公开(公告)号：EP2188604B1

公开(公告)日：2018-06-06

申请号：EP08787757.7

申请日：2008-09-03

Applicant: Valtion Teknillinen Tutkimuskeskus ,  Honeywell Oy

Inventor： MALINEN, Jouko ,  KATAJA, Kari ,  KIVI, Sini ,  VASAMA, Hannu ,  KUUSELA, Reijo

IPC: G01J3/26 ,  G01J3/28 ,  G01N21/85 ,  G01N21/86 ,  G01J3/02

CPC classification number: G01J3/26 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/0232 ,  G01J3/0286 ,  G01J3/2803 ,  G01N21/31 ,  G01N21/85 ,  G01N21/86

Abstract: An optical or infrared spectrometer is suitable for on-line measurements for industrial, agricultural, field, commercial and other applications. Optical spectrometers are very useful for various analytical measurements. On-line operation is needed for obtaining real-time information, which is useful e.g. for process automation and quality control needs. The invention is based on optical design optimized for measuring moving samples at a distance and includes a light guide for signal homogenization, a linear variable filter for defining multiple measurement wavelengths as well as a linear detector array for detecting optical signals relating to the different wavelengths. There is an element for cooling and stabilizing the operating temperature of both the linear detector array and the linear variable filter, while the spectrometer is operating in variable environmental conditions. Thanks to the optical signal chain designed to maximize the radiance at the detector, the proposed spectrometer can provide high signal-to-noise ratio and high speed.

公开(公告)号：EP3161436A4

公开(公告)日：2018-03-07

申请号：EP15811041

申请日：2015-06-29

Applicant: SPECTRAL ENGINES OY

Inventor： ANTILA JARKKO ,  KANTOJÄRVI UULA ,  AKUJÄRVI ALTTI ,  TUOHINIEMI MIKKO ,  MÄKYNEN JUSSI

IPC: G01J3/26 ,  G01J3/28 ,  G02B5/28 ,  G02B26/00 ,  G02F1/21

CPC classification number: G01J3/0297 ,  G01J3/0227 ,  G01J3/0264 ,  G01J3/027 ,  G01J3/0286 ,  G01J3/26 ,  G01J3/28 ,  G01J3/45 ,  G01J2003/2879 ,  G02B26/001

Abstract: A method for determining spectral calibration data (λcal(Sd), Sd,cal(λ)) of a Fabry-Perot interferometer (100) comprises: - forming a plurality of filtered spectral peaks (P'1, P'2) by filtering input light (LB1) with a Fabry-Perot etalon (50) such that a first filtered peak (Ρ'1) corresponds to a first transmittance peak (P1) of the etalon (50), and such that a second filtered peak (P'2) corresponds to a second transmittance peak (P2) of the etalon (50), - using the Fabry-Perot interferometer (100) for measuring a spectral intensity distribution (M(Sd)) of the filtered spectral peaks (Ρ'1, P'2), wherein the spectral intensity distribution (M(Sd)) is measured by varying the mirror gap (dFP) of the Fabry-Perot interferometer (100), and by providing a control signal (Sd) indicative of the mirror gap (dFP), and - determining the spectral calibration data (λcal(Sd), Sd,cal(λ)) by matching the measured spectral intensity distribution (M(Sd)) with the spectral transmittance (ΤΕ(λ)) of the etalon (50).

公开(公告)号：EP3283862A1

公开(公告)日：2018-02-21

申请号：EP16705876.7

申请日：2016-02-01

Applicant: Raytheon Company

Inventor： COOK, Lacy G.

IPC: G01J3/18 ,  G01J3/02

CPC classification number: G01J3/2823 ,  G01J3/0208 ,  G01J3/0286 ,  G01J3/0294 ,  G01J3/18

Abstract: A multi-channel double-pass imaging spectrometer based on a reimaging or relayed all-reflective optical form, such as a four-mirror anastigmat (4MA) or five-mirror anastigmat (5MA). In one example, such a spectrometer includes a slit through which incident electromagnetic radiation enters the spectrometer, an imaging detector positioned at an image plane of the spectrometer co-located with the slit, and double-pass all-reflective reimaging optics configured to receive the electromagnetic radiation from the slit and to output a collimated beam of the electromagnetic radiation, and further configured to produce a reimaged pupil positioned between the double-pass all-reflective reimaging optics and the image plane. The spectrometer further includes at least one dispersive element configured to spectrally disperse the infrared electromagnetic radiation in each channel and being oriented to direct the dispersed output through the double-pass all-reflective reimaging optics to the image plane.

公开(公告)号：EP3104146A4

公开(公告)日：2017-10-18

申请号：EP15745980

申请日：2015-02-03

Applicant: HAMAMATSU PHOTONICS KK

Inventor： YOKINO TAKAFUMI ,  SHIBAYAMA KATSUMI

IPC: G01J3/02 ,  G01J3/18 ,  G01J3/36

CPC classification number: G01J3/021 ,  G01J3/0256 ,  G01J3/0262 ,  G01J3/0264 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/04 ,  G01J3/18

Abstract: A spectrometer 1A includes a light detection element 20 provided with a light passing part 21 and a light detection part 22, a support 30 fixed to the light detection element 20 such that a space S is formed between the light passing part 21 and the light detection part 22, a first reflection part 11 provided in the support 30 and configured to reflect light L1 passing through the light passing part 21 in the space S, a second reflection part 12 provided in the light detection element 20 and configured to reflect the light L1 reflected by the first reflection part 11 in the space S, and a dispersive part 40 provided in the support 30 and configured to disperse and reflect the light L1 reflected by the second reflection part 12 to the light detection part 22 in the space S.

公开(公告)号：EP3215817A1

公开(公告)日：2017-09-13

申请号：EP15857959.9

申请日：2015-11-04

Applicant: Spectral Engines OY

Inventor： ANTILA, Jarkko ,  KANTOJÄRVI, Uula ,  MÄKYNEN, Jussi

IPC: G01J3/06 ,  G01J3/26 ,  G01J3/32 ,  G01N21/25 ,  G02B5/28 ,  G02F1/21

CPC classification number: G01J3/45 ,  G01J3/0202 ,  G01J3/0256 ,  G01J3/0286 ,  G01J3/26 ,  G01J3/32 ,  G02B5/28

Abstract: The present invention concerns a method for an optical measurement method including the following steps: illuminating an object by light, receiving light from the illuminated object to a tunable Fabry-Perot interferometer, changing mirror gap of the Fabry-Perot interferometer, and detecting the signal passed through the mirror gap of the Fabry-Perot interferometer at different gap lengths. In accordance with the invention the detection is performed at different lengths of times at different gap lengths.

Abstract translation: 本发明涉及一种用于光学测量方法的方法，其包括以下步骤：通过光照射物体（OBJ1），从被照明物体（OBJ1）接收光（LB1）到可调法布里珀罗干涉仪（100），改变镜子 法布里 - 珀罗干涉仪（100）的间隙（dFP），并以不同间隙长度（dFP）检测通过法布里 - 珀罗干涉仪的镜面间隙（dFP）的信号（LB3）。 根据本发明，在不同的间隙长度（dFP）下以不同的时间长度进行检测。

公开(公告)号：EP3064914A4

公开(公告)日：2017-09-06

申请号：EP14859201

申请日：2014-10-31

Applicant: HAMAMATSU PHOTONICS KK

Inventor： SHIBAYAMA KATSUMI ,  KASAHARA TAKASHI ,  HIROSE MASAKI ,  KAWAI TOSHIMITSU

IPC: G01J3/26 ,  G01J3/02 ,  G01J3/45 ,  G01J5/04 ,  G01J5/20 ,  G02B26/00

CPC classification number: G01J3/26 ,  G01J3/0286 ,  G01J3/45 ,  G01J5/04 ,  G01J5/20 ,  G02B26/001

公开(公告)号：EP3064912A4

公开(公告)日：2017-09-06

申请号：EP14857161

申请日：2014-10-31

Applicant: HAMAMATSU PHOTONICS KK

Inventor： SHIBAYAMA KATSUMI ,  KASAHARA TAKASHI ,  HIROSE MASAKI ,  KAWAI TOSHIMITSU

IPC: G01J3/26 ,  G01J3/02 ,  G01J3/45 ,  G01J5/04 ,  G01J5/20 ,  G02B26/00

CPC classification number: G01J3/26 ,  G01J3/0286

Abstract: A spectral sensor 1 includes a wiring substrate 2 which has a principal surface; a light detector 3 which is disposed on the principal surface 2A of the wiring substrate 2 and is electrically connected to the wiring substrate 2; spacer 4 which is disposed around the light detector 3, on the principal surface 2A of the wiring substrate 2; and a Fabry-Perot interference filter 10 which has a light transmission region 11 and is disposed on the principal surface 2A of the wiring substrate 2 with the spacer 4 therebetween. The spacer 4 support the Fabry-Perot interference filter 10 in a surrounding region R1 of the light transmission region 11 and the spacer 4 has opening A1 communicating with an inner side of the surrounding region R1 and an outer side of the surrounding region R1, when viewed from a light transmission direction in the light transmission region 11.

Abstract translation: 光谱传感器1包括具有主表面的布线基板2; 设置在配线基板2的主面2A上并与配线基板2电连接的光检测器3， 在布线基板2的主面2A上配置在光检测器3的周围的间隔件4， 以及法布里 - 珀罗干涉滤光片10，其具有透光区域11，隔着间隔物4配置在布线基板2的主面2A上。 间隔物4在光透射区域11的周围区域R1中支撑法布里 - 珀罗干涉滤光片10，并且当隔离物4具有与周围区域R1的内侧和周围区域R1的外侧连通的开口A1时 从光透射区域11中的光透射方向观察。

公开(公告)号：EP3104147A1

公开(公告)日：2016-12-14

申请号：EP15746100.5

申请日：2015-02-03

Applicant: Hamamatsu Photonics K.K.

Inventor： YOKINO, Takafumi ,  SHIBAYAMA, Katsumi

IPC: G01J3/02 ,  G01J3/18

CPC classification number: G01J3/18 ,  G01J3/0256 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/2803 ,  G01J3/36

Abstract: A spectrometer 1A includes a light detection element 20 having a substrate 24 made of a semiconductor material, a light passing part 21 provided in the substrate 24, and a light detection part 22 put in the substrate 24, a support 30 having a base wall part 31 opposing the light detection element 20, and side wall parts 32 and 33 integrally formed with the base wall part 31, the light detection element 20 being fixed to the side wall parts 32 and 33, the support being provided with a wiring 13 electrically connected to the light detection part 22, and a dispersive part 40 provided on a surface 31a of the base wall part 31 on a side of a space S. An end part 13a of the wiring 13 is connected to a terminal 25 of the light detection element 20. An end part 13b of the wiring 13 is positioned on a surface 31b in the base wall part 31 on an opposite side from the side of the space S.

Abstract translation: 光谱仪1A包括具有由半导体材料制成的基板24的光检测元件20，设置在基板24中的光通过部21和放置在基板24中的光检测部22，具有基壁部 31与光检测元件20相对的侧壁部分32和与底壁部分31一体形成的侧壁部分32和33，光检测元件20固定到侧壁部分32和33，所述支撑件设置有电连接的布线13 以及设置在空间S侧的基壁部31的表面31a上的色散部40.布线13的端部13a与光检测元件的端子25连接 布线13的端部13b位于基壁部31的与空间S侧相反一侧的表面31b上。

公开(公告)号：EP2247929B1

公开(公告)日：2016-09-28

申请号：EP08709427.2

申请日：2008-02-15

Applicant: The Science and Technology Facilities Council

Inventor： WEIDMANN, Damien

IPC: G01J3/42 ,  G01J3/08 ,  G01N21/39 ,  G01N21/27 ,  G01N21/35

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0232 ,  G01J3/0286 ,  G01J3/08 ,  G01J3/427 ,  G01N21/276 ,  G01N21/3518 ,  G01N21/39 ,  G01N2021/399

公开(公告)号：EP3064912A1

公开(公告)日：2016-09-07

申请号：EP14857161.5

申请日：2014-10-31

Applicant: Hamamatsu Photonics K.K.

Inventor： SHIBAYAMA Katsumi ,  KASAHARA Takashi ,  HIROSE Masaki ,  KAWAI Toshimitsu

IPC: G01J3/26

CPC classification number: G01J3/26 ,  G01J3/0286

Abstract: A spectral sensor 1 includes a wiring substrate 2 which has a principal surface; a light detector 3 which is disposed on the principal surface 2A of the wiring substrate 2 and is electrically connected to the wiring substrate 2; spacer 4 which is disposed around the light detector 3, on the principal surface 2A of the wiring substrate 2; and a Fabry-Perot interference filter 10 which has a light transmission region 11 and is disposed on the principal surface 2A of the wiring substrate 2 with the spacer 4 therebetween. The spacer 4 support the Fabry-Perot interference filter 10 in a surrounding region R1 of the light transmission region 11 and the spacer 4 has opening A1 communicating with an inner side of the surrounding region R1 and an outer side of the surrounding region R1, when viewed from a light transmission direction in the light transmission region 11.

Abstract translation: 光谱传感器1包括具有主表面的布线基板2; 设置在配线基板2的主面2A上并与配线基板2电连接的光检测器3， 在布线基板2的主面2A上配置在光检测器3的周围的间隔件4， 以及法布里 - 珀罗干涉滤光片10，其具有透光区域11，隔着间隔物4配置在布线基板2的主面2A上。 间隔物4在光透射区域11的周围区域R1中支撑法布里 - 珀罗干涉滤光片10，并且当隔离物4具有与周围区域R1的内侧和周围区域R1的外侧连通的开口A1时 从光透射区域11中的光透射方向观察。