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公开(公告)号：US11906485B2
公开(公告)日：2024-02-20
申请号：US17546615
申请日：2021-12-09
发明人： Tanja Haas , Henry Thiele , Josef Ludwig
IPC分类号： G01N3/42
CPC分类号： G01N3/42
摘要： The invention relates to an indenter receptacle for a measuring device, having a receptacle for detachably fastening an indenter, having an interface for mounting a measuring device, wherein a solid body joint arrangement is provided, which at least three solid body joints are provided between the interface and the receptacle and which are aligned offset at 90° to one another with respect to their flexibility in only one spatial direction.
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公开(公告)号：US20240004818A1
公开(公告)日：2024-01-04
申请号：US18039140
申请日：2021-11-26
发明人： Bilal Akra
CPC分类号： G06F13/385 , G01B5/06 , G06F13/4282 , G06F13/4022 , G06F2213/0042
摘要： The invention relates to a measuring probe (10, 50, 100, 150), in particular for tactile measurement on a surface of objects, comprising a housing (12) and a measuring head (11) accommodated in the housing (12), wherein at least one communications interface (14) is provided on the housing (12) and communicates with a circuit (13) arranged in the housing (12), the circuit (13) comprising at least one microcontroller (24) and at least one multiplexer (26), and at least two different communication protocols are transmittable by the circuit (13) by way of a common communications interface (14).
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公开(公告)号：US20220205777A1
公开(公告)日：2022-06-30
申请号：US17599863
申请日：2020-05-08
摘要： An apparatus determines a layer thickness of a plurality of layers arranged on a body. The apparatus includes a THz transmitter configured to emit a THz signal to said plurality of layers and a THz receiver configured to receive a reflected portion of said THz signal that has been reflected by at least one layer of said plurality of layers. The apparatus is configured to determine the layer thickness of at least one of said plurality of layers based on said reflected portion of said THz signal. The apparatus further includes a distance measuring device for determining at least one parameter characterizing a distance between said apparatus and said body, wherein said distance measuring device may include at least one optical triangulation sensor.
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公开(公告)号：US20220120667A1
公开(公告)日：2022-04-21
申请号：US17428940
申请日：2020-07-17
发明人： Rüdiger Mästle , Henry Thiele , Andreas Godorr
IPC分类号： G01N21/15 , G01N21/3581 , G01B11/06 , G01N21/88
摘要： An apparatus includes at least one Terahertz (THz) device that transmits or receives THz radiation or transmits and receives THz radiation. The apparatus also provides a flow of protective gas in at least one portion of the beam path of the THz radiation.
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公开(公告)号：US20220074838A1
公开(公告)日：2022-03-10
申请号：US17455984
申请日：2021-11-22
发明人： HELMUT FISCHER
IPC分类号： G01N3/46
摘要： A measuring device for detecting measuring signals during either a scanning across a surface to determine a surface profile or a penetration movement of an indenter into a surface of the specimen to determine hardness, and, scanning with sufficient force to determine the scratch resistance of the specimen is described. All of the measurements can be done on the same specimen without unmounting the specimen from a holder. A camera mounted to the same framework as the measuring device enables further documentation of the specimen being tested.
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公开(公告)号：US20210208041A1
公开(公告)日：2021-07-08
申请号：US16070617
申请日：2017-01-09
发明人： Helmut Fischer
IPC分类号： G01N3/46
摘要： A measuring device for detection pf measurement signals during a penetrating movement of a penetrating member into a surface of a test object or during a sensing movement of the penetrating member on the surface of the test object. The measuring device includes a housing which accommodates a force generating device and on which a holding element is arranged remote from the force generating device, which holding element is movable relative to the housing at least in one direction along a longitudinal axis of the housing and which accommodates the penetrating member. The measuring device also includes at least one first measuring element for measuring the penetration depth of the penetrating member into the surface of the test object or a traversing movement of the penetrating member along the longitudinal axis relative to the housing during a sensing movement on the surface of the test object, wherein a transmission element is provided which extends between the force generating device and the penetrating member.
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公开(公告)号：US10707112B2
公开(公告)日：2020-07-07
申请号：US15420690
申请日：2017-01-31
发明人： Werner Volz , Paul Boos
IPC分类号： H01L21/683 , H01L21/687 , H01L21/677 , B25B11/00 , G01N23/223 , H01L21/67
摘要： A vacuum chuck for clamping workpieces, in particular wafers, and a measuring device and a method for checking workpieces by way of X-ray fluorescent radiation. The vacuum chuck has a clamping plate having a support surface, having at least one suction connection arranged on a base body for connecting to a negative-pressure device and for clamping the workpiece on the clamping plate by negative pressure received by the base body and having several suction grooves arranged in the clamping plate and are open towards the support surface. The support surface has concentric suction grooves having a suction opening to which a negative-pressure line is connected or which is connected to a work channel. Each suction groove having a separate negative pressure, which is separate to the adjacent suction groove, is selectively controlled by a control valve by a control for supplying the respective negative pressure in the respective suction groove.
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公开(公告)号：US10584952B2
公开(公告)日：2020-03-10
申请号：US14723027
申请日：2015-05-27
发明人： Helmut Fischer
摘要： Measuring probe for non-destructive measuring of the thickness of thin layers, in particular in cavities, which are accessible by an opening or on curved surfaces, with a measuring head, which includes at least one sensor element and at least one contact spherical cap, assigned to the sensor element on a surface, to be checked, of the cavity, and with a gripping element for positioning and guiding the measuring probe on and/or along the surface to be measured, wherein on the gripping element, a long, elastically yielding guide bar is provided, which accepts the at least one measuring head on its end opposing the gripping element, in such a way that it is moveable with at least one degree of freedom in relation to the guide bar.
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9.发明授权公开(公告)号：US09074880B2
公开(公告)日：2015-07-07
申请号：US13066797
申请日：2011-04-25
申请人： Helmut Fischer
发明人： Helmut Fischer
摘要： The invention relates to a measuring probe for non-destructive measuring of the thickness of thin layers, in particular in cavities, which are accessible by an opening or on curved surfaces, with a measuring head, which comprises at least one sensor element and at least one contact spherical cap, assigned to the sensor element on a surface, to be checked, of the cavity, and with a gripping element for positioning and guiding the measuring probe on and/or along the surface to be measured, wherein on the gripping element, a long, elastically yielding guide bar is provided, which accepts the at least one measuring head on its end opposing the gripping element, in such a way that it is moveable with at least one degree of freedom in relation to the guide bar.
摘要翻译： 本发明涉及一种用于非破坏性地测量薄层厚度的测量探针，特别是在通过开口或弯曲表面可访问的空腔中，测量头包括至少一个传感器元件并且至少包括 分配给待检查的空腔中的传感器元件的一个接触球形盖，以及用于在测量表面上和/或沿着待测量表面定位和引导测量探针的夹持元件，其中在夹持元件上 提供了一种长而弹性屈服的导向杆，其在其与夹持元件相对的端部上接收至少一个测量头，使得其可相对于导向杆至少一个自由度移动。
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10.发明授权Calibrating device for adapting a measuring device for measuring the thickness of thin layers on an object to be measured 失效用于调整测量装置的校准装置，用于测量待测物体上薄层的厚度公开(公告)号：US07549314B2
公开(公告)日：2009-06-23
申请号：US11629018
申请日：2005-06-06
申请人： Helmut Fischer
发明人： Helmut Fischer
IPC分类号： G01B3/30
CPC分类号： G01B7/105
摘要： The invention relates to a calibrating device for adapting a measuring device for measuring the thickness of thin layers on an object to be measured, comprising a calibrating surface (12) having a flat upper side and a flat underside, which are provided at a distance with a predetermined thickness, characterized in that the calibrating surface (12) is arranged separate from at least one edge area (18) and the calibrating surface (12) is connected to the at least one edge area (18) via at least one transition area (14).
摘要翻译： 本发明涉及一种用于调整测量装置的校准装置，用于测量待测物体上的薄层的厚度，包括：具有平坦的上侧和平的下侧的校准表面（12），该校准表面（12）与 其特征在于，所述校准表面（12）与至少一个边缘区域（18）分开布置，并且所述校准表面（12）经由至少一个过渡区域（18）连接到所述至少一个边缘区域 （14）。
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