OXIME DERIVATIVES AND THE USE THEREOF AS LATENT ACIDS
    2.
    发明申请
    OXIME DERIVATIVES AND THE USE THEREOF AS LATENT ACIDS 审中-公开
    OXIME衍生物及其作为主要用途的用途

    公开(公告)号:WO00026219A1

    公开(公告)日:2000-05-11

    申请号:PCT/EP1999/007876

    申请日:1999-10-18

    Abstract: New oxime derivatives of formula (I) or (II), wherein m is 0 or 1; R1 inter alia is phenyl, naphthyl, anthracyl, phenanthryl or a heteroaryl radical; R'1 is for example C2-C12alkylene, phenylene, naphthylene; R2 is CN; R3 is C2-C6haloalkanoyl, halobenzoyl, a phosphoryl or an organosilyl group; R4, R5, R10 and R11 inter alia are hydrogen, C1-C6alkyl, C1-C6alkoxy; R6 inter alia is hydrogen, phenyl, C1-C12alkyl; R7 and R8 inter alia are hydrogen, C1-C12alkyl; or R7 and R8, together with the nitrogen atom to which they are bonded, form a 5-, 6- or 7-membered ring; R9 is for example C1-C12alkyl; and A inter alia is S, O, NR7a; are useful as latent acids, especially in photoresist applications.

    Abstract translation: 式(I)或(II)的新肟衍生物,其中m为0或1; R1特别是苯基,萘基,蒽基,菲基或杂芳基; R'1例如为C 2 -C 12亚烷基,亚苯基,亚萘基; R2为CN; R3是C2-C6卤代烷酰基,卤代苯甲酰基,磷酰基或有机甲硅烷基; R4,R5,R10和R11尤其是氢,C1-C6烷基,C1-C6烷氧基; R6尤其是氢,苯基,C 1 -C 12烷基; R 7和R 8尤其是氢,C 1 -C 12烷基; 或R 7和R 8与它们所键合的氮原子一起形成5-,6-或7-元环; R 9为例如C 1 -C 12烷基; A特别是S,O,NR7a; 可用作潜酸,特别是在光致抗蚀剂中。

    ACTIVATORS FOR PER COMPOUNDS
    4.
    发明申请
    ACTIVATORS FOR PER COMPOUNDS 审中-公开
    活化剂的无机每

    公开(公告)号:WO98033878A2

    公开(公告)日:1998-08-06

    申请号:PCT/EP1998/000574

    申请日:1998-02-03

    CPC classification number: C11D3/3917

    Abstract: Disclosed are carbonates of general formula (I): A-O-CO-OR , in which A is a radical (Ia) R R C=N- or a radical (Ib), or the hydromidesters of the general formula (I) or the polymer derivates thereof are used with radicals having the meaning of R to R , especially alkyl and aryl with or without substituents, R /R representing inter alia hydrogen or, jointly, an alkyl group, while R /R represent inter alia jointly an alkyl group and R /R a carbocycle, as activators for anorganic per compounds.

    Abstract translation: 通式(I)的碳酸酯:AO-CO-OR <3>,在A(Ia)的一个残基R <1> [R <2>是C = N-或A为基团(Ib)中,或一般Hydroximidester 式(II),或者它们的聚合物,具有的含义R <1>至R除其他事项外<5>残余 烷基,芳基具有或不具有取代基,R <1> / R <2>等 也氢,或一起为亚烷基,R <4> / R <5>等 一起的亚烷基,R <6> / R <7>是一个碳环被用作活化剂为无机每。

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