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    ELECTRONIC APPARATUS
    3.
    发明公开
    ELECTRONIC APPARATUS 审中-公开
    电子设备

    公开(公告)号：EP1820257A2

    公开(公告)日：2007-08-22

    申请号：EP05762156.7

    申请日：2005-07-22

    申请人： Stenzel Security Limited

    发明人： MILLER, Rodney

    IPC分类号： H02N11/00

    CPC分类号： H01J3/20 ,  G21K1/08 ,  H01J3/24

    摘要： The invention provides a device for producing and focussing an electron beam; the device comprising an evacuated chamber (4), a source of electrons (2), a target (6), means for creating an electric field to accelerate a stream of the electrons constituting the electron beam through the chamber towards the target, and means (12) for providing a magnetic field crossing the electron beam; characterised in that the magnetic flux of the magnetic field progressively reduces in the direction of the target.

    METHOD AND APPARATUS FOR MAGNETIC FOCUSING OF OFF-AXIS ELECTRON BEAM
    6.
    发明公开
    METHOD AND APPARATUS FOR MAGNETIC FOCUSING OF OFF-AXIS ELECTRON BEAM 有权
    DEVICE AND METHOD FOR磁聚焦离轴电子

    公开(公告)号：EP1522084A2

    公开(公告)日：2005-04-13

    申请号：EP03763466.4

    申请日：2003-07-09

    申请人： Communications & Power Industries, Inc.

    发明人： CATTELINO, Mark J.,Comm. & Power Industries Inc ,  FRIEDLANDER, Fred I.,Comm. & Power Industries Inc

    IPC分类号： H01J23/087

    CPC分类号： H01J23/0876 ,  H01J3/20 ,  H01J23/087

    摘要： Axially symmetric magnetic fields are provided about the longitudinal axis of each beam of a multi-beam electron beam device (MBEBD). A flux equalizer assembly is disposed between the cathodes and the anodes and near the cathodes of a (MBEBD). The assembly includes a ferromagnetic flux plate completely contained within the magnetic focusing circuit of the (MBEBD). The flux plate includes apertures for each beam of the (MBEBD). A flux equalization gap or gaps are disposed in the flux plate to provide a perturbation in the magnetic field in the flux plate which counters the asymmetry induced by the off-axis position of the beam. The gaps (MBEBD) have the effect of producing a locally continuously varying reluctance that locally counters the magnetic field asymmetry. The flux equalizer assembly prevents or substantially reduces beam twist and maintains all of the electron beams of the (MBEBD) as linear beams.

    ELECTRON LENS AND THE ELECTRON BEAM DEVICE
    7.
    发明公开
    ELECTRON LENS AND THE ELECTRON BEAM DEVICE 有权
    ELEKTRONENOBJEKTIV UND ELEKTRONENSTRAHLVORRICHTUNG

    公开(公告)号：EP2587517A1

    公开(公告)日：2013-05-01

    申请号：EP11836299.5

    申请日：2011-10-25

    申请人： Param Corporation

    发明人： YASUDA Hiroshi

    IPC分类号： H01J37/143 ,  H01J37/141 ,  H01J37/305 ,  H01L21/027

    CPC分类号： H01J3/24 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/20 ,  H01J37/143 ,  H01J37/3007 ,  H01J37/3174 ,  H01J37/3177 ,  H01J2237/002 ,  H01J2237/1405

    摘要： There provided a device for effectively drawing a fine pattern using a permanent magnet. The device has an outer cylinder 201 composed of a cylindrical ferromagnet with a Z axis as a central axis, a cylindrical permanent magnet 202 located inside the outer cylinder and polarized along the Z axis direction, a correction coil 204 located inside the cylindrical permanent magnet with a gap from the cylindrical permanent magnet, for adjusting a magnetic field strength generated by the cylindrical permanent magnet along the Z axis direction, and a coolant passage 203 located in the gap between the cylindrical permanent magnet and the correction coil, for allowing a coolant to flow therethrough and controlling temperature changes in the cylindrical permanent magnet.

    摘要翻译： 提供了一种用于使用永磁体有效地绘制精细图案的装置。 该装置具有：外圆筒201，其具有以Z轴为中心轴的圆柱形铁磁体，位于外筒内侧且沿着Z轴方向极化的圆筒形永久磁铁202，位于筒状永久磁铁内部的校正线圈204， 用于调整由圆柱形永磁体沿着Z轴方向产生的磁场强度的圆柱形永磁体的间隙和位于圆柱形永磁体和校正线圈之间的间隙中的冷却剂通道203，用于允许冷却剂 流过并控制圆筒形永久磁铁中的温度变化。

    METHOD AND APPARATUS FOR MAGNETIC FOCUSING OF OFF-AXIS ELECTRON BEAM
    8.
    发明授权
    METHOD AND APPARATUS FOR MAGNETIC FOCUSING OF OFF-AXIS ELECTRON BEAM 有权
    DEVICE AND METHOD FOR磁聚焦离轴电子

    公开(公告)号：EP1522084B1

    公开(公告)日：2011-11-16

    申请号：EP03763466.4

    申请日：2003-07-09

    申请人： Communications & Power Industries, Inc.

    发明人： CATTELINO, Mark J., ,  FRIEDLANDER, Fred I.,

    IPC分类号： H01J23/087

    CPC分类号： H01J23/0876 ,  H01J3/20 ,  H01J23/087

    摘要： Axially symmetric magnetic fields are provided about the longitudinal axis of each beam of a multi-beam electron beam device (MBEBD). A flux equalizer assembly is disposed between the cathodes and the anodes and near the cathodes of a (MBEBD). The assembly includes a ferromagnetic flux plate completely contained within the magnetic focusing circuit of the (MBEBD). The flux plate includes apertures for each beam of the (MBEBD). A flux equalization gap or gaps are disposed in the flux plate to provide a perturbation in the magnetic field in the flux plate which counters the asymmetry induced by the off-axis position of the beam. The gaps (MBEBD) have the effect of producing a locally continuously varying reluctance that locally counters the magnetic field asymmetry. The flux equalizer assembly prevents or substantially reduces beam twist and maintains all of the electron beams of the (MBEBD) as linear beams.

    Magnetische Multipolanordnung n-ter Ordnung
    10.
    发明公开
    Magnetische Multipolanordnung n-ter Ordnung 失效
    磁多极n阶。

    公开(公告)号：EP0129111A1

    公开(公告)日：1984-12-27

    申请号：EP84106084.1

    申请日：1984-05-28

    申请人： SIEMENS AKTIENGESELLSCHAFT

    发明人： Voss, Erich, Dr. ,  Wollnik, Hermann, Prof. Dr.

    IPC分类号： H05H7/04 ,  G21K1/08 ,  H01J3/20

    CPC分类号： G21K1/08 ,  H01J3/20 ,  H05H7/04

    摘要： Die Erfindung betrifft eine magnetische Multipolanordnung n-ter Ordnung zur Beeinflussung der Flugbahn von geladenen Teilchen. Um ohne gesondert herzustellende Bauteile auszukommen, wird vorgeschlagen, daß als Multipolanordnung der Ständer (1) einer mehrphasigen Wechselsstrommaschine vorgesehen ist, deren Ständerwicklung von einer Spannungsquelle derart gespeist wird, daß das Produkt aus Strom und Windungszahl (Amperewindungszahl) in einer unter dem Azimutwinkel H angeordneten Nut oder Nutgruppe proportional zu cos(nθ) ist, wobei n der Ordnungszahl der Multipolanordnung entspricht und die Faktoren a und b dem Verhältnis b/a, welches die Orientierung des Multipols relativ zu dem Azimutwinkel θ = 0 angibt, entnommen sind. Als Multipolanordnung kann auch ein durch Dauermagnete erregter Ständer einer Gleichstrommaschine vorgesehen werden.

    摘要翻译： 本发明涉及一种磁性的多n次来影响带电粒子的轨迹。 来管理，而无需单独制造的部件，所以建议为多极定子（1）提供了一种多相交流发电机，其定子绕组由使得电流和匝数（安培）的数目的乘积在一个方位角下布置θ的电压源激励 槽或槽组正比于cos（NΘ），其中n是相应的多极的序号，并且该因素a和b的比率b / a，它们是0表示相对于方位角θ=截取的多极的方向。 当多极由一个直流电机的永磁体定子也激发可以被提供。