公开(公告)号：JP4334798B2

公开(公告)日：2009-09-30

申请号：JP2001537462

申请日：2000-11-03

申请人： ナノゲン・インコーポレイテッドNanogen,Inc.

发明人： カール・エフ・エドマン ,  クリスティアン・ガートナー ,  マイケル・ジェイ・ヘラー ,  レイチェル・フォルモサ

IPC分类号： B81C99/00 ,  B01J19/00 ,  B01L3/00 ,  B01L9/00 ,  B82B3/00 ,  C07B61/00 ,  C07H21/00 ,  C07K1/04 ,  C12M3/00 ,  C12N15/00 ,  C12Q1/68 ,  C40B40/06 ,  C40B40/10 ,  C40B40/12 ,  C40B60/14 ,  C40B70/00 ,  G01N33/543 ,  G02B6/122 ,  G06N3/00 ,  G06N3/06 ,  G06N3/12 ,  G11B7/0037 ,  G11B7/0045 ,  G11B7/005 ,  G11B7/24 ,  G11B7/244 ,  G11C13/02 ,  G11C19/00 ,  H01L21/336 ,  H01L21/98 ,  H01L29/78 ,  H01L51/00 ,  H01L51/30

CPC分类号： H01L24/95 ,  B01J19/0046 ,  B01J19/0093 ,  B01J2219/00315 ,  B01J2219/00317 ,  B01J2219/00432 ,  B01J2219/00497 ,  B01J2219/00527 ,  B01J2219/00529 ,  B01J2219/00536 ,  B01J2219/00545 ,  B01J2219/00585 ,  B01J2219/0059 ,  B01J2219/00596 ,  B01J2219/00605 ,  B01J2219/00608 ,  B01J2219/00612 ,  B01J2219/00614 ,  B01J2219/00626 ,  B01J2219/00637 ,  B01J2219/00653 ,  B01J2219/00659 ,  B01J2219/00677 ,  B01J2219/00686 ,  B01J2219/00689 ,  B01J2219/00707 ,  B01J2219/00711 ,  B01J2219/00713 ,  B01J2219/0072 ,  B01J2219/00722 ,  B01J2219/00725 ,  B01J2219/00731 ,  B01L3/502707 ,  B01L3/502715 ,  B01L3/502761 ,  B01L9/52 ,  B01L2200/025 ,  B01L2200/028 ,  B01L2200/12 ,  B01L2300/0819 ,  B01L2400/0418 ,  B82B3/00 ,  B82Y5/00 ,  B82Y10/00 ,  B82Y20/00 ,  B82Y30/00 ,  B82Y40/00 ,  C07B2200/11 ,  C07H21/00 ,  C07K1/04 ,  C07K1/045 ,  C07K1/047 ,  C40B40/06 ,  C40B40/10 ,  C40B40/12 ,  C40B60/14 ,  C40B70/00 ,  G01N33/54366 ,  G02B6/1225 ,  G06N3/002 ,  G06N3/061 ,  G06N3/123 ,  G11B7/00455 ,  G11B7/0052 ,  G11B7/244 ,  G11C13/0014 ,  G11C13/0019 ,  G11C13/04 ,  G11C19/00 ,  H01L25/50 ,  H01L29/6656 ,  H01L29/6659 ,  H01L29/66628 ,  H01L29/7834 ,  H01L51/0093 ,  H01L51/0595 ,  H01L2224/95085 ,  H01L2224/95145 ,  H01L2224/95147 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01011 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/0102 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01044 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/01052 ,  H01L2924/01072 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01322 ,  H01L2924/014 ,  H01L2924/10253 ,  H01L2924/10329 ,  H01L2924/12041 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/1461 ,  H01L2924/30105 ,  H01L2924/3025 ,  H01L2924/00

摘要： Methods and apparatus are provided for the fabrication of microscale, including micron and sub-micron scale, including nanoscale, devices. Electronic transport of movable component devices is utilized through a fluidic medium to effect transport to a desired target location on a substrate or motherboard. Forces include electrophoretic force, electroosmotic force, electrostatic force and/or dielectrophoretic force. In the preferred embodiment, free field electroosmotic forces are utilized either alone, or in conjunction with, other forces. These forces may be used singly or in combination, as well as in conjunction with yet other forces, such as fluidic forces, mechanical forces or thermal convective forces. Transport may be effected through the use of driving electrodes so as to transport the component device to yet other connection electrodes. In certain embodiments, the component devices may be attached to the target device using a solder reflow step.