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公开(公告)号：US07413411B2
公开(公告)日：2008-08-19
申请号：US11115774
申请日：2005-04-27
申请人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matté , Martin Stein , Steven C. Rosner
发明人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matté , Martin Stein , Steven C. Rosner
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04 , Y10S417/901
摘要： A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动电动机，净化阀，粗抽阀和电子控制模块的真空泵。 公开了一种低温真空泵和涡轮分子真空泵。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 在涡轮分子泵系统中，通过检测泵驱动器上的当前负载或通过检测前级管路压力来检测净化气体通过净化阀的适当引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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公开(公告)号：US06902378B2
公开(公告)日：2005-06-07
申请号：US10095126
申请日：2002-03-08
申请人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matté , Martin Stein , Steven C. Rosner
发明人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matté , Martin Stein , Steven C. Rosner
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04 , Y10S417/901
摘要： A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动电动机，净化阀，粗抽阀和电子控制模块的真空泵。 公开了一种低温真空泵和涡轮分子真空泵。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 在涡轮分子泵系统中，通过检测泵驱动器上的当前负载或通过检测前级管路压力来检测净化气体通过净化阀的适当引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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公开(公告)号：US06022195A
公开(公告)日：2000-02-08
申请号：US517091
申请日：1995-08-21
申请人： Peter W. Gaudet , Michael J. Eacobacci , Robert J. Lepofsky , David E. Roche , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte , Martin Stein , Steven C. Rosner
发明人： Peter W. Gaudet , Michael J. Eacobacci , Robert J. Lepofsky , David E. Roche , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte , Martin Stein , Steven C. Rosner
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04
摘要： A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动电动机，净化阀，粗抽阀和电子控制模块的真空泵。 公开了一种低温真空泵和涡轮分子真空泵。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 在涡轮分子泵系统中，通过检测泵驱动器上的当前负载或通过检测前级管路压力来检测净化气体通过净化阀的适当引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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公开(公告)号：US5901558A
公开(公告)日：1999-05-11
申请号：US915035
申请日：1997-08-20
申请人： Stephen R. Matte , Alan L. Weeks
发明人： Stephen R. Matte , Alan L. Weeks
CPC分类号： F04D19/046 , F04B37/08 , Y10S417/901
摘要： A cold trap includes a fluid conduit having a fluid flow path therethrough, a length along the fluid flow path and a width transverse to the fluid flow path. The width of the fluid conduit is greater than the length. A gate valve is formed integrally with the fluid flow conduit for opening and closing the fluid flow path. A cryopumping array having an outer rim surrounding a central opening is positioned within the fluid conduit downstream from the gate valve and transverse to the fluid flow path such that the fluid flow path extends through the central opening. The outer rim captures water vapor from the fluid flow path.
摘要翻译： 冷阱包括具有穿过其中的流体流动路径的流体导管，沿着流体流动路径的长度和横向于流体流动路径的宽度。 流体导管的宽度大于长度。 闸阀与流体流动管道一体地形成，用于打开和关闭流体流路。 具有围绕中心开口的外边缘的低温泵阵列定位在流体导管的下游，并且横向于流体流动路径，使得流体流动路径延伸穿过中心开口。 外缘从流体流路捕获水蒸气。
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公开(公告)号：US4842287A
公开(公告)日：1989-06-27
申请号：US112222
申请日：1987-10-22
申请人： Alan L. Weeks
发明人： Alan L. Weeks
CPC分类号： F16L23/20 , F16J15/0881
摘要： A pressure seal used for containing helium within a cryogenic refrigerator, which utilizes a linear drive assembly. A deformable gasket is used to seal the enclosing elements of the linear drive assembly to reduce helium leakage. Concentrically serrated members compress onto opposite sides of the soft metal gasket to form labyrinthine sealing grooves therein.
摘要翻译： 用于在低温冰箱内容纳氦气的压力密封件，其利用线性驱动组件。 可变形垫圈用于密封线性驱动组件的封闭元件以减少氦泄漏。 集中的锯齿形部件压缩在软金属垫圈的相对侧上，以在其中形成迷宫式密封槽。
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公开(公告)号：US20080267790A1
公开(公告)日：2008-10-30
申请号：US12170802
申请日：2008-07-10
申请人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte , Martin Stein , Steven C. Rosner
发明人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte , Martin Stein , Steven C. Rosner
IPC分类号： F04B23/08
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04 , Y10S417/901
摘要： A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动电动机，净化阀，粗抽阀和电子控制模块的真空泵。 公开了一种低温真空泵和涡轮分子真空泵。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 在涡轮分子泵系统中，通过检测泵驱动器上的当前负载或通过检测前级管路压力来检测净化气体通过净化阀的适当引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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公开(公告)号：US06461113B1
公开(公告)日：2002-10-08
申请号：US09454358
申请日：1999-12-03
申请人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matté , Martin Stein , Steven C. Rosner
发明人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matté , Martin Stein , Steven C. Rosner
IPC分类号： F04B4900
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04
摘要： A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动电动机，净化阀，粗抽阀和电子控制模块的真空泵。 公开了一种低温真空泵和涡轮分子真空泵。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 在涡轮分子泵系统中，通过检测泵驱动器上的当前负载或通过检测前级管路压力来检测净化气体通过净化阀的适当引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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公开(公告)号：US5483803A
公开(公告)日：1996-01-16
申请号：US331170
申请日：1994-10-28
CPC分类号： F04D19/046 , B01D8/00 , F04B37/08 , Y10S417/901
摘要： A cryogenically cooled water pump traps water vapor with a high probability but is open to non-condensing gases for high conductance to a turbomolecular pump. The preferred array is a single cylinder, having a length to diameter ratio of between 0.5 and 1, concentric with and near to an ambient temperature conduit. A center baffle, preferably of closed frustoconical shape, may be positioned at the center of the array over the upper bearing plate of the turbomolecular pump where it results in minimal reduction in conductance to the pump.
摘要翻译： 低温冷却水泵以很高的概率捕获水蒸汽，但对非冷凝气体开放，以便对涡轮分子泵进行高电导。 优选的阵列是单个圆柱体，其长度与直径之比在0.5和1之间，与环境温度导管同心并且靠近环境温度导管。 优选具有闭合截头圆锥形状的中心挡板可以位于阵列的中心位于涡轮分子泵的上支承板上，其导致对泵的电导的最小的降低。
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公开(公告)号：US5443368A
公开(公告)日：1995-08-22
申请号：US92692
申请日：1993-07-16
申请人： Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte' , Peter W. Gaudet , Martin Stein , Steven C. Rosner , Robert J. Lepofsky
发明人： Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte' , Peter W. Gaudet , Martin Stein , Steven C. Rosner , Robert J. Lepofsky
摘要： A vacuum system comprises, as an integral assembly, a turbomolecular pump with drive motor, a vent valve, a purge valve, a roughing valve, a heater and an electronic control module. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. Proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动马达的涡轮分子泵，排气阀，净化阀，粗加工阀，加热器和电子控制模块。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 通过检测泵驱动器上的当前负载或通过检测前级压力来检测净化气体通过清洗阀的正确引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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公开(公告)号：US06243184B1
公开(公告)日：2001-06-05
申请号：US09169272
申请日：1998-10-09
IPC分类号： G02B2608
CPC分类号： G02B26/105
摘要： A light scanner includes a beam deflector supported for rotary motion to deflect an incoming light beam into an image field in response to being rotationally aligned. A motor mechanically couples to rotate the deflector in and out of the rotational alignment. The beam deflector scans the image field with the deflected incoming light in response to being rotated. A gas permeable screen structure partially encloses a region adjacent the rotating beam deflector and reduces gas turbulence in the region of the deflector.
摘要翻译： 光扫描器包括支撑用于旋转运动的光束偏转器，以响应于旋转对准将入射光束偏转成图像场。 机械地联接以使偏转器旋转和旋转对准的马达。 光束偏转器响应于旋转而用偏转的入射光扫描图像场。 透气屏蔽结构部分地围绕与旋转的射束偏转器相邻的区域，并减少偏转器区域中的气体湍流。
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