PRINT PROCESSING FOR PATTERNED CONDUCTOR, SEMICONDUCTOR AND DIELECTRIC MATERIALS
    3.
    发明申请
    PRINT PROCESSING FOR PATTERNED CONDUCTOR, SEMICONDUCTOR AND DIELECTRIC MATERIALS 审中-公开
    图形导体,半导体和电介质材料的印刷加工

    公开(公告)号:WO2008137811A2

    公开(公告)日:2008-11-13

    申请号:PCT/US2008/062586

    申请日:2008-05-03

    IPC分类号: H01L21/20 C07H7/04

    摘要: Embodiments relate to printing features from an ink containing a material precursor. In some embodiments, the material includes an electrically active material, such as a semiconductor, a metal, or a combination thereof. In another embodiment, the material includes a dielectric. The embodiments provide improved printing process conditions that allow for more precise control of the shape, profile and dimensions of a printed line or other feature. The composition(s) and/or method(s) improve control of pinning by increasing the viscosity and mass loading of components in the ink. An exemplary method thus includes printing an ink comprising a material precursor and a solvent in a pattern on the substrate; precipitating the precursor in the pattern to form a pinning line; substantially evaporating the solvent to form a feature of the material precursor defined by the pinning line; and converting the material precursor to the patterned material.

    摘要翻译: 实施例涉及从含有材​​料前体的油墨印刷特征。 在一些实施例中,材料包括电活性材料,例如半导体,金属或其组合。 在另一个实施例中,该材料包括电介质。 这些实施例提供改进的印刷工艺条件,其允许更精确地控制印刷线或其它特征的形状,轮廓和尺寸。 组合物和/或方法通过增加油墨中组分的粘度和质量负荷来改善对钉扎的控制。 因此,示例性方法包括在基板上以图案印刷包含材料前体和溶剂的油墨; 以图案沉淀前体以形成钉扎线; 基本上蒸发溶剂以形成由钉扎线限定的材料前体的特征; 并将材料前体转化成图案化材料。

    CVD MASK ALIGNMENT FOR OLED PROCESSING
    5.
    发明申请
    CVD MASK ALIGNMENT FOR OLED PROCESSING 审中-公开
    用于OLED处理的CVD掩模对准

    公开(公告)号:WO2012173692A1

    公开(公告)日:2012-12-20

    申请号:PCT/US2012/033657

    申请日:2012-04-13

    IPC分类号: H01L51/56 C23C16/04

    CPC分类号: H01L51/56 C23C16/042

    摘要: The present invention generally relates to a CVD apparatus for OLED processing. For OLED processing, a mask is oftentimes utilized during the CVD process. Properly aligning the mask over the substrate can be accomplished by utilizing two X-Y-Z motion alignment elements together with two Z motion alignment elements and one or more alignment visualization systems. The mask is initially disposed on the alignment elements. The visualization systems confirm whether the mask is properly aligned. If realignment is necessary, then the two X-Y-Z alignment elements move the mask while the two Z alignment elements remain stationary. The visualization systems then confirm the mask is properly aligned so that the CVD process may then proceed.

    摘要翻译: 本发明一般涉及用于OLED处理的CVD设备。 对于OLED处理,在CVD过程中通常使用掩模。 可以通过利用两个X-Y-Z运动对准元件与两个Z运动对准元件和一个或多个对准可视化系统一起来将掩模适当地对准衬底上的掩模。 掩模最初设置在对准元件上。 可视化系统确认掩模是否正确对齐。 如果需要重新对准,则两个X-Y-Z对准元件移动掩模,同时两个Z对准元件保持静止。 然后,可视化系统确认掩模被正确对准,以便CVD工艺可以继续进行。

    PRINT PROCESSING FOR PATTERNED CONDUCTOR, SEMICONDUCTOR AND DIELECTRIC MATERIALS
    8.
    发明申请
    PRINT PROCESSING FOR PATTERNED CONDUCTOR, SEMICONDUCTOR AND DIELECTRIC MATERIALS 审中-公开
    图形导体,半导体和电介质材料的印刷加工

    公开(公告)号:WO2008137811A3

    公开(公告)日:2009-12-30

    申请号:PCT/US2008062586

    申请日:2008-05-03

    IPC分类号: H01L21/00 H01L21/84

    摘要: Embodiments relate to printing features from an ink containing a material precursor. In some embodiments, the material includes an electrically active material, such as a semiconductor, a metal, or a combination thereof. In another embodiment, the material includes a dielectric. The embodiments provide improved printing process conditions that allow for more precise control of the shape, profile and dimensions of a printed line or other feature. The composition(s) and/or method(s) improve control of pinning by increasing the viscosity and mass loading of components in the ink. An exemplary method thus includes printing an ink comprising a material precursor and a solvent in a pattern on the substrate; precipitating the precursor in the pattern to form a pinning line; substantially evaporating the solvent to form a feature of the material precursor defined by the pinning line; and converting the material precursor to the patterned material.

    摘要翻译: 实施例涉及从含有材​​料前体的油墨印刷特征。 在一些实施例中,材料包括电活性材料,例如半导体,金属或其组合。 在另一个实施例中,该材料包括电介质。 这些实施例提供改进的印刷工艺条件,其允许更精确地控制印刷线或其它特征的形状,轮廓和尺寸。 组合物和/或方法通过增加油墨中组分的粘度和质量负荷来改善对钉扎的控制。 因此,示例性方法包括在基板上以图案印刷包含材料前体和溶剂的油墨; 以图案沉淀前体以形成钉扎线; 基本上蒸发溶剂以形成由钉扎线限定的材料前体的特征; 并将材料前体转化成图案化材料。