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    Defect inspection apparatus and defect inspection method
    8.
    发明专利
    Defect inspection apparatus and defect inspection method 有权
    缺陷检查装置和缺陷检查方法

    公开(公告)号：JP2013231631A

    公开(公告)日：2013-11-14

    申请号：JP2012102819

    申请日：2012-04-27

    申请人： Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

    发明人： HONDA TOSHIFUMI ,  URANO YUTA ,  JINGU TAKAHIRO ,  HAMAMATSU REI

    IPC分类号： G01N21/88 ,  G01B11/30 ,  G01N21/956

    CPC分类号： G01N21/8806 ,  G01J1/0474 ,  G01J1/44 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/06113 ,  G01N2201/068 ,  G01N2201/0683 ,  G01N2201/0697 ,  G01N2201/10 ,  G01N2201/12

    摘要： PROBLEM TO BE SOLVED: To detect a minute defect, measure dimensions of the detected defect with high accuracy, non-destructively inspect a sample and obtain substantially fixed inspection results related to a number, a position, the dimensions and a defect type of the detected defect to inspect a large number of samples within a given amount of time.SOLUTION: A defect inspection apparatus comprises: irradiating means for irradiating a linear region on a sample surface with illumination light; detecting means for detecting reflected and scattered light from the linear region on a sample irradiated with the light by the irradiating means; and signal processing means for processing a signal obtained by detecting the reflected and scattered light to detect the defect on the sample. The detecting means is equipped with: an optical system for dispersing the reflected and scattered light from the sample in one direction and for image forming in a direction orthogonal to the one direction; and a detection system for detecting the reflected and scattered light dispersed in the one direction and image formed in the direction orthogonal to the one direction by the optical system, by using an array sensor in which detection pixels are two-dimensionally arranged, and for adding an output signal of every detection pixel arranged in a line in the direction in which the reflected and scattered light is dispersed and outputting the summed output signal.

    摘要翻译： 要解决的问题：为了检测微小缺陷，以高精度测量检测到的缺陷的尺寸，对样品进行非破坏性检查，并获得与检测到的数量，位置，尺寸和缺陷类型相关的基本上固定的检查结果 缺陷，在一定时间内检查大量样品。解决方案：缺陷检查装置包括：用照明光照射样品表面上的线性区域的照射装置; 检测装置，用于检测由照射装置照射的光的样品上的线性区域的反射和散射光; 以及信号处理装置，用于处理通过检测反射和散射光获得的信号，以检测样品上的缺陷。 检测装置配备有：用于将来自样品的反射和散射光沿一个方向分散并用于沿与该一个方向正交的方向成像的光学系统; 以及检测系统，用于通过使用其中检测像素被二维布置的阵列传感器，用于通过光学系统检测沿一个方向分散的反射和散射光以及在与该一个方向正交的方向上形成的图像，并且用于添加 每个检测像素的输出信号被布置在反射和散射光分散的方向上的一行中，并输出相加的输出信号。

    Measuring apparatus and method, tomography device and method
    10.
    发明专利
    Measuring apparatus and method, tomography device and method 审中-公开
    测量装置和方法，TOMOGRAPHY装置和方法

    公开(公告)号：JP2013181929A

    公开(公告)日：2013-09-12

    申请号：JP2012047462

    申请日：2012-03-04

    申请人： Canon Inc ,  キヤノン株式会社

    发明人： ITSUJI TAKEAKI

    IPC分类号： G01N21/41 ,  G01N21/35

    CPC分类号： G01N21/3586 ,  G01B11/06 ,  G01N21/35 ,  G01N21/3581 ,  G01N21/41 ,  G01N21/47 ,  G01N21/4795 ,  G01N2201/06113 ,  G01N2201/0638 ,  G01N2201/0697

    摘要： PROBLEM TO BE SOLVED: To provide a measuring apparatus and a method by which detection accuracy of thickness and a refraction index, etc. of a domain to be sandwiched by reflection parts of a measuring object can be improved.SOLUTION: A device for acquiring physical properties of a measuring object by time domain spectrometry has: a detection part 101; a delay part 104 which adjusts time difference between generation and detection of an electromagnetic wave pulse; a shaping part 102 which condenses the electromagnetic wave pulse; a waveform acquisition part 105 which constructs a time waveform of the electromagnetic wave pulse by referring to output of the detection part and an adjustment amount of the delay part; and a condensation position adjustment part 106 which adjusts a condensation position of the electromagnetic wave pulse to the measuring object. When the condensation position is moved to the measuring object, the adjustment amount by the condensation position adjustment part and difference by the delay part to be required for detecting first and second pulses of the time waveform when the condensation position overlaps first and second reflection parts of the measuring part, respectively is obtained, thickness and a refraction index of a domain to be sandwiched between the first reflection part and the second reflection part of the measuring object are calculated from variation in the adjustment amount and variation in the difference.

    摘要翻译： 要解决的问题：提供一种测量装置和方法，通过该测量装置和方法可以提高被夹在测量对象的反射部分之间的区域的厚度和折射率等的检测精度。解决方案：一种用于获取物理 通过时域光谱测定的测量对象的特性具有：检测部101; 延迟部分104，其调整电磁波脉冲的产生和检测之间的时间差; 使电磁波脉冲冷凝的成形部102; 波形获取部105，其通过参照检测部的输出和延迟部的调整量构成电磁波脉冲的时间波形; 以及调节电磁波脉冲与测量对象的冷凝位置的冷凝位置调节部106。 当冷凝位置移动到测量对象时，当冷凝位置与第一和第二反射部分重叠时，冷凝位置调节部分的调节量和用于检测时间波形的第一和第二脉冲所需的延迟部分的差值 分别获得测量对象的第一反射部和第二反射部之间夹在的区域的厚度和折射率，并根据调整量的变化和差的变化计算出测量对象的第二反射部的折射率。