Abstract:
Systems are described for delivery of a wide variety of materials in which liquid and gas or vapor states are concurrently present, from a package preferably including a fluid-containing collapsible liner. Headspace gas is removed from a pressure dispensing package prior to liquid dispensation therefrom, and ingress gas is removed thereafter during dispensation operation. At least one sensor senses presence of gas or a gas-liquid interface in a reservoir or gas-liquid separation region. A gas removal system including an integral reservoir, at least one sensor, and at least one flow control elements may be included within a connector adapted to mate with a pressure dispensing package, for highly efficient removal of gas from the liquid being dispensed from the container.
Abstract:
Fluid supply systems for storage and dispensing of chemical reagents and compositions, e.g., high purity liquid reagents and chemical mechanical polishing compositions used to manufacture microelectronic device products, having capability for detection of an empty or near-empty condition when the contained liquid is at or approaching depletion during dispensing operation. Fluid delivery systems employing empty detect arrangements are described, including pressure transducer monitoring of dispensed material intermediate the supply package and a servo-hydraulic dispense pump, or monitoring of dispenser chamber replenishment times in a dispenser being replenished on a cyclic schedule to flow material from the dispenser to a downstream tool utilizing the dispensed material.
Abstract:
A valve assembly. for controlling gas delivery from a higher pressure fluid source to a lower pressure processing tool. The valve assembly includes a valve poppet movingly engageable with a valve seating member and a fluid permeable insert positioned between the valve poppet and the valve seating member that is unexposed to flowing fluid when the valve poppet is in a closed position thereby preventing fluid flow through the valve assembly and providing a diffusional path for transfer of all flowing fluid when the valve poppet is in an open position. The permeable insert can be inserted into the sealable and engageable surface of either the valve seat member or the valve poppet.
Abstract:
A method and apparatus (400) are provided for remotely configuring, operating and monitoring equipment (320, 330) in a manufacturing facility. An interface (230) is provided that allows a remote user to establish a connection with desired equipment (320, 330) in order to configure, operate or monitor the equipment (320,330). The disclosed interface (230) performs any required translation between the diverse equipment (320, 330) and protocols of different equipment manufacturers. A web-based connection to remote equipment allows a variety of diverse equipment systems to be accessed and controlled in a uniform manner. Historical data can be analyzed following a failure using pattern recognition techniques to identify data patterns that suggest an imminent failure.
Abstract:
Packages and methods for storage and dispensing of materials, e.g., high purity liquid reagents and chemical mechanical polishing compositions used in the manufacture of microelectronic device products, including containment structures and methods adapted for pressure-dispensing of high-purity liquids. Liner packaging of liquid or liquid-containing media is described, in which zero or near-zero head space conformations are employed to minimize adverse effects of particle generation, formation of bubbles and degradation of contained material.
Abstract:
A material supply system including a container defining an interior volume for holding the material, such container including a dispense opening therein, a dip tube for dispensing the material from the container, and a fitment mounted in the opening of the container. The fitment in one implementation includes at least two port openings therein, through one of which the dip tube extends into the interior volume of the container, and with another of the at least two port openings being adapted for one or more of (i) filling the container, (ii) venting the container, (iii) recirculation of material during dispensing and (iv) flow of a pressurized medium into the interior volume to assist the dispensing. The container can be of a bag-in-drum or a bag-in-can type. A liner with multiple fitments may be employed. The container in another implementation is fabricated with damping structure, e.g., vibrational damping structure, to reduce susceptibility of the container to adverse vibrational and resonant frequency effects.
Abstract:
A valve assembly. for controlling gas delivery from a higher pressure fluid source to a lower pressure processing tool. The valve assembly includes a valve poppet movingly engageable with a valve seating member and a fluid permeable insert positioned between the valve poppet and the valve seating member that is unexposed to flowing fluid when the valve poppet is in a closed position thereby preventing fluid flow through the valve assembly and providing a diffusional path for transfer of all flowing fluid when the valve poppet is in an open position. The permeable insert can be inserted into the sealable and engageable surface of either the valve seat member or the valve poppet.
Abstract:
Fluid storage and dispensing systems and processes involving various devices, structures and arrangements, as well as techniques and methods, for fluid storage and dispensing, including, without limitation, pre-connect verification couplings that are usefully employed in application to fluid storage and dispensing packages, to ensure proper coupling and avoid fluid contamination issues, empty detect systems that are usefully employed for fluid storage and dispensing packages incorporating liners that are pressure-compressed in the fluid dispensing operation, ergonomically enhanced structures for facilitating removal of a dispense connector from a capped vessel, cap integrity assurance systems for preventing misuse of vessel caps, and keycoding systems for ensuring coupling of proper dispense assemblies and vessels. Fluid storage and dispensing systems are described, which achieve zero or near-zero headspace character, and prevent or ameliorate solubilization effects in liquid dispensing from liners in overpack vessels.
Abstract:
A fluid storage and dispensing package, including a rigid overpack defining an interior volume, a liner disposed in the interior volume of the overpack to hold liquid medium, and a positional fixation structure arranged to restrain movement of the liner when holding liquid medium, wherein the positional fixation structure is not in contact with liquid medium when liquid medium is contained in the liner. Such package, and associated packaging method, preferably involves zero-headspace containment of the liquid or liquid-containing material, and is particularly advantageous in application to storage and dispensing of film-forming colloidal silica-based chemical mechanical polishing (CMP) compositions, with respect to suppressing the presence of microbubbles and unwanted particles.
Abstract:
A fluid storage and dispensing package, including a rigid overpack defining an interior volume, a liner disposed in the interior volume of the overpack to hold liquid medium, and a positional fixation structure arranged to restrain movement of the liner when holding liquid medium, wherein the positional fixation structure is not in contact with liquid medium when liquid medium is contained in the liner. Such package, and associated packaging method, preferably involves zero-headspace containment of the liquid or liquid-containing material, and is particularly advantageous in application to storage and dispensing of film-forming colloidal silica-based chemical mechanical polishing (CMP) compositions, with respect to suppressing the presence of microbubbles and unwanted particles.