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公开(公告)号:TWI646644B
公开(公告)日:2019-01-01
申请号:TW106121861
申请日:2010-04-20
发明人: 安村文次 , YASUMURA,BUNJI , 土屋文男 , TSUCHIYA,FUMIO , 伊東久範 , ITO,HISANORI , 井手琢二 , IDE,TAKUJI , 川邊直樹 , KAWANABE,NAOKI , 佐藤齊尚 , SATO,MASANAO
IPC分类号: H01L23/488
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公开(公告)号:TW201438178A
公开(公告)日:2014-10-01
申请号:TW103110350
申请日:2014-03-19
发明人: 安村文次 , YASUMURA, BUNJI , 出口善宣 , DEGUCHI, YOSHINORI , 竹井文一 , TAKEI, FUMIKAZU , 長谷部昭男 , HASEBE, AKIO , 槙平尙宏 , MAKIHIRA, NAOHIRO , 久保光之 , KUBO, MITSUYUKI
IPC分类号: H01L23/544
CPC分类号: H01L25/50 , H01L21/6835 , H01L22/12 , H01L22/14 , H01L23/544 , H01L24/05 , H01L24/06 , H01L24/81 , H01L25/0657 , H01L25/18 , H01L2221/68327 , H01L2223/54426 , H01L2223/5448 , H01L2223/54493 , H01L2224/03002 , H01L2224/0401 , H01L2224/05552 , H01L2224/0557 , H01L2224/06131 , H01L2224/11009 , H01L2224/13025 , H01L2224/13082 , H01L2224/13147 , H01L2224/14181 , H01L2224/16145 , H01L2224/16225 , H01L2224/32145 , H01L2224/32225 , H01L2224/73204 , H01L2224/73253 , H01L2224/94 , H01L2225/06513 , H01L2225/06517 , H01L2225/06541 , H01L2225/06568 , H01L2225/06593 , H01L2924/00014 , H01L2924/1431 , H01L2924/1434 , H01L2924/15311 , H01L2924/16251 , H01L2924/181 , H01L2224/11 , H01L2924/00
摘要: 本發明公開了一種可提高半導體裝置可裝配性之技術。在邏輯晶片上安裝存儲晶片時,對包括在邏輯晶片之背面上形成之識別標誌之識別範圍進行攝像並對識別範圍之圖案進行識別,並根據識別結果,將邏輯晶片之複數個突起和上述存儲晶片之複數個突起電極進行位置對準,以將上述存儲晶片安裝到邏輯晶片上。此時,識別範圍之圖案與複數個突起之陣列圖中之任何部分都不相同,結果,可對識別範圍圖案中之識別標誌確實進行識別,從而可提高將邏輯晶片之複數個突起和上述存儲晶片之複數個突起電極進行位置對準之精度。
简体摘要: 本发明公开了一种可提高半导体设备可装配性之技术。在逻辑芯片上安装存储芯片时,对包括在逻辑芯片之背面上形成之识别标志之识别范围进行摄像并对识别范围之图案进行识别,并根据识别结果,将逻辑芯片之复数个突起和上述存储芯片之复数个突起电极进行位置对准,以将上述存储芯片安装到逻辑芯片上。此时,识别范围之图案与复数个突起之数组图中之任何部分都不相同,结果,可对识别范围图案中之识别标志确实进行识别,从而可提高将逻辑芯片之复数个突起和上述存储芯片之复数个突起电极进行位置对准之精度。
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公开(公告)号:TW201637161A
公开(公告)日:2016-10-16
申请号:TW105120867
申请日:2010-04-20
发明人: 安村文次 , YASUMURA, BUNJI , 土屋文男 , TSUCHIYA, FUMIO , 伊東久範 , ITO, HISANORI , 井手琢二 , IDE, TAKUJI , 川邊直樹 , KAWANABE, NAOKI , 佐藤齊尚 , SATO, MASANAO
IPC分类号: H01L23/488
CPC分类号: H01L22/32 , H01L23/3114 , H01L23/49816 , H01L23/49838 , H01L24/05 , H01L24/06 , H01L24/13 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/73 , H01L24/85 , H01L2224/02166 , H01L2224/0401 , H01L2224/04042 , H01L2224/05073 , H01L2224/05553 , H01L2224/05624 , H01L2224/0613 , H01L2224/13099 , H01L2224/131 , H01L2224/16225 , H01L2224/32225 , H01L2224/45015 , H01L2224/45144 , H01L2224/48091 , H01L2224/48157 , H01L2224/48227 , H01L2224/4845 , H01L2224/48463 , H01L2224/48465 , H01L2224/48624 , H01L2224/49171 , H01L2224/73265 , H01L2224/85203 , H01L2224/85205 , H01L2224/85207 , H01L2224/85399 , H01L2924/00012 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01022 , H01L2924/01025 , H01L2924/01033 , H01L2924/0105 , H01L2924/01051 , H01L2924/01079 , H01L2924/01082 , H01L2924/01083 , H01L2924/014 , H01L2924/04941 , H01L2924/05042 , H01L2924/10253 , H01L2924/12041 , H01L2924/14 , H01L2924/15311 , H01L2924/181 , H01L2924/20752 , H01L2924/20753 , H01L2924/30107 , H01L2924/3512 , H01L2924/00
摘要: 本發明提供一種可防止半導體裝置最上層之保護膜之裂痕,以謀求半導體裝置之可靠性之提高之技術。將半導體晶片之主面上所形成之接合焊墊BP1設為長方形狀,並以使接合焊墊BP1之打線接合區域BP1w中之保護膜5之重疊寬度寬於接合焊墊BP1之探針區域BP1p中之保護膜5之重疊寬度之方式,而於接合焊墊BP1上之保護膜5上形成開口部6。
简体摘要: 本发明提供一种可防止半导体设备最上层之保护膜之裂痕,以谋求半导体设备之可靠性之提高之技术。将半导体芯片之主面上所形成之接合焊垫BP1设为长方形状,并以使接合焊垫BP1之打线接合区域BP1w中之保护膜5之重叠宽度宽于接合焊垫BP1之探针区域BP1p中之保护膜5之重叠宽度之方式,而于接合焊垫BP1上之保护膜5上形成开口部6。
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公开(公告)号:TWI548051B
公开(公告)日:2016-09-01
申请号:TW099112370
申请日:2010-04-20
发明人: 安村文次 , YASUMURA, BUNJI , 土屋文男 , TSUCHIYA, FUMIO , 伊東久範 , ITO, HISANORI , 井手琢二 , IDE, TAKUJI , 川邊直樹 , KAWANABE, NAOKI , 佐藤齊尚 , SATO, MASANAO
IPC分类号: H01L23/488
CPC分类号: H01L22/32 , H01L23/3114 , H01L23/49816 , H01L23/49838 , H01L24/05 , H01L24/06 , H01L24/13 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/73 , H01L24/85 , H01L2224/02166 , H01L2224/0401 , H01L2224/04042 , H01L2224/05073 , H01L2224/05553 , H01L2224/05624 , H01L2224/0613 , H01L2224/13099 , H01L2224/131 , H01L2224/16225 , H01L2224/32225 , H01L2224/45015 , H01L2224/45144 , H01L2224/48091 , H01L2224/48157 , H01L2224/48227 , H01L2224/4845 , H01L2224/48463 , H01L2224/48465 , H01L2224/48624 , H01L2224/49171 , H01L2224/73265 , H01L2224/85203 , H01L2224/85205 , H01L2224/85207 , H01L2224/85399 , H01L2924/00012 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01022 , H01L2924/01025 , H01L2924/01033 , H01L2924/0105 , H01L2924/01051 , H01L2924/01079 , H01L2924/01082 , H01L2924/01083 , H01L2924/014 , H01L2924/04941 , H01L2924/05042 , H01L2924/10253 , H01L2924/12041 , H01L2924/14 , H01L2924/15311 , H01L2924/181 , H01L2924/20752 , H01L2924/20753 , H01L2924/30107 , H01L2924/3512 , H01L2924/00
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公开(公告)号:TW201806123A
公开(公告)日:2018-02-16
申请号:TW106132731
申请日:2014-03-19
发明人: 安村文次 , YASUMURA,BUNJI , 出口善宣 , DEGUCHI,YOSHINORI , 竹井文一 , TAKEI,FUMIKAZU , 長谷部昭男 , HASEBE,AKIO , 槙平尚宏 , MAKIHIRA,NAOHIRO , 久保光之 , KUBO,MITSUYUKI
IPC分类号: H01L23/544
CPC分类号: H01L25/50 , H01L21/6835 , H01L22/12 , H01L22/14 , H01L23/544 , H01L24/05 , H01L24/06 , H01L24/81 , H01L25/0657 , H01L25/18 , H01L2221/68327 , H01L2223/54426 , H01L2223/5448 , H01L2223/54493 , H01L2224/03002 , H01L2224/0401 , H01L2224/05552 , H01L2224/0557 , H01L2224/06131 , H01L2224/11009 , H01L2224/13025 , H01L2224/13082 , H01L2224/13147 , H01L2224/14181 , H01L2224/16145 , H01L2224/16225 , H01L2224/32145 , H01L2224/32225 , H01L2224/73204 , H01L2224/73253 , H01L2224/94 , H01L2225/06513 , H01L2225/06517 , H01L2225/06541 , H01L2225/06568 , H01L2225/06593 , H01L2924/00014 , H01L2924/1431 , H01L2924/1434 , H01L2924/15311 , H01L2924/16251 , H01L2924/181 , H01L2224/11 , H01L2924/00
摘要: 本發明公開了一種可提高半導體裝置可裝配性之技術。 在邏輯晶片上安裝存儲晶片時,對包括在邏輯晶片之背面上形成之識別標誌之識別範圍進行攝像並對識別範圍之圖案進行識別,並根據識別結果,將邏輯晶片之複數個突起和上述存儲晶片之複數個突起電極進行位置對準,以將上述存儲晶片安裝到邏輯晶片上。此時,識別範圍之圖案與複數個突起之陣列圖中之任何部分都不相同,結果,可對識別範圍圖案中之識別標誌確實進行識別,從而可提高將邏輯晶片之複數個突起和上述存儲晶片之複數個突起電極進行位置對準之精度。
简体摘要: 本发明公开了一种可提高半导体设备可装配性之技术。 在逻辑芯片上安装存储芯片时,对包括在逻辑芯片之背面上形成之识别标志之识别范围进行摄像并对识别范围之图案进行识别,并根据识别结果,将逻辑芯片之复数个突起和上述存储芯片之复数个突起电极进行位置对准,以将上述存储芯片安装到逻辑芯片上。此时,识别范围之图案与复数个突起之数组图中之任何部分都不相同,结果,可对识别范围图案中之识别标志确实进行识别,从而可提高将逻辑芯片之复数个突起和上述存储芯片之复数个突起电极进行位置对准之精度。
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公开(公告)号:TWI605562B
公开(公告)日:2017-11-11
申请号:TW103110350
申请日:2014-03-19
发明人: 安村文次 , YASUMURA, BUNJI , 出口善宣 , DEGUCHI, YOSHINORI , 竹井文一 , TAKEI, FUMIKAZU , 長谷部昭男 , HASEBE, AKIO , 槙平尙宏 , MAKIHIRA, NAOHIRO , 久保光之 , KUBO, MITSUYUKI
IPC分类号: H01L23/544
CPC分类号: H01L25/50 , H01L21/6835 , H01L22/12 , H01L22/14 , H01L23/544 , H01L24/05 , H01L24/06 , H01L24/81 , H01L25/0657 , H01L25/18 , H01L2221/68327 , H01L2223/54426 , H01L2223/5448 , H01L2223/54493 , H01L2224/03002 , H01L2224/0401 , H01L2224/05552 , H01L2224/0557 , H01L2224/06131 , H01L2224/11009 , H01L2224/13025 , H01L2224/13082 , H01L2224/13147 , H01L2224/14181 , H01L2224/16145 , H01L2224/16225 , H01L2224/32145 , H01L2224/32225 , H01L2224/73204 , H01L2224/73253 , H01L2224/94 , H01L2225/06513 , H01L2225/06517 , H01L2225/06541 , H01L2225/06568 , H01L2225/06593 , H01L2924/00014 , H01L2924/1431 , H01L2924/1434 , H01L2924/15311 , H01L2924/16251 , H01L2924/181 , H01L2224/11 , H01L2924/00
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公开(公告)号:TW201733061A
公开(公告)日:2017-09-16
申请号:TW106121861
申请日:2010-04-20
发明人: 安村文次 , YASUMURA,BUNJI , 土屋文男 , TSUCHIYA,FUMIO , 伊東久範 , ITO,HISANORI , 井手琢二 , IDE,TAKUJI , 川邊直樹 , KAWANABE,NAOKI , 佐藤齊尚 , SATO,MASANAO
IPC分类号: H01L23/488
CPC分类号: H01L22/32 , H01L23/3114 , H01L23/49816 , H01L23/49838 , H01L24/05 , H01L24/06 , H01L24/13 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/73 , H01L24/85 , H01L2224/02166 , H01L2224/0401 , H01L2224/04042 , H01L2224/05073 , H01L2224/05553 , H01L2224/05624 , H01L2224/0613 , H01L2224/13099 , H01L2224/131 , H01L2224/16225 , H01L2224/32225 , H01L2224/45015 , H01L2224/45144 , H01L2224/48091 , H01L2224/48157 , H01L2224/48227 , H01L2224/4845 , H01L2224/48463 , H01L2224/48465 , H01L2224/48624 , H01L2224/49171 , H01L2224/73265 , H01L2224/85203 , H01L2224/85205 , H01L2224/85207 , H01L2224/85399 , H01L2924/00012 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01022 , H01L2924/01025 , H01L2924/01033 , H01L2924/0105 , H01L2924/01051 , H01L2924/01079 , H01L2924/01082 , H01L2924/01083 , H01L2924/014 , H01L2924/04941 , H01L2924/05042 , H01L2924/10253 , H01L2924/12041 , H01L2924/14 , H01L2924/15311 , H01L2924/181 , H01L2924/20752 , H01L2924/20753 , H01L2924/30107 , H01L2924/3512 , H01L2924/00
摘要: 本發明提供一種可防止半導體裝置最上層之保護膜之裂痕,以謀求半導體裝置之可靠性之提高之技術。將半導體晶片之主面上所形成之接合焊墊BP1設為長方形狀,並以使接合焊墊BP1之打線接合區域BP1w中之保護膜5之重疊寬度寬於接合焊墊BP1之探針區域BP1p中之保護膜5之重疊寬度之方式,而於接合焊墊BP1上之保護膜5上形成開口部6。
简体摘要: 本发明提供一种可防止半导体设备最上层之保护膜之裂痕,以谋求半导体设备之可靠性之提高之技术。将半导体芯片之主面上所形成之接合焊垫BP1设为长方形状,并以使接合焊垫BP1之打线接合区域BP1w中之保护膜5之重叠宽度宽于接合焊垫BP1之探针区域BP1p中之保护膜5之重叠宽度之方式,而于接合焊垫BP1上之保护膜5上形成开口部6。
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公开(公告)号:TWI618217B
公开(公告)日:2018-03-11
申请号:TW106132731
申请日:2014-03-19
发明人: 安村文次 , YASUMURA,BUNJI , 出口善宣 , DEGUCHI,YOSHINORI , 竹井文一 , TAKEI,FUMIKAZU , 長谷部昭男 , HASEBE,AKIO , 槙平尚宏 , MAKIHIRA,NAOHIRO , 久保光之 , KUBO,MITSUYUKI
IPC分类号: H01L23/544
CPC分类号: H01L25/50 , H01L21/6835 , H01L22/12 , H01L22/14 , H01L23/544 , H01L24/05 , H01L24/06 , H01L24/81 , H01L25/0657 , H01L25/18 , H01L2221/68327 , H01L2223/54426 , H01L2223/5448 , H01L2223/54493 , H01L2224/03002 , H01L2224/0401 , H01L2224/05552 , H01L2224/0557 , H01L2224/06131 , H01L2224/11009 , H01L2224/13025 , H01L2224/13082 , H01L2224/13147 , H01L2224/14181 , H01L2224/16145 , H01L2224/16225 , H01L2224/32145 , H01L2224/32225 , H01L2224/73204 , H01L2224/73253 , H01L2224/94 , H01L2225/06513 , H01L2225/06517 , H01L2225/06541 , H01L2225/06568 , H01L2225/06593 , H01L2924/00014 , H01L2924/1431 , H01L2924/1434 , H01L2924/15311 , H01L2924/16251 , H01L2924/181 , H01L2224/11 , H01L2924/00
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公开(公告)号:TWI596724B
公开(公告)日:2017-08-21
申请号:TW105120867
申请日:2010-04-20
发明人: 安村文次 , YASUMURA, BUNJI , 土屋文男 , TSUCHIYA, FUMIO , 伊東久範 , ITO, HISANORI , 井手琢二 , IDE, TAKUJI , 川邊直樹 , KAWANABE, NAOKI , 佐藤齊尚 , SATO, MASANAO
IPC分类号: H01L23/488
CPC分类号: H01L22/32 , H01L23/3114 , H01L23/49816 , H01L23/49838 , H01L24/05 , H01L24/06 , H01L24/13 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/73 , H01L24/85 , H01L2224/02166 , H01L2224/0401 , H01L2224/04042 , H01L2224/05073 , H01L2224/05553 , H01L2224/05624 , H01L2224/0613 , H01L2224/13099 , H01L2224/131 , H01L2224/16225 , H01L2224/32225 , H01L2224/45015 , H01L2224/45144 , H01L2224/48091 , H01L2224/48157 , H01L2224/48227 , H01L2224/4845 , H01L2224/48463 , H01L2224/48465 , H01L2224/48624 , H01L2224/49171 , H01L2224/73265 , H01L2224/85203 , H01L2224/85205 , H01L2224/85207 , H01L2224/85399 , H01L2924/00012 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01022 , H01L2924/01025 , H01L2924/01033 , H01L2924/0105 , H01L2924/01051 , H01L2924/01079 , H01L2924/01082 , H01L2924/01083 , H01L2924/014 , H01L2924/04941 , H01L2924/05042 , H01L2924/10253 , H01L2924/12041 , H01L2924/14 , H01L2924/15311 , H01L2924/181 , H01L2924/20752 , H01L2924/20753 , H01L2924/30107 , H01L2924/3512 , H01L2924/00
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