Abstract:
An actuator (100) taking advantage of ponderomotive forces to enhance its electromechanical performance as a function of input energy. An actuator (100) may include a first conductive layer (102) residing on a first electret layer (101). The actuator (100) may further include a moveable second electret layer (103) which is spaced apart in relation to the first conductive layer (102) when the second electret layer (103) is in a quiescent state. The actuator (100) may further include a second conductive layer (104) in a spaced apart relation to the second electret layer (103) when the second electret layer (103) is in the quiescent state. The actuator (100) may further include a voltage source (105) configured to selectively apply a voltage between the first (102) and second (104) conductive layers thereby propelling the second electret layer (103) to either the first (102) or second (104) conductive layer.
Abstract:
An electrostatic bimorph actuator includes a cantilevered flexible bimorph arm that is secured and insulated at one end to a planar substrate. In an electrostatically activated state the bimorph arm is generally parallel to the planar substrate. In a relaxed state, residual stress in the bimorph arm causes its free end to extend out-of-plane from the planar substrate. The actuator includes a substrate electrode that is secured to and insulated from the substrate and positioned under and in alignment with the bimorph arm. An electrical potential difference applied between the bimorph arm and the substrate electrode imparts electrostatic attraction between the bimorph arm and the substrate electrode to activate the actuator. As an exemplary application in which such actuators could be used, a microelectrical mechanical optical display system is described.
Abstract:
Micromachine systems (100) are provided. An embodiment of such a micromachine system includes a substrate (111, 504) that defines a trench (116, 512). A first microelectromechanical device (110, 502) and a second microelectromechanical device (110, 502) are arranged at least partially within the trench. Each of the microelectromechanical devices incorporates a first portion that is configured to move relative to the substrate. Methods also are provided.
Abstract:
The tiltable-body apparatus including a frame member, a tiltable body, and a pair of torsion springs having a twisting longitudinal axis. The torsion springs are disposed along the twisting longitudinal axis opposingly with the tiltable body being interposed, support the tiltable body flexibly and rotatably about the twisting longitudinal axis relative to the frame member, and include a plurality of planar portions, compliant directions of which intersect each other when viewed along a direction of the twisting longitudinal axis. A center of gravity of the tiltable body is positioned on the twisting longitudinal axis of the torsion springs.
Abstract:
A compliant micro device transfer head and head array are disclosed. In an embodiment a micro device transfer head includes a spring portion that is deflectable into a space between a base substrate and the spring portion.
Abstract:
The invention relates to an electrostatic actuator comprising a stationary electrode (14) and a bending portion (22') which is securely fixed on one side and which comprises a cantilevered electrode (29) which is arranged opposite the stationary electrode (14) in an overlapping area and which can be moved in the direction of the stationary electrode (14).
Abstract:
An illumination device, comprising a reflective optical cavity (2104, 2116) including a plurality of light-transmissive regions (2108) through which light can escape the reflective optical cavity (2104, 2116); a light source (2118) arranged to introduce the light into the reflective optical cavity (2104, 2116); a plurality of light modulators (2102), each having at least first and second states, wherein, in the first state, a light modulator (2102) obstructs a corresponding light-transmissive region (2108) thereby preventing light introduced into the reflective optical cavity (2104, 2116) from illuminating an image pixel that corresponds to the light-transmissive region (2108), and in the second state, the light modulator (2102) allows light escaping the reflective optical cavity (2104, 2116) through the corresponding light-transmissive region (2108) to illuminate the image pixel corresponding to the light-transmissive region (2108).
Abstract:
An illumination device, comprising a reflective optical cavity (2104, 2116) including a plurality of light-transmissive regions (2108) through which light can escape the reflective optical cavity (2104, 2116); a light source (2118) arranged to introduce the light into the reflective optical cavity (2104, 2116); a plurality of light modulators (2102), each having at least first and second states, wherein, in the first state, a light modulator (2102) obstructs a corresponding light-transmissive region (2108) thereby preventing light introduced into the reflective optical cavity (2104, 2116) from illuminating an image pixel that corresponds to the light-transmissive region (2108), and in the second state, the light modulator (2102) allows light escaping the reflective optical cavity (2104, 2116) through the corresponding light-transmissive region (2108) to illuminate the image pixel corresponding to the light-transmissive region (2108).