HEMT POWER DEVICE OPERATING IN ENHANCEMENT MODE AND MANUFACTURING PROCESS THEREOF

    公开(公告)号:EP3690928A1

    公开(公告)日:2020-08-05

    申请号:EP20154416.0

    申请日:2020-01-29

    Abstract: The power device is formed by a D-mode HEMT (2) and by a MOSFET (3) in cascade to each other and integrated in a chip (51) having a base body (16) and a heterostructure layer (17) on the base body. The D-mode HEMT (2) comprises a channel area formed in the heterostructure layer; the MOSFET (3) comprises a first and a second conduction region (20, 21) formed in the base body, and an insulated-gate region (33A, 33B) formed in the heterostructure layer, laterally and electrically insulated from the D-mode HEMT. A first metal region (25) extends through the heterostructure layer, laterally to the channel area and in electrical contact with the channel area and the first conduction region (20).

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