INTEGRATED CIRCUIT SINGULATION METHOD AND SYSTEM
    7.
    发明申请
    INTEGRATED CIRCUIT SINGULATION METHOD AND SYSTEM 审中-公开
    集成电路整合方法与系统

    公开(公告)号:WO2015038068A1

    公开(公告)日:2015-03-19

    申请号:PCT/SG2014/000427

    申请日:2014-09-11

    CPC classification number: H01L21/78 H01L21/67092 H01L21/67271 H01L21/67276

    Abstract: There is disclosed a method for singulating IC units from a plurality of substrates, the substrates being divided into a sequence of two or more batches in one or more magazines, the method comprising, in a singulation apparatus having a singulation section and a sorting section: sequentially singulating substrates of a first batch in the singulation section and transporting singulated IC units to the sorting section; determining that singulated units of a last substrate of the first batch have reached the sorting section; sequentially processing substrates of a next batch in the sequence until singulated units of the first substrate of the next batch are ready to be sorted in the sorting section; and on receiving an indication that singulated units of the last substrate of the first batch have been cleared from the sorting section, continuing sequential processing of substrates of the next batch.

    Abstract translation: 公开了一种用于从多个基板分离IC单元的方法,所述基板在一个或多个杂志中分成两批以上的序列,所述方法包括在具有单片化部分和分类部分的单片机中: 在分割部分中顺序地分割第一批的基片并将分离的IC单元传送到分选部分; 确定第一批次的最后一个基底的单个单元已经到达分选部分; 顺序地处理下一批次的基板,直到下一批次的第一基板的分割单元准备在分选部分中分类; 并且在接收到从所述分选部分清除了所述第一批次的最后一个基板的分割单元的指示时,继续对下一个批次的基板进行顺序处理。

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