Wavelength variable interference filter, optical filter device, optical module, and electronic apparatus
    167.
    发明公开
    Wavelength variable interference filter, optical filter device, optical module, and electronic apparatus 审中-公开
    波长可变干涉滤波器,光滤波器装置,光学模块和电子设备

    公开(公告)号:EP2770310A3

    公开(公告)日:2015-01-21

    申请号:EP14155919.5

    申请日:2014-02-20

    Abstract: A wavelength variable interference filter includes a first drive electrode electrically connected to a first reflective film and a second drive electrode electrically connected to a second reflective film. The thickness of the first drive electrode is greater than the thickness of the first reflective film, and the thickness of the second drive electrode is greater than the thickness of the second reflective film. The first drive electrode has a first step portion having a thickness smaller than the thickness of the first reflective film in an end portion connected to the first reflective film, and the second drive electrode has a second step portion having a thickness smaller than the thickness of the second reflective film in an end portion connected to the second reflective film. The first reflective film is formed to extend from a surface of a fixed substrate to the surface of the first step portion, and the second reflective film is formed to extend from a surface of a movable substrate to the surface of the second step portion.

    Wavelength variable interference filter, optical filter device, optical module, and electronic apparatus
    169.
    发明公开
    Wavelength variable interference filter, optical filter device, optical module, and electronic apparatus 审中-公开
    WellenlängenvariablerInterferenzfilter,optische Filtervorrichtung,optisches Modul und elektronische Vorrichtung

    公开(公告)号:EP2770310A2

    公开(公告)日:2014-08-27

    申请号:EP14155919.5

    申请日:2014-02-20

    Abstract: A wavelength variable interference filter includes a first drive electrode electrically connected to a first reflective film and a second drive electrode electrically connected to a second reflective film. The thickness of the first drive electrode is greater than the thickness of the first reflective film, and the thickness of the second drive electrode is greater than the thickness of the second reflective film. The first drive electrode has a first step portion having a thickness smaller than the thickness of the first reflective film in an end portion connected to the first reflective film, and the second drive electrode has a second step portion having a thickness smaller than the thickness of the second reflective film in an end portion connected to the second reflective film. The first reflective film is formed to extend from a surface of a fixed substrate to the surface of the first step portion, and the second reflective film is formed to extend from a surface of a movable substrate to the surface of the second step portion.

    Abstract translation: 波长可变干涉滤光器包括电连接到第一反射膜的第一驱动电极和与第二反射膜电连接的第二驱动电极。 第一驱动电极的厚度大于第一反射膜的厚度,第二驱动电极的厚度大于第二反射膜的厚度。 第一驱动电极具有第一台阶部,该第一台阶部的厚度小于与第一反射膜连接的端部的第一反射膜的厚度,第二驱动电极的第二台阶部的厚度小于 连接到第二反射膜的端部的第二反射膜。 第一反射膜形成为从固定基板的表面延伸到第一台阶部分的表面,并且第二反射膜形成为从可移动基板的表面延伸到第二台阶部分的表面。

Patent Agency Ranking