MICHAEL F ,  SHANFIELD STANLEY R ,  LE MINH VAN

Inventor： FLANDERS DALE C ,  WHITNEY PETER S ,  MILLER MICHAEL F ,  SHANFIELD STANLEY R ,  LE MINH VAN

IPC: G01J3/26 ,  G02B26/00 ,  G02B26/02

CPC classification number: G02B26/001 ,  G01J3/26 ,  G02B26/00 ,  G02B26/02 ,  Y10S359/90

Abstract: A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. Voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.

Abstract translation: 可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。 光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。 跨过静电腔施加到电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。 具有可移动膜的过滤器可以通过微结构的光刻和制造工艺由集成器件结构中的半导体材料形成。 膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。 图案可以是直的或径向的系绳将内膜与外体连接。 或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。

公开(公告)号：WO2009131883A3

公开(公告)日：2010-05-06

申请号：PCT/US2009040716

申请日：2009-04-15

Applicant: BIOSCALE INC ,  FALB PETER W ,  BRANCAZIO DAVID ,  FRANCE ERIC ,  MASTERS BRETT P ,  MILLER MICHAEL F ,  ORMSBY JOSHUA R ,  SLOAN WALKER

Inventor： FALB PETER W ,  BRANCAZIO DAVID ,  FRANCE ERIC ,  MASTERS BRETT P ,  MILLER MICHAEL F ,  ORMSBY JOSHUA R ,  SLOAN WALKER

IPC: B01L3/00 ,  G01N35/00

CPC classification number: G01N35/00029 ,  B01L3/5025 ,  B01L3/502715 ,  B01L3/502738 ,  B01L2200/025 ,  B01L2200/16 ,  B01L2300/0654 ,  B01L2300/0816 ,  B01L2400/0487 ,  B01L2400/0655 ,  G01N2035/00148 ,  Y10T29/49

Abstract: A system for processing analytes in samples includes an instrument and a cartridge. The cartridge includes fluid inputs, input and output valve assemblies, processing devices, fluid reservoirs, and channels for carrying samples from the fluid inputs to the fluid reservoirs. The valve assemblies include valves adapted to form a sealed fluid chamber in response to force applied by a movable head assembly of the instrument. Each fluid reservoir is adapted to mate and align with an air displacement pump interface member. A valve assembly includes a recess wall surrounding a recess and a valve assembly wall surrounding both the recess and the recess wall. The recess wall and the valve assembly walls are adapted to mate with and seal against a flexible sheet covering the recess, the recess wall, and the valve assembly wall. The cartridge and instrument include complementary features for finely and coarsely aligning instrument assemblies with portions of the cartridge.

Abstract translation: 用于处理样品中分析物的系统包括仪器和墨盒。 墨盒包括流体输入，输入和输出阀组件，处理装置，流体储存器和用于将样品从流体输入传送到流体储存器的通道。 阀组件包括适于响应由仪器的可移动头组件施加的力而形成密封流体室的阀。 每个流体储存器适于与排气泵接口构件配合和对准。 阀组件包括围绕凹部的凹陷壁和围绕凹部和凹陷壁的阀组件壁。 凹陷壁和阀组件壁适于与覆盖凹部，凹陷壁和阀组件壁的柔性薄片配合并密封。 墨盒和仪器包括用于精细和粗略地对准具有部分墨盒的仪器组件的互补特征。

公开(公告)号：WO2009033056A1

公开(公告)日：2009-03-12

申请号：PCT/US2008/075448

申请日：2008-09-05

Applicant: BIOSCALE, INC. ,  ARENAS, Jaime, E. ,  CHOI, Hyun-Goo ,  DICKERSON, William, Matthew ,  HEMBREE, Sarah, Beth ,  MADISON, Lara, Louise ,  MASTERS, Brett, P. ,  MILLER, Michael, F. ,  WANG, Wayne, U.

Inventor： ARENAS, Jaime, E. ,  CHOI, Hyun-Goo ,  DICKERSON, William, Matthew ,  HEMBREE, Sarah, Beth ,  MADISON, Lara, Louise ,  MASTERS, Brett, P. ,  MILLER, Michael, F. ,  WANG, Wayne, U.

IPC: G01N33/543 ,  G01N29/02

CPC classification number: G01N29/022 ,  B01L9/52 ,  G01N33/54373 ,  G01N2291/014 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/02809 ,  G01N2291/02836 ,  G01N2291/0427

Abstract: The technology provided herein generally relates to reusable detection surfaces and methods for reusing a detection surface after using the detection surface in an assay for an analyte. In particular, the present application relates to a detection surface of an acoustic device, like flexural plate wave (FPW) device, wherein a first capture agent capable of binding an analyte is linked to the detection surface and remains linked to the detection surface upon removal of the bound analyte by chemical wash. Thus the detection surface can be reused in further assays. Furthermore the application claims a kit and a reusable cartridge with a fluid chamber, an acoustic device with detection surface and a first capturing agent.

Abstract translation: 本文提供的技术通常涉及可重复使用的检测表面和用于在分析物的测定中使用检测表面后重新使用检测表面的方法。 特别地，本申请涉及一种声学装置的检测表面，例如弯曲板波（FPW）装置，其中能够将分析物结合的第一捕获剂与检测表面连接，并且在去除时保持与检测表面的连接 的化学洗涤结合的分析物。 因此，检测表面可以再次用于进一步的检测。 此外，本申请要求具有流体室的套件和可重复使用的盒，具有检测表面的声学装置和第一捕获剂。