公开(公告)号：WO2005072089A3

公开(公告)日：2006-07-13

申请号：PCT/US2004041467

申请日：2004-12-13

Applicant: PENN STATE RES FOUND ,  PENG CHIH-YI ,  KALKAN ALI KAAN ,  CUIFFI JOSEPH D ,  SHAN YINGHUI ,  FONASH STEPHEN ,  HAYES DANIEL ,  BUTTERFOSS PAUL ,  NAM WOOK JUN

Inventor： PENG CHIH-YI ,  KALKAN ALI KAAN ,  CUIFFI JOSEPH D ,  SHAN YINGHUI ,  FONASH STEPHEN ,  HAYES DANIEL ,  BUTTERFOSS PAUL ,  NAM WOOK JUN

IPC: H01L21/36 ,  B81C1/00 ,  H01L21/20 ,  H01L21/44 ,  H01L29/06 ,  H01L51/00

CPC classification number: B81C1/0019 ,  B81B2203/0109 ,  B81B2203/0118 ,  B82Y10/00 ,  H01L21/0237 ,  H01L21/02532 ,  H01L21/0259 ,  H01L21/02603 ,  H01L21/02639 ,  H01L21/02645 ,  H01L21/02653 ,  H01L29/0665 ,  H01L29/0673 ,  H01L29/068 ,  H01L51/0002 ,  Y02E10/549 ,  Y10S977/762

Abstract: This invention presents a novel method to form uniform or heterogeneous, straight or curved and size-controllable nanostructures, nanowires, and nanotapes, including SiNW, in a nanochannel template. In the case of semiconductor nanowires, doping can be included during growth. Electrode contacts are present as needed and built in to the template structure. Thus completed devices such as diodes, transistors, solar cells, sensors, and transducers are fabricated, contacted, and arrayed as nanowire or nanotape fabrication is completed. Optionally, the template is not removed may become part of the structure. Nanostructures such as nanotweezers, nanocantiliver, and nanobridges are formed utilizing the processes of the invention.

Abstract translation: 本发明提出了一种在纳米通道模板中形成均匀或不均匀的直线或弯曲和尺寸可控的纳米结构，纳米线和纳米线（包括SiNW）的新方法。 在半导体纳米线的情况下，在生长期间可以包括掺杂。 根据需要存在电极触点，并内置于模板结构中。 如纳米线或纳米线制造完成时，制造，接触和排列诸如二极管，晶体管，太阳能电池，传感器和换能器的完成器件。 可选地，模板不被移除可能成为结构的一部分。 使用本发明的方法形成纳米结构，纳米滴定剂，纳米栓剂和纳米桥接纳米结构。

公开(公告)号：WO03020946A9

公开(公告)日：2003-09-04

申请号：PCT/US0226009

申请日：2002-08-14

Applicant: PENN STATE RES FOUND

Inventor： FONASH STEPHEN J ,  HAYES DANIEL ,  NAM WOOK JUN ,  CUIFFI JOSEPH D

IPC: B01J19/00 ,  B01L3/00 ,  B81B1/00 ,  F15C5/00 ,  F16K99/00

CPC classification number: B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00819 ,  B01J2219/00835 ,  B01J2219/00837 ,  B01J2219/00853 ,  B01L3/5027 ,  B82Y15/00 ,  F15C5/00 ,  F16K99/0001 ,  F16K99/0003 ,  F16K99/0046 ,  F16K99/0051 ,  F16K2099/0073 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0084

Abstract: There is disclosed a method providing micro-scale devices, nano-scale devices, or devices having both nano-scale and micro-scale features. The method of the invention comprises fluidic assembly and various novel devices produced thereby. A variety of nanofluidic and molecular electronic type devices and structures having applications such as filtering and genetic sequencing are provided by the invention

Abstract translation: 公开了一种提供具有纳米尺度和微尺度特征的微尺度装置，纳米级装置或装置的方法。 本发明的方法包括流体组装和由此制造的各种新型装置。 本发明提供了具有诸如过滤和遗传测序等应用的多种纳米流体和分子电子型装置和结构

公开(公告)号：WO2008127438A2

公开(公告)日：2008-10-23

申请号：PCT/US2007085630

申请日：2007-11-27

Applicant: PENN STATE RES FOUND ,  FONASH STEPHEN J ,  NAM WOOK JUN ,  LIANG HUINAN

Inventor： FONASH STEPHEN J ,  NAM WOOK JUN ,  LIANG HUINAN

IPC: C12M3/00

CPC classification number: F04B19/006 ,  B01L3/50273 ,  B01L2300/0816 ,  B01L2300/0861 ,  B01L2300/088 ,  B01L2300/0896 ,  B01L2400/0487 ,  B82Y30/00

Abstract: A method of active nanofluidic flow control (parallel flow control-PFC) includes providing a nanofluidic channel and a pressure-driven microfluidic channel connected in parallel and actively controlling flow through the nanofluidic channel by using the pressure-driven microfluidic channel. A method of nanofluidic flow measurement includes providing a nanofluidic channel, a pressure-driven microfluidic channel connected in parallel for flow control, and an additional measurement microfluidic channel connected in series for flow measurement and measuring the nanofluidic flow rate by measuring the filling rate in the measurement microfluidic channel. A method of nano-scale volume fluid manipulation includes providing a nanofluidic channel and a pressure-driven microfluidic channel connected in parallel and manipulating nano-scale volume fluid through the nanofluidic channel by using the pressure-driven microfluidic channel. A method of fabricating a fluidic system is provided. The method includes forming a nanofluidic channel and a pressure-driven microfluidic channel connected to the nanofluidic channel in parallel.

Abstract translation: 主动纳流控流量控制（并流控制-PFC）的方法包括提供并联连接的纳流体通道和压力驱动微流体通道，并通过使用压力驱动的微流体通道主动控制流过纳流体通道的流量。 纳流体流量测量的方法包括提供纳流体通道，并联连接用于流量控制的压力驱动的微流体通道，以及串联连接的另外的测量微流体通道以用于流量测量并且通过测量纳流体流量测量中的填充速率来测量纳流体流速 测量微流体通道。 纳米级体积流体操纵的方法包括提供平行连接的纳米流体通道和压力驱动的微流体通道并且通过使用压力驱动的微流体通道操纵纳米流体通道通过纳米流体通道。 提供了一种制造流体系统的方法。 该方法包括形成并联连接到纳米流体通道的纳米流体通道和压力驱动的微流体通道。

公开(公告)号：WO0180286A3

公开(公告)日：2002-02-07

申请号：PCT/US0112281

申请日：2001-04-17

Applicant: PENN STATE RES FOUND

Inventor： FONASH STEPHEN J ,  KALKAN ALI KAAN ,  BAE SANGHOON ,  HAYES DAN ,  NAM WOOK JUN ,  CHANG KYUHWAN ,  LEE YOUNGCHUL

IPC: B81B3/00 ,  B81C1/00 ,  C23C16/24 ,  C23C16/511 ,  H01L21/306 ,  H01M8/02 ,  B05D5/12

CPC classification number: B81C1/0038 ,  B81C99/008 ,  B81C2201/0109 ,  B81C2201/0115 ,  B81C2203/0127 ,  C23C16/24 ,  C23C16/511

Abstract: This invention uses large surface to volume ratio materials for separation, release layer, and sacrificial material applications. The invention outlines the material concept, application designs, and fabrication methodologies. The invention is demonstrated using deposited column/void network materials as examples of large surface to volume ratio materials. In a number of the specific applications discussed, it is shown that it is advantageous to create structures on a laminate on a mother substrate and then, using the separation layer material approach, to separate this laminate from the mother substrate using the present separation scheme. It is also shown that the present materials have excellent release layer utility. In a number of applications it is also shown how the approach can be used to uniquely form cavities, channels, air-gaps, and related structures in or on various substrates. Further, it is demonstrated that it also can be possible and advantageous to combine the schemes for cavity formation with the scheme for laminate separation.

Abstract translation: 本发明使用大的表面体积比的材料用于分离，剥离层和牺牲材料应用。 本发明概述了材料概念，应用设计和制造方法。 本发明使用沉积柱/空隙网络材料作为大表面积与体积比的材料的实例进行了说明。 在讨论的许多具体应用中，显示了在母基板上的层压体上产生结构，然后使用分离层材料方法，使用本分离方案将该层压体与母基板分开是有利的。 还显示出本发明材料具有优异的脱模层效用。 在许多应用中，还显示了该方法如何用于在各种基底中或其上独特地形成腔，通道，气隙和相关结构。 此外，证明了将空腔形成方案与层压分离方案组合也是有可能和有利的。