PROCESS FOR THE GENERATION OF THIN INORGANIC FILMS
    4.
    发明公开
    PROCESS FOR THE GENERATION OF THIN INORGANIC FILMS 审中-公开
    生成薄无机膜的过程

    公开(公告)号:EP3177751A1

    公开(公告)日:2017-06-14

    申请号:EP15739640.9

    申请日:2015-07-24

    Applicant: BASF SE

    Abstract: The present invention is in the field of processes for the generation of thin inorganic films on substrates. More specifically, the present invention relates to a process comprising bringing a compound of general formula (I) into the gaseous or aerosol state and depositing the compound of general formula (I) from the gaseous or aerosol state onto a solid substrate, wherein R11, R12, R13, R14, R15, R16, R17, R18 are independent of each other hydrogen, an alkyl group, an aryl group, or a trialkylsilyl group, R21, R22, R23, R24 are independent of each other an alkyl group, an aryl group, or a trialkylsilyl group, n is 1 or 2, M is a metal or semimetal, X is a ligand which coordinates M, and m is an integer from 0 to 3.

    Abstract translation: 本发明属于在基材上产生无机薄膜的方法领域。 更具体地说,本发明涉及一种包括使通式(I)的化合物进入气态或气溶胶状态并将通式(I)的化合物从气态或气溶胶状态沉积到固体基质上的方法,其中R 11, R12,R13,R14,R15,R16,R17,R18相互独立地为氢,烷基,芳基或三烷基甲硅烷基,R21,R22,R23,R24彼此独立地为烷基, 芳基或三烷基甲硅烷基,n为1或2,M为金属或半金属,X为配位M的配位体,m为0〜3的整数。

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