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    METHOD FOR MANIPULATING MICROSCOPIC PARTICLES AND ANALYZING THE COMPOSITION THEREOF
    3.
    发明公开
    METHOD FOR MANIPULATING MICROSCOPIC PARTICLES AND ANALYZING THE COMPOSITION THEREOF 审中-公开
    过程处理微观粒子的分析及其组成

    公开(公告)号：EP1754049A2

    公开(公告)日：2007-02-21

    申请号：EP04754729.4

    申请日：2004-06-08

    申请人： Omniprobe, Inc.

    发明人： MOORE, Thomas, M. ,  ANTHONY, John, M.

    IPC分类号： G01N23/22

    CPC分类号： G01N23/2204 ,  G02B21/32 ,  H01J2237/31745

    摘要： Disclosed is a method for analyzing the composition of a microscopic particle (100) resting on a first sample surface (110). The method comprises positioning a micro-manipulator probe (120) near the particle; attaching the particle to the probe (120); moving the probe (120) and the attached particle (100) away from the first sample surface (110); positioning the particle on a second sample surface (150); and, analyzing the composition of the particle on the second sample surface (150) by energy-dispersive X-ray analysis or detection of Auger electrons. The second surface (150) has a reduced or non-interfering background signal during analysis relative to the background signal of the first surface (110). Also disclosed are methods for adjusting potentials after its transfer and relocation to the second sample surface (150).

    METHOD FOR ACQUIRING SIMULTANEOUS AND OVERLAPPING OPTICAL AND CHARGED PARTICLE BEAM IMAGES
    6.
    发明公开
    METHOD FOR ACQUIRING SIMULTANEOUS AND OVERLAPPING OPTICAL AND CHARGED PARTICLE BEAM IMAGES 审中-公开
    AND METHOD FOR法同时录制影像重叠光学和带电粒子束

    公开(公告)号：EP2601477A2

    公开(公告)日：2013-06-12

    申请号：EP11815181.0

    申请日：2011-08-02

    申请人： Omniprobe, Inc.

    发明人： MOORE, Thomas ,  HARTFIELD, Cheryl ,  MAGEL, Gregory

    IPC分类号： G01B11/00 ,  G01B9/04 ,  H01J37/26

    CPC分类号： H01J37/28 ,  G01N23/2251 ,  G01N2223/10 ,  G01N2223/418 ,  G02B21/002 ,  G02B21/367 ,  H01J37/228 ,  H01J2237/2445

    摘要： This disclosure relates to a method and apparatus for producing multiple pixel-by-pixel simultaneous and overlapping images of a sample in a microscope with multiple imaging beams. A scanning electron microscope, a focused ion-beam microscope, or a microscope having both beams, also has an optical microscope. A region of interest on a sample is scanned by both charged-particle and optical beams, either by moving the sample beneath the beams by use of a mechanical stage, or by synchronized scanning of the stationary sample by the imaging beams, or by independently scanning the sample with the imaging beams and recording imaging signals so as to form pixel-by-pixel simultaneous and overlapping images.

    摘要翻译： 本公开涉及一种用于在具有多个成像射束显微镜产生样品的多个像素由像素同时和重叠的图像的方法和装置。 扫描型电子显微镜，聚焦离子束显微镜，或具有两种光束显微镜，以便有光学显微镜。 感兴趣样品上的区域由两个带电粒子和光束扫描，或者通过使用机械台的移动梁下方的样品，或由成像射束固定样品的同步扫描，或者通过unabhängig扫描 与成像光束和记录的摄像信号的样品，以形成像素的逐像素同时和重叠的图像。