公开(公告)号：EP2365321A3

公开(公告)日：2012-01-11

申请号：EP11168729.9

申请日：2007-12-12

Applicant: JEOL Ltd.

Inventor： Nishiyama, Hidetoshi

IPC: G01N23/225 ,  H01J37/20 ,  H01J37/22 ,  H01J37/256 ,  H01J37/28

CPC classification number: G01N23/2251 ,  H01J37/20 ,  H01J37/228 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/206 ,  H01J2237/208 ,  H01J2237/2608 ,  H01J2237/2808

Abstract: Sample inspection apparatus, sample inspection method, and sample inspection system are offered which can give a stimulus to a sample (20) held on a film (32) when the sample is inspected by irradiating it with a primary beam (7) (e.g., an electron beam or other charged particle beam) via the film. The apparatus has the film (32), a vacuum chamber (11), primary beam irradiation means, signal detection means (4), and a controller for controlling the operations of the beam irradiation means and signal detection means. The sample (20) is held on a first surface (32a) of the film opened to permit access to the film. The vacuum chamber (11) reduces the pressure of the ambient in contact with a second surface (32b) of the film. The irradiation means irradiates the sample with the primary beam via the film from the second surface side. The detection means (4) detects a secondary signal produced from the sample (20) in response to the irradiation (7).

公开(公告)号：EP1724809A1

公开(公告)日：2006-11-22

申请号：EP05076151.9

申请日：2005-05-18

Applicant: FEI COMPANY

Inventor： Knowles, Ralph W.

IPC: H01J37/28

CPC classification number: H01J37/256 ,  H01J37/228 ,  H01J37/28 ,  H01J2237/16 ,  H01J2237/2608

Abstract: Many particle-optical apparatus operate with a gas pressure near the sample (118) higher than in the particle-optical column. To avoid leakage into the column a pressure limiting aperture (PLA) with a small diameter is used through which the particle beam (160) leaves the column. Often there is also the need to combine the use of such a column with a path for electro-magnetic radiation, e.g. for the detection of X-rays or when a light-optical microscope is included for observation and/or navigation. Creating a path for this radiation (and optical elements thereof) typically results in an increased working distance for the column, resulting in several disadvantages. The invention offers a solution by placing a window (156) transparent to the electro-magnetic radiation but impervious to gas adjacent to the PLA (140), through which the beam of radiation (170) can enter and/or emerge from the column, to be guided and/or detected further.

Abstract translation: 许多粒子光学装置在样品（118）附近的气体压力高于颗粒光学柱中操作。 为了避免泄漏到柱中，使用具有小直径的压力限制孔（PLA），粒子束（160）离开柱。 通常还需要将这种柱的使用与用于电磁辐射的路径相结合，例如， 用于检测X射线或当包含用于观察和/或导航的光学显微镜时。 为该辐射（及其光学元件）创建路径通常导致柱的工作距离增加，导致几个缺点。 本发明通过将窗口（156）放置为对电磁辐射透明但不透过与PLA（140）相邻的气体而提供了解决方案，辐射束（170）可以通过该窗口进入和/或从柱子出来， 被引导和/或进一步检测。

公开(公告)号：EP0753200B1

公开(公告)日：2000-02-02

申请号：EP94922723.5

申请日：1994-07-25

Applicant: PHILIPS ELECTRONICS NORTH AMERICA CORPORATION

Inventor： KNOWLES, W., Ralph ,  SCHULTZ, William, G. ,  ARMSTRONG, Allen, E.

IPC: H01J37/256 ,  H01J37/244

CPC classification number: H01J37/228 ,  H01J37/244 ,  H01J2237/2003 ,  H01J2237/24475 ,  H01J2237/2605

Abstract: An environmental scanning electron microscope which achieves image resolution comparable to that of a conventional SEM is disclosed. A biased ring electrode (28) detects secondary electrons from the specimen and a biased pressure limiting aperture electron detector (50) is also provided to reduce signals emanating from backscattered electrons and to reduce signal noise generated by the electron beam. An optical window system is provided which allows the user to easily switch between the normal environmental SEM electron image (limited to 0.5 mm in diameter) to an optical light view of the sample that covers a field-of-view of up to about 7 to 10 mm. Moreover, the construction of this environmental SEM provides for a take-off angle for the X-ray detectors (EDX detectors) (102) which is comparable to the take-off angle for an EDX detector in a conventional SEM.

公开(公告)号：EP0766869B1

公开(公告)日：1998-08-26

申请号：EP95905795.1

申请日：1995-01-24

Applicant: BIOMATERIALS RESEARCH GROUP STICHTING AZL

Inventor： VAN BLITTERSWIJK, Clemens, Antoni ,  KOERTEN, Hendrick, Klaas ,  GREVE, Jan

IPC: H01J37/252 ,  H01J37/256 ,  G01N21/65

CPC classification number: H01J37/228 ,  G01N21/65 ,  G01N2021/656 ,  H01J37/226 ,  H01J37/252 ,  H01J37/256 ,  H01J2237/2445

Abstract: Electron microscope provided, in the direction of the longitudinal axis, with at least one electron beam generation system, a condenser and objective lens system, a specimen chamber with a specimen mount, a projection lens system with imaging screen for the purpose of transmission electron microscopy (TEM) and/or an electron detector for the purpose of scanning electron microscopy (SEM). The microscope is used in combination with an externally positioned Raman spectrometer and an associated light source for injecting and extracting, via a window in the microscope wall, a light beam to be directed at the specimen, and specimen-related Raman radiation, respectively. In the specimen chamber, a light beam and Raman radiation guide system is provided with an optical guide to guide the light beam to - and the Raman radiation from - the specimen. The guide system and the specimen mount are displaceable with respect to one another for mutual alignment of the specimen and the optical axis of the Raman spectrometer. The guide system may comprise en objective and lens system positioned at the end of the optical guide. The guide system may be in a fixed position in the specimen chamber next to the longitudinal axis of the microscope, a specimen displacement mechanism displacing the specimen mount from a position in the longitudinal axis of the microscope to a position aligned with the optical axis in the said guide system and vice versa. Equally, the optical guide may be displaceable to a position in which the optical axis running out from the end of the guide coincides with the longitudinal axis of the microscope.

公开(公告)号：EP2706556B1

公开(公告)日：2017-05-31

申请号：EP13183272.7

申请日：2013-09-06

Applicant: FEI Company

Inventor： Straw, Marcus ,  Emerson, Mark

IPC: H01J37/22 ,  H01J37/304 ,  H01J37/305

CPC classification number: H01J37/3045 ,  G21K5/00 ,  G21K5/08 ,  H01J37/226 ,  H01J37/228 ,  H01J37/3056 ,  H01J2237/1501 ,  H01J2237/28

Abstract: A method and apparatus for aligning a laser beam (216) coincident with a charged particle beam (350). The invention described provides a method for aligning the laser beam through the center of an objective lens (214) and ultimately targeting the eucentric point of a multi-beam system (300). The apparatus takes advantage of components of the laser beam alignment system being positioned within and outside of the vacuum chamber (360) of the charged particle system.

Abstract translation: 一种用于对齐与带电粒子束（350）一致的激光束（216）的方法和装置。 所描述的本发明提供了一种通过物镜（214）的中心对齐激光束并且最终瞄准多光束系统（300）的中心点的方法。 该设备利用激光束对准系统的部件位于带电粒子系统的真空室（360）内部和外部。

公开(公告)号：EP2899743B1

公开(公告)日：2016-09-21

申请号：EP14152582.4

申请日：2014-01-27

Applicant: FEI COMPANY

Inventor： Buijsse, Bart

IPC: H01J37/22 ,  H01J37/26

CPC classification number: H01J37/226 ,  H01J37/20 ,  H01J37/228 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/14 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/223 ,  H01J2237/2602

公开(公告)号：EP2991097A1

公开(公告)日：2016-03-02

申请号：EP14002946.3

申请日：2014-08-25

Applicant: Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V.

Inventor： Talebi Sarvari, Nahid

IPC: H01J37/22 ,  H01J37/244 ,  H01J37/26 ,  G01N21/00 ,  G01N23/00

CPC classification number: H01J37/228 ,  G01N23/2251 ,  H01J37/226 ,  H01J37/244 ,  H01J37/26 ,  H01J2237/2445 ,  H01J2237/24475 ,  H01J2237/24585 ,  H01J2237/2626

Abstract: A method of time-resolved pump-probe electron microscopy, comprises the steps of irradiating a sample (1) with a photonic pump pulse (2) being directed on a pump pulse path (3) from a photonic source to the sample (1), irradiating the sample (1) with an electron probe pulse (4) being directed on an electron pulse path (5) from an electron pulse source (10) to the sample (1), wherein the photonic pump pulse (2) and the electron probe pulse (4) arrive at the sample (1) with a predetermined temporal relationship relative to each other, and detecting a sample response to the electron probe pulse (4) irradiation with a detector device (20), wherein the photonic source comprises a photonic lattice structure (30) being arranged adjacent to the electron pulse path (5), and the photonic pump pulse (2) is created by an interaction of the electron probe pulse (4) with the photonic lattice structure (30). Furthermore, an electron microscopy apparatus, configured for time-resolved pump-probe electron microscopy, and a sample supply device (200) for an electron microscopy apparatus (100) are described.

Abstract translation: 时间分辨泵浦 - 探针电子显微镜的方法包括以下步骤：用从光子源到样品（1）的泵浦脉冲路径（3）上的光子泵脉冲（2）照射样品（1） 用来自电子脉冲源（10）的电子脉冲路径（5）上的电子探针脉冲（4）照射样品（1）到样品（1），其中光子泵浦脉冲（2）和 电子探针脉冲（4）以相对于彼此的预定时间关系到达样本（1），并且利用检测器装置（20）检测对电子探针脉冲（4）照射的样本响应，其中光子源包括 光电晶格结构（30）被布置为与电子脉冲路径（5）相邻，并且光子泵浦脉冲（2）通过电子探针脉冲（4）与光子晶格结构（30）的相互作用而产生。 此外，描述了配置用于时间分辨泵 - 探针电子显微镜的电子显微镜装置和用于电子显微镜装置（100）的样品供应装置（200）。

公开(公告)号：EP2899743A1

公开(公告)日：2015-07-29

申请号：EP14152582.4

申请日：2014-01-27

Applicant: FEI COMPANY

Inventor： Buijsse, Bart

IPC: H01J37/22 ,  H01J37/26

CPC classification number: H01J37/226 ,  H01J37/20 ,  H01J37/228 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/14 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/223 ,  H01J2237/2602

Abstract: The invention relates to a Correlative Light and Electron Microscope (CLEM), equipped with a TEM column and a light microscope (10), the light microscope fitting between the pole shoes (8A, 8B) of the objective lens of the TEM. To enlarge the acceptance solid angle for enhanced sensitivity a truncated lens is used. It is noted that this does not imply that the lens shows astigmatism (it is not a cylindrical lens).
The invention further teaches to make, using the light microscope, a first image with the sample (1) in a first direction. This image will show in one direction a higher (diffraction limited) resolution than in the direction perpendicular thereto, due to the different NA of the lens in the two directions (312 x , 312 y ). By rotating the sample and make a second image, a combined image can be formed showing a better resolution than either of the images in the direction where they show a low NA.

Abstract translation: 本发明涉及一种配有TEM柱和光学显微镜（10）的相关的光电子显微镜（CLEM），该光学显微镜装在TEM的物镜的极靴（8A，8B）之间。 为了增大接收立体角以提高灵敏度，使用截头透镜。 应注意，这并不意味着透镜显示散光（它不是柱面透镜）。 本发明进一步教导了使用光学显微镜使样品（1）在第一方向上的第一图像。 由于透镜在两个方向（312 x，312 y）上的不同NA，该图像将在一个方向上显示比垂直于其方向更高（衍射受限）的分辨率。 通过旋转样品并制作第二个图像，可以形成组合图像，显示出比它们显示低NA的方向中的任一个图像更好的分辨率。

公开(公告)号：EP2847573A1

公开(公告)日：2015-03-18

申请号：EP13787887.2

申请日：2013-05-08

Applicant: E.A. Fischione Instruments, Inc.

Inventor： DESHMUKH, Pushkarraj V. ,  GRONSKY, Jeffrey J. ,  FISCHIONE, Paul, E.

IPC: G01N21/01 ,  G01N23/00

CPC classification number: G01N23/225 ,  G01N21/01 ,  G01N2223/309 ,  G01N2223/31 ,  H01J37/20 ,  H01J37/228 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2065

Abstract: An
in situ optical specimen holder is disclosed which allows imaging and analysis during dynamic experimentation. This holder assembly includes a set of focusing and reflection optics along with an environmental cell. Electromagnetic radiation can be used to optically excite the specimen in the presence or absence of fluid and the source of such radiation may be located within the body of the holder itself. The spot size of the irradiation at the specimen surface can be varied, thus exciting only a specific region on the specimen. The window type cell provides a variable fluid path length ranging from the specimen thickness to 500μm. The holder has the provision to continuously circulate fluids over the specimen. The pressure within the cell can be regulated by controlling the flow rate of the fluids and the speed of the pumps.

Abstract translation: 公开了一种在动态实验中进行成像和分析的原位光学样本架。 该保持器组件包括一组聚焦和反射光学器件以及环境细胞。 电磁辐射可用于在存在或不存在流体的情况下光学地激发样品，并且这种辐射源可以位于保持器本体的主体内。 样品表面的照射点尺寸可以变化，从而仅激发样品上的特定区域。 窗型细胞提供从样品厚度到500μm的可变流体路径长度。 保持器具有连续地将流体循环流过样品的规定。 可以通过控制流体的流量和泵的速度来调节电池内的压力。

公开(公告)号：EP2191927B1

公开(公告)日：2014-01-08

申请号：EP09176974.5

申请日：2009-11-25

Applicant: FEI COMPANY

Inventor： Straw, Marcus ,  Toth, Milos ,  Utlaut, Mark ,  Randolph, Steven ,  Lysaght, Michael

IPC: B23K26/18 ,  B23K26/36 ,  B23K26/06 ,  G03F7/004 ,  G03F7/20

CPC classification number: G21G5/00 ,  B23K26/0624 ,  B23K26/0661 ,  B23K26/18 ,  B23K2201/40 ,  B23K2201/42 ,  G03F7/70383 ,  H01J37/228 ,  H01J2237/31749