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公开(公告)号：EP2572788B1
公开(公告)日：2015-03-18
申请号：EP11182533.7
申请日：2011-09-23
发明人： Jones, Ben , Fiorini, Paolo , Tanaka, Hiroyuki
CPC分类号： B01L3/502707 , B01L3/502715 , B01L7/52 , B01L2200/147 , B01L2300/0816 , B01L2300/1805 , B01L2300/1883 , B81B3/0081 , B81B7/0087 , B81B2201/051
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2.发明公开Method and device for thermal insulation of micro-reactors 有权Verfahren und Vorrichtung zurWärmeisolierungvon Mikroreaktoren
公开(公告)号：EP2572788A1
公开(公告)日：2013-03-27
申请号：EP11182533.7
申请日：2011-09-23
发明人： Jones, Ben , Fiorini, Paolo , Tanaka, Hiroyuki
CPC分类号： B01L3/502707 , B01L3/502715 , B01L7/52 , B01L2200/147 , B01L2300/0816 , B01L2300/1805 , B01L2300/1883 , B81B3/0081 , B81B7/0087 , B81B2201/051
摘要： The present invention provides a micro-fluidic device (104), comprising:
- a semiconductor substrate;
- at least one micro-reactor (105) in said semiconductor substrate;
- one or more micro-fluidic channels (101) in said semiconductor substrate, connected to said at least one micro-reactor (105);
- a cover layer (106) bonded to the semiconductor substrate (900) for sealing the one or more micro-fluidic channels (101); and
- at least one through-substrate trench (100) surrounding said at least one micro-reactor (105) and the one or more micro-fluidic channels (101).摘要翻译： 本发明提供了一种微流体装置（104），包括： - 半导体衬底; - 所述半导体衬底中的至少一个微反应器（105） - 连接到所述至少一个微反应器（105）的所述半导体衬底中的一个或多个微流体通道（101）; - 结合到所述半导体衬底（900）上用于密封所述一个或多个微流体通道（101）的覆盖层（106）; 以及 - 围绕所述至少一个微反应器（105）和所述一个或多个微流体通道（101）的至少一个贯通衬底沟槽（100）。
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公开(公告)号：EP2902109A1
公开(公告)日：2015-08-05
申请号：EP15154853.4
申请日：2011-09-23
CPC分类号： B01L3/502707 , B01L3/502715 , B01L7/52 , B01L2200/147 , B01L2300/0816 , B01L2300/1805 , B01L2300/1883 , B81B3/0081 , B81B7/0087 , B81B2201/051
摘要： A method for manufacturing a micro-fluidic device (104) comprises:
- providing a semiconductor substrate (900) having a front side and a back side;
- providing at least one micro-reactor (105) in said semiconductor substrate (900);
- providing one or more micro-fluidic channels (101) in the front side of said semiconductor substrate (900), connected to said at least one micro-reactor (105);
- sealing said micro-fluidic channels (101) by bonding of a cover layer (903) to the front side of the semiconductor substrate (900); and
- thereafter, from the semiconductor backside, providing at least a partial etch for forming at least one through-substrate trench (100) surrounding said at least one micro-reactor (105) and the one or more micro-fluidic channels (101).摘要翻译： 一种用于制造微流体装置（104）的方法，包括：提供具有正面和背面的半导体衬底（900） - 在所述半导体衬底（900）中提供至少一个微反应器（105）; - 在所述半导体衬底（900）的正面中提供连接到所述至少一个微反应器（105）的一个或多个微流体通道（101）;以及 - - 通过将覆盖层（903）结合到所述半导体衬底（900）的所述前侧来密封所述微流体通道（101）; 然后从半导体背面提供用于形成围绕所述至少一个微反应器（105）和一个或多个微流体通道（101）的至少一个贯穿基板沟槽（100）的至少部分蚀刻， 。
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公开(公告)号：EP2902109B1
公开(公告)日：2018-10-31
申请号：EP15154853.4
申请日：2011-09-23
CPC分类号： B01L3/502707 , B01L3/502715 , B01L7/52 , B01L2200/147 , B01L2300/0816 , B01L2300/1805 , B01L2300/1883 , B81B3/0081 , B81B7/0087 , B81B2201/051
摘要： The present invention provides a micro-fluidic device (104), comprising: - a semiconductor substrate; - at least one micro-reactor (105) in said semiconductor substrate; - one or more micro-fluidic channels (101) in said semiconductor substrate, connected to said at least one micro-reactor (105); - a cover layer (106) bonded to the semiconductor substrate (900) for sealing the one or more micro-fluidic channels (101); and - at least one through-substrate trench (100) surrounding said at least one micro-reactor (105) and the one or more micro-fluidic channels (101).
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5.发明公开Device and method for performing digital PCR 审中-公开Vorrichtung und Verfahren zurAusführungeiner digitalen PCR
公开(公告)号：EP2878374A1
公开(公告)日：2015-06-03
申请号：EP13195075.0
申请日：2013-11-29
申请人： IMEC VZW
发明人： Fiorini, Paolo , Stakenborg, Tim , Colle, Frederik
CPC分类号： B01L3/502784 , B01L7/52 , B01L2200/061 , B01L2200/0673 , B01L2200/10 , B01L2300/0627 , B01L2300/0816 , B01L2300/0867 , B01L2300/0883 , B01L2300/1827 , C12Q1/686
摘要： A micro-fluidic device 100 for performing digital PCR is presented. The device comprises: a semiconductor substrate; a first micro-fluidic channel 104, comprising an inlet 102 and an outlet 103, embedded in the semiconductor substrate; a heating element 101 thermally coupled to the first micro-fluidic channel 104; a droplet generator 107 connected to the inlet 102 of the first micro-fluidic channel 104 for generating droplets and pumping generated droplets at a flow rate into the first micro-fluidic channel 104; characterized in that: the heating element 101 is a single heating element connected to a temperature control unit 111 configured to cycle the temperature of the complete first micro-fluidic channel 104 through at least two temperature values; and wherein the flow rate of the droplet generator 107 is adaptable. Further, a method to perform digital PCR is presented using the micro-fluidic device 100.
摘要翻译： 提出了一种用于执行数字PCR的微流体装置100。 该装置包括：半导体衬底; 第一微流体通道104，包括嵌入在半导体衬底中的入口102和出口103; 热耦合到第一微流体通道104的加热元件101; 连接到第一微流体通道104的入口102的液滴发生器107，用于产生液滴并以一定流量将产生的液滴泵入第一微流体通道104; 其特征在于：加热元件101是连接到温度控制单元111的单个加热元件，温度控制单元111被配置为使完整的第一微流体通道104的温度循环至少两个温度值; 并且其中液滴发生器107的流量是适应性的。 此外，使用微流体装置100呈现执行数字PCR的方法。
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公开(公告)号：EP2803410A1
公开(公告)日：2014-11-19
申请号：EP13168227.0
申请日：2013-05-17
申请人： IMEC
CPC分类号： B01L3/50273 , B01L3/502738 , B01L3/502746 , B01L2300/0636 , B01L2300/0829 , B01L2300/168 , B01L2400/0406 , B01L2400/0427 , B01L2400/0688 , B01L2400/086 , G01N21/658 , G01N27/44704
摘要： In a first aspect of the invention, a micro-fluidic device is presented. The device comprises a micro-fluidic channel having an inner surface; a plurality of pillars positioned along the length of the inner surface of the micro-fluidic channel and configured for creating a capillary action in the micro-fluidic channel when a fluid is present in the micro-fluidic channel. The micro-fluidic device further comprises a plurality of electric power supplies. Each electric power supply is suitable for generating a different voltage and each pillar is connected to a different electric power supply. In a second aspect of the invention, another micro-fluidic device is presented. The device comprises a micro-fluidic channel having an inner surface; a plurality of pillars positioned along the inner surface of the micro-fluidic channel and configured for creating a capillary action in the micro-fluidic channel. The micro-fluidic device further comprises at least one electric power supply. The plurality of pillars are grouped into at least two groups of pillars, each group of pillars comprising at least two pillars and all pillars of at least one group of pillars are connected to the at least one power supply. In a third aspect of the invention, a sensing system for detecting bioparticles is presented. The system comprises a micro-fluidic device according to an embodiment of the invention wherein the surface of each pillar comprises functionalized plasmonic nanoparticles or functionalized SERS nanoparticles; a radiation source for radiating the micro-fluidic device and a detector for detecting SERS signals or surface plasmon resonance.
摘要翻译： 在本发明的第一方面，提出了一种微流体装置。 该装置包括具有内表面的微流体通道; 多个柱沿着微流体通道的内表面的长度定位并且被配置为当流体存在于微流体通道中时在微流体通道中产生毛细作用。 微流体装置还包括多个电源。 每个电源适用于产生不同的电压，每个支柱连接到不同的电源。 在本发明的第二方面，提出了另一种微流体装置。 该装置包括具有内表面的微流体通道; 多个柱沿着微流体通道的内表面定位，并被配置用于在微流体通道中产生毛细作用。 微流体装置还包括至少一个电源。 多个支柱被分组成至少两组支柱，每组支柱包括至少两个支柱，并且至少一组支柱的所有支柱连接到所述至少一个电源。 在本发明的第三方面，提出了一种用于检测生物颗粒的感测系统。 该系统包括根据本发明的实施方案的微流体装置，其中每个柱的表面包含官能化等离子体激元纳米颗粒或官能化的SERS纳米颗粒; 用于辐射微流体装置的辐射源和用于检测SERS信号或表面等离子体共振的检测器。
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7.发明授权Microstructured micropillar arrays for controllable filling of a capillary pump 有权用于可控填充毛细管泵的微结构微柱阵列
公开(公告)号：EP2896457B1
公开(公告)日：2017-08-23
申请号：EP14151290.5
申请日：2014-01-15
申请人： IMEC VZW
发明人： Jones, Benjamin , Fiorini, Paolo
IPC分类号： B01L3/00
CPC分类号： B01L3/50273 , B01L3/502738 , B01L3/502746 , B01L2300/0838 , B01L2300/12 , B01L2400/0406 , B01L2400/0688 , Y10T137/87917
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8.发明公开Microstructured micropillar arrays for controllable filling of a capillary pump 有权MikrostrukturierteMikrostützen-Arrays zur steuerbarenBefüllungeiner kapillaren Pumpe
公开(公告)号：EP2896457A1
公开(公告)日：2015-07-22
申请号：EP14151290.5
申请日：2014-01-15
申请人： IMEC VZW
发明人： Jones, Benjamin , Fiorini, Paolo
IPC分类号： B01L3/00
CPC分类号： B01L3/50273 , B01L3/502738 , B01L3/502746 , B01L2300/0838 , B01L2300/12 , B01L2400/0406 , B01L2400/0688 , Y10T137/87917
摘要： The embodiments of the present invention disclose a micro-fluidic device comprising a substrate, a cavity in the substrate and a plurality of micro-pillar columns located inside the cavity. The micro-pillars columns are configured to create a capillary action when a fluid sample is provided in the cavity. A micro-fluidic channel is present between two walls of any two adjacent micro-pillars in a same micro-pillar column. Each of the two walls comprises a sharp corner along the direction of a propagation path of the fluid sample in the micro-fluidic channel thereby forming a capillary stop valve. A notch provided in a sidewall of the cavity acts as a capillary stop valve.
摘要翻译： 本发明的实施例公开了一种微流体装置，其包括衬底，衬底中的腔和位于空腔内的多个微柱。 微柱柱配置成当在空腔中提供流体样品时产生毛细管作用。 微流体通道存在于相同微柱柱中任意两个相邻微柱的两个壁之间。 两个壁中的每一个包括沿微流体通道中的流体样品的传播路径的方向的尖角，从而形成毛细管截止阀。 设置在腔的侧壁中的凹口用作毛细管截止阀。
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公开(公告)号：EP2395549B1
公开(公告)日：2014-06-25
申请号：EP10165504.1
申请日：2010-06-10
申请人： IMEC
发明人： Oprins, Herman , Vandevelde, Bart , Fiorini, Paolo , Beyne, Eric , De Vos, Joeri , Majeed, Bivragh
IPC分类号： H01L23/473
CPC分类号： H01L23/4735 , H01L2924/0002 , H01L2924/00
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公开(公告)号：EP2395549A1
公开(公告)日：2011-12-14
申请号：EP10165504.1
申请日：2010-06-10
申请人： IMEC
发明人： Oprins, Herman , Vandevelde, Bart , Fiorini, Paolo , Beyne, Eric , De Vos, Joeri , Majeed, Bivragh
IPC分类号： H01L23/473
CPC分类号： H01L23/4735 , H01L2924/0002 , H01L2924/00
摘要： The present invention is related to a device for cooling the surface of a semiconductor device such as an integrated circuit or the like, said cooling device comprising a plurality of channels (3') which are non-parallel to the surface to be cooled, each channel comprising a plurality of separate electrodes (5) or equivalent conducting areas arranged along the length of each channel, the device further comprising or being connectable to means for applying a voltage to said electrodes or conducting areas in each channel according to a sequence, said sequence being such that a droplet (6) of cooling liquid in a channel may be moved from one electrode to the next, thereby transporting the droplet from the top of the channel to the bottom, from where the droplet impinges on the surface to be cooled.
摘要翻译： 本发明涉及一种用于冷却诸如集成电路等的半导体器件的表面的器件，所述冷却器件包括与待冷却表面不平行的多个通道（3'），每个通道 通道包括沿着每个通道的长度布置的多个分离的电极（5）或等效的导电区域，所述装置还包括或可连接到根据序列向每个通道中的所述电极或导电区域施加电压的装置，所述装置 顺序是使得通道中的冷却液体的液滴（6）可以从一个电极移动到下一个电极，从而将液滴从通道的顶部输送到底部，从而液滴撞击在待冷却的表面上 。
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