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公开(公告)号：EP2344416B1
公开(公告)日：2020-08-05
申请号：EP09749300.1
申请日：2009-11-06
Applicant: Cavendish Kinetics, Inc.
Inventor： SMITH, Charles Gordon , KNIPE, Richard L. , JOSHI, Vikram , GADDI, Roberto , UNAMUNO, Anartz , VAN KAMPEN, Robertus Petrus
IPC: B81C1/00
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公开(公告)号：EP3053181A1
公开(公告)日：2016-08-10
申请号：EP14781789.4
申请日：2014-09-24
Applicant: Cavendish Kinetics, Inc.
Inventor： RENAULT, Mickael , JOSHI, Vikram , VAN KAMPEN, Robertus Petrus , MAGUIRE, Thomas L. , KNIPE, Richard L.
CPC classification number: H01G5/16 , B81B3/0086 , B81B2201/0221 , B81B2203/04 , B81C1/00166 , B81C2201/0104 , B81C2201/0109 , H01G5/011 , H01H59/0009
Abstract: The present invention generally relates to a MEMS device and a method of manufacture thereof. The RF electrode, and hence, the dielectric layer thereover, has a curved upper surface that substantially matches the contact area of the bottom surface of the movable plate. As such, the movable plate is able to have good contact with the dielectric layer and thus, good capacitance is achieved.
Abstract translation: 本发明一般涉及MEMS器件及其制造方法。 RF电极以及因此其上的电介质层具有基本上与可移动板的底表面的接触面积匹配的弯曲的上表面。 因此，可移动板能够与电介质层良好的接触，从而实现良好的电容。
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公开(公告)号：EP2751817B1
公开(公告)日：2020-08-19
申请号：EP12828150.8
申请日：2012-09-04
Applicant: Cavendish Kinetics Inc.
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公开(公告)号：EP3254294A1
公开(公告)日：2017-12-13
申请号：EP16703698.7
申请日：2016-01-28
Applicant: Cavendish Kinetics, Inc.
Inventor： VAN KAMPEN, Robertus Petrus , GADDI, Roberto , KNIPE, Richard L.
CPC classification number: H01G4/005 , B81B2201/016 , H01H1/0036 , H01H59/0009 , H01H2001/0057 , H01H2001/0084
Abstract: The present disclosure generally relates to a MEMS DVC utilizing one or more MIM capacitors located in the anchor of the DVC and an Ohmic contact located on the RF-electrode. The MIM capacitor in combination with the ohmic MEMS device ensures that a stable capacitance for the MEMS DVC is achieved with applied RF power.
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公开(公告)号：EP2745301A1
公开(公告)日：2014-06-25
申请号：EP12759849.8
申请日：2012-08-17
Applicant: Cavendish Kinetics Inc.
Inventor： GADDI, Roberto , VAN KAMPEN, Robertus Petrus , KNIPE, Richard L. , UNAMUNO, Anartz
CPC classification number: H01G5/16 , H01G5/38 , H01G7/00 , H01H59/0009 , Y10T29/43
Abstract: Utilizing a variable capacitor for RF and microwave applications provides for multiple levels of intra-cavity routing that advantageously reduce capacitive coupling. The variable capacitor includes a bond pad that has a plurality of cells electrically coupled thereto. Each of the plurality of cells has a plurality of MEMS devices therein. The MEMS devices share a common RF electrode, one or more ground electrodes and one or more control electrodes. The RF electrode, ground electrodes and control electrodes are all arranged parallel to each other within the cells. The RF electrode is electrically connected to the one or more bond pads using a different level of electrical routing metal.
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Patent Agency Ranking
公开(公告)号：EP2751837B1
公开(公告)日：2020-07-22
申请号：EP12827352.1
申请日：2012-09-04
Applicant: Cavendish Kinetics Inc.
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公开(公告)号：EP3378088B1
公开(公告)日：2019-08-21
申请号：EP16804971.6
申请日：2016-11-15
Applicant: Cavendish Kinetics, Inc.
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公开(公告)号：EP2751818B1
公开(公告)日：2019-05-08
申请号：EP12772159.5
申请日：2012-08-31
Applicant: Cavendish Kinetics Inc.
Inventor： GADDI, Roberto , KNIPE, Richard L. , VAN KAMPEN, Robertus Petrus , UNAMUNO, Anartz
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公开(公告)号：EP2996983B1
公开(公告)日：2019-01-02
申请号：EP14728400.4
申请日：2014-05-16
Applicant: Cavendish Kinetics Inc.
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公开(公告)号：EP2619780B1
公开(公告)日：2015-12-16
申请号：EP11770225.8
申请日：2011-09-19
Applicant: Cavendish Kinetics Inc.
Inventor： KNIPE, Richard L. , VAN KAMPEN, Robertus Petrus , UNAMUNO, Anartz , GADDI, Roberto
CPC classification number: H01H1/0036 , H01H59/0009 , H01H2001/0084
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