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公开(公告)号：EP3373387A2
公开(公告)日：2018-09-12
申请号：EP18160897.7
申请日：2018-03-09
CPC分类号： H01H59/0009 , H01H1/0036 , H01H2001/0052 , H01H2001/0084 , H01H2001/0089 , H01H2059/0027 , H01H2205/004 , H01H2239/004 , H01H2239/018 , H01P1/127 , H01P1/2005
摘要： A microelectromechanical switch having improved isolation and insertion loss characteristics and reduced liability for stiction. The switch includes a signal line having an input port and an output port between first and second ground planes. The switch also includes a beam for controlling activation of the switch. In some embodiments, the switch further includes one or more defected ground structures formed in the first and second ground planes, and a corresponding secondary deflectable beam positioned over each defected ground structure. In some embodiments, the switch includes a metamaterial structure for generating a repulsive Casimir force.
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2.发明公开
公开(公告)号：EP3038126A1
公开(公告)日：2016-06-29
申请号：EP14307128.0
申请日：2014-12-22
申请人： DelfMEMS SAS
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , B81B3/0051 , B81B2201/018 , B81B2203/0127 , B81C1/00158 , B81C2201/013 , H01H49/00 , H01H2059/0027 , H01H2059/0036 , H01H2227/004
摘要： The present invention relates to a method of manufacturing an MEMS device that comprises the steps of forming a first membrane layer over a sacrificial base layer, forming a second membrane layer over the first membrane layer, wherein the second membrane layer comprises lateral recesses exposing lateral portions of the first membrane layer and forming stoppers to restrict movement of the first membrane layer. Moreover, it is provided MEMS device comprising a movable membrane comprising a first membrane layer and a second membrane layer formed over the first membrane layer, wherein the second membrane layer comprises lateral recesses exposing lateral portions of the first membrane layer.
摘要翻译： 本发明涉及一种制造MEMS器件的方法，该方法包括以下步骤：在牺牲基底层上形成第一膜层，在第一膜层上形成第二膜层，其中第二膜层包括侧向凹槽， 的第一膜层并形成止挡件以限制第一膜层的运动。 此外，提供了包括可移动膜的MEMS装置，该可移动膜包括形成在第一膜层上的第一膜层和第二膜层，其中第二膜层包括暴露第一膜层的侧向部分的侧向凹部。
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公开(公告)号：EP3411894A1
公开(公告)日：2018-12-12
申请号：EP17713766.8
申请日：2017-02-02
IPC分类号： H01H59/00
CPC分类号： B81B3/0051 , B81B2201/014 , B81B2203/0118 , B81B2203/0181 , B81C1/0015 , B81C2201/0109 , B81C2201/0197 , H01H59/0009 , H01H2059/0027 , H01H2059/0054
摘要： Microelectromechanical systems (MEMS) switches are described. The MEMS switches can be actively opened and closed. The switch can include a beam coupled to an anchor on a substrate by one or more hinges. The beam, the hinges and the anchor may be made of the same material in some configurations. The switch can include electrodes, disposed on a surface of the substrate, for electrically controlling the orientation of the beam. The hinges may be thinner than the beam, resulting in the hinges being more flexible than the beam. In some configurations, the hinges are located within an opening in the beam. The hinges may extend in the same direction of the axis of rotation of the beam and/or in a direction perpendicular to the axis of rotation of the beam.
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公开(公告)号：EP3378085A1
公开(公告)日：2018-09-26
申请号：EP16801685.5
申请日：2016-11-14
CPC分类号： H01H59/0009 , H01H2001/0084 , H01H2059/0027 , H01H2059/0072
摘要： The present disclosure generally relates to a mechanism for making a MEMS switch that can switch large electrical powers. Extra landing electrodes are employed that provide added electrical contact along the MEMS device so that when in contact current and heat are removed from the MEMS structure close to the hottest points.
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公开(公告)号：EP1385189A2
公开(公告)日：2004-01-28
申请号：EP03016858.7
申请日：2003-07-24
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01G5/40 , H01H2001/0078 , H01H2059/0027
摘要： A switch comprises voltage applying means for providing direct current potentials to first to third beams arranged with a spacing slightly distant one from another, and electrodes for inputting/outputting signals to/from the beams. By controlling the direct current potential provided to the beam, an electrostatic force is caused to thereby change the beam positions and change a capacitance between the beams. By causing an electrostatic force between the first and second beams and moving the both beams, the first and second beams can be electrically coupled together at high speed. Also, an electrostatic force is caused on the third beam arranged facing to the first and second beams, to previously place it close to the first and second beams. When the electrostatic force is released from between the first and second beams, the second beam moves toward the third beam thereby releasing the first and second beams of an electric coupling.
摘要翻译： 开关包括电压施加装置，用于向彼此稍微间隔的间隔布置的第一至第三波束提供直流电势，以及用于向/从波束输入/输出信号的电极。 通过控制提供给光束的直流电势，引起静电力从而改变光束位置并改变光束之间的电容。 通过在第一和第二光束之间产生静电力并移动两个光束，第一和第二光束可以高速电耦合在一起。 此外，在面对第一和第二光束布置的第三光束上产生静电力，以预先将其靠近第一和第二光束。 当静电力从第一和第二光束之间释放时，第二光束朝着第三光束移动，从而释放电耦合的第一和第二光束。
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公开(公告)号：EP3373387A3
公开(公告)日：2018-12-12
申请号：EP18160897.7
申请日：2018-03-09
CPC分类号： H01H59/0009 , H01H1/0036 , H01H2001/0052 , H01H2001/0084 , H01H2001/0089 , H01H2059/0027 , H01H2205/004 , H01H2239/004 , H01H2239/018 , H01P1/127 , H01P1/2005
摘要： A microelectromechanical switch having improved isolation and insertion loss characteristics and reduced liability for stiction. The switch includes a signal line having an input port and an output port between first and second ground planes. The switch also includes a beam for controlling activation of the switch. In some embodiments, the switch further includes one or more defected ground structures formed in the first and second ground planes, and a corresponding secondary deflectable beam positioned over each defected ground structure. In some embodiments, the switch includes a metamaterial structure for generating a repulsive Casimir force.
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公开(公告)号：EP3407405A1
公开(公告)日：2018-11-28
申请号：EP18181486.4
申请日：2017-02-10
申请人： The Noco Company
发明人： NOOK, Jonathan Lewis , NOOK, William Knight , STANFIELD, James Richard , UNDERHILL, Derek Michael
CPC分类号： F02N11/12 , F02N11/087 , F02N11/14 , H01H2059/0027 , H01M2/30 , H02J2001/006
摘要： A rechargeable battery assembly for use in a rechargeable jump starting device having a positive cable with a positive battery clamp and a negative cable with a negative battery clamp, the rechargeable battery assembly comprising a rechargeable battery, a positive terminal conductor bar and a negative terminal conductor bar, wherein the rechargeable battery assembly is configured to maximize electrical conductivity from the rechargeable battery to a battery being jump started.
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公开(公告)号：EP1388875A3
公开(公告)日：2006-04-12
申请号：EP03254928.9
申请日：2003-08-07
发明人： Iwata, Hideki, c/o Fujitsu Component Limited , Yuba, Takashi, c/o Fujitsu Component Limited , Saso, Hirofumi, c/o Fujitsu Component Limited
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2001/0084 , H01H2059/0027 , H01H2059/0072
摘要： A micro-relay includes a first substrate (10) having stationary contacts and a stationary electrode, a second substrate (30) arranged so as to face the first substrate, and a movable plate (20) arranged between the first and second substrates. The movable plate has a frame (25) and a movable portion (21). The frame is sandwiched between the first and second substrates to realize a hermetical sealed structure. The movable portion has a movable electrode facing the stationary electrode, and a movable contact faces the stationary contacts. The movable portion moves between the first and second substrates due to electrostatic attraction that develops between the movable electrode and the stationary electrode.
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公开(公告)号：EP3038125A1
公开(公告)日：2016-06-29
申请号：EP14307127.2
申请日：2014-12-22
申请人： DelfMEMS SAS
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , B81B3/0086 , B81B2201/018 , B81B2203/0127 , B81C1/00158 , B81C2201/0188 , H01H49/00 , H01H2059/0027 , H01H2059/0036 , H01H2227/004
摘要： The present invention relates to a method of manufacturing an MEMS device, in particular, an MEMS switch, comprising the steps of forming posts and a conduction (transmission) line over a substrate and forming a membrane over the posts and the conduction line comprising forming a first membrane layer and a second membrane layer over the first membrane layer in a region over one of the posts and/or a region over the conduction line such that the first membrane layer has a region where the second membrane layer is not formed adjacent to the region where the second membrane layer is formed. Moreover, it is provided an MEMS device, in particular, an MEMS switch, comprising posts and a conduction (transmission) line formed over a substrate and a membrane over the posts and the conduction line. The membrane comprises a first membrane layer and a second membrane layer formed over the first membrane layer in a region over one of the posts and/or a region over the conduction line such that the first membrane layer has a region where the second membrane layer is not formed adjacent to the region where the second membrane layer is formed.
摘要翻译： 本发明涉及一种制造MEMS器件，特别是MEMS开关的方法，包括以下步骤：在衬底上形成柱和导电（透射）线，并在柱上形成膜，导线包括形成 第一膜层和第二膜层之上的第一膜层和第二膜层上的第一膜层和第二膜层之间的区域，使得第一膜层具有不与第二膜层相邻的区域 形成第二膜层的区域。 此外，它提供了一种MEMS器件，特别是MEMS开关，其包括柱和形成在衬底上的导电（透射）线和在柱和导电线上的膜。 所述膜包括第一膜层和第二膜层，所述第一膜层和所述第二膜层形成在所述第一膜上方的区域中，并且在所述导电线上方的区域和/或所述导电线上的区域中形成在所述第一膜层上，使得所述第一膜层具有第二膜层 不与形成有第二膜层的区域相邻地形成。
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10.发明公开
公开(公告)号：EP1642311A2
公开(公告)日：2006-04-05
申请号：EP04737143.0
申请日：2004-06-23
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01G5/40 , H01H2059/0027 , H01H2059/0045
摘要： The MEMS element of the invention has a first, a second and an intermediate third electrode. It is given an increased dynamic range in that the switchable capacitor constituted by the second and the third electrode is provided in the signal path between input and output, and that the switchable capacitor constituted by the first and third electrode is provided between the signal path and ground. The MEMS element of the invention is very suitable for integration in a network of passive components.
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